CN205580609U - Base is pressed extremely in pressure sensor integration - Google Patents
Base is pressed extremely in pressure sensor integration Download PDFInfo
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- CN205580609U CN205580609U CN201620371845.6U CN201620371845U CN205580609U CN 205580609 U CN205580609 U CN 205580609U CN 201620371845 U CN201620371845 U CN 201620371845U CN 205580609 U CN205580609 U CN 205580609U
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- chip slot
- acupuncture needle
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- base
- pressure sensor
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Abstract
The utility model provides a pressure sensor integration gauge pressure base, the device comprises a main body of a basal seat, the acupuncture needle, the gauge pressure pipe, the inner chamber of base body divide into chip slot and two upper and lower cavitys of compensation plate mounting groove, the upper end of base body still is provided with silicon oil infilling chamber and chip slot intercommunication, be equipped with 3 at least through -holes around chip slot, the acupuncture needle passes through the glass insulator sintering to be fixed in the through -hole, the up end of acupuncture needle exposes in the silicon oil infilling chamber, gauge pressure pipe is fixed in chip slot 's bottom and is communicate with chip slot through the glass insulator sintering. The utility model is used for the way that adopts the pottery to do the packing has been abandoned in gauge pressure pressure sensor's encapsulation, regards all -metal structure 's integrated base as the encapsulation original paper that pressure -sensitive chip is single, has really realized the integrally packaged of base, when reduce sensor temperature drift, improving its sensitivity, has practiced thrift manufacturing cost, makes the production technology more succinctly optimize.
Description
Technical field
This utility model relates to a kind of base construction encapsulating pressure transducer, particularly relates to a kind of pressure sensor integrated exhausted
Pressure pedestal.
Background technology
Nowadays the quality of the performance of pressure transducer largely depends on its temperature performance, i.e. temperature drift.Owing to I adopts at company
Being pressure conduction medium with silicone oil, silicone oil itself has certain thermal coefficient of expansion, and these factors disturb pressure transducer
Temperature performance, so reducing oil-filled amount is to improve an a crucial factor of pressure transducer performance.
The pressure transducer pedestal used at present, is the end of acupuncture needle and chip to be arranged in same cavity, this structure
Chip slot cavity volume relatively big, in order to reduce the oil-filled volume in chip slot cavity, the way taked is at acupuncture needle and core
Utilize the harder materials such as pottery as insulation filling between sheet.But, need additionally to add during due to encapsulation pressure transducer
Ceramic insulation is filled, therefore relatively cumbersome producing in assemble flow, and technique is the most relative complex, and production cost is the highest.
Summary of the invention
The purpose of this utility model is to provide a kind of pressure sensor integrated absolute pressure pedestal, for the envelope of absolute pressure pressure transducer
Dress, has abandoned employing pottery and has done the way filled, using the integrated base of all-metal construction as the single encapsulation of chip varistor
Original paper, is truly realized the integrative packaging of pedestal, while reducing Sensor temperature drift, improving its sensitivity, saves
Production cost, makes production technology more succinctly optimize.
For achieving the above object, this utility model realizes by the following technical solutions:
A kind of pressure sensor integrated absolute pressure pedestal, including base body, acupuncture needle, the inner chamber of base body is divided into chip slot
Two cavitys upper and lower with compensating plate mounting groove, mutually completely cut off between chip slot and compensating plate mounting groove, and the upper end of base body is also
Being provided with silicon oil infilling chamber to connect with chip slot, be provided around at least 3 through holes at chip slot, acupuncture needle passes through glass insulation
Son is sintered to fix in through-holes, and the upper surface of acupuncture needle is exposed in silicon oil infilling chamber.
It is additionally provided with seal groove in the outside of described base body.
The upper end-face edge of described chip slot is chamfering.
Compared with prior art, the beneficial effects of the utility model are:
A kind of pressure sensor integrated absolute pressure pedestal, little for taking up the chip slot volume of chip varistor, acupuncture needle is arranged on core
Around film trap, only upper surface is exposed for welding in silicon oil infilling chamber, and other parts sealing-in, in integral base, subtracts
Few chip slot and the cavity volume in silicon oil infilling chamber, thus reduce the loading of silicone oil.Abandon use pottery on this basis
Do the way filled, using the integrated base of all-metal construction as the single encapsulation original paper of chip varistor, be truly realized base
The integrative packaging of seat, while the temperature reducing absolute pressure sensor is floated, improved its sensitivity, has saved production cost, has made
Production technology more succinctly optimizes.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model a kind of pressure sensor integrated absolute pressure pedestal；
Fig. 2 is the upper surface figure of this utility model a kind of pressure sensor integrated absolute pressure pedestal；
In figure: 1-chip slot, 2-silicon oil infilling chamber, 3-glass insulator, 4-seal groove, 5-compensating plate mounting groove, 6-silicone oil
Charge hole, 7-acupuncture needle, 8-base body, 9-chamfering.
Detailed description of the invention
Below in conjunction with Figure of description, this utility model is described in detail, it should be noted that enforcement of the present utility model
It is not limited to following embodiment.
As Figure 1-Figure 2, a kind of pressure sensor integrated absolute pressure pedestal, including base body 8, acupuncture needle 7, pedestal
The inner chamber of body 8 is divided into chip slot 1 and about 5 two cavitys of compensating plate mounting groove, chip slot 1 and compensating plate mounting groove 5
Between mutually completely cut off, the upper end of base body 8 is additionally provided with silicon oil infilling chamber 2 and connects with chip slot 1, at chip slot 1
Being provided around at least 3 through holes, acupuncture needle 7 is sintered to fix in through-holes by glass insulator 3, and the upper end of acupuncture needle 7 is showed
Go out in silicon oil infilling chamber 2.
Being 7 under through hole regular situation around chip slot 1,6 are used for sintering acupuncture needle 7, and another one is used for charging silicon
Oil.
It is additionally provided with seal groove 4, for mounting O-shaped sealing ring in the outside of described base body 8.
The upper end-face edge of described chip slot 1 is chamfering 9.Upper end-face edge at chip slot 1 designs a bigger chamfering 9,
It is possible to prevent the spun gold connecting pressure chip and acupuncture needle and all-metal base into contact.
This utility model one pressure sensor integrated absolute pressure pedestal is to use all 316L stainless steel structure, chip slot 1
Cavity volume specific pressure sensitive chip slightly larger, during use, presser sensor chip is arranged in chip slot 1, use spun gold
The upper surface of input (output) point of presser sensor chip with acupuncture needle 7 is coupled together by ball bonding technique, completes electrical connection.
After being encapsulated the upper end of pressure sensor integrated gauge pressure pedestal, in silicon oil infilling chamber 2, pour into silicon by silicon oil infilling hole 6
Oil.O RunddichtringO is placed, it is achieved sealing when pressure measurement is installed in seal groove 4.It is right to lay in compensating plate mounting groove 5
Chip varistor carries out the circuit board of temperature-compensating.
Owing to mutually completely cutting off between chip slot 1 and compensating plate mounting groove 5, therefore the pressure transducer using this pedestal to assemble is surveyed
Amount force value be observed pressure be offset output under vacuum conditions relative to the pressure under vacuum environment, i.e. sensor.
This utility model one pressure sensor integrated absolute pressure pedestal, is used for encapsulating absolute pressure pressure transducer, structurally changes
Become original chip slot 1 and the connected mode of acupuncture needle 7, reduced the volume of chip slot 1, be served only for accommodating chip varistor.
Acupuncture needle 7 only upper surface is exposed in silicon oil infilling chamber 2 for connecting chip varistor.Directly decrease from the design of structure
The loading of silicone oil, has abandoned use pottery and has done the way filled, not only reduced Sensor temperature drift, improve sensor
Sensitivity, and saved production cost, make production technology more succinctly optimize, establish for realizing production line for automatically assembling in the future
Determine basis.
Claims (3)
1. a pressure sensor integrated absolute pressure pedestal, it is characterised in that include base body, acupuncture needle, base body
Inner chamber be divided into chip slot and upper and lower two cavitys of compensating plate mounting groove, mutually completely cut off between chip slot and compensating plate mounting groove,
The upper end of base body is additionally provided with silicon oil infilling chamber and connects with chip slot, is provided around at least 3 through holes at chip slot,
Acupuncture needle is sintered to fix in through-holes by glass insulator, and the upper surface of acupuncture needle is exposed in silicon oil infilling chamber.
A kind of pressure sensor integrated absolute pressure pedestal the most according to claim 1, it is characterised in that at described base
The outside of seat body is additionally provided with seal groove.
A kind of pressure sensor integrated absolute pressure pedestal the most according to claim 1, it is characterised in that described chip
The upper end-face edge of groove is chamfering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620371845.6U CN205580609U (en) | 2016-04-27 | 2016-04-27 | Base is pressed extremely in pressure sensor integration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620371845.6U CN205580609U (en) | 2016-04-27 | 2016-04-27 | Base is pressed extremely in pressure sensor integration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205580609U true CN205580609U (en) | 2016-09-14 |
Family
ID=56858633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620371845.6U Active CN205580609U (en) | 2016-04-27 | 2016-04-27 | Base is pressed extremely in pressure sensor integration |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205580609U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106338356A (en) * | 2016-09-28 | 2017-01-18 | 广州凯耀资产管理有限公司 | Pressure sensor |
-
2016
- 2016-04-27 CN CN201620371845.6U patent/CN205580609U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106338356A (en) * | 2016-09-28 | 2017-01-18 | 广州凯耀资产管理有限公司 | Pressure sensor |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |