KR20060018746A - Apparatus for depositing organic material - Google Patents

Abstract

The present invention is applicable to a large substrate by forming an organic thin film by depositing an organic material in a state in which the substrate is upright, and can form an organic thin film having a uniform thickness. The organic material storage unit and the organic material spray nozzle are separated from the substrate and An organic material deposition apparatus minimizing deformation of a mask pattern, the apparatus comprising: a chamber constituting a body and maintaining a substrate at an angle of 70 ° to 110 ° on the ground; An organic material storage unit comprising at least one organic material storage container containing organic material deposited on the substrate; An organic material spray nozzle unit for spraying an organic material deposited on the substrate; A connection line connecting the organic material spray nozzle part to the organic material storage part; It is characterized in that it provides an organic material deposition apparatus having a moving mechanism for moving at least the organic material spray nozzle in the vertical direction of the organic material storage unit, the organic material spray nozzle unit and the connection line.

Organic material deposition apparatus, vertical movement

Description

Organic material deposition apparatus {Apparatus for Depositing Organic Material}

1 is a schematic view for explaining an organic material deposition apparatus according to an embodiment of the present invention.

2A and 2B are schematic views for explaining an organic material deposition apparatus according to an embodiment of the present invention.

3 is a schematic view for explaining an organic material deposition apparatus according to another embodiment of the present invention.

Figure 4 is a schematic diagram for explaining an organic material deposition apparatus according to another embodiment of the present invention.

(Explanation of symbols for main parts of drawing)

100; Organic material deposition apparatus 110; chamber

120, 200, 300; Organic material deposition sources 121, 210, 310; Organic matter storage department

121a; Organic storage 122, 220, 320; Organic spray nozzle

123, 230, 330; Connecting lines 124, 240, 340; Measuring device

130; Organic material deposition source moving mechanism S; Board

M; Mask pattern

The present invention relates to an organic material deposition apparatus for forming an organic thin film, such as an organic semiconductor device, and more particularly, to form an organic thin film by depositing an organic material in a state in which the substrate is upright, and is applicable to a large substrate and has a uniform thickness. The organic thin film of the present invention may be formed, and the organic material deposition apparatus minimizing deformation of the substrate and the mask pattern by separating the organic material storage unit and the organic material spray nozzle.

In general, an organic thin film of an organic semiconductor device including an organic light emitting device (OLED) or the like is largely a method of forming an organic thin film by evaporating a low molecular organic material in a vacuum and a polymer organic material in a solvent. After dissolution, there is a method of forming an organic thin film using spin coating, dip coating, doctor blading, inkjet printing, or the like.

In the above method, when manufacturing a thin film made of a low molecular organic material in a vacuum, a shadow mask having an opening having a shape to be formed is aligned in front of the substrate, and the organic material is deposited on the substrate, thereby providing the substrate. An organic thin film is prepared on the substrate.

As a method for producing an organic thin film made of a low molecular organic material as described above, there is a method using a viscous organic material deposition source, a method using a linear organic material deposition source and the like.

However, in the case of forming an organic thin film on a large substrate using a point- or linear organic material deposition source as described above, the distance between the substrate and the evaporation source is increased together, and the distance between the substrate and the evaporation source is increased. This causes a decrease in the uniformity of the organic thin film formed on the substrate.

In addition, when the distance between the substrate and the evaporation source is increased, the organic material evaporated from the evaporation source is deposited in a vacuum chamber other than the substrate, so that the loss of the organic material is increased, considering that the organic material is expensive, There is an increasing problem.

In addition, in order to ensure uniformity of the organic thin film, the shadow mask and the evaporation source may be formed at a predetermined angle to form an organic thin film. In this case, when the shadow mask and the evaporation source form a predetermined angle, there is a problem in that a shadow effect caused by the shadow mask is generated and it is difficult to obtain an organic thin film having a desired shape.

In addition, since the evaporation source and the spray nozzle are integrated, there is a problem that deformation due to heat of the substrate and the mask pattern due to heat may occur.

In addition, in the case of a large substrate, there is a problem that the uniformity of the thin film of the center portion and the edge portion of the substrate is different due to the drooping phenomenon of the substrate.

An object of the present invention is to solve the above problems of the prior art, the present invention is to form an organic thin film by depositing an organic material in a state in which the substrate is upright, and is applicable to a large substrate and an organic thin film having a uniform thickness It is possible to form, and to provide an organic material deposition apparatus that minimizes deformation of the substrate and mask pattern by separating the organic material storage unit and the organic material injection nozzle.

