CN202631163U - Inner hole sealing structure of ceramic pressure sensor - Google Patents

Inner hole sealing structure of ceramic pressure sensor Download PDF

Info

Publication number
CN202631163U
CN202631163U CN 201220251998 CN201220251998U CN202631163U CN 202631163 U CN202631163 U CN 202631163U CN 201220251998 CN201220251998 CN 201220251998 CN 201220251998 U CN201220251998 U CN 201220251998U CN 202631163 U CN202631163 U CN 202631163U
Authority
CN
China
Prior art keywords
sensor
ceramic
pressure sensor
groove
shell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 201220251998
Other languages
Chinese (zh)
Inventor
薄卫忠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUXI SENMIC SENSING TECHNOLOGY Co Ltd
Original Assignee
WUXI SENMIC SENSING TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WUXI SENMIC SENSING TECHNOLOGY Co Ltd filed Critical WUXI SENMIC SENSING TECHNOLOGY Co Ltd
Priority to CN 201220251998 priority Critical patent/CN202631163U/en
Application granted granted Critical
Publication of CN202631163U publication Critical patent/CN202631163U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Abstract

The utility model relates to a ceramic pressure sensor, and aims at providing an inner hole sealing structure of a ceramic pressure sensor for making the sensor unstressed in the longitudinal direction when the assembling is completed and improving the measurement precision, and the inner hole sealing structure comprises a shell and a ceramic sensor, wherein the shell is used for encapsulating a sensitive element and a circuit and connected with a tested matrix, the sensitive element is used for detecting a tested signal and outputting the signal, a sensor holding groove is arranged on the bottom of an inner cavity of the shell, the ceramic sensor is fixed inside the sensor holding groove, a nylon ring is arranged above the ceramic sensor, the upper part of the nylon ring is provided with a snap ring, the ceramic sensor is uniformly compressed inside the shell through the snap ring, the inner side of the sensor holding groove extends upwards to form a sealing groove, and an O-shaped inner sealing is arranged inside the sealing groove. By adopting the inner hole sealing structure, only smaller compression force is needed, the sensor is free from being stressed in the longitudinal direction after being assembled, the sensor stays at a suspended state, no prestress exists, the measurement precision and the stability are greatly improved, and simultaneously the encapsulation size and the cost are also reduced.

