CN206100450U - 一种mems麦克风的封装结构 - Google Patents
一种mems麦克风的封装结构 Download PDFInfo
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- CN206100450U CN206100450U CN201621010761.6U CN201621010761U CN206100450U CN 206100450 U CN206100450 U CN 206100450U CN 201621010761 U CN201621010761 U CN 201621010761U CN 206100450 U CN206100450 U CN 206100450U
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910052802 copper Inorganic materials 0.000 claims abstract description 30
- 239000010949 copper Substances 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 5
- 238000007789 sealing Methods 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000004806 packaging method and process Methods 0.000 abstract description 21
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621010761.6U CN206100450U (zh) | 2016-08-31 | 2016-08-31 | 一种mems麦克风的封装结构 |
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| CN201621010761.6U CN206100450U (zh) | 2016-08-31 | 2016-08-31 | 一种mems麦克风的封装结构 |
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| CN206100450U true CN206100450U (zh) | 2017-04-12 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107105378A (zh) * | 2017-06-05 | 2017-08-29 | 歌尔股份有限公司 | Mems芯片、麦克风及制作方法与封装方法 |
| CN109862500A (zh) * | 2019-01-17 | 2019-06-07 | 江苏普诺威电子股份有限公司 | 多孔进音单孔传声的mems麦克风载板的制作方法 |
| CN110475192A (zh) * | 2019-08-30 | 2019-11-19 | 苏州敏芯微电子技术股份有限公司 | 抗静电基板及采用该抗静电基板的硅麦克风 |
| CN110574395A (zh) * | 2017-05-05 | 2019-12-13 | 歌尔股份有限公司 | 一种mems麦克风 |
| CN110784814A (zh) * | 2019-10-30 | 2020-02-11 | 歌尔股份有限公司 | 一种麦克风及电子设备 |
| CN111510835A (zh) * | 2020-06-01 | 2020-08-07 | 无锡韦尔半导体有限公司 | 固传导mems麦克风的封装结构、制造方法及移动终端 |
| CN111757230A (zh) * | 2020-08-31 | 2020-10-09 | 潍坊歌尔微电子有限公司 | Mems麦克风和电子设备 |
| CN112969278A (zh) * | 2021-02-03 | 2021-06-15 | 苏州维信电子有限公司 | 一种麦克风柔性电路板及其制作方法 |
| WO2022000644A1 (zh) * | 2020-06-30 | 2022-01-06 | 瑞声声学科技(深圳)有限公司 | 麦克风 |
| CN113942974A (zh) * | 2017-07-10 | 2022-01-18 | Tdk株式会社 | 具有粒子过滤器的mems器件以及制造的方法 |
| WO2024016346A1 (zh) * | 2022-07-22 | 2024-01-25 | 深圳市创芯微电子有限公司 | 一种咪头电路板加工工艺、制品、咪头及电子产品 |
-
2016
- 2016-08-31 CN CN201621010761.6U patent/CN206100450U/zh active Active
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11109162B2 (en) | 2017-05-05 | 2021-08-31 | Goertek Inc. | MEMS microphone |
| CN110574395A (zh) * | 2017-05-05 | 2019-12-13 | 歌尔股份有限公司 | 一种mems麦克风 |
| CN110574395B (zh) * | 2017-05-05 | 2020-11-13 | 潍坊歌尔微电子有限公司 | 一种mems麦克风 |
| CN107105378A (zh) * | 2017-06-05 | 2017-08-29 | 歌尔股份有限公司 | Mems芯片、麦克风及制作方法与封装方法 |
| CN113942974A (zh) * | 2017-07-10 | 2022-01-18 | Tdk株式会社 | 具有粒子过滤器的mems器件以及制造的方法 |
| CN109862500A (zh) * | 2019-01-17 | 2019-06-07 | 江苏普诺威电子股份有限公司 | 多孔进音单孔传声的mems麦克风载板的制作方法 |
| CN110475192A (zh) * | 2019-08-30 | 2019-11-19 | 苏州敏芯微电子技术股份有限公司 | 抗静电基板及采用该抗静电基板的硅麦克风 |
| CN110784814A (zh) * | 2019-10-30 | 2020-02-11 | 歌尔股份有限公司 | 一种麦克风及电子设备 |
| CN111510835A (zh) * | 2020-06-01 | 2020-08-07 | 无锡韦尔半导体有限公司 | 固传导mems麦克风的封装结构、制造方法及移动终端 |
| WO2022000644A1 (zh) * | 2020-06-30 | 2022-01-06 | 瑞声声学科技(深圳)有限公司 | 麦克风 |
| CN111757230A (zh) * | 2020-08-31 | 2020-10-09 | 潍坊歌尔微电子有限公司 | Mems麦克风和电子设备 |
| CN112969278A (zh) * | 2021-02-03 | 2021-06-15 | 苏州维信电子有限公司 | 一种麦克风柔性电路板及其制作方法 |
| WO2024016346A1 (zh) * | 2022-07-22 | 2024-01-25 | 深圳市创芯微电子有限公司 | 一种咪头电路板加工工艺、制品、咪头及电子产品 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200608 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
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| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: F / F, phase II, Qingdao International Innovation Park, 1 Keyuan Weiyi Road, Laoshan District, Qingdao City, Shandong Province, 266104 Patentee after: Geer Microelectronics Co.,Ltd. Country or region after: China Address before: Room 103, 396 Songling Road, Laoshan District, Qingdao City, Shandong Province 266104 Patentee before: Goer Microelectronics Co.,Ltd. Country or region before: China |