CN201947418U - 一种mems麦克风 - Google Patents
一种mems麦克风 Download PDFInfo
- Publication number
- CN201947418U CN201947418U CN2011200066636U CN201120006663U CN201947418U CN 201947418 U CN201947418 U CN 201947418U CN 2011200066636 U CN2011200066636 U CN 2011200066636U CN 201120006663 U CN201120006663 U CN 201120006663U CN 201947418 U CN201947418 U CN 201947418U
- Authority
- CN
- China
- Prior art keywords
- mems
- chip
- mems microphone
- circuit board
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 239000002184 metal Substances 0.000 claims description 30
- 229910000679 solder Inorganic materials 0.000 claims description 4
- 238000013461 design Methods 0.000 abstract description 13
- 238000009434 installation Methods 0.000 abstract description 9
- 239000000047 product Substances 0.000 description 16
- 238000005538 encapsulation Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 239000000178 monomer Substances 0.000 description 3
- 230000005236 sound signal Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000012536 packaging technology Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011200066636U CN201947418U (zh) | 2011-01-11 | 2011-01-11 | 一种mems麦克风 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011200066636U CN201947418U (zh) | 2011-01-11 | 2011-01-11 | 一种mems麦克风 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201947418U true CN201947418U (zh) | 2011-08-24 |
Family
ID=44474752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011200066636U Expired - Lifetime CN201947418U (zh) | 2011-01-11 | 2011-01-11 | 一种mems麦克风 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201947418U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102595293A (zh) * | 2011-01-11 | 2012-07-18 | 歌尔声学股份有限公司 | 一种mems麦克风及其封装方法 |
CN106652988A (zh) * | 2017-02-11 | 2017-05-10 | 常州东村电子有限公司 | 一种mems有源smd电磁式蜂鸣器及其生产工艺 |
WO2022067897A1 (zh) * | 2020-09-29 | 2022-04-07 | 瑞声声学科技(深圳)有限公司 | 一种超声麦克风及移动终端 |
-
2011
- 2011-01-11 CN CN2011200066636U patent/CN201947418U/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102595293A (zh) * | 2011-01-11 | 2012-07-18 | 歌尔声学股份有限公司 | 一种mems麦克风及其封装方法 |
CN102595293B (zh) * | 2011-01-11 | 2015-04-08 | 歌尔声学股份有限公司 | 一种mems麦克风及其封装方法 |
CN106652988A (zh) * | 2017-02-11 | 2017-05-10 | 常州东村电子有限公司 | 一种mems有源smd电磁式蜂鸣器及其生产工艺 |
WO2022067897A1 (zh) * | 2020-09-29 | 2022-04-07 | 瑞声声学科技(深圳)有限公司 | 一种超声麦克风及移动终端 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102917303B (zh) | 塑料壳封装麦克风 | |
EP3435685B1 (en) | Diaphragm and manufacturing method for diaphragm | |
CN201042078Y (zh) | 具有防尘声孔的硅麦克风 | |
CN204761710U (zh) | 一种mems麦克风 | |
CN101237719A (zh) | 一种硅电容式麦克风及其制作方法 | |
CN103037297A (zh) | Mems麦克风及其制作方法 | |
CN102595293B (zh) | 一种mems麦克风及其封装方法 | |
CN201947418U (zh) | 一种mems麦克风 | |
CN201138866Y (zh) | 改进结构的硅麦克风 | |
CN102118674A (zh) | 一种mems麦克风及其封装方法 | |
CN202799144U (zh) | Mems麦克风 | |
CN104244154A (zh) | Mems麦克风组件中的开口腔基板及其制造方法 | |
CN202425037U (zh) | Mems麦克风 | |
CN104780490A (zh) | 一种mems麦克风的封装结构及其制造方法 | |
CN202019450U (zh) | 一种mems麦克风 | |
CN202679623U (zh) | Mems麦克风 | |
CN201138865Y (zh) | 硅电容麦克风 | |
CN107113485B (zh) | 在mems换能器封装件的制造中使用的基于引线框架的芯片载体 | |
CN202019449U (zh) | 一种mems麦克风 | |
CN104038856B (zh) | 扬声器模组 | |
CN101257736B (zh) | 微型电容式传声器 | |
CN105491493A (zh) | 指向性mems mic | |
KR101300572B1 (ko) | 마이크로-전자 기계적 시스템을 갖는 반도체 패키지 | |
CN202799143U (zh) | Mems麦克风 | |
CN201995128U (zh) | Mems麦克风以及包含它的mems麦克风模组 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20200610 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20110824 |
|
CX01 | Expiry of patent term |