The present invention for achieving the above object comprises a chamber to form a body, the substrate to maintain an angle of 70 ° to 110 ° to the ground; An organic material storage unit comprising at least one organic material storage container containing organic material deposited on the substrate; An organic material spray nozzle unit for spraying an organic material deposited on the substrate; A connection line connecting the organic material spray nozzle part to the organic material storage part; It is characterized in that it provides an organic material deposition apparatus having a moving mechanism for moving at least the organic material spray nozzle in the vertical direction of the organic material storage unit, the organic material spray nozzle unit and the connection line.

The organic matter storage unit may be located inside or outside the chamber.

It is preferable that the said organic matter spray nozzle part further includes a partition.

It is preferable to further include a measuring device which is located at the front end of the organic material spray nozzle portion in the organic material spray direction, and measures the deposition rate of the organic material deposited on the substrate, wherein the measuring device is integrated with the organic material spray nozzle, It is preferable to move vertically with the organic substance injection nozzle part.

In addition, the present invention comprises a chamber to form a body, the substrate to maintain an angle of 70 ° to 110 ° to the ground; At least one organic matter storage portion comprising at least one organic matter reservoir containing organic matter deposited on the substrate; At least two organic material spray nozzles for spraying organic material deposited on the substrate; It is characterized in that it provides an organic material deposition apparatus having a connection line connecting the organic material injection nozzle unit and the organic material storage unit.

The organic material storage unit and the organic material spray nozzle may correspond to a plurality of, or the organic material storage parts may be a plurality, and the organic material spray nozzle may correspond to the organic material storage part 1: 1.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

The organic material deposition apparatus of the present invention can form an organic thin film by depositing an organic material in a state in which the substrate is erected substantially vertically, which can be applied to a large substrate, and can form an organic thin film having a uniform thickness. Separation can minimize deformation of the substrate and mask pattern.

1 is a schematic diagram illustrating an organic material deposition apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the organic material deposition apparatus 100 according to an exemplary embodiment of the present invention may deposit organic material particles onto a chamber 110 forming a body of the organic material deposition apparatus 100 and a substrate S on which organic materials are deposited. It is composed of a structure having an organic material deposition source 120 for spraying, and an organic material deposition source moving mechanism 130 capable of moving the organic material deposition source 120 in the vertical direction.

The chamber 110 maintains the substrate S on which the organic material is to be deposited to be approximately vertical, preferably 70 ° to 110 ° with the ground. In addition, the chamber 110 is preferably a vacuum chamber.

The organic material deposition source 120 sprays the organic material evaporated from the organic material storage part 121 and the organic material storage part 121 to accommodate the organic material deposited on the substrate 110 onto the substrate S. The organic spray nozzle unit 122, the organic storage unit 121, and the organic spray nozzle unit 122 are connected to each other to form a connection line 123 which becomes a movement path of the evaporated organic material and is deposited on the substrate S. FIG. It consists of a structure comprising a measuring device 124 for measuring the organic deposition rate and the thickness of the organic material.

The organic material deposition source moving mechanism 130 has a structure including a moving means capable of moving at least the organic material injection nozzle unit 122 of the organic material deposition source 120 in the vertical direction. At this time, the organic material deposition source moving mechanism 130 is a vertical movement mechanism suitable for use in the chamber 110 maintained in a vacuum, the movement of at least the organic material injection nozzle unit 122 of the organic material deposition source 120. A feed rate adjusting mechanism (not shown) may be further provided to adjust the speed.

Reference numeral M in the figure is a mask pattern for determining the shape of the organic material deposited on the substrate S.

2A and 2B are schematic diagrams for describing an organic material deposition apparatus according to an embodiment of the present invention, and are shown as being limited to a substrate and an organic material deposition source on which organic materials are deposited.

2A and 2B, the organic material deposition source 120 of the organic material deposition apparatus 100 according to the exemplary embodiment of the present invention may include at least one organic material reservoir 121a containing organic materials deposited on the substrate S. Referring to FIGS. The organic material storage unit 121 and the organic material spray nozzle unit 122 for spraying the organic material deposited on the substrate S, and the organic material spray nozzle unit 122 and the organic material storage unit 121 are connected to each other. The main consists of a connection line 123 and a measuring device 124 for measuring the deposition rate of the organic material deposited on the substrate S and the thickness of the organic material.

The organic material storage unit 121 includes at least one organic material storage 121a for storing the organic material deposited on the substrate S. The organic matter storage unit 121 is a portion for heating the organic matter reservoir 121a to evaporate the organic matter particles. The organic matter storage unit 121 is generally located inside the chamber 110, but the organic matter storage unit of the present invention. The unit 121 may be located outside the chamber 110. That is, the position of the organic storage 121 may be configured to be located both inside or outside the chamber 110.

