CN202116690U - Thermal field system of silicon single crystal furnace - Google Patents
Thermal field system of silicon single crystal furnace Download PDFInfo
- Publication number
- CN202116690U CN202116690U CN2011201867472U CN201120186747U CN202116690U CN 202116690 U CN202116690 U CN 202116690U CN 2011201867472 U CN2011201867472 U CN 2011201867472U CN 201120186747 U CN201120186747 U CN 201120186747U CN 202116690 U CN202116690 U CN 202116690U
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- heat
- preservation cylinder
- crucible
- thermal field
- field system
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Abstract
The utility model discloses a thermal field system of a silicon single crystal system, which comprises a heater arranged in an insulating cylinder. A crucible is arranged in the heater; the bottom of the crucible is supported by a crucible support; the bottom of the crucible support is provided with a support rod shaft; the support rod shaft extends out through the bottom of the insulating cylinder; the top of the crucible is provided with a guide cylinder; an upper opening of the guide cylinder corresponds to an opening at the top of the insulating cylinder; and the top of a cylindrical insulating layer is also provided with an insulating cover. The thermal field system is characterized in that the insulating cylinder is divided into an upper insulating cylinder, a middle insulating cylinder and a lower insulating cylinder which are matched mutually and are connected together; an upper insulating layer, a middle insulating layer and a lower insulating layer are respectively and correspondingly coated outside the upper insulating cylinder, the middle insulating cylinder and the lower insulating cylinder; and the insulating cover is divided into two layers which are respectively an upper insulating cover and a lower insulating cover. With the multistage arrangement of the insulating cylinder and the insulating layer, the heat preservation performance of the thermal field system and the liquidity of shielding gas are improved, so that the thermal field system is beneficial for improving the crystal formation quality of a single crystal rod.
Description
Technical field
The utility model relates to semi-conductor and technical field of solar, relates in particular to a kind of thermal field of single crystal furnace structure that is used to adopt the silicon single crystal that vertical pulling method (CZ method) forms.
Background technology
Along with the develop rapidly of photovoltaic industry, to the quality and the new requirement of cost proposition of photovoltaic module, the cost consumption of photovoltaic module more than 50% is in the production of ingot casting and wafer.Pulling of crystals manufacturing process (CZ) is the main growth methods that is used for semi-conductor and solar battery mono-crystal silicon, and this method adopts dual mode to reduce cost usually: the power consumption and raising pulling rate that reduce well heater.Improve more effective, the higher pulling rate of pulling rate in this dual mode undoubtedly, not only can shorten the crystal growth time, enhance productivity, can also reduce consumption.But, improve pulling rate simply, can bring the decline of crystal mass.Pulling rate is too fast even can produce the polycrystalline defective.Therefore when improving pulling rate, must the thermal field of crystal growth system be optimized, to guarantee to grow up-to-standard crystal.Single crystal growing furnace is a kind of in inert gas environment, with graphite heater polycrystalline materials such as polysilicon is melted, with the equipment of CZ method growth dislocation-free single crystal.For the widely used single crystal growing furnace of photovoltaic industry, adopt the shape and the size that change heat shielding to cut down the consumption of energy at present usually, thereby reduce production costs.Yet there is following defective in this technology: the technology difficulty that the heat shielding of single crystal growing furnace is transformed and tested is big, and cost is too high, therefore is unfavorable for applying on a large scale.
The utility model content
The utility model technical problem to be solved provides a kind of thermal field system of monocrystal stove, and (the moving performance of Ar stream is improved, and helps improving the one-tenth crystalloid amount of single crystal rod for the heat-insulating property of this thermal field system and shielding gas.
The thermal field system of the monocrystal stove of the utility model comprises the well heater that is arranged in the heat-preservation cylinder, and crucible is housed in the well heater, and crucible bottom has the crucible holder to support, and the pressure pin axle is equipped with in crucible backing portion, and stretch out this pressure pin beam warp heat-preservation cylinder bottom; Be provided with guide shell at the crucible top, the guide shell upper shed is corresponding with the heat-preservation cylinder open top; Also be provided with insulation cover at tubular thermal insulation layer top; It is characterized in that; Said heat-preservation cylinder is divided into mutual coupling and the last heat-preservation cylinder that links together, middle heat-preservation cylinder and following heat-preservation cylinder, and the outside of corresponding upper, middle and lower heat-preservation cylinder is enclosed with thermal insulation layer, middle thermal insulation layer and following thermal insulation layer respectively; Said insulation cover is divided into two-layer, is respectively insulation cover and following insulation cover.
Guide shell is two-layer, is respectively inner draft tube and external flow guiding cylinder.
Can be provided with back-up ring in the space between the last insulation cover outside and the single crystal growing furnace furnace chamber inwall, flow to stop and to reduce the space of shielding gas (Ar) between the heat-preservation cylinder outside and furnace chamber inwall.
Corresponding pressure pin shaft extension goes out the position and is provided with the pressure pin sheath in heat-preservation cylinder bottom.
Be provided with Graphite Electrodes and electrode sheath thereof in the heat-preservation cylinder bottom, and in the middle of Graphite Electrodes, pass and be tightened in the heat-preservation cylinder bottom, the electrode screw cap is housed at electrode screw top by the electrode screw.
The utility model has improved the heat-insulating property of thermal field system and the flowability of shielding gas through the multistage setting of heat-preservation cylinder and thermal insulation layer, helps improving the one-tenth crystalloid amount of single crystal rod.
Description of drawings
Fig. 1 is the structure assembly drawing of the utility model;
Fig. 2 suspends for guide shell under the state, and the utility model is to the distribution plan of the thermal exposure of each parts of body of heater and the cooling water inflow that needs.
Fig. 3 falls for guide shell under the state, and the utility model is to the distribution plan of the thermal exposure of each parts of body of heater and the cooling water inflow that needs.
Embodiment
As shown in Figure 1; The thermal field system of the monocrystal stove of the utility model; Its outside is a heat-preservation cylinder; This heat-preservation cylinder is divided into mutual coupling and the last heat-preservation cylinder 5 that links together, middle heat-preservation cylinder 6 and following heat-preservation cylinder 7, and the outside of corresponding upper, middle and lower heat-preservation cylinder is enclosed with thermal insulation layer 11, middle thermal insulation layer 12 and following thermal insulation layer 13 respectively; Well heater 1 is arranged in the heat-preservation cylinder, and plumbago crucible 2 is housed in the well heater 1, and plumbago crucible 2 bottoms have crucible holder 14 to support, and pressure pin axle 15 is equipped with in crucible holder 14 bottoms, and this pressure pin axle 16 stretches out through the heat-preservation cylinder bottom; Be provided with pressure pin sheath 17 in corresponding pressure pin axle 16 extending areas, heat-preservation cylinder bottom.Last compressing tablet 18 is enclosed within on pressure pin sheath 17 outer rims with lower sheeting 19.At crucible 2 tops guide shell is arranged, this guide shell is two-layer, is respectively inner draft tube 3 and external flow guiding cylinder 4.The guide shell upper shed is corresponding with the heat-preservation cylinder open top; Lower opening be arranged on 20 " thermal field is 215 ~ 220mm, " thermal field is 260mm 22.Also be provided with insulation cover at tubular thermal insulation layer top, said insulation cover also is divided into two-layer, is respectively insulation cover 9 and following insulation cover 10.Space between the last insulation cover outside and single crystal growing furnace furnace chamber inwall is provided with insulation back-up ring 8.Be provided with Graphite Electrodes 20 and electrode sheath 21 thereof in the heat-preservation cylinder bottom, and in the middle of Graphite Electrodes 20, pass and be tightened in the heat-preservation cylinder bottom, electrode screw cap 23 is housed at electrode screw 22 tops by electrode screw 22.
Pyrolysis through to existing thermal field is analysed, and can obtain correlation parameter and the thermal field of the thermal field thermal radiation heat to the body of heater each several part.Fig. 2 and Fig. 3 be respectively guide shell suspend state with fall under the state, improve the distribution plan of thermal field to the thermal exposure of each parts of body of heater and the cooling water inflow that needs.The result of this figure analyses from the pyrolysis of thermal field.Pyrolysis is analysed also and for solving the problem that the single crystal growing furnace body of heater generates heat and the segregaion valve sealing-ring burns out solution is provided, and has calculated the temperature of crucible lifting mechanism at the inner component of body of heater.Visible by figure, the utility model has improved the heat-insulating property of thermal field system and the flowability of shielding gas (Ar gas), helps improving the one-tenth crystalloid amount of single crystal rod.
The concrete application approach of the utility model also has a lot; The above only is the preferred implementation of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; Can also make some improvement, these improve the protection domain that also should be regarded as the utility model.
Claims (5)
1. the thermal field system of a monocrystal stove; Comprise the well heater (1) that is arranged in the heat-preservation cylinder, plumbago crucible (2), crucible (2) bottom has crucible holder (14) to support; Pressure pin axle (15) is equipped with in crucible holder (14) bottom, and this pressure pin axle (16) stretches out through the heat-preservation cylinder bottom; Be provided with guide shell (4) at crucible (2) top, guide shell (4) upper shed is corresponding with the heat-preservation cylinder open top; Also be provided with insulation cover at tubular thermal insulation layer top; It is characterized in that; Said heat-preservation cylinder is divided into mutual coupling and the last heat-preservation cylinder (5) that links together, middle heat-preservation cylinder (6) and following heat-preservation cylinder (7), and the outside of corresponding upper, middle and lower heat-preservation cylinder is enclosed with thermal insulation layer (11), middle thermal insulation layer (12) and following thermal insulation layer (13) respectively; Said insulation cover is divided into two-layer, is respectively insulation cover (9) and following insulation cover (10).
2. require the thermal field system of 1 described monocrystal stove according to patent, it is characterized in that guide shell is two-layer, be respectively inner draft tube (3) and external flow guiding cylinder (4).
3. the thermal field system of monocrystal stove according to claim 1 is characterized in that, the space between the last insulation cover outside and single crystal growing furnace furnace chamber inwall is provided with insulation back-up ring (8).
4. the thermal field system of monocrystal stove according to claim 1 and 2 is characterized in that, is provided with pressure pin sheath (17) in corresponding pressure pin axle (16) extending area, heat-preservation cylinder bottom.
5. the thermal field system of monocrystal stove according to claim 1 and 2; It is characterized in that; Be provided with Graphite Electrodes (20) and electrode sheath (21) thereof in the heat-preservation cylinder bottom; And pass and be tightened in the heat-preservation cylinder bottom in the middle of the Graphite Electrodes (20) by electrode screw (22), at electrode screw (22) top electrode screw cap (23) is housed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201867472U CN202116690U (en) | 2011-06-03 | 2011-06-03 | Thermal field system of silicon single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201867472U CN202116690U (en) | 2011-06-03 | 2011-06-03 | Thermal field system of silicon single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202116690U true CN202116690U (en) | 2012-01-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201867472U Expired - Fee Related CN202116690U (en) | 2011-06-03 | 2011-06-03 | Thermal field system of silicon single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202116690U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102212875A (en) * | 2011-06-03 | 2011-10-12 | 无锡中能晶科光电科技股份有限公司 | Thermal field system of silicon single crystal furnace |
| CN102925965A (en) * | 2012-11-16 | 2013-02-13 | 英利能源（中国）有限公司 | Single crystal furnace and heater thereof |
| CN110528064A (en) * | 2019-09-17 | 2019-12-03 | 大同新成新材料股份有限公司 | A kind of monocrystalline silicon growing device and monocrystalline silicon growing method |
-
2011
- 2011-06-03 CN CN2011201867472U patent/CN202116690U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102212875A (en) * | 2011-06-03 | 2011-10-12 | 无锡中能晶科光电科技股份有限公司 | Thermal field system of silicon single crystal furnace |
| CN102925965A (en) * | 2012-11-16 | 2013-02-13 | 英利能源（中国）有限公司 | Single crystal furnace and heater thereof |
| CN102925965B (en) * | 2012-11-16 | 2015-06-17 | 英利能源（中国）有限公司 | Single crystal furnace and heater thereof |
| CN110528064A (en) * | 2019-09-17 | 2019-12-03 | 大同新成新材料股份有限公司 | A kind of monocrystalline silicon growing device and monocrystalline silicon growing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120118 Termination date: 20170603 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |