CN202679623U - Mems麦克风 - Google Patents
Mems麦克风 Download PDFInfo
- Publication number
- CN202679623U CN202679623U CN 201220239617 CN201220239617U CN202679623U CN 202679623 U CN202679623 U CN 202679623U CN 201220239617 CN201220239617 CN 201220239617 CN 201220239617 U CN201220239617 U CN 201220239617U CN 202679623 U CN202679623 U CN 202679623U
- Authority
- CN
- China
- Prior art keywords
- wiring board
- conversion chip
- mems
- electro conversion
- sound hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 118
- 239000003990 capacitor Substances 0.000 claims abstract description 87
- 239000000758 substrate Substances 0.000 claims description 8
- 230000000694 effects Effects 0.000 abstract description 3
- 238000004806 packaging method and process Methods 0.000 abstract 4
- 230000005611 electricity Effects 0.000 abstract 3
- 230000000630 rising effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
Images
Landscapes
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220239617 CN202679623U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220239617 CN202679623U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202679623U true CN202679623U (zh) | 2013-01-16 |
Family
ID=47500492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201220239617 Expired - Lifetime CN202679623U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202679623U (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103179478A (zh) * | 2013-04-09 | 2013-06-26 | 山东共达电声股份有限公司 | 适合在高光照条件下工作的麦克风 |
CN103200508A (zh) * | 2013-03-26 | 2013-07-10 | 歌尔声学股份有限公司 | Mems麦克风 |
US20150125003A1 (en) * | 2013-11-06 | 2015-05-07 | Infineon Technologies Ag | System and Method for a MEMS Transducer |
CN109121032A (zh) * | 2018-08-03 | 2019-01-01 | 江苏普诺威电子股份有限公司 | 单入双出进音孔麦克风基板的制作方法 |
-
2012
- 2012-05-25 CN CN 201220239617 patent/CN202679623U/zh not_active Expired - Lifetime
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103200508A (zh) * | 2013-03-26 | 2013-07-10 | 歌尔声学股份有限公司 | Mems麦克风 |
CN103200508B (zh) * | 2013-03-26 | 2016-01-13 | 歌尔声学股份有限公司 | Mems麦克风 |
CN103179478A (zh) * | 2013-04-09 | 2013-06-26 | 山东共达电声股份有限公司 | 适合在高光照条件下工作的麦克风 |
US20150125003A1 (en) * | 2013-11-06 | 2015-05-07 | Infineon Technologies Ag | System and Method for a MEMS Transducer |
CN104640038A (zh) * | 2013-11-06 | 2015-05-20 | 英飞凌科技股份有限公司 | 用于mems换能器的系统和方法 |
US10589987B2 (en) * | 2013-11-06 | 2020-03-17 | Infineon Technologies Ag | System and method for a MEMS transducer |
CN111479179A (zh) * | 2013-11-06 | 2020-07-31 | 英飞凌科技股份有限公司 | 微机电系统 |
CN111479179B (zh) * | 2013-11-06 | 2021-12-21 | 英飞凌科技股份有限公司 | 微机电系统 |
US11225408B2 (en) | 2013-11-06 | 2022-01-18 | Infineon Technologies Ag | System and method for a mems transducer |
DE102014116129B4 (de) | 2013-11-06 | 2023-03-09 | Infineon Technologies Ag | MEMS mit zwei Wandlerelementen |
CN109121032A (zh) * | 2018-08-03 | 2019-01-01 | 江苏普诺威电子股份有限公司 | 单入双出进音孔麦克风基板的制作方法 |
CN109121032B (zh) * | 2018-08-03 | 2019-10-29 | 江苏普诺威电子股份有限公司 | 单入双出进音孔麦克风基板的制作方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3240306B1 (en) | Multi-device transducer module, apparatus including the transducer module and method of manufacturing the transducer module | |
CN202679623U (zh) | Mems麦克风 | |
CN101426166A (zh) | 硅麦克风 | |
CN202679624U (zh) | Mems麦克风 | |
CN102595295A (zh) | 一种mems麦克风 | |
CN201138866Y (zh) | 改进结构的硅麦克风 | |
CN202334882U (zh) | Mems麦克风 | |
CN103200508B (zh) | Mems麦克风 | |
CN202663538U (zh) | Mems麦克风 | |
CN101478710B (zh) | 硅电容传声器 | |
CN202488706U (zh) | 一种mems麦克风 | |
CN102378093A (zh) | 一种硅微麦克风 | |
CN202663539U (zh) | Mems麦克风 | |
CN202425037U (zh) | Mems麦克风 | |
CN102387454A (zh) | 硅麦克风及其应用产品的封装结构 | |
CN201294632Y (zh) | 硅麦克风 | |
CN202019450U (zh) | 一种mems麦克风 | |
CN116405857B (zh) | 一种降噪式mems麦克风及电子设备 | |
CN201138865Y (zh) | 硅电容麦克风 | |
CN202587374U (zh) | Mems麦克风芯片 | |
CN201947418U (zh) | 一种mems麦克风 | |
CN205754730U (zh) | 一种麦克风的封装结构 | |
CN202799143U (zh) | Mems麦克风 | |
CN202334883U (zh) | Mems麦克风 | |
CN202019449U (zh) | 一种mems麦克风 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200616 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20130116 |
|
CX01 | Expiry of patent term |