CN204251771U - A kind of sapphire crystal growth device - Google Patents

A kind of sapphire crystal growth device Download PDF

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Publication number
CN204251771U
CN204251771U CN201420706060.0U CN201420706060U CN204251771U CN 204251771 U CN204251771 U CN 204251771U CN 201420706060 U CN201420706060 U CN 201420706060U CN 204251771 U CN204251771 U CN 204251771U
Authority
CN
China
Prior art keywords
vacuum chamber
crucible
sapphire crystal
screw mandrel
crystal growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420706060.0U
Other languages
Chinese (zh)
Inventor
孙占喜
李吾臣
李莉
蔺崇召
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XUCHANG TIANGE SILICON TECHNOLOGY CO., LTD.
Original Assignee
HENAN JINGGE OPTOELECTRONICS TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HENAN JINGGE OPTOELECTRONICS TECHNOLOGY Co Ltd filed Critical HENAN JINGGE OPTOELECTRONICS TECHNOLOGY Co Ltd
Priority to CN201420706060.0U priority Critical patent/CN204251771U/en
Application granted granted Critical
Publication of CN204251771U publication Critical patent/CN204251771U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to a kind of sapphire crystal growth device, it comprises vacuum chamber, the left lower of vacuum chamber is provided with vacuum orifice, vacuum chamber right upper portion is provided with thermometer hole, internal vacuum chamber is provided with well heater, the top of well heater is provided with the heat protection screen be made up of high-purity special graphite, crucible is placed with in well heater, crucible is built with polycrystal raw material, sapphire crystal is placed with in polycrystal raw material, sapphire crystal is placed with seed crystal, seed crystal is connected with lifting rod, rotation platform is provided with below crucible, bottom rotation platform, screw mandrel is installed, screw mandrel is set with the axle matched with screw mandrel, axle is connected with rotating machine, vacuum chamber is outside equipped with timing register, timing register is connected with the controller controlling motor and rotate and reverse, the utility model simplicity of design, the rotation of the control realization of motor crucible and moving up and down, lifting rod lifts seed crystal simultaneously, ensure environment of crystal growth temperature homogeneity, make the growth of crystal well, quality is also high.

