CN202799143U - Mems麦克风 - Google Patents
Mems麦克风 Download PDFInfo
- Publication number
- CN202799143U CN202799143U CN201220424219.0U CN201220424219U CN202799143U CN 202799143 U CN202799143 U CN 202799143U CN 201220424219 U CN201220424219 U CN 201220424219U CN 202799143 U CN202799143 U CN 202799143U
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- Prior art keywords
- recessed groove
- connecting plate
- encapsulating structure
- mems
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000000295 complement effect Effects 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 101001045744 Sus scrofa Hepatocyte nuclear factor 1-beta Proteins 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 abstract 6
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201220424219.0U CN202799143U (zh) | 2012-08-25 | 2012-08-25 | Mems麦克风 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201220424219.0U CN202799143U (zh) | 2012-08-25 | 2012-08-25 | Mems麦克风 |
Publications (1)
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CN202799143U true CN202799143U (zh) | 2013-03-13 |
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CN201220424219.0U Expired - Lifetime CN202799143U (zh) | 2012-08-25 | 2012-08-25 | Mems麦克风 |
Country Status (1)
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CN (1) | CN202799143U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102833659A (zh) * | 2012-08-25 | 2012-12-19 | 歌尔声学股份有限公司 | Mems麦克风及其制造方法 |
CN104766831A (zh) * | 2015-04-16 | 2015-07-08 | 歌尔声学股份有限公司 | 一种集成传感器的封装结构 |
CN114040307A (zh) * | 2021-11-25 | 2022-02-11 | 荣成歌尔微电子有限公司 | Mems麦克风和电子设备 |
-
2012
- 2012-08-25 CN CN201220424219.0U patent/CN202799143U/zh not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102833659A (zh) * | 2012-08-25 | 2012-12-19 | 歌尔声学股份有限公司 | Mems麦克风及其制造方法 |
CN104766831A (zh) * | 2015-04-16 | 2015-07-08 | 歌尔声学股份有限公司 | 一种集成传感器的封装结构 |
CN104766831B (zh) * | 2015-04-16 | 2018-03-23 | 歌尔股份有限公司 | 一种集成传感器的封装结构 |
CN114040307A (zh) * | 2021-11-25 | 2022-02-11 | 荣成歌尔微电子有限公司 | Mems麦克风和电子设备 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20130313 |