CN205580627U - Gauge pressure pressure sensor - Google Patents
Gauge pressure pressure sensor Download PDFInfo
- Publication number
- CN205580627U CN205580627U CN201620370648.2U CN201620370648U CN205580627U CN 205580627 U CN205580627 U CN 205580627U CN 201620370648 U CN201620370648 U CN 201620370648U CN 205580627 U CN205580627 U CN 205580627U
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- pressure
- chip
- chip slot
- pedestal
- gauge
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Abstract
The utility model provides a gauge pressure pressure sensor, which comprises a base, the pressure chip, the acupuncture needle, the gauge pressure pipe, pressure sensitive diaphragm, the clamping ring, the inner chamber of base divide into chip slot and two upper and lower cavitys of compensation plate mounting groove, the upper end of base still is provided with silicon oil infilling chamber and chip slot intercommunication, the pressure chip is placed in chip slot, be equipped with 3 at least through -holes around chip slot, the acupuncture needle passes through the glass insulator sintering to be fixed in the through -hole, the up end of acupuncture needle exposes in the silicon oil infilling chamber, be connected through gold wire wire and pressure chip, gauge pressure pipe is fixed in chip slot 's bottom and is communicate with chip slot through the glass insulator sintering, clamping ring welded fastening is in the upper end of base, pressure sensitive diaphragm fixes between base and clamping ring. This pressure sensor has abandoned and has adopted the pottery to do the way of packing, and manufacturing cost when reduce sensor temperature drift, improving its sensitivity, has been practiced thrift to metal base integrally packaged's structure entirely, makes the production technology more succinctly optimize.
Description
Technical field
This utility model relates to a kind of gauge sensor.
Background technology
Nowadays the quality of the performance of pressure transducer largely depends on its temperature performance, i.e. temperature drift.Owing to I adopts at company
Being pressure conduction medium with silicone oil, silicone oil itself has certain thermal coefficient of expansion, and these factors disturb pressure transducer
Temperature performance, so reducing oil-filled amount is to improve an a crucial factor of pressure transducer performance.
The pressure transducer used at present, is the end of acupuncture needle and chip to be arranged in same cavity, the core of this structure
Film trap cavity volume is relatively big, in order to reduce the oil-filled volume in chip slot cavity, the way taked be acupuncture needle and chip it
Between utilize pottery etc. harder material as insulation filling.But, during due to encapsulation pressure transducer, need additionally to add pottery
Insulation filling, thus relatively cumbersome producing in assemble flow, and technique is the most relative complex, and production cost is the highest.
Summary of the invention
The purpose of this utility model is to provide a kind of gauge sensor, and this pressure transducer has been abandoned employing pottery and filled
Way, use all-metal pedestal integrative packaging structure, reduce Sensor temperature drift, improve its sensitivity while,
Save production cost, made production technology more succinctly optimize.Pressure measured by this utility model be actual pressure relative to
Pressure under atmospheric pressure environment.
For achieving the above object, this utility model realizes by the following technical solutions:
A kind of gauge sensor, including pedestal, pressure chip, acupuncture needle, gauge pressure pipe, presser sensor diaphragm, pressure ring,
The inner chamber of pedestal is divided into chip slot and upper and lower two cavitys of compensating plate mounting groove, the upper end of pedestal be additionally provided with silicon oil infilling chamber with
Chip slot connects, and pressure chip is placed in chip slot, is provided around at least 3 through holes at chip slot, and acupuncture needle passes through glass
Glass insulator is sintered to fix in through-holes, and the upper surface of acupuncture needle is exposed in silicon oil infilling chamber, by spun gold wire and pressure core
Sheet connects, and gauge pressure pipe is sintered to fix in the bottom of chip slot by glass insulator and connects with chip slot, and pressure ring is welded and fixed
In the upper end of pedestal, presser sensor diaphragm is fixed between pedestal and pressure ring.
It is additionally provided with seal groove in the outside of described pedestal.
The upper end-face edge of described chip slot is chamfering.
Compared with prior art, the beneficial effects of the utility model are:
1) pedestal that this utility model is used is little for the chip slot volume taking up chip varistor, and acupuncture needle is arranged on chip slot
Around, only upper surface is exposed for welding in silicon oil infilling chamber, other parts sealing-in in integral base, this structure
Decrease chip slot and the cavity volume in silicon oil infilling chamber, thus reduce the loading of silicone oil, reduce Sensor temperature drift, carry
The high sensitivity of sensor.
2) this utility model has been abandoned use pottery and has been done the way filled, and uses the structure of all-metal pedestal integrative packaging,
Make production technology more succinctly optimize, save production cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model a kind of gauge sensor；
Fig. 2 is the A-A direction view of Fig. 1；
In figure: 1-chip slot, 2-silicon oil infilling chamber, 3-glass insulator, 4-seal groove, 5-compensating plate mounting groove, 6-gauge pressure
Pipe, 7-acupuncture needle, 8-pedestal, 9-chamfering, 10-pressure ring, 11-presser sensor diaphragm, 12-pressure chip, 13-silicon oil infilling
Hole, 14-spun gold wire.
Detailed description of the invention
Below in conjunction with Figure of description, this utility model is described in detail, it should be noted that enforcement of the present utility model
It is not limited to following embodiment.
