CN104313537A - Real-time membrane thickness modification plate for vacuum membrane plating and control method of real-time membrane thickness modification plate - Google Patents
Real-time membrane thickness modification plate for vacuum membrane plating and control method of real-time membrane thickness modification plate Download PDFInfo
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- CN104313537A CN104313537A CN201410577335.XA CN201410577335A CN104313537A CN 104313537 A CN104313537 A CN 104313537A CN 201410577335 A CN201410577335 A CN 201410577335A CN 104313537 A CN104313537 A CN 104313537A
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Abstract
The invention relates to a real-time membrane thickness modification plate for vacuum membrane plating and a control method of the real-time membrane thickness modification plate, for mainly solving the technical problems that a conventional membrane thickness modification plate is large in plating membrane material waste, the membrane plating is not uniform and the product quality is poor. According to the technical scheme, the real-time membrane thickness modification plate for vacuum membrane plating comprises a membrane thickness modification plate bracket as well as a rotation membrane thickness modification plate, a rotating device and a fixed membrane thickness modification plate, wherein the fixed membrane thickness modification plate is arranged on one side of the membrane thickness modification plate bracket; a rotary guide track is arranged on the membrane thickness modification plate; the rotating membrane thickness modification plate is arranged above the fixed membrane thickness modification plate and a guide column arranged on the rotating membrane thickness modification plate is positioned in the rotary guide track; the rotating device is arranged on the fixed membrane thickness modification plate and is positioned on one side of the rotating membrane thickness modification plate. The control method of the real-time membrane thickness modification plate comprises steps of comparing the membrane plating velocity of a main monitoring point and an auxiliary monitoring point, and achieving rapid real-time membrane thickness distribution modification under the condition that the stable membrane plating velocity at the main monitoring point is ensured.
Description
Technical field
The present invention relates to a kind of vacuum plating real-time thickness revision board and control method thereof, it belongs to equipment and the control method of the real-time thickness correction of optical vacuum plated film.
Background technology
In vacuum plating, the evaporant concentration directly over vapor deposition source (target) is the highest, causes the film thickness on coated basal plate from centre to edge, occur inconsistent phenomenon.The uniform film of current thickness obtains, and is normally solved by substrate swivel mount and thickness revision board.One revision board is set between coated basal plate frame and vapor deposition source, blocks the evaporant directly over vapor deposition source by revision board, to reduce the thickness of base plate glass rete directly over vapor deposition source.But because present thickness revision board is all the below being installed on substrate swivel mount usually, the corner of thickness revision board cannot be changed, therefore, the waste Coating Materials of existence is large, the defect of poor product quality.
In addition, because present thickness revision board is all be installed on substrate swivel mount usually, cannot control in real time it, therefore, the defect of the uneven and poor product quality of the plated film of existence.
Summary of the invention
The object of the invention is to solve that the Coating Materials waste that existing thickness revision board exists is large, plated film is uneven and the technical problem of poor product quality, provide that a kind of plated film consumptive material is little, plated film evenly, good product quality and the simple vacuum plating of structure real-time thickness revision board and control method thereof.
For solving the problems of the technologies described above, the technical solution used in the present invention is:
The real-time thickness revision board of vacuum plating, it comprises thickness revision board support, wherein: it also comprises rotation thickness revision board, swivel arrangement and fixing thickness revision board, fixing thickness revision board is located at one side of thickness revision board support, fixing thickness revision board is provided with the circular guideway that rotation thickness revision board can be made to rotate, rotate thickness revision board be located at fixing thickness revision board above and make to be arranged on the guide pillar rotated on thickness revision board and be arranged in circular guideway, swivel arrangement to be located on fixing thickness revision board and to be positioned at the side rotating thickness revision board.
Described swivel arrangement is made up of gear, tooth bar and actuating unit, and gear to be located on fixing thickness revision board and to be connected with the output shaft of actuating unit, and tooth bar is located at the side that rotates thickness revision board and is meshed with gear.
The described vacuum plating control method of real-time thickness revision board, its main control point is located on the rotation center of rotation thickness revision board, and auxiliary control point is located at the one or both sides of main control point; The plated film speed of more main control point and auxiliary control point in real time, regulate the angle rotating thickness revision board, it is made to block the too fast part of plated film speed, and reduce the partially slow part of plated film speed simultaneously, under the condition ensureing main control point plated film rate stabilization, realize the correction of film thickness distribution in real time fast.
Owing to present invention employs technique scheme, the Coating Materials solving the existence of existing thickness revision board is wasted greatly, plated film is uneven and the technical problem of poor product quality, therefore, compared with prior art, the invention has the beneficial effects as follows: 1. monitor radius and be located at the rotation center rotating thickness revision board, thus ensure that the reliable and stable of control point plated film speed.When ensureing that optical film thickness meter tolerance range is constant, regulate the distribution of thickness convenient and swift; 2. physical construction is more simple and reliable; 3., compared with fixing thickness revision board widely used on current coating equipment, reduce the consume of Coating Materials, alleviate the impact of the factors such as ion source drift, improve the quality of coated product.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation that the present invention rotates thickness revision board;
Fig. 3 is the structural representation that the present invention fixes thickness revision board.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
As Fig. 1, shown in Fig. 2 and Fig. 3, the real-time thickness revision board of vacuum plating in the present embodiment, it comprises thickness revision board support 2, wherein: it also comprises rotation thickness revision board 1, swivel arrangement and fixing thickness revision board 3, fixing thickness revision board 3 is located at one side of thickness revision board support 2, fixing thickness revision board 3 is provided with the circular guideway 11 that rotation thickness revision board 1 can be made to rotate, rotate thickness revision board 1 be located at fixing thickness revision board 3 above and make to be arranged on the guide pillar 8 rotated on thickness revision board 1 and be arranged in circular guideway 11, swivel arrangement to be located on fixing thickness revision board 2 and to be positioned at the side rotating thickness revision board 1.Described swivel arrangement is made up of gear 4, tooth bar 9 and actuating unit, and gear 4 is located on fixing thickness revision board 3 and with the output shaft 10 of actuating unit and is connected, and tooth bar 9 is located at the side of rotation thickness revision board 1 and is meshed with gear 4.Main control point 7 is arranged on the rotation center 5 of rotation thickness revision board 1, and auxiliary control point 6 is positioned at one or both sides, main control point 7.
As shown in Figure 1, the control method of real-time thickness revision board of the vacuum plating in above-described embodiment, its main control point 7 is located on the rotation center 5 of rotation thickness revision board, and auxiliary control point 6 is located at the one or both sides of main control point 7; The plated film speed of more main control point 7 and auxiliary control point 6 in real time, regulate the angle rotating thickness revision board 1, it is made to block the too fast part of plated film speed, and reduce the partially slow part of plated film speed simultaneously, under the condition ensureing main control point 7 plated film rate stabilization, realize the correction of film thickness distribution in real time fast.
Principle of work of the present invention is: first rotation thickness revision board 1 is placed on level attitude; Then by the shape of the fixing thickness revision board 3 of amendment, the thickness distribution of film is made to reach uniformity; Finally, confirm that the change of film thickness distribution regulates direction linearly to change along revision board.Then the plated film speed of more main control point 7 and auxiliary control point 6, continuous adjustment rotates the angle of thickness revision board 1, the fast one end of plated film speed rotates thickness revision board 1 increases shielded area, and reduce the slow one end of plated film speed, until obtain best film thickness distribution at whole monitoring range simultaneously.
Claims (3)
1. the real-time thickness revision board of vacuum plating, it comprises thickness revision board support, it is characterized in that: it also comprises rotation thickness revision board, swivel arrangement and fixing thickness revision board, fixing thickness revision board is located at one side of thickness revision board support, fixing thickness revision board is provided with the circular guideway that rotation thickness revision board can be made to rotate, rotate thickness revision board be located at fixing thickness revision board above and make to be arranged on the guide pillar rotated on thickness revision board and be arranged in circular guideway, swivel arrangement to be located on fixing thickness revision board and to be positioned at the side rotating thickness revision board.