The organic spray nozzle unit 122 is a portion for spraying the organic particles evaporated from the organic storage unit 121 onto the substrate S, although not shown in the drawing, a heating heater to prevent condensation of the organic particles. And a nozzle for uniformly spraying the organic particles. In addition, the organic spray nozzle unit 122 is not evaporated to a completely particulate state of the organic material evaporated from the organic storage unit 121, and the organic material maintaining the cluster form where a plurality of organic particles are agglomerated again into an organic particle state. In order to make the size of the organic particles sprayed onto the substrate (S), it may be made of a structure further comprising a baffle for uniformizing the size of the organic particles.

The connection line 123 connects the organic material storage part 121 and the organic material injection nozzle part 122 to transfer the organic material particles evaporated from the organic material storage part 121 to the organic material injection nozzle part 122. Part. The connection line 123 is configured to control the temperature to prevent condensation of the organic particles evaporated from the organic storage 121. In addition, the organic particles may be individually controlled in two or more areas in order to minimize condensation. In addition, when the organic storage unit 121 is located outside the chamber 110, a connection line 123 connecting the organic storage unit 121 and the organic spray nozzle unit 122 may include the chamber ( 110 is connected to the outside. In addition, the connection line 123 may be formed in the form of a corrugated pipe in order to allow the organic spray nozzle unit 122 to move in the vertical direction.

The measuring device 124 measures the deposition rate of the organic material and the thickness of the organic material deposited on the substrate (S), is located at the front end of the organic material spray nozzle unit 122 in the organic material spray direction, the organic material spray It is integrated with the nozzle part 122. The measuring device 124 moves together with the organic spray nozzle unit 122 when the organic spray nozzle unit 122 moves to form an organic thin film on the substrate S, and then moves on the substrate S. The evaporation rate of the organic material in the organic storage unit 121 is controlled by measuring the deposition rate of the organic material deposited on the organic material storage unit 121.

A method of forming an organic thin film using the organic material deposition apparatus 100 as described above is as follows.

First, the substrate S is mounted in the organic vapor deposition apparatus 100 chamber 110 so as to maintain an angle of approximately 70 ° to 110 ° with respect to the ground.

Then, the organic matter storage unit 121, which is located inside or outside the chamber 110 and includes at least one organic matter reservoir containing organic matter, is heated to evaporate the organic matter to the state of organic matter.

The evaporated organic particles move to the organic spray nozzle unit 122 through the organic storage unit 121 and the organic spray nozzle unit 122 connection line 123, and through the organic spray nozzle unit 122. It is injected onto the substrate (S).

At this time, the organic material that does not evaporate completely in the state of the organic material evaporated from the organic storage unit 121, and maintains the cluster form of a plurality of organic material particles collide with the partition wall of the organic material injection nozzle unit 122 again the organic material By breaking the particles into particles, the size of the organic particles sprayed onto the substrate S is made uniform.

In addition, the organic material storage unit 121, the organic material spray nozzle unit 122, the connection line 123, and the organic material spray nozzle unit 122 are heated through an auxiliary heating heater so that the evaporated organic particles do not condense.

In addition, at least the organic material spray nozzle unit 122 of the organic material deposition source 120 is moved through the organic material deposition source moving mechanism 130, and uniformly spraying the organic material particles on the substrate S, A uniform organic thin film may be formed on the substrate S.

On the other hand, Figure 3 is a schematic diagram for explaining an organic material deposition apparatus according to another embodiment of the present invention, it is shown to be limited to the substrate and the organic material deposition source on which the organic material is deposited.

Referring to FIG. 3, the organic material deposition apparatus according to another embodiment of the present invention is similar to the organic material deposition apparatus illustrated in FIGS. 1, 2A, and 2B. However, only the structure in which the organic material deposition source 200 of the organic material deposition apparatus includes a plurality of organic material storage parts 210 and a plurality of organic material injection nozzle parts 220 is different.

That is, the organic material deposition source 200 of the organic material deposition apparatus according to another embodiment of the present invention is composed of at least one organic material reservoir for receiving the organic material deposited on the substrate (S), or in the chamber of the organic material deposition apparatus or A plurality of organic material storage unit 210 and the plurality of organic material spray nozzle unit 220 corresponding to each of the organic material storage unit 210, the organic material spray nozzle unit 220 and the organic material storage unit ( Measured to measure the deposition rate of the organic material deposited on the substrate (S) is installed at the front end of the plurality of connection lines 230 for connecting the 210 and the organic material injection direction of each of the organic material injection nozzle unit 220 It is made of a structure having a device (240).