Description

The endoporus hermetically-sealed construction of ceramic pressure sensor
Technical field
The utility model relates to a kind of ceramic pressure sensor, relates in particular to a kind of endoporus hermetically-sealed construction of ceramic pressure sensor.
Background technology
Ceramic sensor element is the developing direction of pressure transducer, in American-European countries the trend that comprehensively substitutes the other types sensor is arranged, and uses ceramic sensor element to substitute diffusion silicon pressure sensor in Chinese more and more users.
In the prior art, bottom seals is adopted in the endoporus of ceramic pressure sensor sealing, and its defective is following: with the contact area of medium be 2 square centimeters; Need bigger vertical snap-in force, this snap-in force can produce prestress, causes the sensor zero point drift; Influence precision, compress, then produce torsion at tightening direction as adopting screw thread; This torsion also can produce prestress, also can influence precision.
The utility model content
The purpose of the utility model provides a kind of when assembling is accomplished, and sensor does not vertically stress, the endoporus hermetically-sealed construction of the ceramic pressure sensor that measuring accuracy is high.
In order to address the above problem, the utility model is realized through following technical scheme:
The endoporus hermetically-sealed construction of the ceramic pressure sensor of the utility model comprises housing and ceramic sensor element, and said housing is used to encapsulate sensitive element and circuit; And be connected with tested matrix, sensitive element is used to detect measured signal, and the output signal; The intracavity bottom of said housing is provided with the sensor standing groove, and ceramic sensor element is fixed in the sensor standing groove, and the top of ceramic sensor element is provided with nylon ring; The top of nylon ring is provided with snap ring; Through this snap ring ceramic sensor element evenly is pressed in the housing, the inboard of said sensor standing groove extends upward out a seal groove, is provided with O type inner seal ring in the seal groove.
Further, the inwall of said housing is provided with annular groove, and snap ring is placed in this annular groove.
Further, the bottom of said ceramic sensor element does not contact with the bottom land of sensor standing groove.
Compared with prior art, the beneficial effect of the utility model is: adopt this endoporus hermetically-sealed construction, the medium contact area is 0.75 square centimeter; Only need littler snap-in force, sensor was not vertically stressing when assembling was accomplished, and was in suspended state; Do not have prestress, measuring accuracy and stability improve greatly, simultaneously; Encapsulation volume reduces, and cost also reduces.
Description of drawings
Fig. 1 is the section of structure of the endoporus hermetically-sealed construction of the utility model ceramic pressure sensor;
Fig. 2 is the section of structure of Fig. 1 middle shell.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
Embodiment 1
As depicted in figs. 1 and 2, a kind of endoporus hermetically-sealed construction of ceramic pressure sensor comprises housing 1 and ceramic sensor element 2; Housing 1 is used to encapsulate sensitive element and circuit, and is connected with tested matrix, and sensitive element is used to detect measured signal; And the output signal, the intracavity bottom of housing 1 is provided with sensor standing groove 11, and ceramic sensor element 2 is fixed in the sensor standing groove 11; The top of ceramic sensor element 2 is provided with nylon ring 3, and the top of nylon ring 3 is provided with snap ring 4, through this snap ring 4 ceramic sensor element 2 evenly is pressed in the housing 1; The inboard of sensor standing groove 11 extends upward out a seal groove 12, is provided with O type inner seal ring 5 in the seal groove 12.
The inwall of housing 1 is provided with annular groove 13, and snap ring 4 is placed in this annular groove 13; The bottom of ceramic sensor element 2 does not contact with the bottom land of sensor standing groove 11.
Adopt this endoporus hermetically-sealed construction, the medium contact area is 0.75 square centimeter, only needs littler snap-in force, and sensor was not vertically stressing when assembling was accomplished; Be in suspended state, do not have prestress, measuring accuracy and stability improve greatly; Simultaneously, encapsulation volume reduces, and cost also reduces.
This technology is successfully used in the manufacturing of A/C pressure sensor.The height of its packed part is 11mm, therefore must adopt the endoporus hermetically-sealed construction, otherwise peace can not load (volume restrictions is arranged) on air conditioning for automobiles.The bundle mouth of aluminum hull press-fits (aluminium is all soft more a lot of than copper material and steel, and the bundle mouth pressure is all little more a lot of than common material), only needs the encapsulation pressure of one of four parts on common structure, guarantees enough package strength.Annual leakage rate less than 1 milligram reaches up-to-date environmental protection standard.
The above only is the preferred implementation of the utility model; Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model know-why, can also make some improvement and modification, these improvement and modification also should be regarded as the protection domain of the utility model.

Claims (3)

1. the endoporus hermetically-sealed construction of a ceramic pressure sensor comprises housing and ceramic sensor element, and said housing is used to encapsulate sensitive element and circuit; And be connected with tested matrix; It is characterized in that: the intracavity bottom of said housing is provided with the sensor standing groove, and ceramic sensor element is fixed in the sensor standing groove, and the top of ceramic sensor element is provided with nylon ring; The top of nylon ring is provided with snap ring; Through this snap ring ceramic sensor element evenly is pressed in the housing, the inboard of said sensor standing groove extends upward out a seal groove, is provided with O type inner seal ring in the seal groove.
2. the endoporus hermetically-sealed construction of ceramic pressure sensor according to claim 1, it is characterized in that: the inwall of said housing is provided with annular groove, and snap ring is placed in this annular groove.
3. the endoporus hermetically-sealed construction of ceramic pressure sensor according to claim 1, it is characterized in that: the bottom of said ceramic sensor element does not contact with the bottom land of sensor standing groove.
CN 201220251998 2012-05-31 2012-05-31 Inner hole sealing structure of ceramic pressure sensor Expired - Lifetime CN202631163U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220251998 CN202631163U (en) 2012-05-31 2012-05-31 Inner hole sealing structure of ceramic pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220251998 CN202631163U (en) 2012-05-31 2012-05-31 Inner hole sealing structure of ceramic pressure sensor

Publications (1)

Publication Number Publication Date
CN202631163U true CN202631163U (en) 2012-12-26

Family

ID=47384354

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220251998 Expired - Lifetime CN202631163U (en) 2012-05-31 2012-05-31 Inner hole sealing structure of ceramic pressure sensor

Country Status (1)

Country Link
CN (1) CN202631163U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104088871A (en) * 2014-06-27 2014-10-08 华南理工大学 Precision positioning drive-end pre-tightening device
CN106052940A (en) * 2015-04-10 2016-10-26 罗伯特·博世有限公司 Apparatus for determining pressure and method of manufacturing the same
CN108303209A (en) * 2017-01-12 2018-07-20 霍尼韦尔国际公司 O-ring inner seal liner for pressure sensor
CN109596260A (en) * 2019-01-03 2019-04-09 西安中星测控有限公司 A kind of pressure transmitter

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104088871A (en) * 2014-06-27 2014-10-08 华南理工大学 Precision positioning drive-end pre-tightening device
CN104088871B (en) * 2014-06-27 2016-03-02 华南理工大学 A kind of precision positioning drive end pre-tightening apparatus
CN106052940A (en) * 2015-04-10 2016-10-26 罗伯特·博世有限公司 Apparatus for determining pressure and method of manufacturing the same
CN106052940B (en) * 2015-04-10 2020-11-03 罗伯特·博世有限公司 Device for determining pressure and method for producing the same
CN108303209A (en) * 2017-01-12 2018-07-20 霍尼韦尔国际公司 O-ring inner seal liner for pressure sensor
CN108303209B (en) * 2017-01-12 2021-06-18 霍尼韦尔国际公司 O-ring inner seal for pressure sensor
CN109596260A (en) * 2019-01-03 2019-04-09 西安中星测控有限公司 A kind of pressure transmitter

Similar Documents

Publication Publication Date Title
CN202631163U (en) Inner hole sealing structure of ceramic pressure sensor
CN206670840U (en) A kind of small-sized silicon piezoresistance type gas pressure sensor structure
CN104101456B (en) Pressure transducer medium insulation package structure
CN202442825U (en) Dielectric isolation encapsulating structure of pressure sensor
CN204461670U (en) A kind of pressure sensor packaging structure
CN201138258Y (en) Surface mounted combined pressure sensor
CN107144391A (en) A kind of integrated form MEMS oil-filled pressure transducers
CN106644244A (en) MEMS pressure sensor
CN105333939B (en) The waterproof connector of I-shaped beam type dynamic weighing sensor for vehicle
CN205027465U (en) Two remaining pressure tube structures
CN203365047U (en) Dual-path pressure sensitive core
CN107543644A (en) Quick response diaphragm pressure sensor and its manufacture method
CN206450347U (en) A kind of encapsulating structure of pressure sensor
CN201852665U (en) Gas pressure sensor
CN206945201U (en) A kind of integrated form MEMS oil-filled pressure transducers
CN105547567A (en) Gauge age pressure sensor
CN104215383B (en) Thin-film isolation gauge pressure sensor with built-in balance chamber
CN103712729A (en) Non-welding-sealed pressure sensor
CN202710237U (en) Absolute pressure sensor packaging structure
CN204085770U (en) A kind of ceramic pressure sensor novel package structure
CN201583379U (en) Deep sea high pressure sensor packaging structure
CN209417074U (en) A kind of piezoelectricity velocity sensor
CN201242484Y (en) Whole closed type capacitance pressure differential pressure transmitter
CN104181202B (en) A kind of many redundancy hydrogen gas sensors
CN103063357A (en) Gas pressure transmitter based on ceramic packaging

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20121226

CX01 Expiry of patent term