2. the real-time thickness revision board of a kind of vacuum plating according to claim 1, it is characterized in that: described swivel arrangement is made up of gear, tooth bar and actuating unit, gear to be located on fixing thickness revision board and to be connected with the output shaft of actuating unit, and tooth bar is located at the side that rotates thickness revision board and is meshed with gear.
3. a vacuum plating according to claim 1 control method for real-time thickness revision board, is characterized in that: main control point is located on the rotation center of rotation thickness revision board, and auxiliary control point is located at the one or both sides of main control point; The plated film speed of more main control point and auxiliary control point in real time, regulate the angle rotating thickness revision board, it is made to block the too fast part of plated film speed, and reduce the partially slow part of plated film speed simultaneously, under the condition ensureing main control point plated film rate stabilization, realize the correction of film thickness distribution in real time fast.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410577335.XA CN104313537B (en) | 2014-10-24 | 2014-10-24 | Vacuum coating real-time thickness revision board and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410577335.XA CN104313537B (en) | 2014-10-24 | 2014-10-24 | Vacuum coating real-time thickness revision board and control method thereof |
Publications (2)
| Publication Number | Publication Date |
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| CN104313537A true CN104313537A (en) | 2015-01-28 |
| CN104313537B CN104313537B (en) | 2016-08-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410577335.XA Active CN104313537B (en) | 2014-10-24 | 2014-10-24 | Vacuum coating real-time thickness revision board and control method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109518134A (en) * | 2018-12-29 | 2019-03-26 | 湖南宇诚精密科技有限公司 | A kind of horizontal correcting device of coating machine |
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| CN201713567U (en) * | 2010-05-21 | 2011-01-19 | 光驰科技(上海)有限公司 | Driving device of duplicature thickness uniformity modification board |
| CN102086505A (en) * | 2009-12-03 | 2011-06-08 | 鸿富锦精密工业（深圳）有限公司 | Correction mask for coating film |
| CN202380071U (en) * | 2011-12-20 | 2012-08-15 | 杭州科汀光学技术有限公司 | Baffle plate for correcting gradient film thickness of projection display color analyzer |
| CN103290384A (en) * | 2012-03-02 | 2013-09-11 | 鸿富锦精密工业（深圳）有限公司 | Film coating correcting plate |
| CN204138749U (en) * | 2014-10-24 | 2015-02-04 | 杰莱特（苏州）精密仪器有限公司 | The real-time thickness revision board of vacuum plating |
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2014
- 2014-10-24 CN CN201410577335.XA patent/CN104313537B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102086505A (en) * | 2009-12-03 | 2011-06-08 | 鸿富锦精密工业（深圳）有限公司 | Correction mask for coating film |
| CN201713567U (en) * | 2010-05-21 | 2011-01-19 | 光驰科技(上海)有限公司 | Driving device of duplicature thickness uniformity modification board |
| CN202380071U (en) * | 2011-12-20 | 2012-08-15 | 杭州科汀光学技术有限公司 | Baffle plate for correcting gradient film thickness of projection display color analyzer |
| CN103290384A (en) * | 2012-03-02 | 2013-09-11 | 鸿富锦精密工业（深圳）有限公司 | Film coating correcting plate |
| CN204138749U (en) * | 2014-10-24 | 2015-02-04 | 杰莱特（苏州）精密仪器有限公司 | The real-time thickness revision board of vacuum plating |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109518134A (en) * | 2018-12-29 | 2019-03-26 | 湖南宇诚精密科技有限公司 | A kind of horizontal correcting device of coating machine |
| CN109518134B (en) * | 2018-12-29 | 2023-12-26 | 湖南宇晶机器股份有限公司 | Horizontal correction device of coating machine |
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| Publication number | Publication date |
|---|---|
| CN104313537B (en) | 2016-08-24 |
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