CN106052940A - Apparatus for determining pressure and method of manufacturing the same - Google Patents
Apparatus for determining pressure and method of manufacturing the same Download PDFInfo
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- CN106052940A CN106052940A CN201610217752.2A CN201610217752A CN106052940A CN 106052940 A CN106052940 A CN 106052940A CN 201610217752 A CN201610217752 A CN 201610217752A CN 106052940 A CN106052940 A CN 106052940A
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- sealing
- cavity
- pressure
- sensor device
- sealing device
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/18—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/005—Non square semiconductive diaphragm
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Measuring Fluid Pressure (AREA)
- Combined Controls Of Internal Combustion Engines (AREA)
Abstract
The present invention relates to a device for determining a pressure and a method of manufacturing the same. The device is configured with a housing having a cavity and a first sealing structure, a sensor device having a second sealing structure in cooperation with the first sealing structure so that the mouth of the cavity can pass therethrough Wherein the sensor device is configured to determine a pressure to load the cavity; and a sealing device at least partially disposed in the cavity and configured to apply pressure to the cavity by applying a pressing force to Said sensor means to compress said second seal structure onto said first seal structure.
Description
Technical field
The present invention relates to a kind of device for determining pressure and a kind of manufacture for determining the device of pressure
Method.The invention particularly relates to a kind of pressure transducer, preferred high pressure sensor, it has certainly
The constructing technology sealed and interconnection technique." high pressure sensor " should be particularly understood that and be designed for determining
The sensor of the pressure in 2000 Palestine and Israels, in preferably 2500 Palestine and Israels, in particularly preferred 3000 Palestine and Israels,
Wherein, described high pressure sensor is advantageously not damaged by.1 bar is equivalent to 100000 Pascals.
Background technology
In hydraulic pressure and in many fields of process technology, pressure transducer, i.e. it is used for determining pressure
The device of power (pressure of especially greater than 50 bars) plays an important role.Particularly in automobile construction
This kind of device can be used in various different systems, such as, dynamically adjust at direct fuel injection device and traveling
In regulating device.Typically be used herein so-called pressure resistance type high pressure sensor, its have especially accurately and
Sane performance and can be with relatively low expense manufacture.
In piezoresistive pressure sensor, the steel diaphragm designed suitably exists to elongation sensitivity
Resistance, these resistance are used for connecting into Wheatstone bridge.The pressure to be determined being applied on described steel diaphragm
Power causes this steel diaphragm to deform.The material elongation of the resistance being therefore likely to result on described steel diaphragm surface.
Described resistance is disposed so as elongation at this or contraction can be sensed.Caused Wheatstone bridge
(also referred to as resistance bridge) lacks of proper care in the case of the diaphragm deflection that described steel diaphragm is little with given
Proportional pressure also can be analyzed processing by suitable electronic installation.
A kind of two-part pressure transducer, its two are described in DE 10 2,009 025 486 A1
Individual part is fixed to one another by means of weld seam.Part I is to have externally threaded housing, described external screw thread
The fluid with its pressure to be determined does not contacts.Part II has measurement section, this measurement section by
The deformation that pressure to be determined causes is measured and analyzed process is to determine this pressure to be determined.
Summary of the invention
The invention discloses a kind of device with claim 1 feature and one has claim 8
The method being used for manufacturing device of feature.
Correspondingly, the present invention provides a kind of device for determining pressure, comprising: have sky
Chamber and first seals the housing of structure；Having the sensor device of the second sealing structure, second seals knot
Structure and first seals structure and is so in cooperation so that seal structure and described the by means of described first
Two seal structure, and the oral area of described cavity can be closed by described sensor device, wherein, described
Cavity is loaded with pressure to be determined, and described sensor device is configured for determining described pressure to be determined
Power；And sealing device, it at least partly, is preferably completely arranged in described cavity and is configured to
For described by extruding force is applied on described sensor device to make the second sealing structure be pressed to
First seals in structure.
Described pressure to be determined especially can import to the pressure of the fluid in described cavity, described fluid
Being loaded with this pressure to be determined, the most described cavity is also loaded with this pressure to be determined.Described dress
The housing put is also known as pressure tap.Described sealing device and described sensor device are referred to alternatively as
Engage mating member.The oral area of described cavity is interpreted as from described cavity to the outside of described device
Through-flow connecting portion.Through-flow connecting portion is interpreted as to receive fluid to arrive another position from a position
The path put.
Additionally, provide a kind of manufacture method for determining the device of pressure, the party by the present invention
Method comprises the steps: to construct and has cavity and first and seal the housing of structure；It is close that structure has second
The sensor device of seal structure；Described sensor device is so incorporated in described cavity so that logical
Cross the oral area that described sensor device can be closed or close described cavity；To have the second sealing structure
Sealing device at least partly, be preferably completely arranged in described cavity so that described sealing device lead to
Cross and be applied to extruding force on described sensor device make the second sealing structure be pressed to the first sealing knot
On structure.
The present invention is based on following cognition: the manufacture of the pressure transducer being made from multiple components advantageously makes
Obtain all parts can optimally produce dividually and also in terms of required manufacture consuming.Additionally,
Manufactured all parts can be so connected with each other or the most interconnective so that determines pressure
That minimizing deformation of the parts of power.High pressure sensor often requires that e.g., from about 0.5%FS (full scale；
English: Full Scale) new parts precision.In order to reach this precision, it is advantageous to engaging
Do not have pressure transducer during all parts of described pressure transducer, described for determining pressure
The skew of zero-signal of device.The most particularly advantageously, it is self sealss according to assembly of the invention
, the pressure being i.e. applied to described cavity is the highest, and the oral area of described cavity is closed by sensor device
The tightst.
Additionally, eliminate the weld seam by tensile load according to assembly of the invention, this improves described dress
The intensity put.Additionally, according to the make of assembly of the invention both when manufacturing this device also
Ensure when using field stripping or this device is installed: the sensor device of described device is preferably to outside
Impact machinery uncoupling.
Additionally, according to assembly of the invention advantage described here and the sensor manufacturing described device
Concrete grammar used by device is unrelated.The one describing described sensor device below has based on thin layer
The embodiment of measuring unit, this embodiment illustrates the one in multiple example.
By advantageous embodiment available in dependent claims and explanation referring to the drawings and improvement side
Case.
According to a kind of advantageous modification, described sensor device has: diaphragm, described diaphragm and institute
State cavity and be in connection；And measuring unit, described measuring unit is configured to change based on described diaphragm
Shape determines the pressure to be determined loading described cavity.Described measuring unit especially can have favour stone electricity
Bridge.Described diaphragm can be configured to the thinning section of the single type matrix of described sensor device, described base
Body such as can be made up of steel.Therefore, it is possible to particularly accurately determine described pressure to be determined.
According to another preferred improvement project, described sealing device is so arranged under pretightning force effect
On described housing so that make described sealing device so compress described sensor device based on this pretightning force,
Thus the second sealing structure is forced into be in and seals in the first sealing structure of respective outer side edges with second.
Therefore, even if also ensureing described sensing when there is no additonal pressure or only having the least additonal pressure
Device device is connected hermetically with described housing pressure so that do not go out on the first oral area of described cavity
The existing pressure loss, but the first oral area is sealed shut by described sensor device pressure.Therefore change
Sentence is talked about, and described device is self-packing.
According to another preferred improvement project, described sealing device is fixed on by means of at least one weld seam
On described housing.It is fixedly attached on described housing therefore, it is possible to realize described sealing device.
According to another preferred improvement project, described first seals structure has the first external taper, and institute
Stating tapering in the second sealing structure has first, wherein, in first, tapering can be pressed on positive
To close the described oral area of cavity on first external taper.It is to say, tapering can seal by pressure in first
Be pressed in described first external taper.Therefore the described oral area guided away from the cavity of housing can quilt
Specifically and tightly close." external taper " should be particularly understood that the side of tapered recess in element." inner cone
Portion " should be particularly understood that the conical outer surface of element.
According to another preferred improvement project, described sensor device has the 3rd sealing structure, its structure
Cause for jointly sealing with described sealing device.3rd seals structure can have the second outer cone
Portion or be made up of the second external taper.3rd seal structure can additionally or alternatively have sealing seamed edge or
Person is formed by sealing seamed edge.Seal seamed edge and be also referred to as engaged seamed edge.Hence in so that at described sensor
The most pressure-tight connection can be realized between device and described sealing device.
According to another preferred improvement project, the 3rd sealing structure of described sensor device has second
External taper, wherein said sealing device have be configured to tapering in second the 4th sealing structure, the 4th
Sealing structure can be formed with the 3rd sealing structure and coordinates or formed cooperation.Especially, tapering in second
Can compress (such as passing through pretightning force) to the second external taper, in i.e. second, tapering can be pressed into described
In external taper.Therefore the pressure between described sensor device and described sealing device is further increased
Sealing.
A kind of advantageous modification of manufacturing method according to the invention, is arranging described sealing device
Or when being incorporated in described cavity, in order to this sealing device being fixed in the cavities and in order to extrude
Power is applied on sensor device, is so pressed in cavity by sealing device so that at sealing device
At least there is pretightning force between sensor device (alternatively, and housing).Can arrange, described
Sealing device is fixed in the cavity of described housing only by means of described pretightning force, i.e. there is interference
Coordinate.The magnitude of interference of described interference fit is preferably chosen as: when described cavity is applying pressure to be determined
In the case of expand time, the connection between sealing device and housing is still pressure-tight.Described interference
Amount can adapt to intended pressure depending on the use region according to assembly of the invention.
According to another preferred improvement project, described sealing device is being arranged or is being incorporated into described cavity
Time middle, in order in the cavities and fill fixing for this sealing device to extruding force be applied to sensor
Put, sealing device is joined in cavity under the effect of predetermined pretightning force and by means of
Weld seam is fixed on described housing.Therefore can be provided between sealing device and housing by described weld seam
Pressure be tightly connected.Also contemplated that interference is joined to be fixed in described cavity by sealing device
Close and the most back to back combination welded.
Accompanying drawing explanation
The present invention is explained in detail referring to the embodiment shown in the schematic diagram of accompanying drawing.Accompanying drawing illustrates:
Fig. 1 according to one embodiment of the present invention, for determining device 1 schematic of pressure
Block diagram；
Fig. 2 according to another embodiment of the present invention, for determining the signal of device 100 of pressure
Property cross-sectional view；
Fig. 3 according to another embodiment of the present invention, for determining the signal of device 100 of pressure
Property cross-sectional view；
Fig. 4 according to another embodiment of the present invention, for determining the signal of device 300 of pressure
Property cross-sectional view；
Fig. 5 according to another embodiment of the present invention, for determining device 400 schematic of pressure
Cross-sectional view；
The exemplary details figure of the sensor device 120 of the device 100 in Fig. 6 Fig. 2；
Fig. 7 a) to 7c) according to the possible various sensor devices 120 of assembly of the invention；320；
The schematic cross section of 520；With
Fig. 8 is for explaining the indicative flowchart of the method according to the invention, and described method is used for manufacturing
For determining the device of pressure.
In all of the figs, as long as no providing other explanation, element that identical or function is identical and dress
Put and be just provided with identical reference.The numbering of method step only for making orderliness understand, and if
Do not provide other explanation, the most should not represent the time sequencing determined.The most also can perform simultaneously
Multiple method steps.
Detailed description of the invention
Fig. 1 show according to one embodiment of the present invention, for determining showing of the device 1 of pressure
Meaning property block diagram.
Device 1 has the housing 10 of band cavity 12, and this cavity has oral area 13, and this oral area is from cavity
On 12 outsides outwards leading to housing 10.Housing 10 also has the first sealing structure 14.Device 1 is also
Including the sensor device 20 with the second sealing structure 24.Second sealing structure 24 is the closeest with first
Seal structure 14 is in cooperation so that seals structure 14 and second by means of first and seals structure 24, empty
The oral area 13 in chamber 12 can be closed or close by sensor device 20.
Described cavity is loaded with pressure to be determined, and its mode is, is loaded with this pressure to be determined
Fluid is directed in this cavity or has imported in this cavity, and sensor device 20 is configured for really
Fixed described pressure to be determined.
Device 1 also has sealing device 50, and this sealing device is fully disposed in cavity 12 and this is close
Seal apparatus is configured for making the second sealing structure on sensor device 20 by extruding force being applied to
24 are pressed to seal structure 24 with second is in the first sealing structure 14 coordinated.
Sensor device 20, sealing device 50 and housing 10 are preferably separated from each other the element of manufacture,
In i.e. three elements, any two manufactures the most integrally with each other.