Description

A kind of sapphire crystal growth device
Technical field
The utility model belongs to crystal technology field, is specifically related to growing apparatus, particularly a kind of sapphire crystal growth device.
Background technology
In sapphire crystal growth technology, generally in maintenance crucible transfixion, the method of crystal lift and rotary motion is adopted to control the growth of crystal, but under prior art conditions, because heating system and heat-insulation system can not meet the factors such as technical requirements completely because of making precision, installation site, therefore, generally speaking, well can not ensure the even, symmetrical of temperature field in crystal pulling process, thus affect the stable growth of crystal.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, and a kind of simplicity of design is provided, the sapphire crystal growth device that easy and simple to handle, growing environment good, growth quality is high.
The purpose of this utility model is achieved in that a kind of sapphire crystal growth device, it comprises vacuum chamber, the left lower of described vacuum chamber is provided with vacuum orifice, vacuum chamber right upper portion is provided with thermometer hole, described internal vacuum chamber is provided with well heater, the top of described well heater is provided with the heat protection screen be made up of high-purity special graphite, crucible is placed with in described well heater, described crucible is built with polycrystal raw material, sapphire crystal is placed with in described polycrystal raw material, described sapphire crystal is placed with seed crystal, described seed crystal is connected with lifting rod, rotation platform is provided with below described crucible, bottom described rotation platform, screw mandrel is installed, described screw mandrel is set with match with screw mandrel female axle is set, described axle is connected with rotating machine, described vacuum chamber is outside equipped with timing register, described timing register is connected with the controller controlling motor and rotate and reverse.
Viewing window is provided with in described vacuum chamber.
The timing time of described timing register is one minute.
Described screw mandrel and rotation platform are structure as a whole.
The two ends of described rotation platform are provided with baffle plate.
Described timing register is connected with external power interface.
The beneficial effects of the utility model: the utility model simplicity of design, whole growing apparatus is all in the state of vacuum, be provided with vacuum orifice, for staff provides convenience, be provided with well heater, by polycrystal raw material heating and melting in crucible, the bottom of well heater and the left and right sides all can be heated, not only ensure that the homogeneity of heating, more ensure that the symmetry of heating, be provided with heat protection screen, better utilised heat, crucible bottom is provided with rotation platform, vacuum chamber is outside equipped with timing register, controller is controlled by timing register, thus control the forward or reverse of motor, owing to being provided with screw mandrel, so not only ensure that the rotation of crucible also achieves moving up and down of crucible, lifting rod lifts up and down to seed crystal simultaneously, ensure environment of crystal growth temperature homogeneity, be conducive to the perfection growth of sapphire crystal, not only the growth of crystal well, quality is also high, rotation platform two ends are provided with baffle plate in addition, ensure that the stability of crucible, for sapphire growth provides stable environment, be provided with thermometer hole, facilitate staff's control temperature, the utility model has simplicity of design in a word, be heated evenly, growing environment is good, the advantage that growth quality is high.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of sapphire crystal growth device of the utility model.
In figure: 1, vacuum chamber 2, vacuum orifice 3, thermometer hole 4, well heater 5, heat protection screen 6, crucible 7, polycrystal raw material 8, sapphire crystal 9, seed crystal 10, lifting rod 11, rotation platform 12, screw mandrel 13, axle 14, rotating machine 15, timing register 16, controller.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described further.
Embodiment 1
As shown in Figure 1, a kind of sapphire crystal growth device, it comprises vacuum chamber 1, the left lower of described vacuum chamber 1 is provided with vacuum orifice 2, vacuum chamber 1 right upper portion is provided with thermometer hole 3, described vacuum chamber 1 inside is provided with well heater 4, the top of described well heater 4 is provided with the heat protection screen 5 be made up of high-purity special graphite, crucible 6 is placed with in described well heater 4, described crucible 6 is built with polycrystal raw material 7, sapphire crystal 8 is placed with in described polycrystal raw material 7, described sapphire crystal 8 is placed with seed crystal 9, described seed crystal 9 is connected with lifting rod 10, under described crucible, 6 sides are provided with rotation platform 11, bottom described rotation platform 11, screw mandrel 12 is installed, described screw mandrel 12 is set with match with screw mandrel 12 female axle 13 is set, described axle 13 is connected with rotating machine 14, described vacuum chamber 1 is outside equipped with timing register 15, described timing register 15 is connected with the controller 16 controlling motor 14 and rotate and reverse.
The utility model simplicity of design, whole growing apparatus is all in the state of vacuum, be provided with vacuum orifice, for staff provides convenience, be provided with well heater, by polycrystal raw material heating and melting in crucible, the bottom of well heater and the left and right sides all can be heated, not only ensure that the homogeneity of heating, more ensure that the symmetry of heating, be provided with heat protection screen, better utilised heat, crucible bottom is provided with rotation platform, vacuum chamber is outside equipped with timing register, controller is controlled by timing register, thus control the forward or reverse of motor, owing to being provided with screw mandrel, so not only ensure that the rotation of crucible also achieves moving up and down of crucible, lifting rod lifts up and down to seed crystal simultaneously, ensure environment of crystal growth temperature homogeneity, be conducive to the perfection growth of sapphire crystal, not only the growth of crystal well, quality is also high, be provided with thermometer hole, facilitate staff's control temperature, the utility model has simplicity of design in a word, be heated evenly, growing environment is good, the advantage that growth quality is high.
Embodiment 2
As shown in Figure 1, a kind of sapphire crystal growth device, it comprises vacuum chamber 1, the left lower of described vacuum chamber 1 is provided with vacuum orifice 2, vacuum chamber 1 right upper portion is provided with thermometer hole 3, described vacuum chamber 1 inside is provided with well heater 4, the top of described well heater 4 is provided with the heat protection screen 5 be made up of high-purity special graphite, crucible 6 is placed with in described well heater 4, described crucible 6 is built with polycrystal raw material 7, sapphire crystal 8 is placed with in described polycrystal raw material 7, described sapphire crystal 8 is placed with seed crystal 9, described seed crystal 9 is connected with lifting rod 10, under described crucible, 6 sides are provided with rotation platform 11, bottom described rotation platform 11, screw mandrel 12 is installed, described screw mandrel 12 is set with match with screw mandrel 12 female axle 13 is set, described axle 13 is connected with rotating machine 14, described vacuum chamber 1 is outside equipped with timing register 15, described timing register 15 is connected with the controller 16 controlling motor 14 and rotate and reverse.
Viewing window is provided with in described vacuum chamber 1.
The timing time of described timing register 15 is one minute.
Described screw mandrel 12 and rotation platform 11 are structure as a whole.
The two ends of described rotation platform 11 are provided with baffle plate.
Described timing register 15 is connected with external power interface.
The utility model simplicity of design, whole growing apparatus is all in the state of vacuum, be provided with vacuum orifice, for staff provides convenience, be provided with well heater, by polycrystal raw material heating and melting in crucible, the bottom of well heater and the left and right sides all can be heated, not only ensure that the homogeneity of heating, more ensure that the symmetry of heating, be provided with heat protection screen, better utilised heat, crucible bottom is provided with rotation platform, vacuum chamber is outside equipped with timing register, controller is controlled by timing register, thus control the forward or reverse of motor, owing to being provided with screw mandrel, so not only ensure that the rotation of crucible also achieves moving up and down of crucible, lifting rod lifts up and down to seed crystal simultaneously, ensure environment of crystal growth temperature homogeneity, be conducive to the perfection growth of sapphire crystal, not only the growth of crystal well, quality is also high, screw mandrel and rotation platform are structure as a whole, ensure the stability of whole rotation platform, rotation platform two ends are provided with baffle plate in addition, ensure that the stability of crucible, for sapphire growth provides stable environment, be provided with thermometer hole, facilitate staff's control temperature, be provided with viewing window, staff is facilitated to understand crystal growth condition in time, the utility model has simplicity of design in a word, be heated evenly, growing environment is good, the advantage that growth quality is high.

Claims (6)

1. a sapphire crystal growth device, it comprises vacuum chamber, it is characterized in that: the left lower of described vacuum chamber is provided with vacuum orifice, vacuum chamber right upper portion is provided with thermometer hole, described internal vacuum chamber is provided with well heater, the top of described well heater is provided with the heat protection screen be made up of high-purity special graphite, crucible is placed with in described well heater, described crucible is built with polycrystal raw material, sapphire crystal is placed with in described polycrystal raw material, described sapphire crystal is placed with seed crystal, described seed crystal is connected with lifting rod, rotation platform is provided with below described crucible, bottom described rotation platform, screw mandrel is installed, described screw mandrel is set with match with screw mandrel female axle is set, described axle is connected with rotating machine, described vacuum chamber is outside equipped with timing register, described timing register is connected with the controller controlling motor and rotate and reverse.
2. a kind of sapphire crystal growth device according to claim 1, is characterized in that: be provided with viewing window in described vacuum chamber.
3. a kind of sapphire crystal growth device according to claim 1, is characterized in that: the timing time of described timing register is one minute.
4. a kind of sapphire crystal growth device according to claim 1, is characterized in that: described screw mandrel and rotation platform are structure as a whole.
5. a kind of sapphire crystal growth device according to claim 1, is characterized in that: the two ends of described rotation platform are provided with baffle plate.
6. a kind of sapphire crystal growth device according to claim 1, is characterized in that: described timing register is connected with external power interface.
CN201420706060.0U 2014-11-24 2014-11-24 A kind of sapphire crystal growth device Expired - Fee Related CN204251771U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420706060.0U CN204251771U (en) 2014-11-24 2014-11-24 A kind of sapphire crystal growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420706060.0U CN204251771U (en) 2014-11-24 2014-11-24 A kind of sapphire crystal growth device

Publications (1)

Publication Number Publication Date
CN204251771U true CN204251771U (en) 2015-04-08

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109338469A (en) * 2018-11-26 2019-02-15 国宏中晶集团有限公司 A kind of sapphire crystal growth power supply and its method
CN109722710A (en) * 2017-10-27 2019-05-07 江苏维福特科技发展股份有限公司 Step-by-step movement bar cramp head stretching device
CN111607823A (en) * 2020-06-19 2020-09-01 山东新升光电科技有限责任公司 Sapphire single crystal pulling method preparation device and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109722710A (en) * 2017-10-27 2019-05-07 江苏维福特科技发展股份有限公司 Step-by-step movement bar cramp head stretching device
CN109338469A (en) * 2018-11-26 2019-02-15 国宏中晶集团有限公司 A kind of sapphire crystal growth power supply and its method
CN111607823A (en) * 2020-06-19 2020-09-01 山东新升光电科技有限责任公司 Sapphire single crystal pulling method preparation device and method

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C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: XUCHANG TIANGE SILICON INDUSTRY TECHNOLOGY CO., LT

Free format text: FORMER OWNER: HENAN JINGGE OPTOELECTRONIC TECHNOLOGY CO., LTD.

Effective date: 20150325

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20150325

Address after: 452670, Xuchang County, Henan City, Xiangcheng Province North Industrial Agglomeration Area

Patentee after: XUCHANG TIANGE SILICON TECHNOLOGY CO., LTD.

Address before: 452670 west section of North Ring Road, Xiangcheng County, Henan, Xuchang

Patentee before: HENAN JINGGE OPTOELECTRONICS TECHNOLOGY CO., LTD.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150408

Termination date: 20171124

CF01 Termination of patent right due to non-payment of annual fee