As Figure 1-Figure 2, a kind of gauge sensor, including pedestal 8, pressure chip 12, acupuncture needle 7, gauge pressure pipe
6, presser sensor diaphragm 11, pressure ring 10, the inner chamber of pedestal 8 is divided into chip slot 1 and about 5 two chambeies of compensating plate mounting groove
Body, the upper end of pedestal 8 is additionally provided with silicon oil infilling chamber 2 and connects with chip slot 1, and pressure chip 12 is placed on chip slot 1
In, at least 3 through holes that are provided around of chip slot 1, acupuncture needle 7 is sintered to fix in through-holes by glass insulator 3,
The upper surface of acupuncture needle 7 is exposed in silicon oil infilling chamber 2, is connected with pressure chip 12 by spun gold wire 14, gauge pressure pipe 6
Being sintered to fix in the bottom of chip slot 1 by glass insulator 3 and connect with chip slot 1, pressure ring 10 is weldingly fixed on base
The upper end of seat 8, presser sensor diaphragm 11 is fixed between pedestal 8 and pressure ring 10.
Being 7 under through hole regular situation around chip slot 1,6 are used for sintering acupuncture needle 7, and another one is used for charging silicon
Oil.
It is additionally provided with seal groove 4, for mounting O-shaped sealing ring in the outside of described pedestal 8.
The upper end-face edge of described chip slot 1 is chamfering 9.Upper end-face edge at chip slot 1 designs a bigger chamfering 9,
It is possible to prevent spun gold wire 14 to contact with all-metal pedestal 8.
The pedestal 8 of this utility model a kind of gauge sensor uses all 316L stainless steel structure, chip slot 1 interior
Chamber volumetric ratio pressure chip 12 is slightly larger, and pressure chip 12 is arranged in chip slot 1, uses gold wire ball welding procedure by pressure
Input (output) point of chip 12 is coupled together by spun gold wire 14 with the upper surface of acupuncture needle 7, completes electrical connection.
By welding, pressure ring 10 and presser sensor diaphragm 11 are fixed on the upper end of pedestal 8, complete the upper end of gauge sensor
Encapsulation.In silicon oil infilling chamber 2, silicone oil is poured into, then by glass insulator 3 sealing-in by silicon oil infilling hole 13.?
O RunddichtringO is placed, it is achieved sealing when pressure measurement is installed in seal groove 4.Lay pressure core in compensating plate mounting groove 5
Sheet 12 carries out the circuit board of temperature-compensating.
This utility model one gauge sensor, arranges gauge pressure pipe 6 in communication bottom chip slot 1, and being used for will
The back side of pressure chip 12 communicates with ambient atmosphere, therefore measured pressure is that actual pressure is relative to the pressure under atmospheric environment
Power, is i.e. offset output at atmospheric pressure environment lower sensor.
This utility model one gauge sensor, for measuring relative to the pressure under atmospheric pressure environment, have employed full gold
Belong to pedestal integrative packaging structure, reduce the volume of chip slot 1, be served only for accommodating pressure chip 12.On acupuncture needle 7 only has
End face exposes in silicon oil infilling chamber 2 for connecting pressure chip 12.The filling of silicone oil is directly decreased from the design of structure
Amount, has abandoned use pottery and has done the way filled, not only reduced Sensor temperature drift, improve the sensitivity of sensor, and
And saved production cost, make production technology more succinctly optimize, it is achieved that the full-automatic assembling of gauge sensor.
Claims (3)
1. a gauge sensor, it is characterised in that include pedestal, pressure chip, acupuncture needle, gauge pressure pipe, pressure
Sensitive diaphragm, pressure ring, the inner chamber of pedestal is divided into chip slot and upper and lower two cavitys of compensating plate mounting groove, and the upper end of pedestal also sets
Being equipped with silicon oil infilling chamber to connect with chip slot, pressure chip is placed in chip slot, is provided around at least 3 at chip slot
Through hole, acupuncture needle is sintered to fix in through-holes by glass insulator, and the upper surface of acupuncture needle is exposed in silicon oil infilling chamber, passes through
Spun gold wire is connected with pressure chip, and gauge pressure pipe is sintered to fix in the bottom of chip slot by glass insulator and connects with chip slot
Logical, pressure ring is weldingly fixed on the upper end of pedestal, and presser sensor diaphragm is fixed between pedestal and pressure ring.
A kind of gauge sensor the most according to claim 1, it is characterised in that in the outside of described pedestal also
It is provided with seal groove.
A kind of gauge sensor the most according to claim 1, it is characterised in that the upper end edge of described chip slot
Edge is chamfering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620370648.2U CN205580627U (en) | 2016-04-27 | 2016-04-27 | Gauge pressure pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620370648.2U CN205580627U (en) | 2016-04-27 | 2016-04-27 | Gauge pressure pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205580627U true CN205580627U (en) | 2016-09-14 |
Family
ID=56857910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620370648.2U Active CN205580627U (en) | 2016-04-27 | 2016-04-27 | Gauge pressure pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205580627U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112326096A (en) * | 2020-11-04 | 2021-02-05 | 麦克传感器股份有限公司 | Pressure sensitive element sintering base |
-
2016
- 2016-04-27 CN CN201620370648.2U patent/CN205580627U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112326096A (en) * | 2020-11-04 | 2021-02-05 | 麦克传感器股份有限公司 | Pressure sensitive element sintering base |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |