CN200989838Y - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN200989838Y CN200989838Y CN 200620095462 CN200620095462U CN200989838Y CN 200989838 Y CN200989838 Y CN 200989838Y CN 200620095462 CN200620095462 CN 200620095462 CN 200620095462 U CN200620095462 U CN 200620095462U CN 200989838 Y CN200989838 Y CN 200989838Y
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Abstract
The utility model relates to a sensing and measuring field, in particular to a pressure sensor. The pressure sensor provided by the utility model consists of a pressure sensing head and a conditioning circuit board; the pressure sensing head includes a membrane, a pressure sensing device, a filling piece and a shell. The utility model is characterized in that the conditioning circuit board as a clapboard of an oil pouring chamber is arranged in the shell of the pressure sensing head; the pressure sensing device is connected with the conditioning circuit board as a whole. The utility model smartly simplifies the whole structure of the sensor, adopts the technique of strict and simple oil pouring sealing process to manufacture, reduces the producing cost, reduces the size of the device, and meets the requirements of trends of systematization, micromation and integration of components in electric application field.
Description
Technical field
The utility model relates to sensing measurement field, especially pressure transducer.
Background technology
Pressure transducer not only is common in applications such as civilian, also occupies critical role in applications such as military products, Aero-Space, and is therefore more and more higher for the pressure transducer technical requirement.The pressure sensor structure of widespread use at present comprises presser sensor head and transmission circuit plate 5 ' two parts referring to accompanying drawing 1, the presser sensor head be plugged on transmission circuit plate 5 ' on.Its presser sensor head mainly by pressure-sensitive component 2 ', filler piece 3 ' and diaphragm 1 ' form, diaphragm 1 ' and pressure-sensitive component 2 ' between to pass through the silicone oil conducting pressure, in order to guarantee impermeability, need to adopt metal base 7 ' and housing 4 ' formations filling oil pocket and encapsulating, and will pedestal 7 ' in be provided with pin 6 ', pressure-sensitive component 2 ' lead-in wire from pin 6 ' draw, so that be plugged into transmission circuit plate 5 ', realize pressure-sensitive component 2 ' with transmission circuit plate 5 ' on other devices be electrically connected.Referring to accompanying drawing 2, in actual the use, pressure-sensitive component 2 ' with pedestal 7 ' between need to be provided with glass pad 8 ', presser sensor head and transmission circuit plate 5 ' between need card extender structure 9 ', carry out Integratively after connecting again and encapsulate.This pressure transducer not only can carry out the pressure survey of common gas and liquid, also can be used for the pressure survey of corrosive gas and liquid, but complex structure, size is bigger than normal, encapsulation is complicated, requires further improvement.
The utility model content
The utility model provides a kind of pressure transducer at the prior art deficiency.
The pressure transducer that the utility model provides, be to constitute by presser sensor head and transmission circuit plate, described presser sensor head comprises diaphragm, pressure-sensitive component, filler piece and housing, the transmission circuit plate places in the housing of presser sensor head as the dividing plate of irritating oil pocket, and pressure-sensitive component and transmission circuit plate link into an integrated entity.
And pressure-sensitive component adopts the diffused-silicon pressure chip.
And the baseplate material of transmission circuit plate adopts pottery.
And, filler piece be provided with the transmission circuit plate on the corresponding utensil receiving opening of device.
And, the fairlead that double as is irritated oilhole is set on the transmission circuit plate.
Perhaps, fairlead and filling oilhole are set on the transmission circuit plate.
The utility model directly is integrated in pressure-sensitive component on the transmission circuit plate, the transmission circuit plate places the housing of presser sensor head, reduce cost, reduce device size, simplify encapsulation operation by improving one-piece construction, and shortened conductive path, reduced ghost effect, improved electrical property and integrated level.The utility model can satisfy the microminiaturized trend needs of electronic component.
Description of drawings
Fig. 1 is the presser sensor header structure figure of existing pressure transducer;
Fig. 2 is the structural representation of existing pressure transducer;
Fig. 3 is a structural representation of the present utility model;
Fig. 4 is the circuit theory diagrams of the utility model embodiment;
Fig. 5 a is the filler piece structural representation of the utility model embodiment one; Fig. 5 b is the vertical view of Fig. 5 a;
Fig. 6 a is the filler piece structural representation of the utility model embodiment two; Fig. 6 b is the vertical view of Fig. 6 a.
Embodiment
The utility model is described in further detail below in conjunction with embodiment and accompanying drawing.
The pressure transducer that the utility model provides, be to constitute by presser sensor head and transmission circuit plate, described presser sensor head comprises diaphragm 1, pressure-sensitive component 2, filler piece 3 and housing 4, transmission circuit plate 5 places in the housing 4 of presser sensor head as the dividing plate of irritating oil pocket, and pressure-sensitive component 2 links into an integrated entity with transmission circuit plate 5.This one annexation between pressure-sensitive component 2 and the transmission circuit plate 5 had both comprised implication approaching on the physical arrangement, also comprised the implication of electrical connection, and binding got final product after pressure-sensitive component 2 was welded on the transmission circuit plate 5.The pedestal 7 that the pressure transducer of prior art needs ' and card extender structure 9 ', pin 6 ' etc. all be removed.Therefore pressure-sensitive component 2 is as the groundwork device of induction pressure, and relative position should not change between the diaphragm, is attached thereto after transmission circuit plate 5 being put into housing.Pressure-sensitive component 2 links into an integrated entity with transmission circuit plate 5, when shortening the electrical connection distance, can also isolate the space of perfusion silicone oil.Transmission circuit plate 5 places the housing 4 of presser sensor head; constitute the filling oil pocket of perfusion silicone oil between transmission circuit plate 5 and the diaphragm 1; transmission circuit plate 5 is as the dividing plate of irritating oil pocket; substituted this effect (establish dividing plate in addition as being equal to alternative means, also should fall in the utility model protection domain) of pedestal 7 ' play.Space between transmission circuit plate 5 bottoms and the housing 4 is sealant pouring and sealing after finishing all debugging work, this sealant pouring and sealing is implemented simple and reliable, the output pin of transmission circuit plate 5 is directly drawn by colloid, has saved the pressure transducer integral sealing of prior art.The performance and the encapsulation technology of pressure transducer are closely related, the utility model hardens presser sensor head and transmission circuit and carries out system in package (SIP) after closing, satisfy the needs of complete electronic set system development, helped guaranteed performance when reducing device size, simplifying encapsulation operation.
Pressure-sensitive component of the present utility model adopts diffused-silicon pressure sheet P.Piezoresistive effect in semiconductor silicon, the germanium material is than big many of the piezoresistive effect in the metal material.Silicon single crystal material is when being subjected to the external force effect and producing atomic small strain (being generally less than 400 microstrains), and the electron level state of its inner atomic structure can change, thereby causes its resistivity acute variation (G-factor sudden change).Greatly changing also just appears in the resistance made from this material, and this physical influence is called piezoresistive effect.The utility model has utilized the piezoresistive effect of silicon materials.Referring to Fig. 5, diffused-silicon pressure chip P of the present utility model adopts the brilliant unit of ATP100, adopt transmission circuit to handle then: the strain bridge signal that ATP100 is produced with constant current drive chip U (adopting ratio-voltage translation interface integrated circuit (IC) chip AM417-8U) carries out the constant current drive processing, with PNP triode D the result of AM417-8 is amplified again; The diffused-silicon pressure chip has inherent characteristic, and temperature coefficient is bigger, therefore need carry out temperature error compensation to it, temperature compensation mode commonly used is an additional resistance network on strain bridge, by testing and calculating its property at high and low temperature, determine the network resistance, to reach the purpose of temperature compensation.Above circuit structure belongs to prior art, will not give unnecessary details.
Referring to Fig. 4, transmission circuit of the present utility model is on the basis of existing additional resistance network, increasing a plurality of thermistors carries out temperature compensation, thereby guarantees the steady operation in super wide operating temperature range strain bridge, constant current drive source, amplifying circuit gain respectively.Specifically, the utility model embodiment mainly comprises following to the improvement of additional resistance network: the current source adjustment end RB input of AM417-8 increases a variable resistor R1, the collector output of PNP triode increase by one with gain adjustment resistance R 3A thermistor R3B in parallel, resistance R 4A place is adjusted in the output stage gain of AM417-8 periphery increases a thermistor R4B in parallel with it, and the power supply output negative pole of ATP100 increases a thermistor R2B in parallel with stake resistance R2A to the ground connection place.The effect of variable resistor R1 and thermistor R3B is zero point and the gain of regulating pressure transducer, and the effect of thermistor R2B, R4B is that temperature compensation is carried out in the gain of pressure transducer.During concrete enforcement, can also improve circuit, take multiple filtering and shielding measure, to satisfy the electromagnetic compatibility test requirement of pressure transducer harshness, the utility model embodiment increases a pi type filter in parallel with capacitor C 1 at the collector output of PNP triode, and this pi type filter is made up of inductance L 1 and capacitor C 2, C3.
For diffused-silicon pressure chip P and transmission circuit 5 are integrated on the circuit board, just transmission circuit plate 5 itself is as the carriers of diffused-silicon pressure chip P, the most important condition that reaches this purpose is that the thermal expansivity of the thermal expansivity of circuit base material and silicon chip is close, in the employed baseplate material of ordinary circuit board, have only ceramic substrate to meet the demands, so the baseplate material of transmission circuit plate 5 adopt pottery.
The silicone oil amount of filling in the pressure transducer should be as much as possible little, otherwise, the volumetric expansion of silicone oil under different temperatures will bring bigger error to gaging pressure, and be easy to cause the temperature drift of sensor, therefore between diaphragm 1 and pressure-sensitive component 2, to place ring-type filler piece 3, pressure-sensitive component 2 is under annular distance, so that reduce the silicone oil amount when pressure transmits not influencing between diaphragm 1 and the pressure-sensitive component 2.Pressure-sensitive component 2 of the present utility model and transmission circuit plate 5 are integrated, and other devices on the transmission circuit plate 5 might influence the filler piece position, and in order to reduce the silicone oil amount as far as possible, should not enlarge the distance between diaphragm 1 and the pressure-sensitive component 2.In order to reach the optimum efficiency that reduces the silicone oil amount, the technical solution of the utility model be filler piece 3 be provided with transmission circuit plate 5 on the corresponding utensil receiving opening a of device shape.During concrete enforcement, can reserve utensil receiving opening a, during 5 making sheet of transmission circuit plate according to utensil receiving opening a position arrangement electron device position, shown in Fig. 5 a and 5b; Another kind of scheme is to determine number and the shape of utensil receiving opening a according to the electron device shape height of using on the transmission circuit plate 5, shown in Fig. 6 a and Fig. 6 b.The material and the baseplate material of filler piece 3 are corresponding, adopt pottery.
Because transmission circuit plate 5 has been inserted among the housing 4, so must therefore three corresponding fairlead b need be set on transmission circuit plate 5 from transmission circuit plate 5 extracting power supply cords, ground wire and output line so that weld above-mentioned three leads.Fairlead b also can play more important role in the process of making pressure transducer: need can silicone oil between diaphragm 1 and the pressure-sensitive component 2, fairlead b is used as the fill orifice of silicone oil earlier, after the priming by vacuum of finishing silicone oil, through cleaning again, become sealing, that be full of a silicone oil fully space with regard to making the space between diaphragm 1 and the transmission circuit plate 5 with the soldering connection lead of burn-oning.And diaphragm 1 ' weld with housing 4 ' employing welding process irritated the oil sealing dress and is by the pressure transducer of prior art, and process sequence can weld by first filling silicone oil again, also can weld filling silicone oil more earlier.The former need carry out strict control to welding technology, because the filling of silicone oil this moment is in housing 4 ' inside, high temperature in the welding process can cause the consequence that is difficult to expect, though the latter does not have these problems, but need housing 4 ' on reserve to irritate oily passage, finish the silicone oil filling towards the shutoff passage of taking measures again later on, normally be pressed into a steel ball and block the oily passage of filling, might cause the leakage of silicone oil like this after the long-term work.The utility model design double as is irritated the fairlead b of oilhole, has solved the problems referred to above fully, inserts transmission circuit plate 5 backs and irritates oil seal, and is easy to be reliable, durable.Filling oilhole and fairlead b that obvious perfusion silicone oil is used also can be provided with respectively, but fairlead b double as filling oilhole is a most preferred embodiment.
The utility model provides that the pressure sensing appliance system is made technology so that implement:
Circuit theory diagrams in 5 carry out board design at first with reference to the accompanying drawings, and adopt ceramic substrate processing to obtain transmission circuit plate 5; On transmission circuit plate 5, adopt paster welding method welding main element; Presser sensor chip P is glued to earlier on the substrate, again with spun gold binding, more whole transmission circuit plate 5 and ceramic filler piece 3 is bonded to one after qualified by preliminary test.
Then, at the inner position gluings that contacts with transmission circuit plate 5 of Stainless Steel Shell 4, the association that implants transmission circuit plate 5 and ceramic filler piece 3 then correctly locatees and guarantees that the bonded part is bonding closely, again through aging or dry the curing of assurance bonding agent; After the curing, adopt the argon arc roll welding that stainless steel diaphragm 1 and pressure ring (in order to weld fixedly diaphragm 1 a kind of ring that is pressed on the diaphragm 1 of employing) usually are welded on the Stainless Steel Shell 4.
Carry out the vacuum filling of silicone oil at last, then seal and carry out circuit debugging and test, qualified after with housing 4 bottom sealant pouring and sealings.
Claims (6)
1. pressure transducer, constitute by presser sensor head and transmission circuit plate, described presser sensor head comprises diaphragm, pressure-sensitive component, filler piece and housing, it is characterized in that: the transmission circuit plate places in the housing of presser sensor head as the dividing plate of irritating oil pocket, and pressure-sensitive component and transmission circuit plate link into an integrated entity.
2. pressure transducer according to claim 1 is characterized in that: pressure-sensitive component adopts the diffused-silicon pressure chip.
3. pressure transducer according to claim 2 is characterized in that: the baseplate material of transmission circuit plate adopts pottery.
4. according to claim 1 or 2 or 3 described pressure transducers, it is characterized in that: filler piece be provided with the transmission circuit plate on the corresponding utensil receiving opening of device.
5. according to claim 1 or 2 or 3 described pressure transducers, it is characterized in that: the fairlead that double as is irritated oilhole is set on the transmission circuit plate.
6. according to claim 1 or 2 or 3 described pressure transducers, it is characterized in that: fairlead is set on the transmission circuit plate and irritates oilhole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620095462 CN200989838Y (en) | 2006-03-03 | 2006-03-03 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620095462 CN200989838Y (en) | 2006-03-03 | 2006-03-03 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200989838Y true CN200989838Y (en) | 2007-12-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620095462 Expired - Fee Related CN200989838Y (en) | 2006-03-03 | 2006-03-03 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200989838Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105716751A (en) * | 2016-01-27 | 2016-06-29 | 苏州诚亭自动化设备有限公司 | Diffused silicon pressure sensor |
| CN106959138A (en) * | 2017-04-26 | 2017-07-18 | 苏州捷研芯纳米科技有限公司 | Differential pressure flow transducer and its processing method based on MEMS technology |
| CN107764459A (en) * | 2016-08-17 | 2018-03-06 | 苏州明皜传感科技有限公司 | Pressure sensor and its manufacture method |
| CN108005666A (en) * | 2016-11-02 | 2018-05-08 | 上海朝辉压力仪器有限公司 | Native storehouse soil pressure transmitter |
| CN108780015A (en) * | 2016-03-11 | 2018-11-09 | 微软技术许可有限责任公司 | Force snesor |
| CN109764999A (en) * | 2019-02-14 | 2019-05-17 | 河海大学 | A kind of gas pressure measurement sensor |
| CN110726422A (en) * | 2019-03-25 | 2020-01-24 | 共达电声股份有限公司 | Sensor |
-
2006
- 2006-03-03 CN CN 200620095462 patent/CN200989838Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105716751A (en) * | 2016-01-27 | 2016-06-29 | 苏州诚亭自动化设备有限公司 | Diffused silicon pressure sensor |
| CN108780015A (en) * | 2016-03-11 | 2018-11-09 | 微软技术许可有限责任公司 | Force snesor |
| CN108780015B (en) * | 2016-03-11 | 2020-12-22 | 微软技术许可有限责任公司 | Force sensor |
| CN107764459A (en) * | 2016-08-17 | 2018-03-06 | 苏州明皜传感科技有限公司 | Pressure sensor and its manufacture method |
| CN108005666A (en) * | 2016-11-02 | 2018-05-08 | 上海朝辉压力仪器有限公司 | Native storehouse soil pressure transmitter |
| CN106959138A (en) * | 2017-04-26 | 2017-07-18 | 苏州捷研芯纳米科技有限公司 | Differential pressure flow transducer and its processing method based on MEMS technology |
| CN106959138B (en) * | 2017-04-26 | 2024-02-23 | 苏州捷研芯电子科技有限公司 | Differential pressure flow sensor based on MEMS technology and processing method thereof |
| CN109764999A (en) * | 2019-02-14 | 2019-05-17 | 河海大学 | A kind of gas pressure measurement sensor |
| CN110726422A (en) * | 2019-03-25 | 2020-01-24 | 共达电声股份有限公司 | Sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071212 Termination date: 20110303 |