CN202587373U - Mems麦克风芯片 - Google Patents
Mems麦克风芯片 Download PDFInfo
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- CN202587373U CN202587373U CN 201220239615 CN201220239615U CN202587373U CN 202587373 U CN202587373 U CN 202587373U CN 201220239615 CN201220239615 CN 201220239615 CN 201220239615 U CN201220239615 U CN 201220239615U CN 202587373 U CN202587373 U CN 202587373U
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- 238000004377 microelectronic Methods 0.000 title abstract 2
- 239000003990 capacitor Substances 0.000 claims abstract description 141
- 239000000758 substrate Substances 0.000 claims abstract description 114
- 230000035945 sensitivity Effects 0.000 abstract description 12
- 230000007547 defect Effects 0.000 abstract 1
- 230000001413 cellular effect Effects 0.000 description 9
- 238000010276 construction Methods 0.000 description 9
- 230000002950 deficient Effects 0.000 description 9
- 238000002955 isolation Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000001133 acceleration Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 1
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CN 201220239615 CN202587373U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风芯片 |
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CN 201220239615 CN202587373U (zh) | 2012-05-25 | 2012-05-25 | Mems麦克风芯片 |
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CN202587373U true CN202587373U (zh) | 2012-12-05 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102711027A (zh) * | 2012-05-25 | 2012-10-03 | 歌尔声学股份有限公司 | Mems麦克风芯片 |
CN104837104A (zh) * | 2014-02-10 | 2015-08-12 | 英飞凌科技股份有限公司 | 用于制造多个麦克风结构的方法、麦克风和移动设备 |
CN104902403A (zh) * | 2015-06-30 | 2015-09-09 | 歌尔声学股份有限公司 | 一种mems麦克风 |
CN106454659A (zh) * | 2016-10-31 | 2017-02-22 | 歌尔股份有限公司 | 一种发声装置及其制造方法 |
CN110366090A (zh) * | 2018-04-11 | 2019-10-22 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其制备方法 |
CN110357030A (zh) * | 2018-04-11 | 2019-10-22 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其制备方法 |
-
2012
- 2012-05-25 CN CN 201220239615 patent/CN202587373U/zh not_active Expired - Lifetime
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102711027A (zh) * | 2012-05-25 | 2012-10-03 | 歌尔声学股份有限公司 | Mems麦克风芯片 |
CN104837104A (zh) * | 2014-02-10 | 2015-08-12 | 英飞凌科技股份有限公司 | 用于制造多个麦克风结构的方法、麦克风和移动设备 |
CN104837104B (zh) * | 2014-02-10 | 2018-08-07 | 英飞凌科技股份有限公司 | 用于制造多个麦克风结构的方法、麦克风和移动设备 |
CN104902403A (zh) * | 2015-06-30 | 2015-09-09 | 歌尔声学股份有限公司 | 一种mems麦克风 |
CN106454659A (zh) * | 2016-10-31 | 2017-02-22 | 歌尔股份有限公司 | 一种发声装置及其制造方法 |
CN110366090A (zh) * | 2018-04-11 | 2019-10-22 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其制备方法 |
CN110357030A (zh) * | 2018-04-11 | 2019-10-22 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其制备方法 |
CN110366090B (zh) * | 2018-04-11 | 2021-02-23 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其制备方法 |
CN110357030B (zh) * | 2018-04-11 | 2022-12-16 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其制备方法 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
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TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20121205 |
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CX01 | Expiry of patent term |