CN207267903U - Single crystal growing furnace can lift water cooling heat shield arrangement - Google Patents
Single crystal growing furnace can lift water cooling heat shield arrangement Download PDFInfo
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- CN207267903U CN207267903U CN201721214789.6U CN201721214789U CN207267903U CN 207267903 U CN207267903 U CN 207267903U CN 201721214789 U CN201721214789 U CN 201721214789U CN 207267903 U CN207267903 U CN 207267903U
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Abstract
It the utility model is related to silicon single crystal manufacturing apparatus field, it is desirable to provide a kind of single crystal growing furnace can lift water cooling heat shield arrangement.This kind of single crystal growing furnace, which can lift water cooling heat shield arrangement, includes heat shielding lifting device, water cooling heat shielding, ring under ring, heat shielding in heat shielding, heat shielding outer shroud, insulation cover, fast removing nut, immersion liquid protective device on thermal field, for being arranged on the top of silica crucible in single crystal furnace body.The utility model replaces the heat shielding inner ring in former single crystal growing furnace using water cooling heat shielding, and water cooling heat shielding bottom can form smaller metric space between liquid level, heat is taken away in the region nearer apart from liquid level；And remaining water cooling heat shielding is consistent with original graphite heat shielding inner ring size, shadow will not be produced to its air-flow etc..
Description
Technical field
The utility model is can to lift water cooling heat shield arrangement on silicon single crystal manufacturing apparatus field, more particularly to single crystal growing furnace.
Background technology
Chinese photovoltaic industry experienced the low ebb of 2011-2012, and part backward production facilities are eliminated.2013, Chinese light
Volt enterprise encounters serious outlet crisis --- and European Union is double anti-, has also welcome opportunity --- the rise of domestic market of maximum,
Chinese Government has launched a series of photovoltaic policies, stimulates the fast development of domestic photovoltaic market.2014, with the whole world
The sustainable growth of photovoltaic market demand, the country go the continuation of production capacity, and market will be further pulled.
According further to market survey, many photovoltaic units 2015 promote lifting pulling rate, repeatedly feed intake etc. skill
The application of art, these technologies can push directly on the decline of monocrystalline silicon non-silicon cost.
Under such a background, pulling rate can be lifted but also make full use of multiple throwing charging more to save the time, improve by being badly in need of one kind
Efficiency, lift water cooling heat shield arrangement for single crystal growing furnace.
Current water-cooling system is generally the structure being installed at bell upper flange of straight barrel type, due to visual field problem chaotropic
Face changes no water cooling heat shielding positive effect farther out, to the indoor temperature gradient of stove.
Also one kind is directly fixed in furnace chamber, but can not be lifted, so being had certain limitations to the amount of multiple throwing silicon material, nothing
Method meets present efficient production model.
Utility model content
The main purpose of the utility model is that overcome deficiency of the prior art, there is provided one kind can lift pulling rate, again
Multiple throwing can be made full use of to feed to save the time, carry efficient single crystal growing furnace and can lift water cooling heat shield arrangement more.To solve above-mentioned skill
Art problem, the solution of the utility model are：
Water cooling heat shield arrangement can be lifted by providing a kind of single crystal growing furnace, for being arranged on silica crucible in single crystal furnace body
Side, the single crystal growing furnace, which can lift water cooling heat shield arrangement, includes ring, heat under ring, heat shielding in heat shielding lifting device, water cooling heat shielding, heat shielding
Insulation cover, fast removing nut, immersion liquid protective device on screen outer shroud, thermal field；
The water cooling heat shielding includes water cooling heat shielding inner cylinder, water cooling heat shielding outer barrel, water cooling heat shielding inner cylinder, the weldering of water cooling heat shielding outer barrel
It is connected together, and the cross sectional shape of water cooling heat shielding is in back taper；Weld what is formed in water cooling heat shielding inner cylinder and water cooling heat shielding outer barrel
The water channel of detour is internally provided with, water inlet pipe, outlet pipe is respectively welded (during water inlet pipe, outlet pipe all use in import, the outlet of water channel
Blank pipe)；Water inlet pipe and the lift shaft that outlet pipe is internal water flowing, water inlet pipe are connected with insulation cover is respectively welded on outlet pipe
Section；
Heat shielding outer shroud (passing through screw) is fixedly mounted in the water cooling heat shielding of insulation cover on thermal field (on thermal field), is protected on thermal field
Temperature lid is installed on insulation cover linkage section by fast removing nut, water cooling heat shielding and heat shielding outer shroud is fixed together (heat shielding outer shroud
Be that a bottom is angled or the tubular structure of radian)；The fast removing nut is the internal nut for C character form structures, can be convenient
It is fixed or dismantles with upper insulation cover linkage section, realizes the fixation or separation of heat shielding outer shroud and water cooling heat shielding；
The upper end of water cooling heat shielding is provided with upper flange, and ring is installed on water-cooled by the recess of the upper flange in the heat shielding
On screen；Ring is used to be installed on above water cooling heat shielding in heat shielding, and heat shielding outer shroud forms a sandwich, is filled out inside sandwich
It is plugged with thermal insulation material (ring is a tubular structure for having certain angle in heat shielding)；The lower end of water cooling heat shielding is provided with lower flange,
Ring is installed in water cooling heat shielding by the recess of the lower flange under the heat shielding；Ring is used to be installed under water cooling heat shielding under heat shielding
Face, and heat shielding outer shroud form a sandwich, and thermal insulation material is packed with inside sandwich, and (ring, which is one, under heat shielding has necessarily
The tubular structure of angle)；
The heat shielding lifting device is equipped with two, and the upper end with water inlet pipe, the upper end of outlet pipe are connected respectively, for passing through
Two heat shielding lifting devices lift water-cooled screen at the same time；
The immersion liquid protective device is installed on bell, and is fixed on insulation cover or water cooling heat shielding on thermal field by being flexible coupling
On, and each fixing point is realized with installing point insulating by ceramic fixed block；Immersion liquid protective device can be contacted with silicon liquid level
When feed back unlike signal, and then control that water cooling heat shielding can not decline or crucible can not rise, prevent water cooling heat shielding to be immersed in silicon liquid
In (immersion liquid protection end monitoring point is less than heat shielding outer shroud X, and heat shielding outer shroud is Y away from liquid level distance during normal crystal pulling, it is necessary to assure X ＜
Y, when the liquid level in silica crucible is immersed in immersion liquid protective device monitoring point, since immersion liquid protective device starts to insulate with bell,
Certain resistance can be produced after contact liquid level, can be used to judge that liquid level is too small apart from the value of heat shielding outer shroud, there are certain hidden
Suffer from, control liquid level can not rise and can not decline with water cooling heat shielding).
As a further improvement, the stitching portion of the water channel of the water cooling heat shielding and hollow tube, respectively (according to actual strong
Degree) it is welded with reinforcing rib.
As a further improvement, it is the specific heat capacity of cooling water according to Q=CW △ t, C, W is water flow, and △ t are Inlet and outlet water
The temperature difference, if to improve longitudinal temperature gradient, it is necessary to make the heat that water cooling heat shielding is taken away more, one improve water flow, two improve
Pass in and out water temperature difference；For result above, water cooling heat shielding can also use the larger interface of single water flow pump, water flow or temperature
Relatively low cooling water is spent to have achieved the goal；The water inlet pressure of general single crystal growing furnace plant area is in 2.0Kg/cm2~3.0Kg/cm2, water
Temperature can increase water inlet pressure or water temperature take away more heats to reach at 25~30 DEG C according to the particular/special requirement of water cooling heat shielding
Purpose.
As a further improvement, mouth is arranged on apart from 30~100mm of liquid level under the water cooling heat shielding, can be dropped apart from too low
Low liquid level temperature, heater consumption power is opposite to be raised, and to cause crystal to take away heat after being molded less apart from excessive, is unfavorable for carrying
High rate of crystalline growth；Water cooling heat shield arrangement closer to liquid level, increases the longitudinal temperature gradient of crystal than conventional water collar.
