CN205580628U - Pressure sensor presses extremely - Google Patents
Pressure sensor presses extremely Download PDFInfo
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- CN205580628U CN205580628U CN201620371860.0U CN201620371860U CN205580628U CN 205580628 U CN205580628 U CN 205580628U CN 201620371860 U CN201620371860 U CN 201620371860U CN 205580628 U CN205580628 U CN 205580628U
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- pressure
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- pedestal
- acupuncture needle
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Abstract
The utility model provides a pressure sensor presses extremely, which comprises a base, the pressure chip, the acupuncture needle, pressure sensitive diaphragm, the clamping ring, the inner chamber of base divide into chip slot and two upper and lower cavitys of compensation plate mounting groove, it is isolated each other between chip slot and the compensation plate mounting groove, the upper end of base still is provided with silicon oil infilling chamber and chip slot intercommunication, the pressure chip is placed in chip slot, be equipped with 3 at least through -holes around chip slot, the acupuncture needle passes through the glass insulator sintering to be fixed in the through -hole, the up end of acupuncture needle exposes in the silicon oil infilling chamber, be connected through gold wire wire and pressure chip, clamping ring welded fastening is in the upper end of base, pressure sensitive diaphragm fixes between base and clamping ring. This pressure sensor has abandoned and has adopted the pottery to do the way of packing, and manufacturing cost when reduce sensor temperature drift, improving its sensitivity, has been practiced thrift to metal base integrally packaged's structure entirely, makes the production technology more succinctly optimize.
Description
Technical field
This utility model relates to a kind of absolute pressure pressure transducer.
Background technology
Nowadays the quality of the performance of pressure transducer largely depends on its temperature performance, i.e. temperature drift.Owing to I adopts at company
Being pressure conduction medium with silicone oil, silicone oil itself has certain thermal coefficient of expansion, and these factors disturb pressure transducer
Temperature performance, so reducing oil-filled amount is to improve an a crucial factor of pressure transducer performance.
The pressure transducer used at present, is the end of acupuncture needle and chip to be arranged in same cavity, the core of this structure
Film trap cavity volume is relatively big, in order to reduce the oil-filled volume in chip slot cavity, the way taked be acupuncture needle and chip it
Between utilize pottery etc. harder material as insulation filling.But, during due to encapsulation pressure transducer, need additionally to add pottery
Insulation filling, thus relatively cumbersome producing in assemble flow, and technique is the most relative complex, and production cost is the highest.
Summary of the invention
The purpose of this utility model is to provide a kind of absolute pressure pressure transducer, and this pressure transducer has been abandoned employing pottery and filled
Way, use all-metal pedestal integrative packaging structure, reduce Sensor temperature drift, improve its sensitivity while,
Save production cost, made production technology more succinctly optimize.Force value measured by this utility model is relative to vacuum ring
Absolute pressure under border.
For achieving the above object, this utility model realizes by the following technical solutions:
A kind of absolute pressure pressure transducer, including pedestal, pressure chip, acupuncture needle, presser sensor diaphragm, pressure ring, pedestal interior
Chamber is divided into chip slot and upper and lower two cavitys of compensating plate mounting groove, mutually completely cuts off, pedestal between chip slot and compensating plate mounting groove
Upper end be additionally provided with silicon oil infilling chamber and connect with chip slot, pressure chip is placed in chip slot, sets around chip slot
Having at least 3 through holes, acupuncture needle is sintered to fix in through-holes by glass insulator, and the upper surface of acupuncture needle is exposed at silicon oil infilling
In chamber, being connected with pressure chip by spun gold wire, pressure ring is weldingly fixed on the upper end of pedestal, and presser sensor diaphragm is fixed on
Between pedestal and pressure ring.
It is additionally provided with seal groove in the outside of described pedestal.
The upper end-face edge of described chip slot is chamfering.
Compared with prior art, the beneficial effects of the utility model are:
1) pedestal that this utility model is used is little for the chip slot volume taking up chip varistor, and acupuncture needle is arranged on chip slot
Around, only upper surface is exposed for welding in silicon oil infilling chamber, other parts sealing-in in integral base, this structure
Decrease chip slot and the cavity volume in silicon oil infilling chamber, thus reduce the loading of silicone oil, reduce Sensor temperature drift, carry
The high sensitivity of sensor.
