CN204825114U - A alternating temperature cooling system for single crystal growing furnace - Google Patents
A alternating temperature cooling system for single crystal growing furnace Download PDFInfo
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- CN204825114U CN204825114U CN201520376166.3U CN201520376166U CN204825114U CN 204825114 U CN204825114 U CN 204825114U CN 201520376166 U CN201520376166 U CN 201520376166U CN 204825114 U CN204825114 U CN 204825114U
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Abstract
The utility model relates to an alternating temperature cooling system for single crystal growing furnace, it includes heat exchanger, outer cooling system and pure water circulating system, outer cooling system includes water -cooling tower, valve, outer water pump and water source groove that mutual series connection looped in, pure water circulating system includes water cooling jacket, deputy furnace room water -cooling water route and main oven chamber water -cooling water route, water cooling jacket, deputy furnace room water -cooling water route comprise with first pure water refrigerated water return circuit is parallelly connected first pure water water cooling circuit, main oven chamber water -cooling water route comprises with second pure water refrigerated water return circuit is parallelly connected second pure water water cooling circuit, heat exchanger contains two independent peripheral passages, and a peripheral passage is inserted outer cooling system, another peripheral passage is inserted pure water circulating system. The utility model discloses can do according to the cooling water temperature allotment cooling water of different technology stage needs according to selecting cooling method season. The utility model discloses can effectively improve the single crystal growing furnace pull rate, reduce with the heat loss.
Description
Technical field
The utility model belongs to photovoltaic art, is specifically related to a kind of alternating temperature cooling system for single crystal growing furnace.
Background technology
In crystal pulling production process, the effect one of water coolant is that protection furnace binding does not deform by temperatures involved, and two is can need to reduce silicon single crystal rod temperature and adjustment hot systems temperature according to technique.Different production phases, the different sites of body of heater are not quite similar to cooling requirement, and in the heating material stage, in order to reduce thermal losses, the temperature of cooling water at each position should maintain comparatively high temps; In the long brilliant stage, in order to improve long brilliant speed, the temperature of cooling water at the position (water jacket, concubine etc.) of cooling monocrystalline is more low better; In the blowing out stage, in order to stove is torn in cooling open as early as possible, the temperature of cooling water at each position is more low better.But traditional cooling system of single crystal furnace, do not possess temperature adjustment function, single crystal growing furnace all sites is by a road water cooling, and the water temperature at each position cannot control respectively, and single outdoor cooling tower cooling method, wayward by the larger coolant water temperature of the seasonal effect temperature difference.
Utility model content
The purpose of this utility model is the defect overcoming prior art, provides a kind of and effectively can improve single crystal growing furnace pulling rate, reduces and add the alternating temperature cooling system of thermal losses.
To achieve these goals, the technical scheme taked of the utility model is as follows:
For an alternating temperature cooling system for single crystal growing furnace, it comprises heat exchanger, outer cooling system and pure water circulating system;
Described outer cooling system comprises the water-cooling tower, valve, outer water pump and the water source groove that are mutually connected in series and form loop;
Described pure water circulating system comprises water jacket, secondary furnace chamber water-cooled water route and main furnace chamber water-cooled water route, described water jacket, secondary furnace chamber water-cooled water route are composed in parallel by the first pure water cooling water loop and the first pure water chilled water circuit, and described main furnace chamber water-cooled water route is composed in parallel by the second pure water cooling water loop and the second pure water chilled water circuit;
Described first pure water cooling water loop is the series loop comprising pure water cooling tank, water pump, the first electric flow control valve and water jacket, secondary furnace chamber;
Described first pure water chilled water circuit is the series loop comprising pure water cooling tank, water pump, freezing unit, the second electric flow control valve and water jacket, secondary furnace chamber;
Described second pure water cooling water loop is the series loop comprising pure water cooling tank, water pump, the 3rd electric flow control valve and main furnace chamber;
Described second pure water chilled water circuit is the series loop comprising pure water cooling tank, water pump, freezing unit, the 4th electric flow control valve and main furnace chamber;
Described heat exchanger comprises two independently circulation paths, the outer cooling system described in a circulation path access, the pure water circulating system described in the access of another circulation path.
Further improve as the utility model, described pure water cooling tank comprises the pure water cooling return flume and pure water cooling inlet flume that are arranged in series, and described heat exchanger is arranged between described pure water cooling return flume and pure water cooling inlet flume.
Further improve as the utility model, described water jacket, secondary furnace chamber water-cooled water route water outlet are provided with the first cooling-water temperature sensor, and the water outlet of described main furnace chamber is provided with the second cooling-water temperature sensor.
Further improve as the utility model, also comprise PLC, described cooling-water temperature sensor is connected with the input terminus of PLC, and the output terminal of described PLC is connected with the 4th electric flow control valve with described first electric flow control valve, the second electric flow control valve, the 3rd electric flow control valve respectively.
Further improve as the utility model, described first pure water cooling water loop and described second pure water cooling water loop are provided with cooling water valve, and described first pure water chilled water circuit and described second pure water chilled water circuit are provided with refrigerated water valve.
Compared with prior art, the beneficial effect acquired by the utility model is as follows:
The alternating temperature cooling system of the single crystal growing furnace that the utility model provides, according to water jacket, the water-cooled requirement different from main furnace chamber of secondary furnace chamber, can be controlled separately and cools by water jacket, secondary furnace chamber water-cooled water route and main furnace chamber water-cooled water route.The mode that two water routes adopt pure water cooling water loop in parallel with chilled water circuit, can according to the Season select type of cooling, the temperature of cooling water allotment water coolant that also can need according to the different process stage.The utility model effectively can improve single crystal growing furnace pulling rate, reduction adds thermal losses.
Cooling tower is cooled equipment pure water indirectly by heat exchanger, ensure that the purity of equipment water, preventing pollution equipment, and can prevent water chiller fouling.
Pure water cooling tank comprises the pure water cooling return flume and pure water cooling inlet flume that are arranged in series, can effectively prevent cooling backwater from drawing high into water water temperature, improves cooling efficiency.
Temperature signal is passed to PLC control system by cooling-water temperature sensor, and PLC control system controls electric flow control valve (5) and regulates water coolant and chilled-water flow, achieves the closed-loop control of water temperature, can control respectively different body of heater, different sites.
Accompanying drawing explanation
Accompanying drawing 1 is structural representation of the present utility model;
In the accompanying drawings: 1 heat exchanger, 2 water-cooling towers, 3-1 valve, 3-2 cooling water valve, 3-3 refrigerated water valve, the pure water tank valve of 3-4, the outer water pump of 4-1, 4-2 water pump, 4-3 pure water groove pump, 5 water source grooves, 6-1 first electric flow control valve, 6-2 second electric flow control valve, 6-3 the 3rd electric flow control valve, 6-4 the 4th electric flow control valve, 7 water jackets, secondary furnace chamber, 8 freezing units, 9 main furnace chambers, 10-1 first cooling-water temperature sensor, 10-2 second cooling-water temperature sensor, 11 pure water cooling return flumes, 12 pure water cooling inlet flumes, 13 cold water jackets.
Embodiment
Detailed further describing is carried out below in conjunction with accompanying drawing 1 pair of the utility model.
As shown in Figure 1, a kind of alternating temperature cooling system for single crystal growing furnace, it comprises heat exchanger 1, outer cooling system and pure water circulating system.
Described pure water circulating system comprises water jacket, secondary furnace chamber water-cooled water route and main furnace chamber water-cooled water route, according to water jacket, the water-cooled requirement different from main furnace chamber of secondary furnace chamber, can be controlled separately and cool by water jacket, secondary furnace chamber water-cooled water route and main furnace chamber water-cooled water route.Described water jacket, secondary furnace chamber water-cooled water route are composed in parallel by the first pure water cooling water loop and the first pure water chilled water circuit, described main furnace chamber water-cooled water route is composed in parallel by the second pure water cooling water loop and the second pure water chilled water circuit, can according to the Season select type of cooling, the temperature of cooling water allotment water coolant that also can need according to the different process stage.
Described first pure water cooling water loop is the series loop comprising pure water cooling inlet flume 12, water pump 4-2, the first electric flow control valve 6-1, water jacket, secondary furnace chamber 7 and pure water cooling return flume 11; Described first pure water chilled water circuit is the series loop comprising pure water cooling inlet flume 12, water pump 4-2, freezing unit 8, second electric flow control valve 6-2, water jacket, secondary furnace chamber 7 and pure water cooling return flume 11; Described second pure water cooling water loop is the series loop comprising pure water cooling inlet flume 12, water pump 4-2, the 3rd electric flow control valve 6-3, main furnace chamber 9 and pure water cooling return flume 11; Described second pure water chilled water circuit is the series loop comprising pure water cooling inlet flume 12, water pump 4-2, freezing unit 8, the 4th electric flow control valve 6-4, main furnace chamber 9 and pure water cooling return flume 11; Described water jacket, secondary furnace chamber water-cooled water route water outlet are provided with the first cooling-water temperature sensor 10-1, and the water outlet of described main furnace chamber is provided with the second cooling-water temperature sensor 10-2.
Described outer cooling system comprises mutually being connected in series and forms the water-cooling tower 2 in loop, valve 3-1, outer water pump 4-1 and water source groove 5, and described water source groove 5 is tank from the beginning.Described heat exchanger comprises two independently circulation paths, and the outer cooling system described in a circulation path access, another circulation path is accessed between the pure water cooling return flume 12 of described pure water circulating system and pure water cooling inlet flume 11.Outer cooling system centered by cooling tower, can be lowered the temperature to the pure water of pure water circulating system by heat exchanger 1 indirectly.
Also PLC is comprised in the utility model, described cooling-water temperature sensor 6 is connected with the input terminus of PLC, and the output terminal of described PLC is connected with the 4th electric flow control valve with described first electric flow control valve, the second electric flow control valve, the 3rd electric flow control valve respectively.The temperature signal that can feed back according to the first cooling-water temperature sensor 10-1 and the second cooling-water temperature sensor 10-2, the flow of adjustment to described first electric flow control valve, the second electric flow control valve, the 3rd electric flow control valve and the 4th electric flow control valve, achieve the control respectively of the different parts of different body of heater, temperature of cooling water can be regulated according to processing requirement.
First pure water cooling water loop described in the utility model and described second pure water cooling water loop are provided with cooling water valve 3-2, and described first pure water chilled water circuit and described second pure water chilled water circuit are provided with refrigerated water valve 3-3.Can according to the Season select type of cooling.
Working process of the present utility model is as follows:
Pure water cooling inlet flume 12 is by pipeline water pump for equipment provides pure water cold water, and pure water cold water is finally divided into three branch roads: 1. the pipeline by being provided with the first electric flow control valve 6-1 enters the water-in of water jacket, secondary furnace chamber 7; 2. the pipeline by being provided with the 3rd electric flow control valve 6-3 enters the water-in of main furnace chamber 9; 3. enter the pure water cooling water water-in of water chiller 8.
The refrigerated water that the refrigerated water water outlet of water chiller flows out is divided into two branch roads: 1. the pipeline by being provided with the second electric flow control valve 6-2 enters the water-in of water jacket, secondary furnace chamber 7; 2. the pipeline by being provided with the 4th electric flow control valve 6-4 enters the water-in of main furnace chamber 9.
The backwater that the water outlet of water jacket, secondary furnace chamber 7 and the water outlet of main furnace chamber 9 flow out is divided into two branch roads: 1. directly enter in pure water cooling return flume 11 by pipeline; 2. entered the pure water refrigerated water water return outlet of water chiller by pipeline, the pure water cooling water water return outlet through water chiller flows out, and enters in pure water cooling water return flume 11.
Pure water cooling water in pure water cooling water return flume 11 is through entering in pure water cooling inlet flume 12 after heat exchanger 1 carries out heat exchange cooling with the pipeline of pure water groove valve 3-4 and pure water groove pump 4-3.
Water in water source groove 5 enters after cooling tower cools and returns in water source groove 5 cooling completed pure water circulating system again after heat exchanger 1 carries out heat exchange.
Temperature signal is passed to PLC by the utility model first cooling-water temperature sensor and the second cooling-water temperature sensor, PLC is according to the temperature of cooling water curve arranged for single crystal growing furnace different steps technological temperature curve, the water flow of regulating and controlling four electric flow control valves 5, and show this temperature curve and real time temperature on the touchscreen.Achieve the control respectively of the different parts of different body of heater, temperature of cooling water can be regulated according to processing requirement.
Be provided with water jacket 13 in single crystal furnace body 9 in the utility model, with silicon single crystal rod close together, reduce this water route water temperature in the long brilliant stage, effectively can improve pulling rate.
The above embodiment is only preferred embodiment of the present utility model, and is not the exhaustive of the feasible enforcement of the utility model.For persons skilled in the art, to any apparent change done by it under the prerequisite not deviating from the utility model principle and spirit, all should be contemplated as falling with within claims of the present utility model.
Claims (5)
1. for an alternating temperature cooling system for single crystal growing furnace, it is characterized in that, it comprises heat exchanger (1), outer cooling system and pure water circulating system;
Described outer cooling system comprises the water-cooling tower (2), valve (3-1), outer water pump (4-1) and the water source groove (5) that are mutually connected in series and form loop;
Described pure water circulating system comprises water jacket, secondary furnace chamber water-cooled water route and main furnace chamber water-cooled water route, described water jacket, secondary furnace chamber water-cooled water route are composed in parallel by the first pure water cooling water loop and the first pure water chilled water circuit, and described main furnace chamber water-cooled water route is composed in parallel by the second pure water cooling water loop and the second pure water chilled water circuit;
Described first pure water cooling water loop is for comprising the series loop of pure water cooling tank, water pump (4-2), the first electric flow control valve (6-1) and water jacket, secondary furnace chamber (7);
Described first pure water chilled water circuit is for comprising the series loop of pure water cooling tank, water pump (4-2), freezing unit (8), the second electric flow control valve (6-2) and water jacket, secondary furnace chamber (7);
Described second pure water cooling water loop is for comprising the series loop of pure water cooling tank, water pump (4-2), the 3rd electric flow control valve (6-3) and main furnace chamber (9);
Described second pure water chilled water circuit is for comprising the series loop of pure water cooling tank, water pump, freezing unit, the 4th electric flow control valve (6-4) and main furnace chamber (9);
Described heat exchanger (1) comprises two independently circulation paths, the outer cooling system described in a circulation path access, the pure water circulating system described in the access of another circulation path.
2. a kind of alternating temperature cooling system for single crystal growing furnace according to claim 1, it is characterized in that, described pure water cooling tank comprises the pure water cooling return flume (12) and pure water cooling inlet flume (11) that are arranged in series, and described heat exchanger (1) is arranged between described pure water cooling return flume (12) and pure water cooling inlet flume (11).
3. a kind of alternating temperature cooling system for single crystal growing furnace according to claim 1, it is characterized in that, described water jacket, secondary furnace chamber water-cooled water route water outlet are provided with the first cooling-water temperature sensor (10-1), and the water outlet of described main furnace chamber is provided with the second cooling-water temperature sensor (10-2).
4. a kind of alternating temperature cooling system for single crystal growing furnace according to claim 1, it is characterized in that, also comprise PLC, first cooling-water temperature sensor (10-1) is connected with the input terminus of PLC respectively with the second cooling-water temperature sensor (10-2), and the output terminal of described PLC is connected with the 4th electric flow control valve (6-4) with described first electric flow control valve (6-1), the second electric flow control valve (6-2), the 3rd electric flow control valve (6-3) respectively.
5. a kind of alternating temperature cooling system for single crystal growing furnace according to claim 1, it is characterized in that, described first pure water cooling water loop and described second pure water cooling water loop are provided with cooling water valve (3-2), and described first pure water chilled water circuit and described second pure water chilled water circuit are provided with refrigerated water valve (3-3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520376166.3U CN204825114U (en) | 2015-06-03 | 2015-06-03 | A alternating temperature cooling system for single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520376166.3U CN204825114U (en) | 2015-06-03 | 2015-06-03 | A alternating temperature cooling system for single crystal growing furnace |
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| Publication Number | Publication Date |
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| CN204825114U true CN204825114U (en) | 2015-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520376166.3U Expired - Fee Related CN204825114U (en) | 2015-06-03 | 2015-06-03 | A alternating temperature cooling system for single crystal growing furnace |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112176397A (en) * | 2020-10-22 | 2021-01-05 | 云南鑫耀半导体材料有限公司 | Circulating water temperature control device for growing single crystal by VGF method and application |
| CN114293246A (en) * | 2021-12-30 | 2022-04-08 | 中国电子科技集团公司第四十八研究所 | Water flow cooling and flow distribution device for silicon epitaxial equipment |
| CN115044974A (en) * | 2022-06-28 | 2022-09-13 | 晶科能源股份有限公司 | Low-oxygen single crystal furnace |
| CN115506016A (en) * | 2022-09-29 | 2022-12-23 | 双良节能系统股份有限公司 | Single crystal growing system |
| CN116732616A (en) * | 2023-06-16 | 2023-09-12 | 通威微电子有限公司 | Circulating water cooling system of silicon carbide crystal growth furnace and control method thereof |
-
2015
- 2015-06-03 CN CN201520376166.3U patent/CN204825114U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112176397A (en) * | 2020-10-22 | 2021-01-05 | 云南鑫耀半导体材料有限公司 | Circulating water temperature control device for growing single crystal by VGF method and application |
| CN114293246A (en) * | 2021-12-30 | 2022-04-08 | 中国电子科技集团公司第四十八研究所 | Water flow cooling and flow distribution device for silicon epitaxial equipment |
| CN115044974A (en) * | 2022-06-28 | 2022-09-13 | 晶科能源股份有限公司 | Low-oxygen single crystal furnace |
| CN115044974B (en) * | 2022-06-28 | 2023-08-18 | 晶科能源股份有限公司 | Low-oxygen single crystal furnace |
| CN115506016A (en) * | 2022-09-29 | 2022-12-23 | 双良节能系统股份有限公司 | Single crystal growing system |
| CN116732616A (en) * | 2023-06-16 | 2023-09-12 | 通威微电子有限公司 | Circulating water cooling system of silicon carbide crystal growth furnace and control method thereof |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 |
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| CF01 | Termination of patent right due to non-payment of annual fee |