CN202730297U - Czochralski method single crystal furnace thermal field structure - Google Patents
Czochralski method single crystal furnace thermal field structure Download PDFInfo
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- CN202730297U CN202730297U CN 201220396724 CN201220396724U CN202730297U CN 202730297 U CN202730297 U CN 202730297U CN 201220396724 CN201220396724 CN 201220396724 CN 201220396724 U CN201220396724 U CN 201220396724U CN 202730297 U CN202730297 U CN 202730297U
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- heat
- preservation cylinder
- crucible
- thermal field
- czochralski method
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- 239000013078 crystal Substances 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000004321 preservation Methods 0.000 claims abstract description 75
- 230000006835 compression Effects 0.000 claims description 29
- 238000007906 compression Methods 0.000 claims description 29
- 238000009413 insulation Methods 0.000 claims description 18
- 239000003351 stiffener Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 6
- 239000002210 silicon-based material Substances 0.000 claims description 4
- 238000002425 crystallisation Methods 0.000 abstract description 3
- 230000008025 crystallization Effects 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The utility model relates to a czochralski method single crystal furnace thermal field structure which comprises a furnace body, a crucible inside the furnace body, heat preservation barrels inside the furnace body and outside the crucible, heaters arranged outside the crucible and in the middle portion of the heat preservation barrel, and guide barrels arranged inside the heat preservation barrels and above the crucible. Each guide barrel consists of an inner guide barrel and an outer guide barrel. Each heat preservation barrel comprises an upper heat preservation barrel, a middle heat preservation barrel and a lower heat preservation barrel. The middle heat preservation barrel is provided with a middle heat preservation cover. An air outlet device is arranged between the middle heat preservation barrel and the upper heat preservation barrel. The czochralski method single crystal furnace thermal field structure improves heat preservation performance of the thermal field, protects air mobility, facilitates temperature and crystallization control, improves crystallization quality, yielding rate and capacity of a single crystal bar, and effectively reduces unit energy consumption of the single crystal furnace and cost.
Description
Technical field
The utility model relates to silicon single crystal ingot furnace technical field, relates in particular to a kind of upper exhaust Czochralski method mono-crystal furnace thermal field structure.
Background technology
A large amount of uses along with novel energy, so that people reduce gradually to the interdependency of traditional energy, wherein sun power is as it green energy resource without cease of a kind of inexhaustible usefulness, is widely used in society now, it has not only improved environment, and has solved part energy problem.In the utilization of sun power, the opto-electronic conversion utilization is the most extensive, in opto-electronic conversion, needs a large amount of silion cells that use, and causes thus the heavy demand of photovoltaic rank silicon single crystal.
At present, the major equipment of manufacture order crystal silicon is Czochralski method mono-crystal furnace.Czochralski method mono-crystal furnace is a kind of in inert gas environment, with graphite heater the polycrystalline materials such as polysilicon are melted, equipment with Grown by CZ Method dislocation-free monocrystalline, be used for the low-cost solar level silicon single crystal that draws, its principle of work is according to setting the heating of technique process melt, seeding, necking down, shouldering, turn shoulder, isodiametric growth, ending, becoming the in a certain direction silicon single crystal rod of growth after several stages of blowing out with polycrystalline silicon raw material.
How a large amount of uses along with silion cell effectively reduce unit consumption of energy, improve production capacity, are problems to be solveds in the solar monocrystalline silicon ingot casting research and development field.
Existing monocrystaline silicon stove unit consumption of energy is higher, and production efficiency is lower, and the quality of single crystal rod.
The utility model content
Main purpose of the present utility model is to provide a kind of Czochralski method mono-crystal furnace thermal field structure, is intended to reduce the unit consumption of energy of monocrystaline silicon stove, improves production capacity, reduces cost.
In order to achieve the above object, the utility model proposes a kind of Czochralski method mono-crystal furnace thermal field structure, comprise: body of heater, the crucible in body of heater, in body of heater and the outer heat-preservation cylinder of crucible, outside crucible, reach the well heater between the heat-preservation cylinder middle part and be positioned at heat-preservation cylinder and crucible on guide shell, described guide shell comprises inner draft tube and is enclosed within described inner draft tube external flow guiding cylinder outward; Described heat-preservation cylinder comprises heat-preservation cylinder, middle heat-preservation cylinder and lower heat-preservation cylinder; Described upper heat-preservation cylinder is provided with insulation cover, and described upper insulation cover is connected with the edge of opening of external flow guiding cylinder; Described middle heat-preservation cylinder is provided with middle insulation cover, between described middle insulation cover and the upper heat-preservation cylinder exhaust port device is set.
Preferably, exhaust port device comprises heat-preservation cylinder retaining ring, support ring, locating dowel, the first gear compression ring and the second gear compression ring, the first gear compression ring and the second gear compression ring by on deposit and be successively set on middle insulation cover top, support ring is set in the upper end week side of the first gear compression ring, and upper heat-preservation cylinder retaining ring is arranged between heat-preservation cylinder and the support ring and is positioned at the second gear compression ring outside; Strut by locating dowel between described upper heat-preservation cylinder retaining ring and the support ring.
Preferably, the parallel sidewalls of the sidewall of described well heater and heat-preservation cylinder; Be provided with the envelope compression ring on the described guide shell, described envelope compression ring is provided with pressure ring.
Preferably, this structure also comprises some pillar stiffeners, is connected between described heat-preservation cylinder bottom and the bottom of furnace body, is used for supporting heat-preservation cylinder; It is one of following that described pillar stiffener cross-sectional shape is at least: circular, the above Polygons of tetragon or four limits.Preferably, this structure also comprises the pressure pin axle, is arranged on the below of described crucible, and described pressure pin axle is connected with the rotating mechanism of body of heater, and when crystal pulling, the silicon material that drives in crucible and the crucible rotates.
Preferably, described crucible bottom is provided with crucible pallet and the pallet pedestal that is fixedly connected with the crucible pallet successively, and described pallet pedestal and pressure pin axle are by the pressure pin bolted; Described pressure pin axle is fixedly connected with crucible bottom with the pallet pedestal by described crucible pallet.
Preferably, the described pressure pin axle outside is arranged with pressure pin sheath shaft and material retaining hood, and described material retaining hood is positioned at the top of described pressure pin sheath shaft.
Preferably, be respectively arranged with from the inside to the outside guide shell retaining ring and guide shell retaining ring between the edge of opening of described inner draft tube and external flow guiding cylinder; The upper end of described guide shell retaining ring connects the inner side edge of described envelope compression ring.
Preferably, the described heat-preservation cylinder outside and bottom are equipped with soft felt; Be provided with the furnace bottom pressing plate on the soft felt of the lower heat-preservation cylinder bottom of described heat-preservation cylinder; Described furnace bottom pressing plate is provided with electrode, and described electrode is connected with described well heater conduction by electrode bolts; It is one of following that described locating dowel cross-sectional shape is at least: circular, the above Polygons of tetragon or four limits; Described locating dowel be 2 or more than.
Preferably, be covered with successively from the inside to the outside electrode insulation sheath and electrode sheath outside the described electrode.
A kind of Czochralski method mono-crystal furnace thermal field structure that the utility model proposes; the heat-insulating property of thermal field system and the flowability of shielding gas have been improved; be convenient to the control to temperature, crystallization; one-tenth crystalloid amount, good article rate and the production capacity of single crystal rod have been improved; effectively reduce the unit consumption of energy of monocrystaline silicon stove, and provide cost savings.
Description of drawings
Fig. 1 is the structural representation of the utility model Czochralski method mono-crystal furnace thermal field structure preferred embodiment.
In order to make the technical solution of the utility model clearer, clear, be described in further detail below in conjunction with accompanying drawing.
Embodiment
Below with reference to drawings and Examples, the technical scheme that realizes the utility model purpose is elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
As shown in Figure 1, Fig. 1 is the structural representation of the utility model Czochralski method mono-crystal furnace thermal field structure preferred embodiment.A kind of Czochralski method mono-crystal furnace thermal field structure that the present embodiment proposes, comprise: body of heater, the crucible in body of heater 18, in body of heater and the outer heat-preservation cylinder of crucible 18, the well heater 16 between crucible 18 outside, reaching in the middle part of the heat-preservation cylinder and be positioned at heat-preservation cylinder and crucible 18 on guide shell, the sidewall of described well heater 16 and the parallel sidewalls of heat-preservation cylinder; Be provided with envelope compression ring 2 on the described guide shell, described envelope compression ring 2 is provided with pressure ring 1.
Particularly, be provided with some pillar stiffeners 30 between above-mentioned heat-preservation cylinder bottom and the bottom of furnace body, be used for supporting heat-preservation cylinder, wherein, the pillar stiffener cross-sectional shape can be circle, tetragon or the Polygons more than four limits.The quantity of pillar stiffener 30 can arrange according to actual needs, and the present embodiment pillar stiffener 30 is set to four, is evenly distributed on the bottom of body of heater.This structure is not so that the phenomenon that well heater 16 tilts can appear in the sidewall keeping parallelism of the sidewall of heat-preservation cylinder and well heater 16, thereby so that heat-preservation cylinder inside circumference temperature is even and easily control.
The concrete three lobe crucibles 18 that adopt of the present embodiment crucible 18 can be deposited quartz crucible 18 and silicon material three lobe crucibles 18 are interior.Be provided with pressure pin axle 21 below described crucible 18, described pressure pin axle 21 is connected with the rotating mechanism of body of heater, and when crystal pulling, the silicon material that drives in crucible 18 and the crucible 18 rotates.
For fixing crucible 18, be provided with successively crucible 18 pallets 19 and pallet 19 pedestals 20 that are fixedly connected with crucible 18 pallets 19 in described crucible 18 bottoms, for preventing skidding, described pallet 19 pedestals 20 are fastening by pressure pin bolt 31 with pressure pin axle 21; Described pressure pin axle 21 is fixedly connected with crucible 18 bottoms with pallet 19 pedestals 20 by described crucible 18 pallets 19.
In order to prevent that impurity from entering in the crucible 18, and be in security consideration, described pressure pin axle 21 outsides are arranged with pressure pin axle 21 sheaths 24 and material retaining hood 22, and described material retaining hood 22 is positioned at the top of described pressure pin axle 21 sheaths 24.
Described guide shell comprises inner draft tube 4 and is enclosed within described inner draft tube 4 external flow guiding cylinder 5 outward; Described heat-preservation cylinder comprises heat-preservation cylinder 8, middle heat-preservation cylinder 15 and lower heat-preservation cylinder 17.
For better exhaust and design strength are considered, heat-preservation cylinder 8 is provided with insulation cover 7 on described, plays and supports and provide protection.Described upper insulation cover 7 is connected with the edge of opening of external flow guiding cylinder 5; Described middle heat-preservation cylinder 15 is provided with middle insulation cover 11, is provided with exhaust port device between described middle insulation cover 15 and the upper heat-preservation cylinder 8, to play the effect of smooth exhaust.
Particularly, above-mentioned exhaust port device comprises heat-preservation cylinder retaining ring 9, support ring 10, locating dowel 14, the first gear compression ring 13 and the second gear compression ring 12, the first gear compression ring 13 and the second gear compression ring 12 by on deposit and be successively set on middle insulation cover 15 tops, support ring 10 is set in the upper end week side of the first gear compression ring 13, and upper heat-preservation cylinder retaining ring 9 is arranged between heat-preservation cylinder 8 and the support ring 10 and is positioned at the second gear compression ring 12 outsides; Strut by locating dowel 14 between described upper heat-preservation cylinder retaining ring 9 and the support ring 10, it is one of following that described locating dowel 14 cross-sectional shapes are at least: circular, the above Polygons of tetragon or four limits; The quantity of described locating dowel 14 can be set to according to actual needs 2 or more than.The present embodiment is set to 6, in order to support upper heat-preservation cylinder retaining ring 9.
Be respectively arranged with from the inside to the outside guide shell retaining ring 6 and guide shell retaining ring 3 between the edge of opening of described inner draft tube 4 and external flow guiding cylinder 5, adopt guide shell retaining ring 3 and guide shell retaining ring 6 can locate accurately the position of inner draft tube 4.
In addition, be provided with soft felt 32 in guide shell retaining ring 6 outsides, the upper end of this guide shell retaining ring 3 connects the inner side edge of described envelope compression ring 2, adds envelope compression ring 2 and pressure ring 1 in guide shell retaining ring 3 upper ends, can prevent that air-flow is not toward the upper reaches.
For not making dissipation of heat, be equipped with soft felt 32 at bottom of furnace body (also namely descending the bottom of heat-preservation cylinder 17) and the heat-preservation cylinder outside, consider that soft felt 32 has unreal and has influence on miscellaneous part, is provided with furnace bottom pressing plate 23 on the soft felt 32 of lower heat-preservation cylinder 17 bottoms.
Be provided with electrode 29 at described furnace bottom pressing plate 23, described electrode 29 is connected with described well heater 16 conductions by electrode bolts 26.Electrode 29 is two in the present embodiment, and the electrode bolts 26 of these two electrodes 29 links to each other with the copper electrode of body of heater.Also be provided with electrode bolts lid 25 on the electrode bolts 26
For preventing and miscellaneous part conducting and security consideration, the outside of described two electrodes 29 is covered with electrode insulation sheath 28 and electrode sheath 27 from the inside to the outside successively.
The said structure of the present embodiment is reasonable in design, is convenient to mechanical workout, and shielding gas flows out from the gear compression ring, is convenient to airshed and temperature are controlled, and impurity is all taken on the furnace chamber wall, has improved crystal forming rate and good article rate.After coming out of the stove, the body of heater cleaning is also very convenient, can reduce clearance time, shortens again charging time, enhances productivity thus, reduces cost.
The utility model embodiment Czochralski method mono-crystal furnace thermal field structure, by changing the thermal field design, better the steady air flow amount is effectively controlled the variation of the thermograde of dynamic thermal field, makes pulling rate higher, faster; The crystal pulling process is more stable, reduces crystal pulling process mid-point defective, L﹠S line defect, plane defect, bulk defects, impurity striation.Through test, the quality of producing silicon single crystal rod is constant in practice for the utility model, and yield improves, and technological process time shorten and energy consumption only increase very little, have improved greatly unit production capacity and good article rate, provide cost savings.
The above only is preferred embodiment of the present utility model; be not so limit claim of the present utility model; every equivalent structure or flow process conversion that utilizes the utility model specification sheets and accompanying drawing content to do; or directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present utility model.
Claims (10)
1. Czochralski method mono-crystal furnace thermal field structure, comprise: body of heater, the crucible in body of heater, in body of heater and the outer heat-preservation cylinder of crucible, the well heater between outside crucible, reaching in the middle part of the heat-preservation cylinder and be positioned at heat-preservation cylinder and crucible on guide shell, it is characterized in that, described guide shell comprises inner draft tube and is enclosed within the outer external flow guiding cylinder of described inner draft tube; Described heat-preservation cylinder comprises heat-preservation cylinder, middle heat-preservation cylinder and lower heat-preservation cylinder; Described upper heat-preservation cylinder is provided with insulation cover, and described upper insulation cover is connected with the edge of opening of external flow guiding cylinder; Described middle heat-preservation cylinder is provided with middle insulation cover, between described middle insulation cover and the upper heat-preservation cylinder exhaust port device is set.
2. Czochralski method mono-crystal furnace thermal field structure according to claim 1, it is characterized in that, described exhaust port device comprises heat-preservation cylinder retaining ring, support ring, locating dowel, the first gear compression ring and the second gear compression ring, the first gear compression ring and the second gear compression ring by on deposit and be successively set on middle insulation cover top, support ring is set in the upper end week side of the first gear compression ring, and upper heat-preservation cylinder retaining ring is arranged between heat-preservation cylinder and the support ring and is positioned at the second gear compression ring outside; Strut by locating dowel between described upper heat-preservation cylinder retaining ring and the support ring.
3. Czochralski method mono-crystal furnace thermal field structure according to claim 1 is characterized in that, the sidewall of described well heater and the parallel sidewalls of heat-preservation cylinder; Be provided with the envelope compression ring on the described guide shell, described envelope compression ring is provided with pressure ring.
4. Czochralski method mono-crystal furnace thermal field structure according to claim 1 is characterized in that, also comprises some pillar stiffeners, is connected between described heat-preservation cylinder bottom and the bottom of furnace body, is used for supporting heat-preservation cylinder; It is one of following that described pillar stiffener cross-sectional shape is at least: circular, the above Polygons of tetragon or four limits.
5. Czochralski method mono-crystal furnace thermal field structure according to claim 1 is characterized in that, also comprises the pressure pin axle, is arranged on the below of described crucible, and described pressure pin axle is connected with the rotating mechanism of body of heater, and when crystal pulling, the silicon material that drives in crucible and the crucible rotates.
6. Czochralski method mono-crystal furnace thermal field structure according to claim 5 is characterized in that, described crucible bottom is provided with crucible pallet and the pallet pedestal that is fixedly connected with the crucible pallet successively, and described pallet pedestal and pressure pin axle are by the pressure pin bolted; Described pressure pin axle is fixedly connected with crucible bottom with the pallet pedestal by described crucible pallet.
7. Czochralski method mono-crystal furnace thermal field structure according to claim 6 is characterized in that, the described pressure pin axle outside is arranged with pressure pin sheath shaft and material retaining hood, and described material retaining hood is positioned at the top of described pressure pin sheath shaft.
8. Czochralski method mono-crystal furnace thermal field structure according to claim 3 is characterized in that, is respectively arranged with from the inside to the outside guide shell retaining ring and guide shell retaining ring between the edge of opening of described inner draft tube and external flow guiding cylinder; The upper end of described guide shell retaining ring connects the inner side edge of described envelope compression ring.
9. Czochralski method mono-crystal furnace thermal field structure according to claim 2 is characterized in that, the described heat-preservation cylinder outside and bottom are equipped with soft felt; Be provided with the furnace bottom pressing plate on the soft felt of the lower heat-preservation cylinder bottom of described heat-preservation cylinder; Described furnace bottom pressing plate is provided with electrode, and described electrode is connected with described well heater conduction by electrode bolts; It is one of following that described locating dowel cross-sectional shape is at least: circular, the above Polygons of tetragon or four limits; Described locating dowel be 2 or more than.
10. Czochralski method mono-crystal furnace thermal field structure according to claim 9 is characterized in that, the described electrode outside is covered with electrode insulation sheath and electrode sheath from the inside to the outside successively.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220396724 CN202730297U (en) | 2012-08-06 | 2012-08-06 | Czochralski method single crystal furnace thermal field structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220396724 CN202730297U (en) | 2012-08-06 | 2012-08-06 | Czochralski method single crystal furnace thermal field structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106087037A (en) * | 2016-08-30 | 2016-11-09 | 成都晶九科技有限公司 | Crystal pull growth furnace temperature field structure and pulling growth technique thereof |
| CN107761162A (en) * | 2017-10-31 | 2018-03-06 | 扬中市惠丰包装有限公司 | One kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure |
| CN108221044A (en) * | 2016-12-14 | 2018-06-29 | 有研半导体材料有限公司 | A kind of optimization temperature controlled thermal field layer structure of vertical pulling method |
| CN110453277A (en) * | 2019-08-28 | 2019-11-15 | 包头美科硅能源有限公司 | A kind of Czochralski method mono-crystal furnace thermal field quickly cooling device and cooling means |
-
2012
- 2012-08-06 CN CN 201220396724 patent/CN202730297U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106087037A (en) * | 2016-08-30 | 2016-11-09 | 成都晶九科技有限公司 | Crystal pull growth furnace temperature field structure and pulling growth technique thereof |
| CN108221044A (en) * | 2016-12-14 | 2018-06-29 | 有研半导体材料有限公司 | A kind of optimization temperature controlled thermal field layer structure of vertical pulling method |
| CN107761162A (en) * | 2017-10-31 | 2018-03-06 | 扬中市惠丰包装有限公司 | One kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure |
| CN110453277A (en) * | 2019-08-28 | 2019-11-15 | 包头美科硅能源有限公司 | A kind of Czochralski method mono-crystal furnace thermal field quickly cooling device and cooling means |
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Owner name: SHENZHEN GOLD STONE TECHNOLOGY STOCK CO., LTD. Free format text: FORMER NAME: SHENZHEN GOLD STONE TECHNOLOGY CO., LTD. |
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Inventor after: Zhu Baixi Inventor after: Li Wenhong Inventor after: Feng Yinhui Inventor before: Feng Yinhui |
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Free format text: CORRECT: INVENTOR; FROM: FENG YINHUI TO: ZHU BAIXI LI WENHONG FENG YINHUI |
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Address after: Baoan District Songgang street, Shenzhen city 518105 Guangdong province with rich industrial zone safety run road No. 2 Patentee after: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. Address before: 518000, Shenzhen, Guangdong, Baoan District Fuyong Street on the south side of the first floor of Great Ocean Road 4, two floor East Patentee before: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. |
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Granted publication date: 20130213 |
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