CN202334882U - Mems麦克风 - Google Patents
Mems麦克风 Download PDFInfo
- Publication number
- CN202334882U CN202334882U CN2011204899371U CN201120489937U CN202334882U CN 202334882 U CN202334882 U CN 202334882U CN 2011204899371 U CN2011204899371 U CN 2011204899371U CN 201120489937 U CN201120489937 U CN 201120489937U CN 202334882 U CN202334882 U CN 202334882U
- Authority
- CN
- China
- Prior art keywords
- wiring board
- hole
- encapsulating structure
- metal forming
- mems microphone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 claims abstract description 58
- 229910052751 metal Inorganic materials 0.000 claims abstract description 58
- 230000000630 rising effect Effects 0.000 claims description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 241000218202 Coptis Species 0.000 claims description 4
- 235000002991 Coptis groenlandica Nutrition 0.000 claims description 4
- 239000011889 copper foil Substances 0.000 claims description 4
- 239000000428 dust Substances 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 7
- 238000005538 encapsulation Methods 0.000 abstract 2
- 239000011888 foil Substances 0.000 abstract 2
- 230000002265 prevention Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011204899371U CN202334882U (zh) | 2011-11-30 | 2011-11-30 | Mems麦克风 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011204899371U CN202334882U (zh) | 2011-11-30 | 2011-11-30 | Mems麦克风 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202334882U true CN202334882U (zh) | 2012-07-11 |
Family
ID=46446844
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011204899371U Expired - Lifetime CN202334882U (zh) | 2011-11-30 | 2011-11-30 | Mems麦克风 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202334882U (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104760924A (zh) * | 2015-04-20 | 2015-07-08 | 歌尔声学股份有限公司 | 一种mems麦克风芯片及其封装结构、制造方法 |
CN104780490A (zh) * | 2015-04-20 | 2015-07-15 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构及其制造方法 |
CN106211578A (zh) * | 2015-05-05 | 2016-12-07 | 深南电路股份有限公司 | 一种pcb板制作方法及pcb板 |
CN106937228A (zh) * | 2015-12-29 | 2017-07-07 | 钰太芯微电子科技(上海)有限公司 | 一种mems麦克风 |
CN107690116A (zh) * | 2016-08-05 | 2018-02-13 | 因克斯实验室有限公司 | Mems麦克风组件 |
DE102017115407B3 (de) | 2017-07-10 | 2018-12-20 | Epcos Ag | Herstellungsverfahren für ein MEMS-Bauteil mit Partikelfilter |
-
2011
- 2011-11-30 CN CN2011204899371U patent/CN202334882U/zh not_active Expired - Lifetime
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104760924A (zh) * | 2015-04-20 | 2015-07-08 | 歌尔声学股份有限公司 | 一种mems麦克风芯片及其封装结构、制造方法 |
CN104780490A (zh) * | 2015-04-20 | 2015-07-15 | 歌尔声学股份有限公司 | 一种mems麦克风的封装结构及其制造方法 |
CN104760924B (zh) * | 2015-04-20 | 2017-06-06 | 歌尔股份有限公司 | 一种mems麦克风芯片及其封装结构 |
CN106211578A (zh) * | 2015-05-05 | 2016-12-07 | 深南电路股份有限公司 | 一种pcb板制作方法及pcb板 |
CN106937228A (zh) * | 2015-12-29 | 2017-07-07 | 钰太芯微电子科技(上海)有限公司 | 一种mems麦克风 |
CN107690116A (zh) * | 2016-08-05 | 2018-02-13 | 因克斯实验室有限公司 | Mems麦克风组件 |
CN107690116B (zh) * | 2016-08-05 | 2021-07-27 | 因克斯实验室有限公司 | Mems麦克风组件 |
DE102017115407B3 (de) | 2017-07-10 | 2018-12-20 | Epcos Ag | Herstellungsverfahren für ein MEMS-Bauteil mit Partikelfilter |
CN110959294A (zh) * | 2017-07-10 | 2020-04-03 | Tdk株式会社 | 具有粒子过滤器的mems器件以及制造的方法 |
CN110959294B (zh) * | 2017-07-10 | 2021-10-29 | Tdk株式会社 | 具有粒子过滤器的mems器件以及制造的方法 |
US11787689B2 (en) | 2017-07-10 | 2023-10-17 | Tdk Corporation | MEMS device with particle filter and method of manufacture |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200616 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20120711 |
|
CX01 | Expiry of patent term |