CN202898593U - Improved single-crystal furnace heat shield guide cylinder - Google Patents
Improved single-crystal furnace heat shield guide cylinder Download PDFInfo
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- CN202898593U CN202898593U CN 201220550303 CN201220550303U CN202898593U CN 202898593 U CN202898593 U CN 202898593U CN 201220550303 CN201220550303 CN 201220550303 CN 201220550303 U CN201220550303 U CN 201220550303U CN 202898593 U CN202898593 U CN 202898593U
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- guide shell
- guide cylinder
- shell body
- layer structure
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Abstract
The utility model relates to an improved single-crystal furnace heat shield guide cylinder which comprises a guide cylinder body (1), wherein the guide cylinder body (1) is integrally in the shape of a reversed frustum; the cylinder wall of the guide shell body (1) is in a multilayer layered structure; the outermost layer of the cylinder wall of the guide cylinder body (1) is provided with a graphite layer structure (3); the intermediate layer of the cylinder wall of the guide cylinder body (1) is provided with a hollow layer structure (4); and the inner layer of the cylinder wall of the guide cylinder body (1) is provided with a graphite layer structure (5). The improved single-crystal furnace heat shield guide cylinder is characterized in that the outer surface of the graphite layer structure (5) inside the cylinder wall of the guide cylinder body (1) is provided with a guiding and heat-insulating layer structure (6) which plays guiding and heat-insulating roles. According to the utility model, molybdenum with poor heat conductivity is adopted to be used as a material used for manufacturing the inner surface layer of a heat shield, and isothermic lines inside a crystal are even, so that the consumption and isometric power of a heater are reduced, the crystal growth speed is increased, and the production cost is saved.
Description
Technical field
The utility model relates to a kind of single crystal growing furnace heat shielding guide shell, particularly a kind of improved single crystal growing furnace heat shielding guide shell.
Background technology
The growth of Cz method crystal is the main growth methods for semi-conductor and solar cell silicon single crystal.The quality of improving crystalline growth velocity and single crystal rod all is absorbed in the hot system design of most single crystal growing furnace, yet for solar level silicon single crystal, most important by changing thermal field structure realization high yield, high quality, low cost.The solar level monocrystalline is realized high yield, high quality, low cost, and three kinds of methods are arranged usually: the one, and the power consumption of reduction well heater in the single crystal growth process; The 2nd, improve crystalline growth velocity, the 3rd, improve the monocrystalline parameter by process modification.Three kinds of methods condition each other, complement each other indispensable.Pulling rate improves, and has not only shortened the crystal growth time, has saved power consumption, and has increased output.But, improve simply pulling rate, can bring crystal quality to descend, pulling rate is too fast even may produce polycrystalline.Therefore, when improving pulling rate, must improve and optimizate the crystal hot system of growing, to guarantee to grow up-to-standard monocrystalline.To realize high yield, high-quality, low-cost for photovoltaic industry, must improve hot system and reduce on the power consumption, improve the monocrystalline quality and make an effort.
The utility model content
The purpose of this utility model provides a kind of improved single crystal growing furnace heat shielding guide shell that reduces well heater consumption and isometrical power, increases crystalline growth velocity, saves production cost.
In order to finish above-mentioned purpose, the technical solution adopted in the utility model is:
A kind of improved single crystal growing furnace heat shielding guide shell, comprise the whole guide shell body of inversed taper platform shape that is, the barrel of guide shell body is multilayer minute stratiform structure, the outermost layer of guide shell body barrel is outer graphite linings structure, the middle layer of guide shell body barrel is the hollow layer structure, the internal layer of guide shell body barrel is interior graphite linings structure, also is provided with the flow guide heat preservation layer structure that one deck plays the flow guide heat preservation effect at the outside surface of the interior graphite linings structure of described guide shell body barrel.
The smooth top layer shape structure of described flow guide heat preservation layer structure for being made by molybdenum.
Be provided with the ring-type inboardend of evagination in the upper end of guide shell body.
In described hollow layer structure, be provided with heat preserving and insulating material.
The beneficial effects of the utility model are: adopt the relatively poor molybdenum of heat conductance as the making material of heat shielding internal skin, make intracrystalline thermoisopleth more smooth, reduced well heater consumption and isometrical power, increased crystalline growth velocity, saved production cost.
Description of drawings
Fig. 1 is that the utility model is assemblied in the structural representation in the single crystal growing furnace.
Fig. 2 is structural representation of the present utility model.
Among the figure, 1, the guide shell body, 2, inboardend, 3, outer graphite linings structure, 4, the hollow layer structure, 5, interior graphite linings structure, 6, flow guide heat preservation layer structure.
