CN201713567U - Driving device of duplicature thickness uniformity modification board - Google Patents
Driving device of duplicature thickness uniformity modification board Download PDFInfo
- Publication number
- CN201713567U CN201713567U CN2010202017150U CN201020201715U CN201713567U CN 201713567 U CN201713567 U CN 201713567U CN 2010202017150 U CN2010202017150 U CN 2010202017150U CN 201020201715 U CN201020201715 U CN 201020201715U CN 201713567 U CN201713567 U CN 201713567U
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- revision board
- guide rail
- fixed
- mounting flange
- pivot axis
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Abstract
The utility model discloses a driving device of a duplicature thickness uniformity modification board, relating to the technical field of vacuum coating and aiming to solve the technical problem on controlling the film thickness uniformity of two kinds of materials. The device comprises a mounting flange, two modification boards and two sets of driving units, wherein each set of driving unit comprises a mounting base, a driving cylinder, a guide rail, a bearing block, a joint bearing, a connecting rod, a rotary arm and a modification board mounting rod; each mounting base, each driving cylinder and each guide rail are all fixed on the mounting flange, and each bearing block is fixed on each mounting base; each joint bearing is fixed on the power arm of each driving cylinder; two ends of each connecting rod are respectively pivoted with each joint bearing and each rotary arm, and each rotary arm is pivoted with each bearing block; each modification board mounting rod is fixed on each rotary arm, and the two modification boards are respectively fixed on modification board mounting rods of the two sets of the driving units; and each joint bearing is provided with the guide rail. The device provided by the utility model can be used for effectively controlling the uniform distribution of the film thickness of the two kinds of materials.
Description
Technical field
The utility model relates to the technology of vacuum plating, particularly relates to a kind of technology of double-deck film uniformity revision board drive unit.
Background technology
Vacuum plating is that solid material is placed in the vacuum chamber, under vacuum condition, with the solid material heating evaporation, makes on its surface that is adsorbed on substrate and forms thin film.
In vacuum plating,, use work rest rotation and revision board technology usually and solve the distribution problem that thickness makes progress with the footpath on circumference for obtaining uniform film thickness distribution.When existing film thickness monitoring device evaporates single-material in same evaporation source position, by control individual layer revision board thickness is revised, can effectively control film thickness distribution, but when two kinds of materials being evaporated in same evaporation source position, because the evaporation characteristic difference of material, the individual layer revision board just is difficult to take into account, and the vacuum cavity that also can not open vacuum plating unit in coating process is changed revision board, therefore when existing film thickness monitoring device evaporated two kinds of materials in same evaporation source position, the effect of control film thickness distribution was relatively poor.
The utility model content
At the defective that exists in the above-mentioned prior art, when technical problem to be solved in the utility model provides a kind of can be in same evaporation source position two kinds of materials evaporations, effectively control the double-deck film uniformity revision board drive unit of film thickness distribution.
In order to solve the problems of the technologies described above, a kind of double-deck film uniformity revision board drive unit provided by the utility model, comprise mounting flange, revision board and driver element, it is characterized in that: described driver element has two groups, is installed in the upper and lower of mounting flange respectively; Every group of driver element comprises mounting seat, drives cylinder, guide rail, bearing support, oscillating bearing, union lever, pivot arm and revision board mounting rod;
Described mounting seat, driving cylinder and guide rail all are fixed on the mounting flange, described bearing support is fixed on the mounting seat, and the power arm, guide rail and the bearing support that drive cylinder all are positioned at the inboard of mounting flange, drive the shell and the mounting flange sealing engagement of cylinder, the axis of described guide rail is parallel to the power arm that drives cylinder;
Described oscillating bearing is fixed on the power arm that drives cylinder;
One end of described union lever and oscillating bearing articulate, and its pivot axis is first pivot axis, and the other end and pivot arm articulate, and its pivot axis is second pivot axis, and described pivot arm and bearing support articulate, and its pivot axis is the 3rd pivot axis; Described first, second, third pivot axis is parallel to each other, and perpendicular to the power arm that drives cylinder;
Described revision board mounting rod is fixed on the pivot arm through an angular setting piece, and described revision board has two, is separately fixed on the revision board mounting rod of two groups of driver elements;
On the described oscillating bearing guide wheel is housed, the axis of described guide wheel is parallel to first axle, and the rail level of its wheel face and guide rail is tangent.
Further, described mounting seat is provided with the spacing adjustment screw of the pivot arm pivoting angle that is used to limit two groups of driver elements.
Further, described angular setting piece is provided with locating slot, and described revision board mounting rod is affixed through locating slot and angular setting piece.
Further, the inwall of described mounting flange, and pivot arm under, union lever under, guide rail under antifouling board all is installed.
The double-deck film uniformity revision board drive unit that the utility model provides, control the switching of two revision boards respectively by two groups of driver elements, can open simultaneously according to two revision boards of plated film situation control, or close simultaneously, or control one of them revision board and open, control another revision board simultaneously and close, when therefore can be two kinds of materials being evaporated in same evaporation source position, revise the film uniformity of two kinds of materials respectively, effectively control film thickness distribution.
Description of drawings
Fig. 1 is the main parallax stereogram of the double-deck film uniformity revision board drive unit of the utility model embodiment;
Fig. 2 is the front view of the double-deck film uniformity revision board drive unit of the utility model embodiment.
Embodiment
Below in conjunction with description of drawings embodiment of the present utility model is described in further detail, but present embodiment is not limited to the utility model, every employing analog structure of the present utility model and similar variation thereof all should be listed protection domain of the present utility model in.
As Fig. 1-shown in Figure 2, a kind of double-deck film uniformity revision board drive unit that the utility model embodiment is provided, comprise mounting flange 2, revision board 18 and driver element, it is characterized in that: described driver element has two groups, is installed in the upper and lower of mounting flange 2 respectively; Every group of driver element comprises mounting seat 13, drives cylinder 1, guide rail 6, bearing support 14, oscillating bearing 4, union lever 8, pivot arm 9 and revision board mounting rod 11;
Described mounting seat 13, driving cylinder 1 and guide rail 6 all are fixed on the mounting flange 2, described bearing support 14 is fixed on the mounting seat 13, and the power arm, guide rail 6 and the bearing support 14 that drive cylinder 1 all are positioned at the inboard of mounting flange 2, the shell that drives cylinder 1 engages with mounting flange 2 through an O-ring seals, and the axis of described guide rail 6 is parallel to the power arm that drives cylinder 1;
Described oscillating bearing 4 is threaded and drives the power arm of cylinder 1, and is locked on the power arm that drives cylinder 1 by a set nut;
One end of described union lever 8 and oscillating bearing 4 articulate, and its pivot axis is first pivot axis, and the other end and pivot arm 9 articulate, and its pivot axis is second pivot axis, and described pivot arm 9 articulates with bearing support 14, and its pivot axis is the 3rd pivot axis; Described first, second, third pivot axis is parallel to each other, and perpendicular to the power arm that drives cylinder 1;
Described revision board mounting rod 11 is fixed on the pivot arm 9 through an angular setting piece 10, and described revision board 18 has two, is separately fixed on the revision board mounting rod 11 of two groups of driver elements;
On the described oscillating bearing 4 guide wheel 7 is housed, the axis of described guide wheel 7 is parallel to first axle, and the rail level of its wheel face and guide rail 6 is tangent;
Described mounting seat 13 is provided with the spacing adjustment screw 12 of pivot arm 9 pivoting angles that are used to limit two groups of driver elements;
Among the utility model embodiment, described angular setting piece 10 is provided with locating slot, and described revision board mounting rod 11 is affixed through locating slot and angular setting piece 10;
The utility model embodiment is installed in the side of vacuum plating unit and uses, and during installation mounting flange 2 is fixed on the vacuum cavity side flange of vacuum plating unit to get final product.
When the utility model embodiment uses, the power arm that drives cylinder 1 by control is flexible, can pass through the rotational angle of oscillating bearing 4, union lever 8 controls revolution arms 9, and then control revision board 18 is opened or closed, thereby 18 pairs of thickness of control revision board are revised, and effectively control film thickness distribution.
Among the utility model embodiment, the driver element that is installed in mounting flange 2 tops is first driver element, the driver element that is installed in mounting flange 2 bottoms is second driver element, the revision board 18 that is fixed on the revision board mounting rod 11 of first driver element is first revision board, the revision board 18 that is fixed on the revision board mounting rod 11 of second driver element is second revision board, when first kind of material of vacuum coating equipment plating, controlling first revision board by first driver element opens or closes, to control the thickness of first kind of material, when second kind of material of vacuum coating equipment plating, control second revision board by second driver element and open or close, to control the thickness of second kind of material;
When the utility model embodiment uses, can control first, second revision board and open simultaneously or close simultaneously, also can control a unlatching in first, second revision board, another is closed.
Have pilot hole on the mounting flange 2 of the utility model embodiment, the steady brace that matches with pilot hole on the mounting flange 2 is housed on the vacuum cavity side flange of vacuum plating unit, with the repeatable accuracy that guarantees that the utility model embodiment installs, and then the repeatable accuracy of assurance revision board position.
Among the utility model embodiment, the keying angle of the adjustable whole revision board 18 in position by regulating spacing adjustment screw 12 and oscillating bearing 4.
During the utility model is implemented, the inwall of described mounting flange 2, and pivot arm 9 under, union lever 8 under, guide rail 6 under antifouling board 15 all is installed, the Coating Materials that is used for effectively avoiding evaporating under revision board 18 unlatchings and closing condition enters, avoid each movable place to kill because of pollution, simultaneously also but partial reflection prevents from that Yin Wendu is too high sealing property to be reduced or kill at movable place from the radiant heat of the vacuum cavity internal heat resource of vacuum plating unit.
Among the utility model embodiment, the outside of described mounting flange 2 is provided with water-cooling jacket, when the vacuum plating unit film-forming temperature is higher, can effectively cool off the shell of driving cylinder 1 and the O-ring seals between the mounting flange 2, guarantees excellent sealing performance.
Claims (4)
1. a double-deck film uniformity revision board drive unit comprises mounting flange, revision board and driver element, and it is characterized in that: described driver element has two groups, is installed in the upper and lower of mounting flange respectively; Every group of driver element comprises mounting seat, drives cylinder, guide rail, bearing support, oscillating bearing, union lever, pivot arm and revision board mounting rod;
Described mounting seat, driving cylinder and guide rail all are fixed on the mounting flange, described bearing support is fixed on the mounting seat, and the power arm, guide rail and the bearing support that drive cylinder all are positioned at the inboard of mounting flange, drive the shell and the mounting flange sealing engagement of cylinder, the axis of described guide rail is parallel to the power arm that drives cylinder;
Described oscillating bearing is fixed on the power arm that drives cylinder;
One end of described union lever and oscillating bearing articulate, and its pivot axis is first pivot axis, and the other end and pivot arm articulate, and its pivot axis is second pivot axis, and described pivot arm and bearing support articulate, and its pivot axis is the 3rd pivot axis; Described first, second, third pivot axis is parallel to each other, and perpendicular to the power arm that drives cylinder;
Described revision board mounting rod is fixed on the pivot arm through an angular setting piece, and described revision board has two, is separately fixed on the revision board mounting rod of two groups of driver elements;
On the described oscillating bearing guide wheel is housed, the axis of described guide wheel is parallel to first axle, and the rail level of its wheel face and guide rail is tangent.
2. double-deck film uniformity revision board drive unit according to claim 1 is characterized in that: described mounting seat is provided with the spacing adjustment screw of the pivot arm pivoting angle that is used to limit two groups of driver elements.
3. double-deck film uniformity revision board drive unit according to claim 1, it is characterized in that: described angular setting piece is provided with locating slot, and described revision board mounting rod is affixed through locating slot and angular setting piece.
4. double-deck film uniformity revision board drive unit according to claim 1 is characterized in that: the inwall of described mounting flange, and pivot arm under, union lever under, guide rail under antifouling board all is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202017150U CN201713567U (en) | 2010-05-21 | 2010-05-21 | Driving device of duplicature thickness uniformity modification board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202017150U CN201713567U (en) | 2010-05-21 | 2010-05-21 | Driving device of duplicature thickness uniformity modification board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201713567U true CN201713567U (en) | 2011-01-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202017150U Expired - Fee Related CN201713567U (en) | 2010-05-21 | 2010-05-21 | Driving device of duplicature thickness uniformity modification board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201713567U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103993267A (en) * | 2014-04-30 | 2014-08-20 | 光驰科技(上海)有限公司 | Arranging correction method for correction plate in film-plating machine |
| CN104046980A (en) * | 2013-03-14 | 2014-09-17 | 三星显示有限公司 | Vacuum powered deposition apparatus |
| CN104046944A (en) * | 2013-03-14 | 2014-09-17 | 三星显示有限公司 | Vacuum evaporating apparatus |
| CN104313537A (en) * | 2014-10-24 | 2015-01-28 | 杰莱特（苏州）精密仪器有限公司 | Real-time membrane thickness modification plate for vacuum membrane plating and control method of real-time membrane thickness modification plate |
| CN109518134A (en) * | 2018-12-29 | 2019-03-26 | 湖南宇诚精密科技有限公司 | A kind of horizontal correcting device of coating machine |
-
2010
- 2010-05-21 CN CN2010202017150U patent/CN201713567U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104046980A (en) * | 2013-03-14 | 2014-09-17 | 三星显示有限公司 | Vacuum powered deposition apparatus |
| CN104046944A (en) * | 2013-03-14 | 2014-09-17 | 三星显示有限公司 | Vacuum evaporating apparatus |
| JP2014177703A (en) * | 2013-03-14 | 2014-09-25 | Samsung Display Co Ltd | Vacuum evaporating apparatus |
| CN104046980B (en) * | 2013-03-14 | 2019-03-26 | 三星显示有限公司 | Vacuum power precipitation equipment |
| CN103993267A (en) * | 2014-04-30 | 2014-08-20 | 光驰科技(上海)有限公司 | Arranging correction method for correction plate in film-plating machine |
| CN103993267B (en) * | 2014-04-30 | 2016-05-25 | 光驰科技(上海)有限公司 | In a kind of coating machine, amending plates arranges modification method |
| CN104313537A (en) * | 2014-10-24 | 2015-01-28 | 杰莱特（苏州）精密仪器有限公司 | Real-time membrane thickness modification plate for vacuum membrane plating and control method of real-time membrane thickness modification plate |
| CN109518134A (en) * | 2018-12-29 | 2019-03-26 | 湖南宇诚精密科技有限公司 | A kind of horizontal correcting device of coating machine |
| CN109518134B (en) * | 2018-12-29 | 2023-12-26 | 湖南宇晶机器股份有限公司 | Horizontal correction device of coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110119 Termination date: 20170521 |