CN107144391A - A kind of integrated form MEMS oil-filled pressure transducers - Google Patents
A kind of integrated form MEMS oil-filled pressure transducers Download PDFInfo
- Publication number
- CN107144391A CN107144391A CN201710557211.9A CN201710557211A CN107144391A CN 107144391 A CN107144391 A CN 107144391A CN 201710557211 A CN201710557211 A CN 201710557211A CN 107144391 A CN107144391 A CN 107144391A
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- China
- Prior art keywords
- double
- circuit board
- chip
- layer circuit
- oil
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/18—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements using liquid as the pressure-sensitive medium, e.g. liquid-column gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Abstract
The invention discloses a kind of integrated form MEMS oil-filled pressure transducers, including metal base, boss provided with annular in metal base, double-layer circuit board is installed on the boss, the upper side of double-layer circuit board is provided with pressure chip and IC chip, double-layer circuit board is provided with the process circuit being connected with the pressure chip and the IC chip, and the pressure chip is connected with the IC chip by nation's line；The peripheral circuit plate being connected with the double-layer circuit board is further fixed on the downside of the boss.The present invention integrated pressure chip and IC chip by using double-layer circuit board and on double-layer circuit board, amplification or the digitized processing of pressure signal can be realized by IC chip, the pressure signal that amplified processing and temperature drift are corrected directly is exported, measurement accuracy is high；By the way that double-layer circuit board and peripheral circuit plate are separately fixed at into both sides above and below boss so that the MEMS oil-filled pressure transducer compact conformations, small volume.
Description
Technical field
The present invention relates to MEMS oil-filled pressure transducer encapsulation technologies, especially a kind of integrated form MEMS precharge pressures sensing
Device.
Background technology
MEMS (MEMS, Micro-Electro-Mechanical System), also referred to as mems
System, micro-system, micromechanics etc..Pressure chip in traditional MEMS oil-filled pressure transducer core bodys containing only a MEMS and simple
Temperature-compensation circuit, the signal of output is the millivolt level signal for not doing enhanced processing, using preceding user need outside increase
Magnification circuit plate or digital signal circuit plate containing integrated circuit realize amplification and the normalization of signal, and what is had also needs to again
Increase the electronic components such as anti-electromagnetic interference.Such a structure has the following disadvantages：1st, due to pressure signal and amplifying circuit or numeral
Output circuit is in two different units, and the size of final finished is generally bigger than normal, and structure is relative complex；2nd, due to integrated circuit
With semiconductor pressure chip not in same cavity, the temperature and pressure chip of the temperature sensor measurement built in integrated circuit
Temperature it is not fully synchronous, cause in the faster application scenario of some temperature changes, using integrated circuit to pressure chip
Temperature correction effect can not accurately embody, and this reduces the measurement accuracy of product.
Chinese publication file CN106644244A discloses a kind of MEMS oil-filled pressure transducers, and pressure signal is direct
Part is exported by signal and exports test pressure value, outer bound pair pressure MEMS chip and pressure asic chip can be not only prevented effectively from
Influence and corrosion, and do not need setting signal modulate circuit to proofread output signal, reduce MEMS precharge pressures sensing
The volume of device；But, the unreasonable structure of the MEMS oil-filled pressure transducers, fragile, poor reliability.
The content of the invention
The invention provides a kind of integrated form MEMS oil-filled pressure transducers, for solving existing MEMS precharge pressures sensing
The problem of body product is bigger than normal, temperature correction is inaccurate.
In order to solve the above problems, the present invention provides a kind of integrated form MEMS oil-filled pressure transducers, including metal base,
Double-layer circuit board, the upside of the double-layer circuit board are installed on boss provided with annular in the metal base, the boss
Face is provided with pressure chip and IC chip, and the double-layer circuit board is provided with and the pressure chip and the integrated electricity
The connected process circuit of road chip, the pressure chip is connected with the IC chip by nation's line；The metal base
Upper end metallic membrane, the metallic membrane, the metal base, the boss and the double-layer electric are also welded with by weld-ring
It is filled with silicone oil in oil pocket that road plate is surrounded, the boss and the double-layer circuit board are connected by sealing glue sticking and keep close
Envelope；It is further fixed on setting on the peripheral circuit plate being connected with the double-layer circuit board, the double-layer circuit board on the downside of the boss
There is electric hole, the both sides up and down of the double-layer circuit board are connected by the excessively electric hole and are connected with the peripheral circuit plate, institute
Peripheral circuit plate is stated provided with peripheral component.