Embodiment
The utility model is a kind of improved single crystal growing furnace heat shielding guide shell, adopt the relatively poor molybdenum of heat conductance as the making material of heat shielding internal skin, make intracrystalline thermoisopleth more smooth, reduced well heater consumption and isometrical power, increased crystalline growth velocity, saved production cost.
Below in conjunction with accompanying drawing the utility model is described further.
Specific embodiment, such as Fig. 1, shown in Figure 2, a kind of improved single crystal growing furnace heat shielding guide shell, comprise the whole guide shell body 1 of inversed taper platform shape that is, be provided with the ring-type inboardend 2 of evagination in the upper end of guide shell body 1, inboardend 2 is used for being fixed in the single crystal furnace body, the barrel of guide shell body 1 is multilayer minute stratiform structure, the outer graphite linings structure 3 of the outermost layer of guide shell body 1 barrel for being made by graphite material, the middle layer of guide shell body 1 barrel is hollow layer structure 4, be filled with heat preserving and insulating material in order to strengthen function of heat insulation in the 4 interior settings of hollow layer structure, the interior graphite linings structure 5 of the internal layer of guide shell body 1 barrel for being made by graphite material, outside surface in the interior graphite linings structure 5 of guide shell body 1 barrel also is provided with the flow guide heat preservation layer structure 6 that one deck plays the flow guide heat preservation effect, the smooth top layer shape structure of flow guide heat preservation layer structure 6 for being made by molybdenum.Owing to adopting the relatively poor molybdenum of heat conductance as the making material of heat shielding internal skin, make intracrystalline thermoisopleth more smooth, reduce well heater consumption and isometrical power, increased crystalline growth velocity, saved production cost.
Claims (4)
1. improved single crystal growing furnace heat shielding guide shell, comprise the whole guide shell body (1) of inversed taper platform shape that is, the barrel of guide shell body (1) is multilayer minute stratiform structure, the outermost layer of guide shell body (1) barrel is outer graphite linings structure (3), the middle layer of guide shell body (1) barrel is hollow layer structure (4), the internal layer of guide shell body (1) barrel is interior graphite linings structure (5), it is characterized in that: the outside surface in the interior graphite linings structure (5) of described guide shell body (1) barrel also is provided with the flow guide heat preservation layer structure (6) that one deck plays the flow guide heat preservation effect.
2. a kind of improved single crystal growing furnace heat shielding guide shell according to claim 1 is characterized in that: the smooth top layer shape structure of described flow guide heat preservation layer structure (6) for being made by molybdenum.
3. a kind of improved single crystal growing furnace heat shielding guide shell according to claim 1 is characterized in that: the ring-type inboardend (2) that is provided with evagination in the upper end of guide shell body (1).
4. a kind of improved single crystal growing furnace heat shielding guide shell according to claim 1 is characterized in that: be provided with heat preserving and insulating material in described hollow layer structure (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220550303 CN202898593U (en) | 2012-10-25 | 2012-10-25 | Improved single-crystal furnace heat shield guide cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220550303 CN202898593U (en) | 2012-10-25 | 2012-10-25 | Improved single-crystal furnace heat shield guide cylinder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202898593U true CN202898593U (en) | 2013-04-24 |
Family
ID=48119284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220550303 Expired - Fee Related CN202898593U (en) | 2012-10-25 | 2012-10-25 | Improved single-crystal furnace heat shield guide cylinder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202898593U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103451721A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Single crystal growth furnace with water-cooling heat shield |
| CN104909171A (en) * | 2015-06-08 | 2015-09-16 | 中美新能源技术研发（山西）有限公司 | Heat-insulating high-temperature-resistant inflatable cone |
| CN106521616A (en) * | 2016-12-13 | 2017-03-22 | 宝鸡市宏佳有色金属加工有限公司 | Single crystal furnace quartz guide cylinder |
| CN111270301A (en) * | 2018-12-04 | 2020-06-12 | 上海新昇半导体科技有限公司 | Guide cylinder of crystal growth furnace and crystal growth furnace |
-
2012
- 2012-10-25 CN CN 201220550303 patent/CN202898593U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103451721A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Single crystal growth furnace with water-cooling heat shield |
| CN104909171A (en) * | 2015-06-08 | 2015-09-16 | 中美新能源技术研发（山西）有限公司 | Heat-insulating high-temperature-resistant inflatable cone |
| CN106521616A (en) * | 2016-12-13 | 2017-03-22 | 宝鸡市宏佳有色金属加工有限公司 | Single crystal furnace quartz guide cylinder |
| CN111270301A (en) * | 2018-12-04 | 2020-06-12 | 上海新昇半导体科技有限公司 | Guide cylinder of crystal growth furnace and crystal growth furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130424 Termination date: 20151025 |
|
| EXPY | Termination of patent right or utility model |