Fig. 2 show according to another embodiment of the present invention, for determining the device 100 of pressure
Schematic block diagram.
Device 100 is the modification of device 1.The sensor device 120 of device 100 has diaphragm 122,
This diaphragm is a part for the integral type matrix 123 of sensor device 120.Matrix 123 is preferably by steel
Make.Diaphragm 122 such as can be by constituting matrix 123 boring so that is formed and matrix 123
Remainder compare a relatively thin section as diaphragm 122.Cavity 12 is deviated from diaphragm 122
On first outer surface, measuring unit 60 is configured for deformation based on diaphragm 122 and determines pressure.
The measuring unit 60 of device 100 describes in detail hereinafter with reference to Fig. 6.
The matrix 123 of sensor device 120 symmetrically constructs about rotationally symmetric axis R1, should
Rotationally symmetric axis intersects with diaphragm 122, is especially perpendicular to diaphragm 122.When hereinafter mentioning axially,
Time tangentially or radially, these are interpreted as being defined with reference to rotationally symmetric axis R1 all the time.
Matrix 123 also has the outer surface towards housing 110 of tapering 124 in first, i.e. matrix 123
Tapered segment seal structure as second, wherein, in first tapering 124 in axial direction go up from
Diaphragm 122 is the most increasingly widened time more and more remote.The housing 110 of device 100 has
First external taper 114 seals structure as first, and this first external taper is towards cavity 12 and about rotation
Turn axis of symmetry R1 rotationally symmetrical.In first, tapering 124 is so formed with the first external taper 114 and coordinates,
Make matrix 123 D1 in the first direction motion and and then sensor device 20 in the first direction
The motion of D1 is hindered by positive, and first direction D1 is parallel to rotationally symmetric axis R1 and carries on the back
From cavity 12, thus the first oral area 13 of cavity 12 can be by being in first and second cooperated
Seal structure 114,124 to close.Especially when making the second sealing structure due to the pressure of loading cavity 12
124 when being pressed in the first sealing structure 114, and the first oral area 13 is sealed by sensor device 120
Close.In second direction D2 contrary with first direction D1, cavity 12 has the second oral area 115,
Cavity 12 can be loaded by this second oral area with pressure to be determined.
The matrix 123 of sensor device 120 has the 3rd sealing structure, and it is configured to rotationally symmetrical
The second external taper 126 that in axis R1 and first, tapering 124 is coaxial, this second external taper is radially
On be formed in first in tapering 124 internal.
Sealing device 150 is arranged in cavity 12, and in the device 100, this sealing device is in pretightning force
So it is pressed under effect in cavity 12 so that sealing device 150 is fixed thus relative to housing 110.
Sealing device 150 is configured to about rotationally symmetric axis R1 rotationally symmetrical, and has breakthrough part 155,
This breakthrough part sets up the second oral area of cavity 12 on the outside deviating from measuring unit 60 of diaphragm 122
Fluidly connecting between 115 and diaphragm 122.
In sealing device 150 has second, tapering 154 seals structure as the 4th, this tapering in second
154 are configured to rotationally symmetrical about rotationally symmetric axis R1 and are run through by breakthrough part 155.In second
Tapering 154 is constructed such that so that it can coordinate with the second external taper 126 in the formation of positive ground.This
Outward, by pretightning force, sealing device 150 is pressed in cavity 12, so select this pretightning force and this
Sealing device 150 is incorporated in cavity 12 by sample so that in second, tapering 154 is forced into outside second
On tapering 126, thus form pressure and be tightly connected.Therefore, especially make the second oral area 115 and be in
Through-flow connection between the first and second sealing structures 114,124 cooperated is closed.
Housing 110 has female thread 117 on the outside deviating from cavity 12, by means of this female thread,
Housing 110 can such as be screwed into the fuel spray of spraying system, such as means of transport as pressure tap
Penetrate in system.In the end of away from membrane in the axial direction 122 of housing 110, (it is also referred to as pressure
Side end) on be configured with the sealing seamed edge 116 of this housing, can when housing 110 is installed in systems
Set up pressure by means of sealing seamed edge 116 to be tightly connected.Diaphragm it is in the axial direction at housing 110
Can be provided with lid 118 on end at 122, measuring unit 60 may pass through described lid and contacts.