Compared with prior art, the beneficial effects of the utility model are：
The utility model replaces the heat shielding inner ring in former single crystal growing furnace using water cooling heat shielding, water cooling heat shielding bottom can with liquid level it
Between form smaller metric space, take away heat in the region nearer apart from liquid level；And remaining water cooling heat shielding and original graphite
Ring size is consistent in heat shielding, will not produce shadow to its air-flow etc..
The immersion liquid protective device of the utility model can prevent maloperation from preventing liquid level rises from encountering the safe thing of guide shell generation
Therefore.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model.
Fig. 2 is the structure diagram of water cooling heat shielding in the utility model.
Reference numeral in figure is：1 water cooling heat shielding；1-1 water inlet pipes；The upper insulation cover linkage sections of 1-2；In 1-3 water cooling heat shieldings
Cylinder；1-4 water cooling heat shielding outer barrels；1-5 outlet pipes；Ring in 2 heat shieldings；3 heat shielding outer shrouds；Ring under 4 heat shieldings；5 heat shielding lifting devices；6 is normal
Advise water collar；Insulation cover on 7 thermal fields；8 fast removing nuts；9 crystal bars；10 immersion liquid protective devices；11 silica crucibles.
Embodiment
The utility model is described in further detail with embodiment below in conjunction with the accompanying drawings：
A kind of single crystal growing furnace as shown in Figure 1, which can lift water cooling heat shield arrangement, includes heat shielding lifting device 5, water cooling heat shielding 1, heat
Ring 4 under ring 2, heat shielding on screen, heat shielding outer shroud 3, insulation cover 7, fast removing nut 8, immersion liquid protective device on thermal field, for being arranged on list
The top of silica crucible 11 in brilliant furnace body, replaces graphite heat shielding, water cooling heat shielding 1 is more leaned on than conventional water collar 6 with water cooling heat shielding 1
Nearly liquid level, increases the longitudinal temperature gradient of crystal, accelerates 9 cooling velocity of crystal bar and then improves growth rate.
As shown in Fig. 2, the water cooling heat shielding 1 of main part welded by water cooling heat shielding inner cylinder 1-3 and water cooling heat shielding outer barrel 1-4 and
Into, and the cross sectional shape of water cooling heat shielding 1 is in back taper.Weld what is formed in water cooling heat shielding inner cylinder 1-3 and water cooling heat shielding outer barrel 1-4
The water channel of detour is internally provided with, import, the outlet of water channel are welded by hollow tube respectively, and stitching portion can be respectively according to actual strength
Weld reinforcing rib.Water inlet pipe 1-1 and outlet pipe 1-5 is the lift shaft of internal water flowing, is distinguished on water inlet pipe 1-1 and outlet pipe 1-5
It is welded with insulation cover linkage section.
The main function of water cooling heat shielding 1 is to speed up the cooling velocity of crystal bar 9, so that accelerate the rate of release of latent heat,
When silicon single crystal rod is stepped into water cooling heat shielding 1, the longitudinal temperature gradient of bigger is improved for it, so as to improve growth rate.Water
Cold and hot screen 1 is substituted outside conventional graphite heat shielding, cooling section is more nearly liquid level, more effectively reduces heat radiation, increases crystal
Heat dissipation, make its more effectively for crystal bar 9 provide growth power.
The heat shielding outer shroud 3 is specifically that a bottom is angled or the tubular structure of radian, heat shielding outer shroud 3 are pacified by screw
Mounted on thermal field in water cooling heat shielding 1, insulation cover 7 is installed on insulation cover linkage section by fast removing nut 8 respectively on thermal field, can be with
Make water cooling heat shielding 1 and heat shielding outer shroud 3 fixed together, aspect installation is detachable.The fast removing nut 8 is that inside is C font knots
The nut of structure, quickly can fix or dismantle with upper insulation cover linkage section 1-2, play heat shielding outer shroud 3 and water cooling heat shielding 1 is fixed or divided
From effect.