2) this utility model has been abandoned use pottery and has been done the way filled, and uses the structure of all-metal pedestal integrative packaging,
Make production technology more succinctly optimize, save production cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model a kind of absolute pressure pressure transducer；
Fig. 2 is the A-A direction view of Fig. 1；
In figure: 1-chip slot, 2-silicon oil infilling chamber, 3-glass insulator, 4-seal groove, 5-compensating plate mounting groove, 6-spun gold
Wire, 7-acupuncture needle, 8-pedestal, 9-chamfering, 10-pressure ring, 11-presser sensor diaphragm, 12-pressure chip, 13-silicone oil fill
Grout.
Detailed description of the invention
Below in conjunction with Figure of description, this utility model is described in detail, it should be noted that enforcement of the present utility model
It is not limited to following embodiment.
As Figure 1-Figure 2, a kind of absolute pressure pressure transducer, quick including pedestal 8, pressure chip 12, acupuncture needle 7, pressure
Sense diaphragm 11, pressure ring 10, the inner chamber of pedestal 8 is divided into chip slot 1 and about 5 two cavitys of compensating plate mounting groove, chip slot
Mutually completely cutting off between 1 and compensating plate mounting groove 5, the upper end of pedestal 8 is additionally provided with silicon oil infilling chamber 2 and connects with chip slot 1,
Pressure chip 12 is placed in chip slot 1, and at least 3 through holes that are provided around of chip slot 1, acupuncture needle 7 passes through glass
Insulator 3 is sintered to fix in through-holes, and the upper surface of acupuncture needle 7 is exposed in silicon oil infilling chamber 2, by spun gold wire 6 with
Pressure chip 12 connects, and pressure ring 10 is weldingly fixed on the upper end of pedestal 8, and presser sensor diaphragm 11 is fixed on pedestal 8 and pressure
Between ring 10.
Being 7 under through hole regular situation around chip slot 1,6 are used for sintering acupuncture needle 7, and another one is used for charging silicon
Oil.
It is additionally provided with seal groove 4, for mounting O-shaped sealing ring in the outside of described pedestal 8.
The upper end-face edge of described chip slot 1 is chamfering 9.Upper end-face edge at chip slot 1 designs a bigger chamfering 9,
It is possible to prevent spun gold wire 6 to contact with all-metal pedestal 8.
The pedestal 8 of this utility model a kind of absolute pressure pressure transducer uses all 316L stainless steel structure, chip slot 1 interior
Chamber volumetric ratio pressure chip 12 is slightly larger, and pressure chip 12 is arranged in chip slot 1, uses gold wire ball welding procedure by pressure
Input (output) point of chip 12 is coupled together by spun gold wire 6 with the upper surface of acupuncture needle 7, completes electrical connection.
By welding, pressure ring 10 and presser sensor diaphragm 11 are fixed on the upper end of pedestal 8, complete the upper end of absolute pressure pressure transducer
Encapsulation.In silicon oil infilling chamber 2, pour into silicone oil by silicon oil infilling hole 13, then use glass insulator 3 sealing-in.?
O RunddichtringO is placed, it is achieved sealing when pressure measurement is installed in seal groove 4.Lay pressure core in compensating plate mounting groove 5
Sheet 12 carries out the circuit board of temperature-compensating.
This utility model one absolute pressure pressure transducer, owing to mutually completely cutting off between chip slot 1 and compensating plate mounting groove 5, pressure
The back side local environment of power chip 12 is vacuum environment, therefore measured force value is relative to the absolute pressure under vacuum condition
Power.
This utility model one absolute pressure pressure transducer, is used for measuring absolute pressure, have employed all-metal pedestal integrative packaging
Structure, reduces the volume of chip slot 1, is served only for accommodating pressure chip 12.Acupuncture needle 7 only upper surface is exposed and is filled at silicone oil
It is used for connecting pressure chip 12 in filling chamber 2.From the design of structure, directly decrease the loading of silicone oil, abandon use pottery
Porcelain does the way filled, and not only reduces Sensor temperature drift, improves the sensitivity of sensor, and has saved production cost,
Production technology is made more succinctly to optimize, it is achieved that the full-automatic assembling of absolute pressure pressure transducer.
