CN205580662U - Pressure sensor integration gauge pressure base - Google Patents

Pressure sensor integration gauge pressure base Download PDF

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Publication number
CN205580662U
CN205580662U CN201620370601.6U CN201620370601U CN205580662U CN 205580662 U CN205580662 U CN 205580662U CN 201620370601 U CN201620370601 U CN 201620370601U CN 205580662 U CN205580662 U CN 205580662U
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China
Prior art keywords
chip slot
gauge pressure
chip
acupuncture needle
pressure
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Application number
CN201620370601.6U
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Chinese (zh)
Inventor
郝程程
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Anshan Hi Tech Sensor Technology Co Ltd
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Anshan Hi Tech Sensor Technology Co Ltd
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Priority to CN201620370601.6U priority Critical patent/CN205580662U/en
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Abstract

The utility model provides a pressure sensor integration gauge pressure base, the device comprises a main body of a basal seat, the acupuncture needle, the gauge pressure pipe, the inner chamber of base body divide into chip slot and two upper and lower cavitys of compensation plate mounting groove, the upper end of base body still is provided with silicon oil infilling chamber and chip slot intercommunication, be equipped with 3 at least through -holes around chip slot, the acupuncture needle passes through the glass insulator sintering to be fixed in the through -hole, the up end of acupuncture needle exposes in the silicon oil infilling chamber, gauge pressure pipe is fixed in chip slot 's bottom and is communicate with chip slot through the glass insulator sintering. The utility model is used for the way that adopts the pottery to do the packing has been abandoned in gauge pressure pressure sensor's encapsulation, regards all -metal structure 's integrated base as the encapsulation original paper that pressure -sensitive chip is single, has really realized the integrally packaged of base, when reduce sensor temperature drift, improving its sensitivity, has practiced thrift manufacturing cost, makes the production technology more succinctly optimize.

Description

A kind of pressure sensor integrated gauge pressure pedestal
Technical field
This utility model relates to a kind of base construction encapsulating pressure transducer, particularly relates to a kind of pressure sensor integrated table Pressure pedestal.
Background technology
Nowadays the quality of the performance of pressure transducer largely depends on its temperature performance, i.e. temperature drift.Owing to I adopts at company Being pressure conduction medium with silicone oil, silicone oil itself has certain thermal coefficient of expansion, and these factors disturb pressure transducer Temperature performance, so reducing oil-filled amount is to improve an a crucial factor of pressure transducer performance.
The pressure transducer pedestal used at present, is the end of acupuncture needle and chip to be arranged in same cavity, this structure Chip slot cavity volume relatively big, in order to reduce the oil-filled volume in chip slot cavity, the way taked is at acupuncture needle and core Utilize the harder materials such as pottery as insulation filling between sheet.The patent literary composition of such as Application No.: CN201020263590.4 One " gauge sensor integrated base " disclosed in part, is the one of such structural pressure sensor base, It is high, stable, reliable etc. that it has integral structure, resistance to static pressure as the encapsulation original paper of a kind of high performance pressure transducer Feature.But, need additionally to add ceramic insulation during due to encapsulation pressure transducer and fill, therefore producing phase in assemble flow To loaded down with trivial details, technique is the most relative complex, and production cost is the highest.
Summary of the invention
The purpose of this utility model is to provide a kind of pressure sensor integrated gauge pressure pedestal, for the envelope of gauge sensor Dress, has abandoned employing pottery and has done the way filled, using the integrated base of all-metal construction as the single encapsulation of chip varistor Original paper, is truly realized the integrative packaging of pedestal, while reducing Sensor temperature drift, improving its sensitivity, saves Production cost, makes production technology more succinctly optimize.
For achieving the above object, this utility model realizes by the following technical solutions:
A kind of pressure sensor integrated gauge pressure pedestal, including base body, acupuncture needle, gauge pressure pipe, the inner chamber of base body divides For upper and lower two cavitys of chip slot and compensating plate mounting groove, the upper end of base body is additionally provided with silicon oil infilling chamber with chip slot even Logical, it is provided around at least 3 through holes at chip slot, acupuncture needle is sintered to fix in through-holes by glass insulator, acupuncture needle Upper surface is exposed in silicon oil infilling chamber, and gauge pressure pipe is sintered to fix in the bottom of chip slot by glass insulator and and chip slot Connection.
It is additionally provided with seal groove in the outside of described base body.
The upper end-face edge of described chip slot is chamfering.
Compared with prior art, the beneficial effects of the utility model are:
A kind of pressure sensor integrated gauge pressure pedestal, little for taking up the chip slot volume of chip varistor, acupuncture needle is arranged on core Around film trap, only upper surface is exposed for welding in silicon oil infilling chamber, and other parts sealing-in, in integral base, subtracts Few chip slot and the cavity volume in silicon oil infilling chamber, thus reduce the loading of silicone oil.Abandon use pottery on this basis Do the way filled, using the integrated base of all-metal construction as the single encapsulation original paper of chip varistor, be truly realized base The integrative packaging of seat, while reducing Sensor temperature drift, improving its sensitivity, has saved production cost, has made production work Skill more succinctly optimizes.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model a kind of pressure sensor integrated gauge pressure pedestal;
Fig. 2 is the upper surface figure of this utility model a kind of pressure sensor integrated gauge pressure pedestal;
In figure: 1-chip slot, 2-silicon oil infilling chamber, 3-glass insulator, 4-seal groove, 5-compensating plate mounting groove, 6-gauge pressure Pipe, 7-acupuncture needle, 8-base body, 9-chamfering, 10-silicon oil infilling hole.
Detailed description of the invention
Below in conjunction with Figure of description, this utility model is described in detail, it should be noted that enforcement of the present utility model It is not limited to following embodiment.
As Figure 1-Figure 2, a kind of pressure sensor integrated gauge pressure pedestal, including base body 8, acupuncture needle 7, gauge pressure Pipe 6, the inner chamber of base body 8 is divided into chip slot 1 and about 5 two cavitys of compensating plate mounting groove, base body 8 upper End is additionally provided with silicon oil infilling chamber 2 and connects with chip slot 1, at least 3 through holes that are provided around of chip slot 1, acupuncture needle 7 Being sintered to fix in through-holes by glass insulator 3, the upper surface of acupuncture needle 7 is exposed in silicon oil infilling chamber 2, gauge pressure pipe 6 It is sintered to fix in the bottom of chip slot 1 by glass insulator 3 and connects with chip slot 1.
Being 7 under through hole regular situation around chip slot 1,6 are used for sintering acupuncture needle 7, and another one is used for charging silicon Oil.
It is additionally provided with seal groove 4, for mounting O-shaped sealing ring in the outside of described base body 8.
The upper end-face edge of described chip slot 1 is chamfering 9.Upper end-face edge at chip slot 1 designs a bigger chamfering 9, It is possible to prevent the spun gold connecting pressure chip and acupuncture needle and all-metal base into contact.
This utility model one pressure sensor integrated gauge pressure pedestal is to use all 316L stainless steel structure, chip slot 1 Cavity volume specific pressure sensitive chip slightly larger, during use, presser sensor chip is arranged in chip slot 1, use spun gold The upper surface of input (output) point of presser sensor chip with acupuncture needle 7 is coupled together by ball bonding technique, completes electrical connection. After the upper end of pressure sensor integrated gauge pressure pedestal is encapsulated, poured in silicon oil infilling chamber 2 by silicon oil infilling hole 10 Silicone oil.O RunddichtringO is placed, it is achieved sealing when pressure measurement is installed in seal groove 4.Lay in compensating plate mounting groove 5 Chip varistor is carried out the circuit board of temperature-compensating.
Using the pressure transducer that this pedestal assembles owing to being provided with gauge pressure pipe 6, gauge pressure pipe 6 communicates with external atmosphere pressure, therefore Measured pressure be actual pressure relative to the pressure under atmospheric environment, be i.e. that zero point is defeated at atmospheric pressure environment lower sensor Go out.
This utility model one pressure sensor integrated gauge pressure pedestal, for the encapsulation of gauge pressure transducer, changes original core Film trap 1 and the attachment structure of acupuncture needle 7, reduce the volume of chip slot 1, is served only for accommodating chip varistor.Acupuncture needle 7 is only Upper surface is exposed in silicon oil infilling chamber 2 for connecting chip varistor.The filling of silicone oil is directly decreased from the design of structure Amount, has abandoned use pottery and has done the way filled, not only reduced Sensor temperature drift, improve the sensitivity of sensor, and And saved production cost, make production technology more succinctly optimize, lay a good foundation for realizing production line for automatically assembling in the future.