The side deviating from housing 110 of lid 118 can be disposed with circuit board 119, the data of measuring unit 60
Signal can be analyzed processing and/or transmission by means of described circuit board.
Fig. 3 show according to another embodiment of the present invention, for determining the device 200 of pressure
Schematic cross section.Device 200 is the modification of the device 100 according to Fig. 2, itself and device 100
Difference be, the sealing device 250 of device 200 without the help of interference fit, and be by mean of weldering
Seam 265 is fixed on housing 110.Weld seam 265 is the most tangentially around the weldering of sealing device 250
Seam, i.e. rotationally symmetrical about rotationally symmetric axis R1.Similarly, in device 200, sealing device
Extruding force is applied on sensor device 120 by 250 based on described pretightning force.
Fig. 4 show according to another embodiment of the present invention, for determining the device 300 of pressure
Schematic cross section.Device 300 is the modification of the device 100 according to Fig. 2, itself and device 100
Difference be sensor device 320 and the configuration of sealing device 350.
In device 300, replace as the 3rd the second external taper 126 sealing structure, sensor device
320 have sensing the second oral area 115 and point to the sealing seamed edge 326 of sealing device 350 as the 3rd
Sealing structure, described sealing seamed edge is configured to around rotationally symmetric axis R1 rotationally symmetrical.Device 300
Sealing device 350 not there is the 4th sealing structure, but in the axial direction at the finger of sealing device 350
On the end of sensor device 320, it is configured with smooth outside 351, thus seals seamed edge 326 with close
The smooth outside 351 of seal apparatus 350 is applied to sensor device 320 based on sealing device 350 together
On extruding force and set up pressure and be tightly connected.
Fig. 5 shows showing of the device 400 for determining pressure according to another embodiment of the present invention
Meaning property cross-sectional view.Device 400 is the modification of the device 300 according to Fig. 4, itself and device 300
Difference is the configuration of sealing device 450.
In device 400, in the outside 351 of the facing sensing device device 320 of sealing device 450
It is configured with about the rotational symmetric blind hole of rotationally symmetric axis R1 457, is inserted with close in described blind hole
Seal ring 458.The sealing seamed edge 326 of sensor device 320 is based on pretightning force, i.e. fill based on by sealing
Put 450 to be applied to the extruding force on sensor device 320 and formed hermetically with sealing ring 458 pressure
Coordinate.
Being also configured with an other sealing seamed edge 454 on sealing device 450, it is pressed with sealing ring 458
Power is in cooperation hermetically.Described other sealing seamed edge 454 preferable configuration is at sealing device 450
On the face of the facing sensing device device 320 of blind hole 457, rotationally symmetric axis R1 is perpendicular to this face.
Sealing ring 458 is rotationally symmetrical about rotationally symmetric axis R1, and preferably metal and can lead to
Cross sealing seamed edge 326,454 deformation.
Fig. 6 shows the exemplary details figure of the sensor device 120 of the device 100 in Fig. 2.Fig. 6
The schematic plan of sensor device 120 D2 in a second direction is shown in left side, and illustrates on right side
The cross-sectional view of a part for sensor device 120.
The lateral surface 61 deviating from housing 110 of sensor device 120 is disposed with measuring unit 60,
It is configured to laminate structure according to Fig. 6.Laminate structure have isolation layer 62 (such as Si oxide) with
And functional layer 64 or be made up of these layers.Can apply all of pressure drag material as functional layer 64, such as
Nickel-chromium alloy, platinum, polysilicon, titanium oxynitrides etc..
In functional layer 64, such as during manufacturing method according to the invention, structuring has at least four
Individual resistance 610, such as by wet etching, dry ecthing, laser ablation etc..Resistance 610 connects into Hui Si
Energising bridge, and there is back-shaped region 612, thus the resistance value of resistance 610 is due to the change of diaphragm 122
Shape, especially extend and change.The supply lines leading to Wheatstone bridge and contact surface can be implemented in merit
In the plane of ergosphere 64 or be implemented in the metallized plane that adds.Additionally, described functional layer can
To be protected by passivation layer (such as silicon nitride) or other measure (such as coating gel).
Circuit board 119 can have analyzing and processing circuit, can analyze and process by means of this analyzing and processing circuit
Voltage on Wheatstone bridge and the output with proportional pressure to be determined can be provided to believe based on this
Number, described output signal is in such as from the zero to the form of the voltage of five volts or in such as from four to two ten millis
Peace electric current form or in digital form.Can intercept on described circuit board described output signal and
Such as outward sending by means of suitable plug, described plug forms the upper part of lid 118.
Fig. 7 a) to Fig. 7 c) illustrate the various possible sensor device 120 according to assembly of the invention,
320, the schematic cross section of 520.Fig. 7 a) show the sensor device 122 in Fig. 2 and 3
Matrix 123.Fig. 7 b) matrix 323 of sensor device 320 in Figure 4 and 5 is shown.Fig. 7 c)
Illustrating another possible form of the matrix 523 of sensor device 520, described matrix has convex shoulder 524
Seal structure as second, make this convex shoulder compress the respective plate of described housing by described sealing device.
Fig. 8 illustrates the indicative flowchart for explaining the method according to the invention, and described method is used for
Manufacture the device for determining pressure.This manufacture method is particularly suited for manufacturing described device 1；100；
200；300；In 400 one, and a part of content is referring to figs. 1 through 7c) carried out in detail
Thin explanation.Described manufacture method especially can according to the modification that describes with reference to assembly of the invention and
Improvement project carries out adaptation.
In step S01, structure has cavity 12 and first and seals structure 14；The housing 10 of 114；
110.In step S02, structure has the second sealing structure 24；124；The sensor device of 524
20；120；320；520.In step S03, the sensor device 20 that will correspondingly construct；120；
320；520 are incorporated in cavity 12 so that the oral area 13 of cavity 12 is by sensor device 20；
120；320；520 can close or be closed.In step S04, by sealing device 50；150；250；
350；450 are at least partially disposed in cavity 12 so that described sealing device 50；150；250；
350；450 by being applied to sensor device 20 by extruding force；120；320；Second is made on 520
Seal structure 24；124；524 are pressed to the first sealing structure 14；On 114, i.e. improve the close of them
Feng Xing.
Sealing device 50；150；250；350；450 especially can so be pressed in cavity 12,
Make sealing device 50；150；250；350；450 and at least sensor device 20；120；320；
Pretightning force is there is between 520.Sealing device 50；150；250；350；450 can be predetermined
It is joined under the effect of pretightning force be fixed on housing 10 in cavity 12 and by means of weld seam 256；On 110.
Although the present invention having been done described above with reference to preferred embodiment, but it being not limited to this, and
It is to retrofit in many ways.The present invention especially can on the premise of without departing from core of the present invention with
Various modes are changed or retrofit.
Claims (10)
1. for determining the device (1 of pressure；100；200；300；400), including:
There is cavity (12) and first and seal structure (14；114) housing (10；110)；
There is the second sealing structure (24；124；524) sensor device (20；120；320；
520), described second structure and the first sealing structure (14 are sealed；114) cooperation so it is in so that
Seal structure and second by means of first and seal structure (14,24；114,124；524), described sky
The oral area (13) in chamber (12) can pass through described sensor device (20；120；220) close, its
In, described cavity (12) is loaded with pressure to be determined, described sensor device (20；120；320；
520) it is configured for determining described pressure to be determined；And
Sealing device (50；150；250；350；450), described sealing device is at least partially arranged in
In described cavity (12) and described sealing device is configured for by extruding force being applied to described
Sensor device (20；120；320；520) above the second sealing structure (24 is made；124；524)
It is pressed to the first sealing structure (14；114) on.
Device the most according to claim 1,
It is characterized in that, described sensor device (120；220；320；520) have:
Diaphragm (122), this diaphragm is in described cavity (12) and is connected；And
Measuring unit (60), this measuring unit is configured for deformation based on described diaphragm (122)
Determine that described pressure to be determined, described cavity (12) are loaded with this pressure to be determined.
Device the most according to claim 1 and 2,
It is characterized in that, described sealing device (150；250；350；450) under pretightning force effect
It is arranged on described housing (110), thus described sealing device (150；250；350；450) base
Described sensor device (20 is compressed in described pretightning force；120；220) so that described second seals
Structure (24；124；524) it is forced into described first and seals structure (12；114) on.
Device the most according to any one of claim 1 to 3,
It is characterized in that, described sealing device (250) is fixed by means of at least one weld seam (256)
On described housing (110).
Device the most according to any one of claim 1 to 4,
It is characterized in that, described first seals structure has the first external taper (114), and described second
Sealing tapering (124) in structure has first, wherein, in described first, tapering (124) can shape lock
It is pressed on described first external taper (114) close described oral area (13) with closing.
Device the most according to any one of claim 1 to 5,
It is characterized in that, described sensor device (120；320) the 3rd sealing structure is configured to use
In with described sealing device (150；250；350；450) jointly seal, described 3rd close
Seal structure has external taper (126) and/or seals seamed edge (326).
Device the most according to claim 6,
It is characterized in that, the described 3rd of described sensor device (120) seals structure to be had outside second
Tapering (126), and described sealing device (150；250) have be configured to second in tapering (154)
The 4th sealing structure, described 4th seal structure can with described second external taper (126) formed coordinate.
8. manufacture the method being used for determining the device of pressure, comprise the following steps:
(S01) structure has cavity (12) and the first sealing structure (14；114) housing (10；
110)；
(S02) structure has the second sealing structure (24；124) sensor device (20；120；
220)；
(S03) by described sensor device (20；120；320；530) described sky so it is incorporated into
In chamber (12) so that the oral area (13) of described cavity can pass through described sensor device (20；120；
320；520) close；And
(S04) by sealing device (50；150；250；350；450) it is at least partially disposed at institute
State in cavity (12) so that described sealing device (50；150；250；350；450) passing through will
Extruding force is applied to described sensor device (20；120；220) described second is above made to seal structure
(24；124；524) it is pressed to described first and seals structure (14；114) on.
Method the most according to claim 8,
It is characterized in that, at (S04) by described sealing device (50；150；250；350；450)
When being arranged in described cavity (12), in order to by described sealing device (50；150；250；350；
450) it is fixed in described cavity (12) and in order to described extruding force being applied to described sensor dress
Put (20；120；220) on, described sealing device (50；150；250；350；450) by this
Sample is pressed in described cavity (12) so that at described sealing device (50；150；250；350；
450) and the most described sensor device (20；120；220) there is pretightning force between.
Method the most according to claim 8 or claim 9,
It is characterized in that, at (S04), described sealing device (250) is arranged in described cavity (12)
Time middle, in order to described sealing device (250) is fixed in described cavity (12) and in order to by institute
State extruding force and be applied to described sensor device (20；120；220) on, by described sealing device (250)
It is joined under predetermined pretightning force effect in described cavity (12) and by means of weld seam (256)
It is fixed on described housing (10；110) on.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015206470.0 | 2015-04-10 | ||
| DE102015206470.0A DE102015206470A1 (en) | 2015-04-10 | 2015-04-10 | Apparatus for determining a pressure and method of making the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106052940A true CN106052940A (en) | 2016-10-26 |
| CN106052940B CN106052940B (en) | 2020-11-03 |
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ID=56986506
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610217752.2A Active CN106052940B (en) | 2015-04-10 | 2016-04-08 | Device for determining pressure and method for producing the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6587972B2 (en) |
| CN (1) | CN106052940B (en) |
| DE (1) | DE102015206470A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111712696A (en) * | 2018-02-15 | 2020-09-25 | 马克桑马基纳奥托莫提夫萨纳伊蒂卡雷特阿诺尼姆西尔凯蒂公司 | Pressure sensing device |
| CN114286929A (en) * | 2020-02-27 | 2022-04-05 | Tdk电子股份有限公司 | Sensor and method for producing a sensor |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016210385A1 (en) * | 2016-06-13 | 2017-12-14 | Robert Bosch Gmbh | Pressure sensor for a high pressure accumulator and high pressure accumulator |
| CN108661036A (en) * | 2018-06-11 | 2018-10-16 | 浙江工业大学 | A kind of absorption type sealing device |
| CN112229567B (en) * | 2020-11-04 | 2022-03-18 | 麦克传感器股份有限公司 | Pressure sensor testing device with automatic air pressure compensation sealing function |
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Also Published As
| Publication number | Publication date |
|---|---|
| DE102015206470A1 (en) | 2016-10-13 |
| JP6587972B2 (en) | 2019-10-09 |
| JP2016200594A (en) | 2016-12-01 |
| CN106052940B (en) | 2020-11-03 |
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