The integrated form MEMS oil-filled pressure transducers that the present invention is provided also have following technical characteristic：
Further, the excessively electric hole be arranged on the double-layer circuit board periphery and the excessively electric hole lower end it is described
Boss is blocked and by sealant sealing.
Further, the metal base is provided with oil filler point, and described oil filler point one end is communicated with oil pocket, the oil filler point
The other end be provided with sealed steel ball.
Further, position corresponding with the oil filler point is additionally provided with avoidance circular hole on the peripheral circuit plate.
Further, the material of the metal base and the metallic membrane is stainless steel.
Further, the outer peripheral face of the metal base is provided with groove, the groove and is provided with sealing ring.
The present invention has the advantages that：By using double-layer circuit board and the integrated pressure chip on double-layer circuit board
And IC chip, pressure chip and IC chip are connected to by the process circuit on nation's line and double-layer circuit board
Together, because pressure chip and IC chip are arranged in same oil pocket, the temperature sensor built in IC chip
The temperature of measurement and the temperature Complete Synchronization of pressure chip, thus can be realized by IC chip pressure signal amplification or
Digitized processing, directly exports the pressure signal that amplified processing and temperature drift are corrected, and measurement accuracy is high；By by double-layer circuit board
Both sides above and below boss are separately fixed at peripheral circuit plate so that the MEMS oil-filled pressure transducer compact conformations, small volume.
Brief description of the drawings
Fig. 1 is the structural representation of the integrated form MEMS oil-filled pressure transducers of the embodiment of the present invention.
Embodiment
Describe the present invention in detail below with reference to accompanying drawing and in conjunction with the embodiments.It should be noted that not conflicting
In the case of, the embodiment in the present invention and the feature in embodiment can be mutually combined.
In one embodiment of integrated form MEMS oil-filled pressure transducers of the invention as shown in Figure 1, the integrated form
MEMS oil-filled pressure transducers include being provided with the boss 11 provided with annular in metal base 10, metal base 10, boss 11
Double-layer circuit board 20, the upper side of double-layer circuit board 20 is provided with pressure chip 21 and IC chip 22, double-layer circuit board
20 provided with the process circuit being connected with pressure chip 21 and IC chip 22, pressure chip 21 and IC chip 22
It is connected by nation's line 23；The upper end of metal base 10 is also welded with metallic membrane 13, metallic membrane 13, gold by weld-ring 12
Silicone oil 101 is filled with the oil pocket that category pedestal 10, boss 11 and double-layer circuit board 20 are surrounded, boss 11 leads to the plate of odt circuit 20
The bonding of fluid sealant 14 is crossed to be connected and keep sealing；The downside of boss 11 is further fixed on the peripheral circuit being connected with double-layer circuit board 20
Plate 30, double-layer circuit board 20 was provided with electric hole, passed through the both sides up and down of the excessively electric hole connected double-layer circuit board 20, double-layer electric
The downside of road plate 20 is connected with peripheral circuit plate 30, and peripheral circuit plate 30 is provided with peripheral component, peripheral circuit plate 30 and set
There is the lead 31 for signal output.Integrated form MEMS oil-filled pressure transducers in the embodiment, by using odt circuit
Plate and integrated pressure chip and IC chip on double-layer circuit board, pass through the process circuit on nation's line and double-layer circuit board
Pressure chip is connected together with IC chip, because pressure chip and IC chip are arranged on same oil pocket
Interior, thus the temperature of the temperature sensor measurement built in IC chip and the temperature Complete Synchronization of pressure chip can pass through
IC chip realizes amplification or the digitized processing of pressure signal, directly exports the pressure that amplified processing and temperature drift are corrected
Signal, measurement accuracy is high；By the way that double-layer circuit board and peripheral circuit plate are separately fixed at into both sides above and below boss so that the MEMS
Oil-filled pressure transducer compact conformation, small volume.
In the above-described embodiments, integrated form MEMS oil-filled pressure transducers also have following technical characteristic：The excessively electric hole
The lower end on the periphery and the excessively electric hole that are arranged on double-layer circuit board 20 is blocked and sealed by fluid sealant 14 by boss 11, thus may be used
The electric signal of the side of double-layer circuit board 20 is guided to by opposite side by excessively electric hole, at the same can also by the fluid sealant on boss incited somebody to action
Electric hole sealing, prevents silicone oil from revealing.
In the above-described embodiments, metal base 10 is provided with oil filler point 15, and the one end of oil filler point 15 is communicated with oil pocket, oil filler point
15 other end be provided with sealed steel ball 16, thus can after weld-ring 12 to be fixed to metallic membrane 13 by oil filler point 15 into oil pocket
Filling silicon oil.Preferably, avoidance circular hole is additionally provided with the corresponding position of oil filler point 15 on peripheral circuit plate 30, is thus easy to silicone oil
Filling, sealing.
In the above-described embodiments, the material of metal base 10 and metallic membrane 13 is stainless steel, thus can play anti-corrosion
The effect of erosion, it is to avoid pressure chip and IC chip are corroded by external corrosion medium.Preferably, metal base 10
Outer peripheral face is provided with groove, the groove and is provided with sealing ring 17 so that the MEMS oil-filled pressure transducers and miscellaneous part
Sealed during connection by sealing ring.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
The present invention is described in detail with reference to the foregoing embodiments, it will be understood by those within the art that：It still may be used
To be modified to the technical scheme described in foregoing embodiments, or equivalent substitution is carried out to which part technical characteristic；
And these modification or replace, do not make appropriate technical solution essence depart from various embodiments of the present invention technical scheme spirit and
Scope.
Claims (6)
1. the boss provided with annular in a kind of integrated form MEMS oil-filled pressure transducers, including metal base, the metal base,
Characterized in that, be provided with double-layer circuit board on the boss, the upper side of the double-layer circuit board provided with pressure chip and
IC chip, the double-layer circuit board is provided with the processing electricity being connected with the pressure chip and the IC chip
Road, the pressure chip is connected with the IC chip by nation's line；Also welded by weld-ring the upper end of the metal base
It is connected in metallic membrane, the oil pocket that the metallic membrane, the metal base, the boss and the double-layer circuit board are surrounded and fills out
Filled with silicone oil, the boss and the double-layer circuit board are connected by sealing glue sticking and keep sealing；The downside of the boss
The peripheral circuit plate being connected with the double-layer circuit board is further fixed on, the double-layer circuit board was provided with electric hole, by described
Cross electric hole to connect the both sides up and down of the double-layer circuit board and with the peripheral circuit plate be connected, the peripheral circuit plate is provided with
Peripheral component.
2. integrated form MEMS oil-filled pressure transducers according to claim 1, it is characterised in that the excessively electric hole is arranged on
Blocked by the boss and by sealant sealing the lower end in the periphery of the double-layer circuit board and the excessively electric hole.
3. integrated form MEMS oil-filled pressure transducers according to claim 1, it is characterised in that set on the metal base
There is oil filler point, described oil filler point one end is communicated with oil pocket, the other end of the oil filler point is provided with sealed steel ball.
4. integrated form MEMS oil-filled pressure transducers according to claim 3, it is characterised in that on the peripheral circuit plate
Position corresponding with the oil filler point is additionally provided with avoidance circular hole.
5. integrated form MEMS oil-filled pressure transducers according to claim 4, it is characterised in that the metal base and institute
The material for stating metallic membrane is stainless steel.
6. integrated form MEMS oil-filled pressure transducers according to claim 5, it is characterised in that outside the metal base
Side face is provided with groove, the groove and is provided with sealing ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710557211.9A CN107144391A (en) | 2017-07-10 | 2017-07-10 | A kind of integrated form MEMS oil-filled pressure transducers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710557211.9A CN107144391A (en) | 2017-07-10 | 2017-07-10 | A kind of integrated form MEMS oil-filled pressure transducers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107144391A true CN107144391A (en) | 2017-09-08 |
Family
ID=59775628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710557211.9A Pending CN107144391A (en) | 2017-07-10 | 2017-07-10 | A kind of integrated form MEMS oil-filled pressure transducers |
Country Status (1)
| Country | Link |
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| CN (1) | CN107144391A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109632153A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing vertical load and the method for real-timely testing of horizontal displacement |
| CN109632154A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing real-time testing system and preparation method thereof |
| CN109668678A (en) * | 2019-01-28 | 2019-04-23 | 安徽天康(集团)股份有限公司 | A kind of pressure transmitter based on MEMS sensor |
| CN112113699A (en) * | 2019-06-21 | 2020-12-22 | 霍尼韦尔国际公司 | Micro-molded fluid pressure sensor housing |
| CN114001846A (en) * | 2021-11-08 | 2022-02-01 | 麦克传感器股份有限公司 | Integrated isolated-packaging pressure sensor |
| CN116718305A (en) * | 2023-08-09 | 2023-09-08 | 合肥皖科智能技术有限公司 | Oil charging pressure sensor based on PCB packaging |
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| CN101738280A (en) * | 2008-11-24 | 2010-06-16 | 河南理工大学 | Mems pressure sensor and manufacturing method thereof |
| US20110290032A1 (en) * | 2010-05-31 | 2011-12-01 | Kunshan Shuangqiao Sensor Measurement Controlling Co., Ltd. | Automobile general pressure sensor |
| CN204128731U (en) * | 2014-09-26 | 2015-01-28 | 深圳瑞德感知科技有限公司 | A kind of MEMS oil-filled pressure transducer |
| CN204461670U (en) * | 2015-03-04 | 2015-07-08 | 苏州敏芯微电子技术有限公司 | A kind of pressure sensor packaging structure |
| CN105628289A (en) * | 2015-12-25 | 2016-06-01 | 陕西电器研究所 | Four-redundancy pressure sensor adopting sputtering film core body |
| CN106289382A (en) * | 2015-06-08 | 2017-01-04 | 伊玛精密电子（苏州）有限公司 | Antiacid alkali all-metal flow temperature sensor |
| CN106644244A (en) * | 2016-11-17 | 2017-05-10 | 歌尔股份有限公司 | MEMS pressure sensor |
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Patent Citations (10)
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|---|---|---|---|---|
| US5859759A (en) * | 1996-10-02 | 1999-01-12 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor pressure sensor module |
| CN201047790Y (en) * | 2007-05-23 | 2008-04-16 | 哈尔滨市东北汽车电子工程技术研究开发中心 | Oil pressure sensor |
| CN101738280A (en) * | 2008-11-24 | 2010-06-16 | 河南理工大学 | Mems pressure sensor and manufacturing method thereof |
| US20110290032A1 (en) * | 2010-05-31 | 2011-12-01 | Kunshan Shuangqiao Sensor Measurement Controlling Co., Ltd. | Automobile general pressure sensor |
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| CN106289382A (en) * | 2015-06-08 | 2017-01-04 | 伊玛精密电子（苏州）有限公司 | Antiacid alkali all-metal flow temperature sensor |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109668678A (en) * | 2019-01-28 | 2019-04-23 | 安徽天康(集团)股份有限公司 | A kind of pressure transmitter based on MEMS sensor |
| CN109632153A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing vertical load and the method for real-timely testing of horizontal displacement |
| CN109632154A (en) * | 2019-01-31 | 2019-04-16 | 苏州美仑凯力电子有限公司 | A kind of vibration isolator rubber bearing real-time testing system and preparation method thereof |
| CN112113699A (en) * | 2019-06-21 | 2020-12-22 | 霍尼韦尔国际公司 | Micro-molded fluid pressure sensor housing |
| CN112113699B (en) * | 2019-06-21 | 2023-04-04 | 霍尼韦尔国际公司 | Micro-molded fluid pressure sensor housing |
| US11630011B2 (en) | 2019-06-21 | 2023-04-18 | Honeywell International Inc. | Micro-molded fluid pressure sensor housing |
| CN114001846A (en) * | 2021-11-08 | 2022-02-01 | 麦克传感器股份有限公司 | Integrated isolated-packaging pressure sensor |
| CN116718305A (en) * | 2023-08-09 | 2023-09-08 | 合肥皖科智能技术有限公司 | Oil charging pressure sensor based on PCB packaging |
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