CN204849118U - Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way - Google Patents
Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way Download PDFInfo
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- CN204849118U CN204849118U CN201520409598.XU CN201520409598U CN204849118U CN 204849118 U CN204849118 U CN 204849118U CN 201520409598 U CN201520409598 U CN 201520409598U CN 204849118 U CN204849118 U CN 204849118U
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Abstract
The utility model provides a modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way, it includes seed rod heat exchanger, furnace body upper portion, lateral wall and bottom cooling system structure, furnace body upper portion cooling structure includes little bell and big bell two parts, furnace body upper portion, lateral wall and bottom cooling system structure all are provided with the cooling and use circulating pipe, seed rod heat exchanger and the interior condenser tube pipe diameter of the interior big bell of condenser tube pipe diameter more than or equal to of little bell, adopt 4 or 6 to be in charge of, furnace body bottom cooling water divide into contact with the pillar in circle and all the other part two parts independent controls of stove bottom, on furnace body lateral wall condenser tube way is divided, in lower triplex single control. The utility model discloses cooling system structure to the sapphire single crystal growing furnace is improved to sapphire single crystal growing furnace cooling system is thought of a way to the influence of crystal growth process to performance bubble, and increase cooling system's control range forms and is suitable for the modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way high -quality, jumbo size sapphire single crystal that grows.
Description
(1) technical field
The utility model relates to a kind of sapphire single-crystal furnace cooling system structure, is specifically related to a kind of kyropoulos growing sapphire cooling system of single crystal furnace structure being particularly suited for the improvement of growing large-size sapphire single-crystal.
(2) background technology
Sapphire single-crystal has excellent over-all properties, and being widely used in aerospace, the military and various fields such as civilian industry, electronic technology, is the preferred material of current GaN blue-ray LED epitaxial substrate sheet.The method of commercialization growing sapphire crystal mainly contains kyropoulos, heat-exchanging method, crystal pulling method, VHGF method etc., and wherein kyropoulos is because having comprehensive technology and cost advantage, commercially dominate.
Along with the development of science and technology and the continuous expansion of sapphire Application Areas, the quality of sapphire single-crystal and size are had higher requirement.Equipment for growing sapphire single crystal is rational in infrastructure is the precondition of growing high quality sapphire single-crystal, only has warm occasion to manage, and just likely grows shape ideal, sapphire single-crystal that subsurface defect is few.Especially the growth cycle of large-size sapphire single-crystal is long, and at later stages because radiating rate is fast, the tendency of crystal autonomous growth is larger, and the speed of growth is wayward, matter crystal internal defect may be increased due to speed of growth fluctuation.Therefore, stricter to the requirement of warm field when growing large-size, high-quality sapphire single-crystal.
Temperature field is mainly by the impact of heating member, insulation construction and cooling system; the cooling system structure of tradition kyropoulos single crystal growing furnace is generally divided into seed rod heat exchanger, upper of furnace body, sidewall and four, bottom part to control separately; and the main purpose of water coolant is that protection furnace shell is not overheated, does not give full play to its impact in crystal growing process.
(3) summary of the invention
On the basis of cold core float die (kyropoulos of improvement) the sapphire single crystal growth furnace structure that the utility model was announced in granted patent ZL200920100239.0 and ZL201320222749.1 in early stage, the cooling system structure of sapphire single-crystal furnace is improved, to play kyropoulos sapphire single-crystal furnace cooling system to the impact of crystal growing process, increase the regulation range of cooling system, form the kyropoulos sapphire single-crystal furnace cooling system structure of improvement being suitable for growing high quality, large-size sapphire single-crystal.
The purpose of this utility model is achieved in that this structure comprises seed rod heat exchanger, upper of furnace body, sidewall and bottom cooling system structure, upper of furnace body cooling structure comprises small furnace cover and large bell two portions, upper of furnace body, sidewall and bottom cooling system structure are provided with circulating water for cooling pipe, seed rod heat exchanger and small furnace cover inner cooling water pipe caliber are more than or equal to large bell inner cooling water pipe caliber, 4 or 6 are adopted to be in charge of, bottom of furnace body water coolant is divided into contact with pillar inner circle and furnace bottom rest part two portions independently to control, sidewall of the furnace body cooling water pipeline divides, in lower three parts control separately.
The utility model also has some features like this:
1, described seed rod heat exchanger and small furnace cover inner cooling water pipe, according to the feature of arrangement, are adjusted to 4 points or 6 distributive pipes by 2 original distributive pipes, and caliber is more than or equal to large bell inner cooling water pipe caliber, to increase cooling power and the regulation range on Wen Chang top.
2, described circulating water for cooling pipe takes single-pipeline or dual circuit mode to arrange.
The beneficial effects of the utility model have:
1, in the utility model, water-cooled tube caliber increases, and is conducive to the risk reducing line clogging on the one hand, makes radiating condition more even.Increase on the other hand the modification scope of cooling system, and then enhance its regulating effect to field warm in stove;
2, in the utility model to the mode that sidewall of the furnace body and employing subregion, bottom control separately, can according to the different characteristics of growth phase and the requirement to warm field, by the exchange capability of heat of adjustment different sites water coolant, reach the effect regulating warm field to a certain extent, enhance the handiness of warm field control, be conducive to forming rational thermograde, reduce technique controlling difficulty;
3, sidewall of the furnace body cooling Discrete control in the utility model, can by controlling the radiating condition of crystal growth later stage upper of furnace body, reduce heat losses, later stage crystalline growth velocity is effectively controlled, reduce the tendency of autonomous growth, be particularly suited for growing large-size, high-quality sapphire single-crystal;
4, this cooling system structure effectively can improve heat utilization rate, reduce energy consumption, and then reduces costs.
(4) accompanying drawing explanation
Fig. 1 is the utility model structural representation.
(5) embodiment
Below in conjunction with accompanying drawing, the utility model is described in detail.Fig. 1 is the utility model structural representation, and this structure comprises seed rod heat exchanger 1, upper of furnace body cooling structure, sidewall and bottom cooling system structure, and wherein, upper of furnace body cooling structure comprises small furnace cover 2 and large bell 3 two portions.For increasing the regulation range of the exchange capability of heat of cold heart part in stove, and then the thermograde in growth regulation interface and melt, control crystalline growth velocity, seed rod heat exchanger 1 and small furnace cover 2 inner cooling water pipe caliber can be more than or equal to large bell 3 inner cooling water pipe caliber, adopt 4 ~ 6 to be in charge of.Sidewall of the furnace body cooling structure 4 is divided into a, b, c tri-part control separately so that adjust flexibly according to Different growth phases feature, control crystalline growth velocity.For identical object, be also divided into two portions independently to control bottom of furnace body 5 water coolant, contact with pillar 6 inner circle d and furnace bottom rest part e two portions.
The utility model is also not limited only to structure in figure, close with this patent thought, does the also genus this patent protection domain of a small amount of structural adjustment.
Claims (2)
1. the kyropoulos sapphire single-crystal furnace cooling system structure improved, it is characterized in that this structure comprises seed rod heat exchanger, upper of furnace body, sidewall and bottom cooling system structure, upper of furnace body cooling structure comprises small furnace cover and large bell two portions, upper of furnace body, sidewall and bottom cooling system structure are provided with circulating water for cooling pipe, seed rod heat exchanger and small furnace cover inner cooling water pipe caliber are more than or equal to large bell inner cooling water pipe caliber, 4 or 6 are adopted to be in charge of, bottom of furnace body water coolant is divided into contact with pillar inner circle and furnace bottom rest part two portions independently to control, sidewall of the furnace body cooling water pipeline divides, in lower three parts control separately.
2. the kyropoulos sapphire single-crystal furnace cooling system structure of improvement according to claim 1, is characterized in that described circulating water for cooling pipe takes single-pipeline or dual circuit mode to arrange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520409598.XU CN204849118U (en) | 2015-06-15 | 2015-06-15 | Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520409598.XU CN204849118U (en) | 2015-06-15 | 2015-06-15 | Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way |
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| CN204849118U true CN204849118U (en) | 2015-12-09 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105603510A (en) * | 2016-02-03 | 2016-05-25 | 江苏浩瀚蓝宝石科技有限公司 | Single crystal growth furnace |
| WO2018129860A1 (en) * | 2017-01-13 | 2018-07-19 | 许昌天戈硅业科技有限公司 | Hierarchical closed-loop control cooling device for sapphire crystal growth furnace |
| CN108330534A (en) * | 2018-04-12 | 2018-07-27 | 七台河奥瑞德光电技术有限公司 | A kind of water distributor structure of single crystal furnace cooling water |
| CN111850688A (en) * | 2020-07-22 | 2020-10-30 | 哈尔滨秋硕半导体科技有限公司 | Cooling device for inhibiting shoulder shrinkage of sapphire single crystal by kyropoulos method |
| CN114395796A (en) * | 2021-12-13 | 2022-04-26 | 青海高景太阳能科技有限公司 | Single crystal furnace capable of intelligently controlling water flow |
-
2015
- 2015-06-15 CN CN201520409598.XU patent/CN204849118U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105603510A (en) * | 2016-02-03 | 2016-05-25 | 江苏浩瀚蓝宝石科技有限公司 | Single crystal growth furnace |
| WO2018129860A1 (en) * | 2017-01-13 | 2018-07-19 | 许昌天戈硅业科技有限公司 | Hierarchical closed-loop control cooling device for sapphire crystal growth furnace |
| CN108330534A (en) * | 2018-04-12 | 2018-07-27 | 七台河奥瑞德光电技术有限公司 | A kind of water distributor structure of single crystal furnace cooling water |
| CN111850688A (en) * | 2020-07-22 | 2020-10-30 | 哈尔滨秋硕半导体科技有限公司 | Cooling device for inhibiting shoulder shrinkage of sapphire single crystal by kyropoulos method |
| CN114395796A (en) * | 2021-12-13 | 2022-04-26 | 青海高景太阳能科技有限公司 | Single crystal furnace capable of intelligently controlling water flow |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way Effective date of registration: 20180929 Granted publication date: 20151209 Pledgee: Longjiang bank Limited by Share Ltd Harbin Development Zone sub branch Pledgor: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY CO., LTD. Registration number: 2018990000856 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200509 Granted publication date: 20151209 Pledgee: Longjiang bank Limited by Share Ltd Harbin Development Zone sub branch Pledgor: HARBIN AURORA OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2018990000856 |