Claims (3)
1. an absolute pressure pressure transducer, it is characterised in that include pedestal, pressure chip, acupuncture needle, presser sensor diaphragm,
Pressure ring, the inner chamber of pedestal is divided into chip slot and upper and lower two cavitys of compensating plate mounting groove, between chip slot and compensating plate mounting groove
Mutually isolation, the upper end of pedestal is additionally provided with silicon oil infilling chamber and connects with chip slot, and pressure chip is placed in chip slot,
Chip slot be provided around at least 3 through holes, acupuncture needle is sintered to fix in through-holes by glass insulator, the upper surface of acupuncture needle
Exposing in silicon oil infilling chamber, be connected with pressure chip by spun gold wire, pressure ring is weldingly fixed on the upper end of pedestal, pressure
Sensitive diaphragm is fixed between pedestal and pressure ring.
A kind of absolute pressure pressure transducer the most according to claim 1, it is characterised in that in the outside of described pedestal also
It is provided with seal groove.
A kind of absolute pressure pressure transducer the most according to claim 1, it is characterised in that the upper end edge of described chip slot
Edge is chamfering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620371860.0U CN205580628U (en) | 2016-04-27 | 2016-04-27 | Pressure sensor presses extremely |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620371860.0U CN205580628U (en) | 2016-04-27 | 2016-04-27 | Pressure sensor presses extremely |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205580628U true CN205580628U (en) | 2016-09-14 |
Family
ID=56858540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620371860.0U Active CN205580628U (en) | 2016-04-27 | 2016-04-27 | Pressure sensor presses extremely |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205580628U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106626503A (en) * | 2016-12-27 | 2017-05-10 | 银川西部大森数控技术有限公司 | Built-in force sensor capable of directly measuring force |
| CN106644238A (en) * | 2016-11-11 | 2017-05-10 | 中国电子科技集团公司第四十八研究所 | Thin film differential pressure core |
| CN106679854A (en) * | 2016-11-29 | 2017-05-17 | 中国电子科技集团公司第四十八研究所 | Absolute-pressure pressure sensor and preparation method thereof |
| CN107907262A (en) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducers for negative pressure measurement |
| CN108375428A (en) * | 2018-01-04 | 2018-08-07 | 南京沃天科技有限公司 | A kind of pressure sensor for fixing absolute pressure chip using no plastic structure |
| CN114719903A (en) * | 2022-03-28 | 2022-07-08 | 河北美泰电子科技有限公司 | Temperature and pressure composite sensor based on metal glass sintered base welding seal |
-
2016
- 2016-04-27 CN CN201620371860.0U patent/CN205580628U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106644238A (en) * | 2016-11-11 | 2017-05-10 | 中国电子科技集团公司第四十八研究所 | Thin film differential pressure core |
| CN106644238B (en) * | 2016-11-11 | 2020-04-03 | 中国电子科技集团公司第四十八研究所 | Film differential pressure core |
| CN106679854A (en) * | 2016-11-29 | 2017-05-17 | 中国电子科技集团公司第四十八研究所 | Absolute-pressure pressure sensor and preparation method thereof |
| CN106679854B (en) * | 2016-11-29 | 2020-02-07 | 中国电子科技集团公司第四十八研究所 | Absolute pressure sensor and preparation method thereof |
| CN106626503A (en) * | 2016-12-27 | 2017-05-10 | 银川西部大森数控技术有限公司 | Built-in force sensor capable of directly measuring force |
| CN107907262A (en) * | 2017-12-20 | 2018-04-13 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducers for negative pressure measurement |
| CN108375428A (en) * | 2018-01-04 | 2018-08-07 | 南京沃天科技有限公司 | A kind of pressure sensor for fixing absolute pressure chip using no plastic structure |
| CN108375428B (en) * | 2018-01-04 | 2020-08-28 | 南京沃天科技有限公司 | Pressure sensor adopting adhesive-free structure to fix absolute pressure chip |
| CN114719903A (en) * | 2022-03-28 | 2022-07-08 | 河北美泰电子科技有限公司 | Temperature and pressure composite sensor based on metal glass sintered base welding seal |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |