CN202587374U - Mems麦克风芯片 - Google Patents
Mems麦克风芯片 Download PDFInfo
- Publication number
- CN202587374U CN202587374U CN 201220239636 CN201220239636U CN202587374U CN 202587374 U CN202587374 U CN 202587374U CN 201220239636 CN201220239636 CN 201220239636 CN 201220239636 U CN201220239636 U CN 201220239636U CN 202587374 U CN202587374 U CN 202587374U
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- CN
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- Prior art keywords
- pole plate
- diaphragm
- plane
- parallel capacitor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000003990 capacitor Substances 0.000 claims abstract description 143
- 239000000758 substrate Substances 0.000 claims abstract description 103
- 238000005530 etching Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 230000007547 defect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 10
- 230000002950 deficient Effects 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220239636 CN202587374U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风芯片 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201220239636 CN202587374U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风芯片 |
Publications (1)
Publication Number | Publication Date |
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CN202587374U true CN202587374U (zh) | 2012-12-05 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201220239636 Expired - Lifetime CN202587374U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风芯片 |
Country Status (1)
Country | Link |
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CN (1) | CN202587374U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103200508A (zh) * | 2013-03-26 | 2013-07-10 | 歌尔声学股份有限公司 | Mems麦克风 |
CN104902403A (zh) * | 2015-06-30 | 2015-09-09 | 歌尔声学股份有限公司 | 一种mems麦克风 |
CN107484051A (zh) * | 2017-09-29 | 2017-12-15 | 瑞声声学科技(深圳)有限公司 | Mems麦克风 |
-
2012
- 2012-05-25 CN CN 201220239636 patent/CN202587374U/zh not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103200508A (zh) * | 2013-03-26 | 2013-07-10 | 歌尔声学股份有限公司 | Mems麦克风 |
CN103200508B (zh) * | 2013-03-26 | 2016-01-13 | 歌尔声学股份有限公司 | Mems麦克风 |
CN104902403A (zh) * | 2015-06-30 | 2015-09-09 | 歌尔声学股份有限公司 | 一种mems麦克风 |
CN107484051A (zh) * | 2017-09-29 | 2017-12-15 | 瑞声声学科技(深圳)有限公司 | Mems麦克风 |
CN107484051B (zh) * | 2017-09-29 | 2021-04-09 | 瑞声声学科技(深圳)有限公司 | Mems麦克风 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200611 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20121205 |
|
CX01 | Expiry of patent term |