CN207294943U - A kind of monocrystal growing furnace of water collar and water-cooled screen surfaces blackening process - Google Patents
A kind of monocrystal growing furnace of water collar and water-cooled screen surfaces blackening process Download PDFInfo
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- CN207294943U CN207294943U CN201721071610.6U CN201721071610U CN207294943U CN 207294943 U CN207294943 U CN 207294943U CN 201721071610 U CN201721071610 U CN 201721071610U CN 207294943 U CN207294943 U CN 207294943U
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Abstract
The utility model discloses a kind of water collar and the monocrystal growing furnace of water-cooled screen surfaces blackening process, including furnace body, absorption crystal bar, heat shielding, water collar, heating unit and crucible；Water collar is fixedly installed in the furnace body middle top, and the absorption crystal bar is from top to bottom stretched into the furnace body through the middle through-hole, and the water collar inner wall surface sets the heat-sink shell I for the heat radiation for being used to absorb the water collar；The heat shielding includes lift arm and heat shielding body.With the above mentioned technical proposal, a kind of monocrystal growing furnace of water collar and water-cooled the screen surfaces blackening process of the utility model, heat absorption effect can be improved, so that the latent heat that crystalizing interface produces is distributed well, improves crystalline rate and pulling rate.
Description
Technical field
The utility model belongs to monocrystalline silicon production equipment technical field, particularly relates to a kind of water collar and water-cooled
The monocrystal growing furnace of screen surfaces blackening process.
Background technology
For solar cell, it is most important that reduce the cost of silicon single crystal rod, photovoltaic module more than 50% into
Originally it is consumed in the production of monocrystal rod and chip.Usually there are two methods to reduce cost：First, reduce the power consumption of heater；Second,
Improve pulling rate.In two methods, the method for improving pulling rate is more effective.Pulling rate improves and not only shortens crystal growth time,
Power consumption is saved, and adds yield.Crystal pulling process is mainly passed with latent heat, distributing for latent heat by crystal heat
The influence with heat radiation is led, therefore, while pulling rate is improved, it is necessary to which the hot systems in crystal growth are optimized.
The content of the invention
In view of defects in the prior art, the purpose of this utility model is to provide for a kind of water collar and water cooling heat shielding table
The monocrystal growing furnace of face blackening process.
The technological means that the utility model uses is as follows：A kind of monocrystalline life of water collar and water-cooled screen surfaces blackening process
Long stove, including furnace body, absorption crystal bar, heat shielding, water collar, heating unit and crucible；
Water collar is fixedly installed in the furnace body middle top, and middle through-hole, the absorption crystal bar are set in the water collar
From top to bottom stretched into through the middle through-hole in the furnace body, the water collar inner wall surface, which is set, to be used to absorb the water cooling
The heat-sink shell I of the heat radiation of set；
Both sides set lifting through hole at the top of the furnace body, and the lift arm from top to bottom stretches into institute through the lifting through hole
State in furnace body；
The heat shielding includes lift arm and heat shielding body, and the lift arm is for two and symmetrical relative to the absorption crystal bar
Set, the lift arm lower end is connected with the heat shielding body both sides upper end, and the heat shielding body inner surface, which is set, to be used for
Absorb the heat-sink shell II of the heat radiation of the heat shielding body；
The silica crucible is fixed on the lower part of the furnace body below the heat shielding body, is equipped with the silica crucible
Silicon melt, sets annular primary heater around the silica crucible, and the bottom of the furnace body below the silica crucible is set
Bottom heater.
Further, in the above-mentioned technical solutions, the heat-sink shell I and the heat-sink shell II are the metal oxygen of blackening process
Change film layer.
Further, in the above-mentioned technical solutions, the heat shielding body is hollow Stainless Steel Shell, the heat shielding body
Interior setting heat shielding body cooling water pipeline.
Further, in the above-mentioned technical solutions, the heat shielding body includes annular heat shielding body and cross-sectional area by upper
The taper heat shielding body being gradually reduced under, the annular heat shielding body inward flange and taper heat shielding body top edge one
Connection.
Further, in the above-mentioned technical solutions, the heat shielding body cooling water pipeline passes through the lift arm and outside
Circulating water pipeline is connected.
Further, in the above-mentioned technical solutions, the water collar is hollow Stainless Steel Shell, is set in the water collar
Put water collar cooling water pipeline.
Further, in the above-mentioned technical solutions, the water collar includes annular water collar and tubular water collar, the ring
Shape water collar inward flange and the tubular water collar top edge integrally connected.
Further, in the above-mentioned technical solutions, the water collar cooling water pipeline through the annular water collar with it is outer
Portion's circulating water pipeline is connected.
Further, in the above-mentioned technical solutions, the lift arm upper end is used to control the rising of heat shielding body with exterior
Or the lifting device declined is connected, the lift arm is slidably connected with the lifting through hole madial wall, the lift arm lower end
It is fixedly connected with the heat shielding body.
The beneficial effects of the utility model are：
(1) monocrystal growing furnace of water collar and water-cooled the screen surfaces blackening process of the utility model, it is possible to increase
Heat absorption effect, so that the latent heat that crystalizing interface produces is distributed well, improves crystalline rate and pulling rate；
(2) monocrystal growing furnace of water collar and water-cooled the screen surfaces blackening process of the utility model, crystalizing interface
Neighbouring temperature gradient is stablized；
(3) monocrystal growing furnace of water collar and water-cooled the screen surfaces blackening process of the utility model, vacuum sealing
Property it is good, crystalline environment stablize.
Brief description of the drawings
The utility model is described in further detail with specific implementation method below in conjunction with the accompanying drawings.
Fig. 1 is the monocrystal growing furnace structure diagram of water collar described in embodiment 1 and water-cooled screen surfaces blackening process.
In figure：1st, silica crucible, 2, absorb crystal bar, 3, silicon melt, 4, annular primary heater, 5, heat shielding body, 6, water cooling
Set, 7, heat-sink shell I, 8, lift arm, 9, heat-sink shell II, 10, annular water collar, 11, middle through-hole, 12, lifting through hole, 13, bottom
Portion's heater, 14, annular heat shielding, 15, taper heat shielding, 16, heat shielding cooling water pipeline, 17, fixed plate, 18, water cooling jacket water
Pipeline, 19, furnace body, 20, tubular water collar.
Specific implementation method
Clear, complete description is carried out to the technical solution of the utility model with reference to the accompanying drawings and examples, in this reality
With in new description, it is necessary to explanation, term " " center ", " on ", " under ", "left", "right", " vertical ", " level ",
The orientation or position relationship of the instructions such as " interior ", " outer " are based on orientation shown in the drawings or position relationship, are for only for ease of and retouch
State the utility model and simplify and describe, rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not intended that limitation to the utility model.
Embodiment 1
As shown in Figure 1, the monocrystal growing furnace of a kind of water collar and water-cooled screen surfaces blackening process, including furnace body 19, suction
Receive crystal bar 2, heat shielding, water collar 6, heating unit and crucible；
Water collar 6 is fixedly installed in 19 middle top of furnace body, and middle through-hole 11, the suction are set in the water collar 6
Receive crystal bar 2 from top to bottom to stretch into the furnace body 19 through the middle through-hole 11,6 inner wall surface of water collar, which is set, to be used for
Absorb the heat-sink shell I 7 of the heat radiation of the water collar 6；
The 19 top both sides of furnace body set lifting through hole 12, and the lift arm 8 from top to bottom passes through the lifting through hole
12 stretch into the furnace body 19；
The heat shielding includes lift arm 8 and heat shielding body 5, and the lift arm 8 is for two and relative to the absorption crystal bar 2
It is symmetrical arranged, 8 lower end of lift arm is connected with the 5 both sides upper end of heat shielding body, and 5 inner surface of heat shielding body is set
Put the heat-sink shell II 9 of the heat radiation for absorbing the heat shielding body 5；
Silica crucible 1 is fixed on the lower part of the furnace body 19 of the lower section of heat shielding body 5, is set in the silica crucible 1
There is silicon melt 3,1 surrounding of silica crucible sets annular primary heater 4, the furnace body 19 of the lower section of silica crucible 1
Bottom sets bottom heater 13.
Further, in the above-mentioned technical solutions, the heat-sink shell I 7 and the heat-sink shell II 9 are the metal of blackening process
Oxidation film layer.
Further, in the above-mentioned technical solutions, the heat shielding body 5 is hollow Stainless Steel Shell, the heat shielding sheet
Heat shielding body cooling water pipeline 16 is set in body 5.
Further, in the above-mentioned technical solutions, the heat shielding body 5 include annular heat shielding body 14 and cross-sectional area by
The taper heat shielding body 15 being gradually reduced under, 14 inward flange of annular heat shielding body with the taper heat shielding body 15
Edge integrally connected.
Further, in the above-mentioned technical solutions, the heat shielding body cooling water pipeline 16 through the lift arm 8 with
Outer loop waterpipe is connected.
Further, in the above-mentioned technical solutions, the water collar 6 is hollow Stainless Steel Shell, in the water collar 6
Water collar cooling water pipeline 18 is set.
Further, in the above-mentioned technical solutions, the water collar 6 includes annular water collar 10 and tubular water collar 20,
Annular 10 inward flange of water collar and the 20 top edge integrally connected of tubular water collar.