Claims (3)

1. a pressure sensor integrated gauge pressure pedestal, it is characterised in that include base body, acupuncture needle, gauge pressure pipe, The inner chamber of base body is divided into chip slot and upper and lower two cavitys of compensating plate mounting groove, and the upper end of base body is additionally provided with silicone oil Charging chamber to connect with chip slot, be provided around at least 3 through holes at chip slot, acupuncture needle is sintered to fix by glass insulator In through-holes, the upper surface of acupuncture needle is exposed in silicon oil infilling chamber, and gauge pressure pipe is sintered to fix at chip slot by glass insulator Bottom and connect with chip slot.
A kind of pressure sensor integrated gauge pressure pedestal the most according to claim 1, it is characterised in that at described base The outside of seat body is additionally provided with seal groove.
A kind of pressure sensor integrated gauge pressure pedestal the most according to claim 1, it is characterised in that described chip The upper end-face edge of groove is chamfering.
CN201620370601.6U 2016-04-27 2016-04-27 Pressure sensor integration gauge pressure base Active CN205580662U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620370601.6U CN205580662U (en) 2016-04-27 2016-04-27 Pressure sensor integration gauge pressure base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620370601.6U CN205580662U (en) 2016-04-27 2016-04-27 Pressure sensor integration gauge pressure base

Publications (1)

Publication Number Publication Date
CN205580662U true CN205580662U (en) 2016-09-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620370601.6U Active CN205580662U (en) 2016-04-27 2016-04-27 Pressure sensor integration gauge pressure base

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CN (1) CN205580662U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110567638A (en) * 2019-08-29 2019-12-13 蚌埠市创业电子有限责任公司 Sensor base for reducing stress of shell to chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110567638A (en) * 2019-08-29 2019-12-13 蚌埠市创业电子有限责任公司 Sensor base for reducing stress of shell to chip
CN110567638B (en) * 2019-08-29 2022-03-04 蚌埠市创业电子有限责任公司 Sensor base for reducing stress of shell to chip

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