CN202099412U - Polycrystal ingot furnace and heat exchange device thereof - Google Patents
Polycrystal ingot furnace and heat exchange device thereof Download PDFInfo
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- CN202099412U CN202099412U CN2011201834892U CN201120183489U CN202099412U CN 202099412 U CN202099412 U CN 202099412U CN 2011201834892 U CN2011201834892 U CN 2011201834892U CN 201120183489 U CN201120183489 U CN 201120183489U CN 202099412 U CN202099412 U CN 202099412U
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- control valve
- heat exchanger
- temperature
- water
- heat exchange
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Abstract
The utility model discloses a heat exchange device, which comprises a cooling device, a water inlet pipeline and a water outlet pipeline, wherein the water inlet pipeline and the water outlet pipeline are communicated with a water inlet and a water outlet of the cooling device; and the heat exchange device further comprises a flow control valve arranged on the water inlet pipeline and/or the water outlet pipeline. Through the adoption of flow control manner, the temperature changing speed is higher than the heater power changing speed; if the flow rate is constant, the heat exchange is conducted; under the condition that the actual temperature is largely different from the set temperature, considerable PID (proportion, integration and differentiation) correction is required to achieve the preset temperature, and if the stabilization time is longer, the considerable power change influences the power grid. The cooling device can preset temperature and change temperature gradient, and heat absorbed by quantitative cooling water flow rate is basically constant. Through the use of variable flow control manner, heat loss can be changed, and electric energy loss is saved. The utility model further discloses a polycrystal ingot furnace comprising the heat exchange device.
Description
Technical field
The utility model relates to the silicon chip processing technique field, particularly a kind of polycrystalline ingot furnace and heat exchanger thereof.
Background technology
At present, global energy is more and more nervous, and sun power has been obtained extensive application as new forms of energy, the fast development of photovoltaic industry, and wherein, crystal technique is the key link in the silicon chip processing always.
As shown in Figure 1, silicon chip of solar cell has two types of polycrystalline and monocrystalline from structure, and wherein polysilicon chip is lower than the main flow that monocrystalline silicon piece becomes industry development gradually because of its manufacturing cost.The thermal field mode of the polycrystalline ingot furnace that generally adopts at present heats through 4 pairs of polysilicons of well heater of arranging up and down for primary silicon being placed in the quadrate insulation groove 1, in well heater 4 outer setting heat insulating body 2 is arranged.During crystallisation process, two hot topics 3 of bottom are opened through drive unit 6 fully, utilize the refrigerating unit 5 of thermal field bottom to cool, and then thermal field formation certain temperature gradient, make silicon liquid carry out crystal growth from the bottom to top.
After hot topic 3 was opened, heat and refrigerating unit 5 that the well heater 4 of bottom produces carried out heat exchange, force the reduction temperature, and temperature is controlled in certain scope.The polycrystalline ingot casting need obtain a bigger thermograde, therefore, adopts popular structure; Both can seal and keep the heat of temperature field not scatter and disappear; Also can be used for changing the environment of temperature field, open hot topic can change Heating temperature very soon, can obtain a suitable temperature environment and carry out directional freeze.
Also can in refrigerating unit 5, feed water coolant, it is mobile that this water coolant is moved in circles along water-in of refrigerating unit 5 51 and water outlet 52, to carry out heat exchange.Each stage needs different temperature to change in casting ingot process; Be to have refrigerating unit to carry out heat exchange can reach the certain temperature gradient on the one hand; Be that the adjustment heating power changes temperature on the other hand; Therefore refrigerating unit can play very fast regulating effect in temperature variation, but the heat that fixed cooling water flow is taken away is consistent basically.Through in refrigerating unit 5, feeding water coolant, can realize cooling rapidly, but its constant flow, cooling rate is consistent and can't adjust, and also need combine heating system that cooling rate is regulated, and the temperature wave momentum is big, and power consumption is high.
Therefore, how changing temperature rapidly, make temperature reach preset temp, significantly do not revise and do not need heating system to do, and reduce the temperature wave momentum and reduce power consumption, is the technical problem that those skilled in the art need to be resolved hurrily.
The utility model content
In view of this, the utility model provides a kind of polycrystalline ingot furnace and heat exchanger thereof, to do significantly and to revise need not heating system, promptly reduces under temperature wave momentum and the prerequisite that reduces power consumption, changes temperature rapidly, makes temperature reach preset temp.
For realizing above-mentioned purpose, the utility model provides following technical scheme:
A kind of heat exchanger is used for the polycrystalline ingot furnace, comprises refrigerating unit and the inlet channel and the outlet conduit that are communicated with said refrigerating unit water-in and water outlet respectively, also comprises the flowrate control valve that is arranged on said inlet channel and/or the outlet conduit.
Preferably, in above-mentioned heat exchanger, said flowrate control valve is arranged on the said inlet channel, and said outlet conduit is provided with outlet water control valve.
Preferably, in above-mentioned heat exchanger, also be provided with the by-pass valve parallelly connected on the said inlet channel with said flowrate control valve.
Preferably, in above-mentioned heat exchanger, said inlet channel is provided with tensimeter.
Preferably, in above-mentioned heat exchanger, said flowrate control valve is an electrically-controlled valve.
Preferably, in above-mentioned heat exchanger, said flowrate control valve is arranged on the said outlet conduit, and said inlet channel is provided with water inlet control valve.
Preferably, in above-mentioned heat exchanger, said flowrate control valve is the switch-valve that a plurality of parallel connections are provided with.
Preferably, in above-mentioned heat exchanger, also be provided with the by-pass valve parallelly connected on the said outlet conduit with said flowrate control valve.
Preferably, in above-mentioned heat exchanger, be equipped with TM on said inlet channel and the said outlet conduit.
A kind of polycrystalline ingot furnace comprises heat exchanger, and said heat exchanger is as above each described heat exchanger.
Can find out from above-mentioned technical scheme; A kind of heat exchanger that the utility model provides; Comprise refrigerating unit and the inlet channel and the outlet conduit that are communicated with said refrigerating unit water-in and water outlet respectively, also comprise the flowrate control valve that is arranged on said inlet channel and/or the outlet conduit.The utility model is through adopting water coolant the mode of flow control; The speed of response of temperature is more a lot of soon than changing heater power; If fixed flow, heat exchange is definite basically, and actual temperature and design temperature differ under the bigger situation so; Reach more significantly PID (ProportionIntegration Differentiation of preset temperature; Wherein on behalf of ratio unit, I, P represent integral unit and D to represent differentiation element) revise, and steady time is long, and significantly variable power can influence electrical network.Refrigerating unit plays preset temp and changes thermograde, quantitative cooling water flow, and the heat substantially constant of absorption, the utility model utilizes the mode of changeable flow, can change thermosteresis, saves electric energy loss.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of polycrystalline ingot furnace;
The structural representation of the polycrystalline ingot furnace that Fig. 2 provides for the utility model embodiment;
The structural representation of the polycrystalline ingot furnace that Fig. 3 provides for another embodiment of the utility model.
Embodiment
The utility model discloses a kind of polycrystalline ingot furnace and heat exchanger thereof,, promptly reduce under temperature wave momentum and the prerequisite that reduces power consumption, change temperature rapidly, make temperature reach preset temp to do significantly and to revise need not heating system.
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
See also Fig. 2 and Fig. 3, the structural representation of the polycrystalline ingot furnace that Fig. 2 provides for the utility model embodiment; The structural representation of the polycrystalline ingot furnace that Fig. 3 provides for another embodiment of the utility model.
The heat exchanger that the utility model provides; Be used for the polycrystalline ingot furnace; Comprise refrigerating unit 5 and the inlet channel and the outlet conduit that are communicated with the water-in 51 and the water outlet 52 of refrigerating unit respectively; Can in refrigerating unit 5, inject water coolant by inlet channel, water coolant is discharged by outlet conduit after in refrigerating unit 5, carrying out heat exchange.Focusing on of the utility model also comprises the flowrate control valve that is arranged on inlet channel and/or the outlet conduit.It will be appreciated by persons skilled in the art that flowrate control valve is set all can inject the flow in the refrigerating unit 5 by controlled chilling water on inlet channel or outlet conduit.Certainly, flowrate control valve all being set on inlet channel and outlet conduit also can control the flow that water coolant injects in the refrigerating unit 5.
The utility model injects the mode that the flow in the refrigerating unit 5 is controlled through water coolant being adopted flowrate control valve to it; Make that the speed of response of temperature is more a lot of soon than changing heater power; If changeless flow, its heat exchange is definite basically, and actual temperature and design temperature differ under the bigger situation so; Reach more significantly PID (Proportion IntegrationDifferentiation of preset temperature; Wherein on behalf of ratio unit, I, P represent integral unit and D to represent differentiation element) revise, and steady time is long, and significantly variable power can influence electrical network.Refrigerating unit 5 plays preset temp and changes the thermograde effect, quantitative cooling water flow, and the heat substantially constant of absorption, the utility model utilizes the mode of changeable flow, can change thermosteresis, saves electric energy loss.
As shown in Figure 2, flowrate control valve can be arranged at (like the flowrate control valve among Fig. 2 71) on the inlet channel, and outlet conduit is provided with outlet water control valve 91, and promptly outlet water control valve 91 does not have the function of regulating, only the break-make of may command outlet conduit.Through controlling the aperture size of this flowrate control valve 71; But control corresponding gets into the flow in the refrigerating unit 5 by inlet channel; Thereby reach the purpose of controlled chilling speed; Because the rate of heat exchange of water is very fast, therefore, can fast temperature be reduced to preset temperature through the flow of accurate controlled chilling water.
Also be provided with the by-pass valve 81 parallelly connected with flowrate control valve 71 on the inlet channel, flowrate control valve 71 adds by-pass valve 81 and can break down in the prevention and control loop, promptly after flowrate control valve 71 breaks down, opens by-pass valve 81 and just can normally move.Inlet channel is provided with tensimeter, can monitor the intake pressure in the inlet channel at any time.The flowrate control valve 71 that the utility model provides can be preferably electrically-controlled valve, through the aperture size of electric control flowrate control valve 71.
As shown in Figure 3, flowrate control valve also can be arranged on the outlet conduit, and inlet channel is provided with water inlet control valve 72, and promptly water inlet control valve 72 does not have the function of regulating, only the break-make of may command inlet channel.By the flow of the flowrate control valve controlled chilling water cycle on the outlet conduit, i.e. water flow through flowrate control valve controlled chilling water, flooding velocity that equally can controlled chilling water.
Flowrate control valve can be the switch-valves that a plurality of parallel connection is provided with, and switch-valve is three altogether in the present embodiment, is respectively first switch-valve 92, second switch valve 93 and the 3rd switch-valve 94.It will be appreciated by persons skilled in the art that in order to realize the accurate control of flow, also can be accordingly the quantity of switch-valve be increased.Each switch-valve all only has on-off function, does not have flow regulating function, and with after a plurality of switch-valve parallel connections, just makes it possess flow regulating function, promptly can adjust the flow of water coolant accordingly through the break-make quantity of system selector switch valve.For example three switch-valves are all opened, it is maximum that the flow of water coolant reaches, and only opens a switch-valve accordingly, and the flow of water coolant is minimum.
In order further to optimize technique scheme; The utility model also is provided with the by-pass valve parallelly connected with flowrate control valve 82 on outlet conduit; Flowrate control valve (a plurality of switch-valves that are in parallel) adds by-pass valve 82 and can break down in the prevention and control loop; Promptly after flowrate control valve breaks down, open by-pass valve 82 and just can normally move.Be equipped with on inlet channel and the outlet conduit TM (as 2 with Fig. 3 in TM 11 and TM 12), predeterminable alarm temperature is promptly reported to the police when too high or too low for temperature, plays temperature prompt and warning effect.
The polycrystalline ingot furnace that the utility model provides; Comprise heat exchanger, insulation groove 1, heat insulating body 2, hot topic 3 and well heater 4; Primary silicon is placed in the insulation groove 1, heats through 4 pairs of polysilicons of well heater of arranging up and down, in well heater 4 outer setting heat insulating body 2 is arranged.During crystallisation process, two hot topics 3 of bottom are opened through drive unit 6 fully, and wherein, heat exchanger is the as above disclosed heat exchanger of embodiment.Therefore the polycrystalline ingot furnace that the utility model provides has the advantage of above-mentioned heat exchanger concurrently owing to adopt the disclosed heat exchanger of the foregoing description, and concrete technique effect can be consulted the disclosed heat exchanger of the foregoing description, and this paper repeats no more.
Each embodiment adopts the mode of going forward one by one to describe in this specification sheets, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation of spirit that does not break away from the utility model or scope in other embodiments among this paper.Therefore, the utility model will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (10)
1. heat exchanger; Be used for the polycrystalline ingot furnace; Comprise refrigerating unit and the inlet channel and the outlet conduit that are communicated with the water-in and the water outlet of said refrigerating unit respectively, it is characterized in that, also comprise the flowrate control valve that is arranged on said inlet channel and/or the outlet conduit.
2. heat exchanger as claimed in claim 1 is characterized in that, said flowrate control valve is arranged on the said inlet channel, and said outlet conduit is provided with outlet water control valve.
3. heat exchanger as claimed in claim 2 is characterized in that, also is provided with the by-pass valve parallelly connected with said flowrate control valve on the said inlet channel.
4. heat exchanger as claimed in claim 2 is characterized in that said inlet channel is provided with tensimeter.
5. heat exchanger as claimed in claim 2 is characterized in that, said flowrate control valve is an electrically-controlled valve.
6. heat exchanger as claimed in claim 1 is characterized in that, said flowrate control valve is arranged on the said outlet conduit, and said inlet channel is provided with water inlet control valve.
7. heat exchanger as claimed in claim 6 is characterized in that, said flowrate control valve is the switch-valve that a plurality of parallel connections are provided with.
8. heat exchanger as claimed in claim 6 is characterized in that, also is provided with the by-pass valve parallelly connected with said flowrate control valve on the said outlet conduit.
9. like each described heat exchanger of claim 1-8, it is characterized in that, be equipped with TM on said inlet channel and the said outlet conduit.
10. a polycrystalline ingot furnace comprises heat exchanger, it is characterized in that, said heat exchanger is like each described heat exchanger of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201834892U CN202099412U (en) | 2011-06-01 | 2011-06-01 | Polycrystal ingot furnace and heat exchange device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201834892U CN202099412U (en) | 2011-06-01 | 2011-06-01 | Polycrystal ingot furnace and heat exchange device thereof |
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| CN202099412U true CN202099412U (en) | 2012-01-04 |
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| CN2011201834892U Expired - Fee Related CN202099412U (en) | 2011-06-01 | 2011-06-01 | Polycrystal ingot furnace and heat exchange device thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102978697A (en) * | 2012-11-29 | 2013-03-20 | 杭州精功机电研究所有限公司 | Movable curtain door device for crystalline silicon ingot furnace and control method of device |
| CN106029958A (en) * | 2014-02-12 | 2016-10-12 | 信越半导体株式会社 | Silicon single crystal production device |
| CN112176397A (en) * | 2020-10-22 | 2021-01-05 | 云南鑫耀半导体材料有限公司 | Circulating water temperature control device for growing single crystal by VGF method and application |
| CN115383072A (en) * | 2022-08-25 | 2022-11-25 | 太原晋西春雷铜业有限公司 | Control method of cooling water in crystallizer |
-
2011
- 2011-06-01 CN CN2011201834892U patent/CN202099412U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102978697A (en) * | 2012-11-29 | 2013-03-20 | 杭州精功机电研究所有限公司 | Movable curtain door device for crystalline silicon ingot furnace and control method of device |
| CN102978697B (en) * | 2012-11-29 | 2016-03-23 | 杭州精功机电研究所有限公司 | A kind of crystal silicon ingot furnace moves act door gear and control method thereof |
| CN106029958A (en) * | 2014-02-12 | 2016-10-12 | 信越半导体株式会社 | Silicon single crystal production device |
| US10036100B2 (en) | 2014-02-12 | 2018-07-31 | Shin-Etsu Handotai Co., Ltd. | Apparatus for producing silicon single crystal |
| CN106029958B (en) * | 2014-02-12 | 2018-10-26 | 信越半导体株式会社 | Manufacturing device of single crystal silicon |
| CN112176397A (en) * | 2020-10-22 | 2021-01-05 | 云南鑫耀半导体材料有限公司 | Circulating water temperature control device for growing single crystal by VGF method and application |
| CN115383072A (en) * | 2022-08-25 | 2022-11-25 | 太原晋西春雷铜业有限公司 | Control method of cooling water in crystallizer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120104 Termination date: 20190601 |