Further, in the above-mentioned technical solutions, the water collar cooling water pipeline 18 passes through the annular water collar 10
It is connected with outer loop waterpipe.
Further, in the above-mentioned technical solutions, 8 upper end of lift arm is used to control the rising of heat shielding body with exterior
Or the lifting device declined is connected, the lift arm 8 is slidably connected with lifting 12 madial wall of through hole, the lift arm 8
Lower end is fixedly connected with the heat shielding body 5.
Preferably, the annular primary heater 4 and the bottom heater 13 are all graphite heater.
Preferably, fixed plate 17,17 outer edge of fixed plate and the furnace body at the lifting through hole 12 are further included
19 are tightly connected, and 17 inward flange of fixed plate is slidably and sealingly connected with 8 surface of lift arm.
Preferably, the crucible is silica crucible 1.
Preferably, the top of crystal bar 2 that absorbs is connected with exterior lifting gear.
When the silicon melt 3 produces certain degree of supercooling, the silicon melt 3 can produce liquid and be converted into the solid-state crystalline substance
The phase change of rod 2, this process can produce heat transfer with latent heat, latent heat in the solid-state crystal bar 2.It is placed on
The heat shielding body 5 and the water collar 6 of the top of the crucible 1 can absorb the heat of the solid-state crystal bar 2, described in promotion
Heat transfer in solid-state crystal bar 2,
6 inner wall surface of water collar sets the suction by blackening process for the heat radiation for being used to absorb the water collar 6
Thermosphere I 7, can suppress the heat radiation that the water collar 6 produces the solid-state crystal bar 2；5 inner surface of heat shielding body is set
The heat-sink shell II 9 by blackening process of the heat radiation for absorbing the heat shielding body 5 is put, the heat shielding body can be suppressed
The heat radiation that 5 pairs of solid-state crystal bars 2 produce；And then heat absorption effect is substantially increased, so that the knot that crystalizing interface produces
Brilliant latent heat is distributed well, improves crystalline rate and pulling rate.
By adopting the above-described technical solution, a kind of water collar and water-cooled screen surfaces blackening process of the utility model
Monocrystal growing furnace, it is possible to increase heat absorption effect, so that the latent heat that crystalizing interface produces is distributed well, is improved
Crystalline rate and pulling rate, the temperature gradient near crystalizing interface are stablized, and vacuum leakproofness is good, and crystalline environment is stablized.This practicality is new
Type has broad application prospects in monocrystalline silicon production equipment technical field.
The above, is only the preferable specific implementation method of the utility model, but the scope of protection of the utility model and not
This is confined to, any one skilled in the art is in the technical scope that the utility model discloses, according to this practicality
New technical solution and its utility model design are subject to equivalent substitution or change, all cover in the scope of protection of the utility model
Within.
Claims (9)
- A kind of 1. monocrystal growing furnace of water collar and water-cooled screen surfaces blackening process, it is characterised in that：Including furnace body, absorb crystalline substance Rod, heat shielding, water collar, heating unit and crucible；Water collar is fixedly installed in the furnace body middle top, middle through-hole is set in the water collar, the absorption crystal bar is by upper Stretched into lower through the middle through-hole in the furnace body, the water collar inner wall surface, which is set, to be used to absorb the water collar The heat-sink shell I of heat radiation；Both sides set lifting through hole at the top of the furnace body, and the lift arm from top to bottom stretches into the stove through the lifting through hole In vivo；The heat shielding includes lift arm and heat shielding body, and the lift arm symmetrically sets for two and relative to the absorption crystal bar Put, the lift arm lower end is connected with the heat shielding body both sides upper end, and the heat shielding body inner surface, which is set, to be used to inhale Receive the heat-sink shell II of the heat radiation of the heat shielding body；The crucible is silica crucible；The silica crucible is fixed on the lower part of the furnace body below the heat shielding body, is melted in the silica crucible equipped with silicon Body, sets annular primary heater around the silica crucible, and the bottom of the furnace body below the silica crucible sets bottom Heater.
- 2. the monocrystal growing furnace of water collar according to claim 1 and water-cooled screen surfaces blackening process, it is characterised in that： The heat-sink shell I and the heat-sink shell II are the metal oxide film layer of blackening process.
- 3. the monocrystal growing furnace of water collar according to claim 1 and water-cooled screen surfaces blackening process, it is characterised in that： The heat shielding body is hollow Stainless Steel Shell, and heat shielding body cooling water pipeline is set in the heat shielding body.
- 4. the monocrystal growing furnace of water collar according to claim 3 and water-cooled screen surfaces blackening process, it is characterised in that： The heat shielding body includes the taper heat shielding body that annular heat shielding body and cross-sectional area are from top to bottom gradually reduced, the annular Heat shielding body inward flange and the taper heat shielding body top edge integrally connected.
- 5. the monocrystal growing furnace of water collar according to claim 4 and water-cooled screen surfaces blackening process, it is characterised in that： The heat shielding body cooling water pipeline is connected through the lift arm with outer loop waterpipe.
- 6. the monocrystal growing furnace of water collar according to claim 1 and water-cooled screen surfaces blackening process, it is characterised in that： The water collar is hollow Stainless Steel Shell, and water collar cooling water pipeline is set in the water collar.
- 7. the monocrystal growing furnace of water collar according to claim 6 and water-cooled screen surfaces blackening process, it is characterised in that： The water collar includes annular water collar and tubular water collar, the annular water collar inward flange and the tubular water collar top Edge integrally connected.
- 8. the monocrystal growing furnace of water collar according to claim 7 and water-cooled screen surfaces blackening process, it is characterised in that： The water collar cooling water pipeline is connected through the annular water collar with outer loop waterpipe.
- 9. the monocrystal growing furnace of water collar according to claim 1 and water-cooled screen surfaces blackening process, it is characterised in that： The lift arm upper end is connected with the exterior lifting device for being used to control heat shielding body to rise or fall, the lift arm and The lifting through hole madial wall is slidably connected, and the lift arm lower end is fixedly connected with the heat shielding body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721071610.6U CN207294943U (en) | 2017-08-24 | 2017-08-24 | A kind of monocrystal growing furnace of water collar and water-cooled screen surfaces blackening process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721071610.6U CN207294943U (en) | 2017-08-24 | 2017-08-24 | A kind of monocrystal growing furnace of water collar and water-cooled screen surfaces blackening process |
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| Publication Number | Publication Date |
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| CN207294943U true CN207294943U (en) | 2018-05-01 |
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| CN201721071610.6U Active CN207294943U (en) | 2017-08-24 | 2017-08-24 | A kind of monocrystal growing furnace of water collar and water-cooled screen surfaces blackening process |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523869A (en) * | 2017-09-21 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace can lift water cooling heat shield arrangement |
| CN109554753A (en) * | 2018-12-04 | 2019-04-02 | 佛山圣哥拉太阳能科技有限公司 | Water cooling heat shield arrangement for single crystal growing furnace |
| CN111826707A (en) * | 2020-07-27 | 2020-10-27 | 邢台晶龙新能源有限责任公司 | Method for preventing thermal field damage during shutdown of single crystal furnace |
| CN112877776A (en) * | 2021-01-08 | 2021-06-01 | 上海新昇半导体科技有限公司 | Crystal growth furnace |
| CN113652736A (en) * | 2021-08-13 | 2021-11-16 | 普世通（北京）电气有限公司 | Cooling system of single crystal furnace |
| CN113774482A (en) * | 2021-09-16 | 2021-12-10 | 青海高景太阳能科技有限公司 | Water cooling system for drawing large-size single crystal |
| CN114369866A (en) * | 2021-12-29 | 2022-04-19 | 宁夏申和新材料科技有限公司 | Heat shield device of czochralski crystal growing furnace and method for improving crystal pulling rate |
-
2017
- 2017-08-24 CN CN201721071610.6U patent/CN207294943U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523869A (en) * | 2017-09-21 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace can lift water cooling heat shield arrangement |
| CN107523869B (en) * | 2017-09-21 | 2024-03-05 | 浙江晶盛机电股份有限公司 | Single crystal furnace device capable of lifting water-cooling heat shield |
| CN109554753A (en) * | 2018-12-04 | 2019-04-02 | 佛山圣哥拉太阳能科技有限公司 | Water cooling heat shield arrangement for single crystal growing furnace |
| CN109554753B (en) * | 2018-12-04 | 2023-12-12 | 佛山圣哥拉太阳能科技有限公司 | Water-cooling heat shield device for single crystal furnace |
| CN111826707A (en) * | 2020-07-27 | 2020-10-27 | 邢台晶龙新能源有限责任公司 | Method for preventing thermal field damage during shutdown of single crystal furnace |
| CN112877776A (en) * | 2021-01-08 | 2021-06-01 | 上海新昇半导体科技有限公司 | Crystal growth furnace |
| CN113652736A (en) * | 2021-08-13 | 2021-11-16 | 普世通（北京）电气有限公司 | Cooling system of single crystal furnace |
| CN113774482A (en) * | 2021-09-16 | 2021-12-10 | 青海高景太阳能科技有限公司 | Water cooling system for drawing large-size single crystal |
| CN114369866A (en) * | 2021-12-29 | 2022-04-19 | 宁夏申和新材料科技有限公司 | Heat shield device of czochralski crystal growing furnace and method for improving crystal pulling rate |
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