CN108330534A - A kind of water distributor structure of single crystal furnace cooling water - Google Patents

A kind of water distributor structure of single crystal furnace cooling water Download PDF

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Publication number
CN108330534A
CN108330534A CN201810327464.1A CN201810327464A CN108330534A CN 108330534 A CN108330534 A CN 108330534A CN 201810327464 A CN201810327464 A CN 201810327464A CN 108330534 A CN108330534 A CN 108330534A
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CN
China
Prior art keywords
water
cooling water
distributive pipe
single crystal
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810327464.1A
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Chinese (zh)
Inventor
左洪波
杨鑫宏
李铁
周德印
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qitaihe Red Photoelectric Technology Co Ltd
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Qitaihe Red Photoelectric Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qitaihe Red Photoelectric Technology Co Ltd filed Critical Qitaihe Red Photoelectric Technology Co Ltd
Priority to CN201810327464.1A priority Critical patent/CN108330534A/en
Publication of CN108330534A publication Critical patent/CN108330534A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B17/00Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/16Oxides
    • C30B29/20Aluminium oxides
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The present invention relates to a kind of water distributor structure of single crystal furnace cooling water, the structure is whole by water inlet valve, distributive pipe, holder, branch water nozzle, cooling water collector and water temperature sensor composition.It is characterized in that water inlet valve connection main water inlet tube and distributive pipe;Branch water nozzle is installed on distributive pipe, is integrally attached to the top of holder;Branch water nozzle is welded on distributive pipe, is arranged in line-styled;Cooling water collector is welded on holder;Water temperature sensor is mounted at the water nozzle of outlet pipe.The water distributor structure can monitor each road cooler-water temperature one by one, focus on water outlet cooling water, at the same each branch water nozzle can free regulating water flow size, facilitate regulation and control to water temperature, keep the temperature gradient in single crystal growing furnace more reasonable, is conducive to the growth of large-size sapphire single-crystal.

Description

A kind of water distributor structure of single crystal furnace cooling water
Technical field
The present invention relates to a kind of water distributor structures of single crystal furnace cooling water, and in particular to one kind can freely adjust cooling water The size of flow is carried out at the same time the water distributor structure of temperature monitoring.
Background technology
Sapphire single-crystal has excellent optics, mechanically and chemically performance, has higher optical transmittance, wear-resisting, resists Wind erosion, can work under the mal-condition close to 2000 DEG C of high temperature, be widely used as various optical elements, infrared military installation, The window material etc. of spacecraft and high intensity laser beam device.Especially because having excellent comprehensive performance, become current LED with half The preferred material of conductor substrate.
The premise of Sapphire Crystal Growth is crystal growing equipment, and there is good thermal field, thermal field mainly to be tied by calandria, heat preservation The cooling system structure of the influence of structure and cooling system, traditional kyropoulos single crystal growing furnace is generally divided into seed crystal rod heat exchanger, furnace body Top, side wall and the part of bottom four individually control, and the main purpose of cooling water is to protect furnace shell only hot, does not fill Its influence in crystal growing process is waved in distribution.The present invention is directed to by a kind of water distributor structure, in the difference of crystal growth Stage keeps it more reasonable, more conducively by freely adjusting the flow of cooling water to control the axially and radially temperature gradient in stove The growth of sapphire single-crystal.
Invention content
The purpose of the present invention is to provide a kind of sizes that can freely adjust cooling water flow, monitor water temperature in real time, single Brilliant in-furnace temperature gradient is more reasonable, optimizes habit, is conducive to the water knockout drum knot of the single crystal furnace cooling water of Sapphire Crystal Growth Structure.
The object of the present invention is achieved like this:It includes water inlet valve, distributive pipe, holder, branch water nozzle, cooling water Collector and water temperature sensor, water inlet valve connect main water inlet tube and distributive pipe;Branch water nozzle, pressure are installed on distributive pipe side Power table is mounted on one end of distributive pipe, and the top of holder is fixed on entirely through U-typed support;Branch water nozzle is welded to distributive pipe On, it is arranged in line-styled;Cooling water collector is welded on holder, and lower end connects drainpipe;Water temperature sensor is mounted on out At the water nozzle of water pipe, integral installation is on cooling water collector.
The present invention also has some features in this way:
1, the water inlet valve is ball valve, is mounted between water inlet pipe and distributive pipe, and caliber is DN40 ~ DN100.
2, the distributive pipe caliber is DN50 ~ DN150, and stainless steel plate welding in both ends seals, and water inlet is welded in side Branch water nozzle.
3, there is valve on the branch water nozzle, totally 10 ~ 18, integral solder arranges on distributive pipe in line-styled, Caliber is DN8 ~ DN20, while can freely adjust the size of cooling water flow.
4, the cooling water collector is rectangle stainless steel sink, and long 800 ~ 1200mm, wide 200 ~ 400mm, lower part is It is tapered, it is connect with drainpipe, overall structure is welded on holder.
5, the water temperature sensor is mounted at the water nozzle of outlet pipe, and the other end connects industrial personal computer, in real time monitoring cooling The water temperature of water ensures that the temperature gradient in stove is reasonable.
Advantageous effect of the present invention has:
1. being equipped with valve on each water nozzle of branch, the uninterrupted of cooling water can be freely adjusted, rationally controls the temperature in single crystal growing furnace Spend gradient, the more conducively growth of sapphire single-crystal.
2. water temperature sensor monitors the water temperature of each branch cooling water by industrial personal computer in real time, cooling can be better understood by Effect, and according to circumstances adjust, ensure the reasonable of temperature.
3. cooling water focuses on, easy to operation, thermal loss is few, energy saving, while in the sapphire single-crystal of output Portion's defect is few, high yield rate, greatly improves crystal and goes out material.
Description of the drawings
Fig. 1 is schematic structural view of the invention;
Fig. 2 is Fig. 1 side views.
Specific implementation mode
The present invention is described in detail below in conjunction with the accompanying drawings:
In conjunction with Fig. 1, the present embodiment structure is whole by water inlet valve 1, distributive pipe 2, holder 3, branch water nozzle 4, and pressure gauge 5 is cold But water collector 6 and water temperature sensor 7 form.It is characterized in that water inlet valve is connected between main water inlet tube 8 and distributive pipe; Branch water nozzle is installed on distributive pipe, the top of holder is fixed on entirely through U-typed support 9, pressure gauge is mounted on distributive pipe One end;Branch water nozzle is welded to the side of distributive pipe, is arranged in line-styled;Cooling water collector is welded on holder, lower section Connect drainpipe 10;Water temperature sensor is mounted at the water nozzle of outlet pipe 11, and end connects industrial personal computer, monitors coolant water temperature in real time Degree, outlet pipe and water temperature sensor integral installation are on cooling water collector.
The above content is combine specific preferred embodiment to the further description done of the present invention, and it cannot be said that The specific implementation of the present invention is only limited to these explanations.It, can be with for the personnel with fields rudimentary knowledge of the present invention It is easy to change the present invention and change, these change and modification all shall be regarded as belonging to the right that the present invention is submitted and want The scope of patent protection for asking book to determine.

Claims (6)

1. a kind of water distributor structure of single crystal furnace cooling water, it is characterised in that it includes water inlet valve, distributive pipe, holder, branch Road water nozzle, cooling water collector and water temperature sensor, water inlet valve connect main water inlet tube and distributive pipe;Distributive pipe is pacified on side Branch water nozzle is filled, pressure gauge is mounted on one end of distributive pipe, the top of holder is fixed on entirely through U-typed support;Branch water nozzle It is welded on distributive pipe, is arranged in line-styled;Cooling water collector is welded on holder, and lower end connects drainpipe;Water temperature passes Sensor is mounted at the water nozzle of outlet pipe, and integral installation is on cooling water collector.
2. a kind of water distributor structure of single crystal furnace cooling water according to claim 1, it is characterised in that the water inlet pipe Valve is ball valve, is mounted between water inlet pipe and distributive pipe, and caliber is DN40 ~ DN100.
3. a kind of water distributor structure of single crystal furnace cooling water according to claim 2, it is characterised in that the distributive pipe Caliber is DN50 ~ DN150, and stainless steel plate welding in both ends seals, and water inlet branch water nozzle is welded in side.
4. a kind of water distributor structure of single crystal furnace cooling water according to claim 3, it is characterised in that the branch water There is valve on mouth, totally 10 ~ 18, integral solder arranges on distributive pipe in line-styled, and caliber is DN8 ~ DN20, while can Freely to adjust the size of cooling water flow.
5. a kind of water distributor structure of single crystal furnace cooling water according to claim 4, it is characterised in that the cooling water Collector is rectangle stainless steel sink, and long 800 ~ 1200mm, wide 200 ~ 400mm, lower part is tapered, is connect with drainpipe, whole Structure welding is on holder.
6. a kind of water distributor structure of single crystal furnace cooling water according to claim 5, it is characterised in that the water temperature passes Sensor is mounted at the water nozzle of outlet pipe, and the other end connects industrial personal computer.
CN201810327464.1A 2018-04-12 2018-04-12 A kind of water distributor structure of single crystal furnace cooling water Pending CN108330534A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810327464.1A CN108330534A (en) 2018-04-12 2018-04-12 A kind of water distributor structure of single crystal furnace cooling water

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810327464.1A CN108330534A (en) 2018-04-12 2018-04-12 A kind of water distributor structure of single crystal furnace cooling water

Publications (1)

Publication Number Publication Date
CN108330534A true CN108330534A (en) 2018-07-27

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Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109252221A (en) * 2018-10-16 2019-01-22 徐州振丰原喷灌设备有限公司 A kind of water segregator for cooling system of single crystal furnace
CN112176397A (en) * 2020-10-22 2021-01-05 云南鑫耀半导体材料有限公司 Circulating water temperature control device for growing single crystal by VGF method and application

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103898606A (en) * 2012-12-31 2014-07-02 江苏双良新能源装备有限公司 Cooling water collector of sapphire crystal growth furnace
CN103898599A (en) * 2012-12-31 2014-07-02 江苏双良新能源装备有限公司 Cooling water distributor for sapphire crystal growth furnace
CN204849118U (en) * 2015-06-15 2015-12-09 哈尔滨奥瑞德光电技术有限公司 Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103898606A (en) * 2012-12-31 2014-07-02 江苏双良新能源装备有限公司 Cooling water collector of sapphire crystal growth furnace
CN103898599A (en) * 2012-12-31 2014-07-02 江苏双良新能源装备有限公司 Cooling water distributor for sapphire crystal growth furnace
CN204849118U (en) * 2015-06-15 2015-12-09 哈尔滨奥瑞德光电技术有限公司 Modified steeps sapphire single crystal growing furnace cooling system structure of thinking of a way

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109252221A (en) * 2018-10-16 2019-01-22 徐州振丰原喷灌设备有限公司 A kind of water segregator for cooling system of single crystal furnace
CN112176397A (en) * 2020-10-22 2021-01-05 云南鑫耀半导体材料有限公司 Circulating water temperature control device for growing single crystal by VGF method and application

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