As described above, the organic material deposition source 200 of the organic material deposition apparatus includes a plurality of organic material storage units 210 and a plurality of organic material spray nozzle units 220, thereby moving the organic material spray nozzle unit 220. Even if no means is provided, the organic material can be deposited on a large substrate that is substantially vertical, and the organic material can be more uniformly deposited when the moving means is provided.

4 is a schematic view illustrating an organic material deposition apparatus according to still another embodiment of the present invention, and is limited to the substrate and the organic material deposition source on which the organic material is deposited.

Referring to FIG. 4, the organic material deposition apparatus according to another embodiment of the present invention is similar to the organic material deposition apparatus illustrated in FIGS. 1, 2A, and 2B. However, the organic material deposition source 300 of the organic material deposition apparatus includes at least one organic material storage unit 310 and a plurality of organic material injection nozzle units 320 corresponding to any one of the organic material storage unit 310. Only the structure is different.

That is, the organic material deposition source 300 of the organic material deposition apparatus according to another embodiment of the present invention

At least one organic storage for receiving an organic material deposited on a substrate, the organic material storage unit located inside or outside the organic material deposition apparatus, a plurality of organic material injection nozzle unit for injecting organic particles onto the substrate and And a plurality of connection lines connecting each of the organic material spray nozzle parts and the organic material storage part, and a measuring device installed at a tip of the organic material spray direction of each organic material spray nozzle part to measure the deposition rate of the organic material deposited on the substrate. It is made of a structure.

In the organic material deposition apparatus as described above, two or more organic spray nozzles correspond to one organic material reservoir.

That is, a plurality of organic spray nozzles correspond to one organic matter reservoir to form an organic thin film by depositing organic matter on the substantially vertical substrate.

As described above, the organic material deposition apparatus according to the embodiment of the present invention by spraying the organic particles in an upright state of the substrate to form an organic thin film, in the case of a large substrate to prevent sagging of the substrate, it is applied to a large substrate This is possible.

In addition, the organic matter storage unit and the organic matter injection nozzle unit may be separated to prevent deformation due to heat of the substrate and the mask pattern, and an organic thin film having a uniform particle distribution of the organic material may be formed on the substrate.

In addition, it is possible to inject impurities to improve the characteristics of the organic thin film using different materials for the organic material stored in the plurality of organic material storage.

In addition, in the current trend of using a fine metal mask as a mask for forming the organic thin film, since the organic material is sprayed close to the perpendicular to the substrate S, uniform step coverage can be secured. There is an advantage to this.

As described above, according to the present invention, the present invention is applicable to a large substrate by forming an organic thin film by depositing an organic material in a state in which the substrate is erected vertically, and forming an organic thin film having a uniform thickness. The organic material deposition apparatus may minimize the deformation of the substrate and the mask pattern by separating the organic material injection nozzle.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

Claims (9)

A chamber constituting the body to maintain the substrate at an angle of 70 ° to 110 ° to the ground; An organic material storage unit comprising at least one organic material storage container containing organic material deposited on the substrate; An organic material spray nozzle unit for spraying an organic material deposited on the substrate; A connection line connecting the organic material spray nozzle part to the organic material storage part; And a moving mechanism capable of moving at least the organic spray nozzle in the vertical direction among the organic reservoir, the organic spray nozzle, and a connection line. The method of claim 1, The organic material depositing device, characterized in that located in the interior or exterior of the chamber. The method of claim 1, The organic material spray nozzle unit further comprises a partition wall. The method of claim 1, An organic material deposition apparatus, further comprising: a measuring device positioned at a tip end of the organic material spray nozzle unit in an organic material spray direction to measure a deposition rate of the organic material deposited on the substrate. The method of claim 4, wherein And the measuring device is integrated with the organic spray nozzle, and moves vertically together with the organic spray nozzle. A chamber constituting the body to maintain the substrate at an angle of 70 ° to 110 ° to the ground; At least one organic matter storage portion comprising at least one organic matter reservoir containing organic matter deposited on the substrate; At least two organic material spray nozzles for spraying organic material deposited on the substrate; And a connecting line connecting the organic spray nozzle unit and the organic storage unit. The method of claim 6, And the organic material storage unit and the organic material spray nozzle correspond to a plurality of organic material deposition apparatuses. The method of claim 6, The organic material storage unit is a plurality, And the organic material spray nozzle corresponds to the organic material storage part 1: 1. The method of claim 6, An organic material deposition apparatus, further comprising: a measuring device positioned at a tip end of the organic material spray nozzle unit in an organic material spray direction to measure a deposition rate of the organic material deposited on the substrate.

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