The upper end of water cooling heat shielding 1 is provided with upper flange, and ring 2 is installed on water-cooled by the recess of upper flange in the heat shielding
On screen 1.Ring 2 is specifically a tubular structure for having certain angle in heat shielding, for above water cooling heat shielding 1 and outside heat shielding
Ring 3 forms an interlayer assembling structure, and thermal insulation material is clogged inside interlayer.The lower end of water cooling heat shielding 1 is provided with lower flange, the heat
The lower ring 4 of screen is installed in water cooling heat shielding 1 by the recess of lower flange.Ring 4 is specifically a tubular for having certain angle under heat shielding
Structure, for forming an interlayer assembling structure with heat shielding outer shroud 3 below water cooling heat shielding 1, thermal insulating material is clogged inside interlayer
Material.
This kind of single crystal growing furnace can lift water cooling heat shield arrangement can be according to the height of thermal field of single crystal furnace size adjusting water cooling heat shielding body
Degree adjusts in heat shielding ring 4 under ring 2, heat shielding, can also cancel in heat shielding ring 4 under ring 2, heat shielding, overall be designed as water cooling
Heat shielding 1.
The heat shielding lifting device 5 is equipped with two, and the upper end with water inlet pipe 1-1, the upper end of outlet pipe 1-5 are connected respectively,
Water-cooled screen 1 is lifted at the same time by two heat shielding lifting devices 5, can be fed when being thrown again within, to improve production efficiency more.
And can to lift water cooling heat shield arrangement easy for installation for this kind of single crystal growing furnace, can be lifted at the same time with heat shielding outer shroud 3.
The immersion liquid protective device specifically refers to：The device can feed back unlike signal control water-cooled when being contacted with silicon liquid level
Screen 1 can not decline or crucible can not rise, and prevents water cooling heat shielding 1 to be immersed in silicon liquid.Immersion liquid protective device is installed on bell
And be fixed on by being flexible coupling on thermal field in insulation cover 7 or water cooling heat shielding 1, each fixing point by ceramic fixed block realize with
Point insulating is installed；Immersion liquid protection end monitoring point is less than heat shielding outer shroud X, and heat shielding outer shroud 3 is Y away from liquid level distance during normal crystal pulling, must
It must ensure X ＜ Y, when the liquid level in silica crucible 11 is immersed in immersion liquid protective device monitoring point, since immersion liquid protective device starts
Insulate with bell, can produce certain resistance after contacting liquid level, can be used to judge that liquid level is too small apart from the value of heat shielding outer shroud 3,
There are certain hidden danger, control liquid level can not rise and can not decline with water cooling heat shielding 1.
According to Q=CW △ t, C is the specific heat capacity of cooling water, and W is water flow, and △ t are the temperature difference of Inlet and outlet water, if to improve
Longitudinal temperature gradient, it is necessary to make the heat that water cooling heat shielding 1 is taken away more, one improves water flow, two raising disengaging water temperature differences；For with
Above as a result, water cooling heat shielding 1 can also be using the relatively low cooling water of the larger interface of single water flow pump, water flow or temperature
Achieve the goal.
Single crystal growing furnace can lift water cooling heat shield arrangement than conventional water collar 6 closer to liquid level, and the longitudinal temperature for increasing crystal is terraced
Degree.And single crystal growing furnace can be lifted water cooling heat shield arrangement can with conventional water collar 6 while use, further improving pulling rate can stablize
Property.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also there is many variations.Those of ordinary skill in the art can be from disclosed in the utility model
All deformations for directly exporting or associating in content, are considered as the scope of protection of the utility model.
Claims (4)
1. a kind of single crystal growing furnace can lift water cooling heat shield arrangement, for being arranged on the top of silica crucible in single crystal furnace body, it is special
Sign is that the single crystal growing furnace can lift water cooling heat shield arrangement including under ring, heat shielding in heat shielding lifting device, water cooling heat shielding, heat shielding
Ring, heat shielding outer shroud, insulation cover, fast removing nut, immersion liquid protective device on thermal field；
The water cooling heat shielding includes water cooling heat shielding inner cylinder, water cooling heat shielding outer barrel, and water cooling heat shielding inner cylinder, water cooling heat shielding outer barrel are welded on
Together, and the cross sectional shape of water cooling heat shielding is in back taper；The inside to be formed is welded in water cooling heat shielding inner cylinder and water cooling heat shielding outer barrel
Water inlet pipe, outlet pipe is respectively welded in water channel equipped with detour, import, the outlet of water channel；Water inlet pipe and outlet pipe are internal water flowing
Lift shaft, be respectively welded insulation cover linkage section on water inlet pipe and outlet pipe；
Heat shielding outer shroud is fixedly mounted in the water cooling heat shielding of insulation cover on thermal field, and insulation cover is installed on by fast removing nut on thermal field
On insulation cover linkage section, water cooling heat shielding is set to be fixed together with heat shielding outer shroud；The fast removing nut is that inside is C character form structures
Nut, conveniently can be fixed or dismantle with upper insulation cover linkage section, realize the fixation of heat shielding outer shroud and water cooling heat shielding or divide
From；
The upper end of water cooling heat shielding is provided with upper flange, and ring is installed on water cooling heat shielding by the recess of the upper flange in the heat shielding
On；Ring is used to be installed on above water cooling heat shielding in heat shielding, and heat shielding outer shroud forms a sandwich, is clogged inside sandwich
There is thermal insulation material；The lower end of water cooling heat shielding is provided with lower flange, and ring is installed on water by the recess of the lower flange under the heat shielding
On cold and hot screen；Ring is used to be installed on water cooling heat shielding in the following, a sandwich is formed with heat shielding outer shroud, in sandwich under heat shielding
Portion is packed with thermal insulation material；
The heat shielding lifting device is equipped with two, and the upper end with water inlet pipe, the upper end of outlet pipe are connected respectively, for passing through two
Heat shielding lifting device lifts water-cooled screen at the same time；
The immersion liquid protective device is installed on bell, and is fixed on by being flexible coupling on thermal field in insulation cover or water cooling heat shielding,
And each fixing point is realized with installing point insulating by ceramic fixed block；Immersion liquid protective device can be anti-when being contacted with silicon liquid level
Unlike signal is presented, and then control water cooling heat shielding can not decline or crucible can not rise, and prevents water cooling heat shielding to be immersed in silicon liquid.
2. a kind of single crystal growing furnace according to claim 1 can lift water cooling heat shield arrangement, it is characterised in that the water cooling heat shielding
Water channel and hollow tube stitching portion, be respectively welded reinforcing rib.
3. a kind of single crystal growing furnace according to claim 1 can lift water cooling heat shield arrangement, it is characterised in that the water cooling heat shielding
The larger interface of single water flow pump, water flow is additionally provided with, for increasing water inlet pressure, quickly to take away more heat
Amount.
4. a kind of single crystal growing furnace according to claim 1 can lift water cooling heat shield arrangement, it is characterised in that the water cooling heat shielding
Lower mouth is arranged on apart from 30~100mm of liquid level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721214789.6U CN207267903U (en) | 2017-09-21 | 2017-09-21 | Single crystal growing furnace can lift water cooling heat shield arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721214789.6U CN207267903U (en) | 2017-09-21 | 2017-09-21 | Single crystal growing furnace can lift water cooling heat shield arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207267903U true CN207267903U (en) | 2018-04-24 |
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ID=61961533
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721214789.6U Active CN207267903U (en) | 2017-09-21 | 2017-09-21 | Single crystal growing furnace can lift water cooling heat shield arrangement |
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| Country | Link |
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| CN (1) | CN207267903U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523869A (en) * | 2017-09-21 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace can lift water cooling heat shield arrangement |
| CN112501685A (en) * | 2020-12-15 | 2021-03-16 | 南京晶能半导体科技有限公司 | Water cooling jacket centering assembly and centering method |
-
2017
- 2017-09-21 CN CN201721214789.6U patent/CN207267903U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523869A (en) * | 2017-09-21 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace can lift water cooling heat shield arrangement |
| CN107523869B (en) * | 2017-09-21 | 2024-03-05 | 浙江晶盛机电股份有限公司 | Single crystal furnace device capable of lifting water-cooling heat shield |
| CN112501685A (en) * | 2020-12-15 | 2021-03-16 | 南京晶能半导体科技有限公司 | Water cooling jacket centering assembly and centering method |
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