CN109518134A - A kind of horizontal correcting device of coating machine - Google Patents
A kind of horizontal correcting device of coating machine Download PDFInfo
- Publication number
- CN109518134A CN109518134A CN201811642812.0A CN201811642812A CN109518134A CN 109518134 A CN109518134 A CN 109518134A CN 201811642812 A CN201811642812 A CN 201811642812A CN 109518134 A CN109518134 A CN 109518134A
- Authority
- CN
- China
- Prior art keywords
- fixing seat
- attachment base
- trundle
- coating machine
- flexibly connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 17
- 239000011248 coating agent Substances 0.000 title claims abstract description 16
- 238000013016 damping Methods 0.000 claims abstract description 14
- 238000007789 sealing Methods 0.000 claims abstract description 14
- 210000004907 gland Anatomy 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 7
- 238000013019 agitation Methods 0.000 abstract description 3
- 239000012528 membrane Substances 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Machine Tool Units (AREA)
- Vibration Prevention Devices (AREA)
Abstract
A kind of horizontal correcting device of coating machine, including revision board, crossbeam, damping assembly, connecting rod, fixing seat, vacuum sealing cylinder, flanged plate, connector and attachment base；The revision board is fixed on crossbeam；The attachment base side is fixedly connected with crossbeam, and the attachment base other side is flexibly connected with connector by trundle, and the attachment base middle position is flexibly connected with connecting rod by trundle；The connector is connected with vacuum sealing cylinder, and the vacuum sealing cylinder is fixed on flanged plate；One end of the connecting rod is flexibly connected by trundle with fixing seat；The damping assembly is mounted in fixing seat, and the fixing seat is fixed on flanged plate.Using the present invention, the agitation in device operation process to air-flow can be effectively reduced, reduces the influence to membrane thickness unevenness.
Description
Technical field
The present invention relates to a kind of horizontal correcting devices of coating machine.
Background technique
Currently, the existing horizontal correcting device of coating machine is insufficient as present on design, have a defect that film thickness not
Uniformly.
Summary of the invention
The technical problem to be solved by the invention is to provide one kind can effectively reduce in device operation process to air-flow
Agitation, reduce the horizontal correcting device of coating machine of influence to membrane thickness unevenness.
The technical solution adopted by the present invention to solve the technical problems is: a kind of horizontal correcting device of coating machine, including repairs
Positive plate, crossbeam, damping assembly, connecting rod, fixing seat, vacuum sealing cylinder, flanged plate, connector and attachment base；
The revision board is fixed on crossbeam；The attachment base side is fixedly connected with crossbeam, the attachment base other side
It is flexibly connected with connector by trundle, the attachment base middle position is flexibly connected with connecting rod by trundle；The connector
It is connected with vacuum sealing cylinder, the vacuum sealing cylinder is fixed on flanged plate；One end of the connecting rod by trundle with
Fixing seat is flexibly connected；The damping assembly is mounted in fixing seat, and the fixing seat is fixed on flanged plate.
It further, include 1 plastic mattress, 1 fixing seat, 1 positioning sleeve, 1 spring, 1 pressure in the damping assembly
Lid, 1 plain cushion, 1 locking nut, 1 central axis；The plastic mattress, positioning sleeve, spring, plain cushion and locking nut are logical
Cross central axis, gland and fixing seat positioning.
Further, the revision board is fixed by screws on crossbeam.
Further, the attachment base other side is flexibly connected with connector by trundle and wear-resistant pad.
Further, the attachment base middle position is flexibly connected with two connecting rods by trundle and wear-resistant pad.
Further, one end of the connecting rod is flexibly connected by trundle and wear-resistant pad with fixing seat.
Compared with prior art, the invention has the following advantages that can effectively reduce in device operation process to air-flow
Agitation, reduce influence to membrane thickness unevenness；The correcting principle in Relative vertical direction, the correcting device of horizontal direction can be with
Relative altitude between meaning control revision board and evaporation source.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the horizontal correcting device embodiment of coating machine of the present invention；
Fig. 2 is the schematic diagram of the damping assembly of embodiment illustrated in fig. 1；
In figure: 1. revision boards, 2. crossbeams, 3. damping assemblies, 4. connecting rods, 5. fixing seats, 6. vacuum sealing cylinders, 7. flanges
Plate, 8. connectors, 9. wear-resistant pads, 10. trundles, 11. attachment bases, 12. plastic mattress, 13. fixing seats, 14. positioning sleeves, 15. springs,
16. gland, 17. plain cushions, 18. locking nuts, 19. central axises.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and embodiments.
Embodiment
- Fig. 2 referring to Fig.1, a kind of horizontal correcting device of coating machine, including 12,1 sets of crossbeam vibration damping group of revision board 1,1
4,1, connecting rod, 6,1, the vacuum sealing cylinder connector 8,6 wear-resistant pad 9,3 of flanged plate 7,1 of fixing seat 5,1 of part 3,2 passes
Dynamic pin 10 and 1 attachment base 11；
The revision board 1 is fixed by screws on crossbeam 2；11 side of attachment base is fixedly connected with crossbeam 2, another
Side is flexibly connected with connector 8 by trundle 10 and wear-resistant pad 9, and 11 middle position of attachment base and two connecting rods pass through transmission
Pin 10 and wear-resistant pad 9 are flexibly connected；The connector 8 is connected with vacuum sealing cylinder 6, and the vacuum sealing cylinder 6 is fixed on method
On blue plate 7；The other end of described two connecting rods 4 is flexibly connected by trundle 10 and wear-resistant pad 9 with fixing seat 5；The vibration damping
Component 3 is mounted in fixing seat 5, and the fixing seat 5 is fixed on flanged plate 7.
It include 1 fixing seat 13,1 positioning sleeve 14,1 of plastic mattress 12,1 in the damping assembly 3 in the present embodiment
15,1, spring, 16,1, the gland central axis 19 of locking nut 18,1 of plain cushion 17,1；The plastic mattress 12, positioning sleeve 14, bullet
Spring 15, plain cushion 17 and locking nut 18 are positioned by central axis 19, gland 16 and fixing seat 13.
In the course of work, by the flexible of vacuum sealing cylinder 6, drive revision board 1 in amendment position (working position) He Feigong
Make position movement.
The device is made when correcting position and moving to inoperative position using the contact buffering between damping assembly 3 and attachment base 11
With making the process gentle, the effective impact vibration problem reduced in motion process is effective to reduce revision board and coating machine
The vibration of cavity, the effective influence reduced to film thickness uniformity in coating process.
Claims (6)
1. a kind of horizontal correcting device of coating machine, it is characterised in that: including revision board, crossbeam, damping assembly, connecting rod, fixing seat,
Vacuum sealing cylinder, flanged plate, connector and attachment base；
The revision board is fixed on crossbeam；The attachment base side is fixedly connected with crossbeam, the attachment base other side with connect
Head is flexibly connected by trundle, and the attachment base middle position is flexibly connected with connecting rod by trundle；The connector and true
Empty sealing cylinder is connected, and the vacuum sealing cylinder is fixed on flanged plate；One end of the connecting rod passes through trundle and fixation
Seat is flexibly connected；The damping assembly is mounted in fixing seat, and the fixing seat is fixed on flanged plate.
2. the horizontal correcting device of coating machine according to claim 1, it is characterised in that: include 1 in the damping assembly
Plastic mattress, 1 fixing seat, 1 positioning sleeve, 1 spring, 1 gland, 1 plain cushion, 1 locking nut, 1 central axis；It is described
Plastic mattress, positioning sleeve, spring, plain cushion and locking nut pass through central axis, gland and fixing seat positioning.
3. the horizontal correcting device of coating machine according to claim 1 or 2, it is characterised in that: the revision board passes through screw
It is fixed on crossbeam.
4. the horizontal correcting device of coating machine according to claim 1 or 2, it is characterised in that: the attachment base other side with
Connector is flexibly connected by trundle and wear-resistant pad.
5. the horizontal correcting device of coating machine according to claim 1 or 2, it is characterised in that: the attachment base middle position
It is flexibly connected with two connecting rods by trundle and wear-resistant pad.
6. the horizontal correcting device of coating machine according to claim 1 or 2, it is characterised in that: one end of the connecting rod passes through
Trundle and wear-resistant pad are flexibly connected with fixing seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811642812.0A CN109518134B (en) | 2018-12-29 | 2018-12-29 | Horizontal correction device of coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811642812.0A CN109518134B (en) | 2018-12-29 | 2018-12-29 | Horizontal correction device of coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109518134A true CN109518134A (en) | 2019-03-26 |
| CN109518134B CN109518134B (en) | 2023-12-26 |
Family
ID=65798660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811642812.0A Active CN109518134B (en) | 2018-12-29 | 2018-12-29 | Horizontal correction device of coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109518134B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110747443A (en) * | 2019-11-14 | 2020-02-04 | 安徽顺彤包装材料有限公司 | Part position correction device for winding film coating machine and working method thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002194533A (en) * | 2000-12-26 | 2002-07-10 | Asahi Techno Glass Corp | Vacuum deposition equipment |
| CN201713567U (en) * | 2010-05-21 | 2011-01-19 | 光驰科技(上海)有限公司 | Driving device of duplicature thickness uniformity modification board |
| CN102534512A (en) * | 2012-02-29 | 2012-07-04 | 苏州鼎旺科技有限公司 | Correction plate structure for film coating machine |
| CN104313537A (en) * | 2014-10-24 | 2015-01-28 | 杰莱特（苏州）精密仪器有限公司 | Real-time membrane thickness modification plate for vacuum membrane plating and control method of real-time membrane thickness modification plate |
| CN206052136U (en) * | 2016-08-31 | 2017-03-29 | 苏州京浜光电科技股份有限公司 | A kind of coating apparatus revision board |
| CN207811851U (en) * | 2017-12-26 | 2018-09-04 | 惠州比亚迪实业有限公司 | A kind of coating machine revision board and evaporation coating machine |
| CN208151466U (en) * | 2018-04-18 | 2018-11-27 | 东莞市天瞳电子有限公司 | Revision board, uniform correcting device and its coating machine |
| CN209352970U (en) * | 2018-12-29 | 2019-09-06 | 湖南宇诚精密科技有限公司 | The horizontal correcting device of coating machine |
-
2018
- 2018-12-29 CN CN201811642812.0A patent/CN109518134B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002194533A (en) * | 2000-12-26 | 2002-07-10 | Asahi Techno Glass Corp | Vacuum deposition equipment |
| CN201713567U (en) * | 2010-05-21 | 2011-01-19 | 光驰科技(上海)有限公司 | Driving device of duplicature thickness uniformity modification board |
| CN102534512A (en) * | 2012-02-29 | 2012-07-04 | 苏州鼎旺科技有限公司 | Correction plate structure for film coating machine |
| CN104313537A (en) * | 2014-10-24 | 2015-01-28 | 杰莱特（苏州）精密仪器有限公司 | Real-time membrane thickness modification plate for vacuum membrane plating and control method of real-time membrane thickness modification plate |
| CN206052136U (en) * | 2016-08-31 | 2017-03-29 | 苏州京浜光电科技股份有限公司 | A kind of coating apparatus revision board |
| CN207811851U (en) * | 2017-12-26 | 2018-09-04 | 惠州比亚迪实业有限公司 | A kind of coating machine revision board and evaporation coating machine |
| CN208151466U (en) * | 2018-04-18 | 2018-11-27 | 东莞市天瞳电子有限公司 | Revision board, uniform correcting device and its coating machine |
| CN209352970U (en) * | 2018-12-29 | 2019-09-06 | 湖南宇诚精密科技有限公司 | The horizontal correcting device of coating machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110747443A (en) * | 2019-11-14 | 2020-02-04 | 安徽顺彤包装材料有限公司 | Part position correction device for winding film coating machine and working method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109518134B (en) | 2023-12-26 |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20231201 Address after: 413001 No. 01, North Side of Ziyang Avenue, Changchun Economic Development Zone, Ziyang District, Yiyang City, Hunan Province Applicant after: HUNAN YUJING MACHINE INDUSTRIAL Co.,Ltd. Address before: No. 341 Maliang North Road, Changchun Economic Development Zone, Ziyang District, Yiyang City, Hunan Province, 413001 Applicant before: HUNAN YUCHENG PRECISION TECHNOLOGY Co.,Ltd. |
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| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |