CN107761162A - One kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure - Google Patents
One kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure Download PDFInfo
- Publication number
- CN107761162A CN107761162A CN201711048539.4A CN201711048539A CN107761162A CN 107761162 A CN107761162 A CN 107761162A CN 201711048539 A CN201711048539 A CN 201711048539A CN 107761162 A CN107761162 A CN 107761162A
- Authority
- CN
- China
- Prior art keywords
- heat
- flow guiding
- locating ring
- guiding cylinder
- external flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses one kind to be used for czochralski crystal growing furnace electricity-saving type heat shield structure, and main contents are：Including heat-preserving container, insulation cover, inner draft tube, heat shielding locating ring and external flow guiding cylinder；The heat-preserving container is cylindrical structure, the top of heat-preserving container is provided with detent, external flow guiding cylinder is arranged in the detent of heat-preserving container, the top surface of external flow guiding cylinder is provided with positioning boss, external flow guiding cylinder inner bottom surface is provided with detent, inner draft tube bottom is arranged in the detent of external flow guiding cylinder, heat shielding locating ring bottom surface is provided with annular groove, heat shielding locating ring centre bore is inner conical surface at top surface, inner draft tube upper end is stuck on the heat shielding locating ring endoporus conical surface, heat shielding locating ring is arranged on the positioning boss on external flow guiding cylinder top surface, insulation cover is arranged on the top surface of heat-preserving container, heat shielding locating ring is stuck in the annular groove of insulation cover.
Description
Technical field
The present invention relates to czochralski crystal growing furnace technical field, and specifically, more particularly to a kind of czochralski crystal growing furnace that is used for economizes on electricity
Type heat shield structure.
Background technology
Pulling of silicon single crystal stove is a kind of apparatus for directional solidification of silicon, and its function is through superfusion by monocrystalline silicon according to setting technique
Material, seeding, shouldering, turn shoulder, turn into the crystal bar for having certain crystal growth direction after isometrical and ending several stages.Czochralski crystal growing furnace
It is the production equipment that a kind of energy consumption is higher, man-hour is longer, under the conditions of same crystallographic direction and crystalline size, shortening man-hour,
Reduce energy consumption and be desirable to what is improved.In existing czochralski crystal growing furnace, in order to reduce heater of the energy consumption in crystal pulling furnace
Around heat-barrier material is set, be such as designed with stay-warm case, in the prior art with a large amount of uses of silion cell, how effectively to drop
Low specific energy consumption, production capacity is improved, is to have the problem of to be solved in solar monocrystalline silicon ingot casting research and development field.
Existing monocrystaline silicon stove specific energy consumption is higher, and production efficiency is relatively low, and monocrystal rod is of poor quality into crystalline substance.
The content of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing one kind is used for vertical pulling
Single crystal growing furnace electricity-saving type heat shield structure, it increases heat shielding locating ring among original insulation cover, come block in stove hot gas from
Emerged between insulation cover and guide shell, can so control in stove temperature to reduce, the brilliant power such as reduced, saved cost.
The technical solution adopted for the present invention to solve the technical problems is：One kind is used for czochralski crystal growing furnace electricity-saving type heat shielding
Structure, including heat-preserving container, insulation cover, inner draft tube, heat shielding locating ring and external flow guiding cylinder；The heat-preserving container is cylindrical structure, is protected
The top of warm bucket is provided with detent, and the external flow guiding cylinder is arranged in the detent of heat-preserving container, on the top surface of external flow guiding cylinder
Provided with positioning boss, external flow guiding cylinder inner bottom surface is provided with detent, and the inner draft tube bottom is arranged on determining for external flow guiding cylinder
In the groove of position, the heat shielding locating ring bottom surface is provided with annular groove, and heat shielding locating ring centre bore is inner conical surface at top surface,
The inner draft tube upper end is stuck on the heat shielding locating ring endoporus conical surface, and the heat shielding locating ring is arranged on external flow guiding cylinder top surface
On positioning boss, the insulation cover is arranged on the top surface of heat-preserving container, and the heat shielding locating ring is stuck in the annular groove of insulation cover
It is interior.
Preferably, the inner draft tube is circular cone barrel structure.
Preferably, the external flow guiding cylinder bottom surface is provided with centre bore.
Preferably, the external flow guiding cylinder is hat-shaped structure.
The present invention has advantages below compared with prior art：Both the device of original pulling monocrystal rod had been remained, had not been changed
In the case of becoming original thermal field, simply increase heat shielding locating ring on original graphite piece insulation cover, can so allow in stove
Hot gas will not be such that in stove constant temperature greatlys save in certain number of degrees from guide shell with being lost in upwards in the gap between insulation cover
The production cost of company.
Brief description of the drawings
Fig. 1 is a kind of structural representation of embodiment of the present invention.
Description of reference numerals：
1- heat-preserving containers, 2- insulation covers, 3- inner draft tubes, 4- heat shielding locating rings, 5- external flow guiding cylinders.
Embodiment
Below in conjunction with the accompanying drawings and embodiment describes the specific embodiment of the invention：
It is used for czochralski crystal growing furnace electricity-saving type heat shield structure as shown in figure 1, a kind of, including heat-preserving container 1, insulation cover 2, interior leads
Flow cartridge 3, heat shielding locating ring 4 and external flow guiding cylinder 5；The heat-preserving container 1 is cylindrical structure, and the top of heat-preserving container 1 is provided with detent,
The external flow guiding cylinder 5 is arranged in the detent of heat-preserving container 1, and the top surface of external flow guiding cylinder 5 is provided with positioning boss, external flow guiding cylinder
5 inner bottom surfaces are provided with detent, and the bottom of inner draft tube 3 is arranged in the detent of external flow guiding cylinder 5, and the heat shielding is determined
Position ring 4 bottom surface is provided with annular groove, and the centre bore of heat shielding locating ring 4 is inner conical surface at top surface, the upper end of inner draft tube 3
It is stuck on the endoporus conical surface of heat shielding locating ring 4, the heat shielding locating ring 4 is arranged on the positioning boss on the top surface of external flow guiding cylinder 5, institute
Insulation cover 2 is stated on the top surface of heat-preserving container 1, the heat shielding locating ring 4 is stuck in the annular groove of insulation cover 2.
Preferably, the inner draft tube 3 is circular cone barrel structure.
Preferably, the bottom surface of external flow guiding cylinder 5 is provided with centre bore.
Preferably, the external flow guiding cylinder 5 is hat-shaped structure.
The preferred embodiment for the present invention is explained in detail above in conjunction with accompanying drawing, but the invention is not restricted to above-mentioned implementation
Mode, can also be on the premise of present inventive concept not be departed from those of ordinary skill in the art's possessed knowledge
Make a variety of changes.
Many other changes and remodeling can be made by not departing from the spirit and scope of the present invention.It should be appreciated that the present invention is not
It is limited to specific embodiment, the scope of the present invention is defined by the following claims.
Claims (4)
1. one kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure, it is characterised in that：Including heat-preserving container, insulation cover, Inner guide
Cylinder, heat shielding locating ring and external flow guiding cylinder；The heat-preserving container is cylindrical structure, and the top of heat-preserving container is provided with detent, described outer
Guide shell is arranged in the detent of heat-preserving container, and the top surface of external flow guiding cylinder is provided with positioning boss, on external flow guiding cylinder inner bottom surface
Provided with detent, the inner draft tube bottom is arranged in the detent of external flow guiding cylinder, on the heat shielding locating ring bottom surface
Provided with annular groove, heat shielding locating ring centre bore is inner conical surface at top surface, and the inner draft tube upper end is stuck in heat shielding positioning
On the ring endoporus conical surface, the heat shielding locating ring is arranged on the positioning boss on external flow guiding cylinder top surface, and the insulation cover is arranged on
On the top surface of heat-preserving container, the heat shielding locating ring is stuck in the annular groove of insulation cover.
2. one kind as claimed in claim 1 is used for czochralski crystal growing furnace electricity-saving type heat shield structure, it is characterised in that：Led in described
Flow cartridge is circular cone barrel structure.
3. one kind as claimed in claim 1 is used for czochralski crystal growing furnace electricity-saving type heat shield structure, it is characterised in that：Led outside described
Flow cartridge bottom surface is provided with centre bore.
4. one kind as claimed in claim 3 is used for czochralski crystal growing furnace electricity-saving type heat shield structure, it is characterised in that：Led outside described
Flow cartridge is hat-shaped structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711048539.4A CN107761162A (en) | 2017-10-31 | 2017-10-31 | One kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711048539.4A CN107761162A (en) | 2017-10-31 | 2017-10-31 | One kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107761162A true CN107761162A (en) | 2018-03-06 |
Family
ID=61271127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711048539.4A Pending CN107761162A (en) | 2017-10-31 | 2017-10-31 | One kind is used for czochralski crystal growing furnace electricity-saving type heat shield structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107761162A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202730297U (en) * | 2012-08-06 | 2013-02-13 | 深圳市石金科技有限公司 | Czochralski method single crystal furnace thermal field structure |
| CN203021676U (en) * | 2012-12-24 | 2013-06-26 | 九州方园新能源股份有限公司 | Flow guide tube for increasing growth rate of monocrystalline silicon |
| CN203741453U (en) * | 2014-02-24 | 2014-07-30 | 上海磐盟电子材料有限公司 | Single crystal silicon thermal field |
-
2017
- 2017-10-31 CN CN201711048539.4A patent/CN107761162A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202730297U (en) * | 2012-08-06 | 2013-02-13 | 深圳市石金科技有限公司 | Czochralski method single crystal furnace thermal field structure |
| CN203021676U (en) * | 2012-12-24 | 2013-06-26 | 九州方园新能源股份有限公司 | Flow guide tube for increasing growth rate of monocrystalline silicon |
| CN203741453U (en) * | 2014-02-24 | 2014-07-30 | 上海磐盟电子材料有限公司 | Single crystal silicon thermal field |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180306 |
|
| WD01 | Invention patent application deemed withdrawn after publication |