CN202415378U - Biplate or double-sided film coating system - Google Patents
Biplate or double-sided film coating system Download PDFInfo
- Publication number
- CN202415378U CN202415378U CN201120576423XU CN201120576423U CN202415378U CN 202415378 U CN202415378 U CN 202415378U CN 201120576423X U CN201120576423X U CN 201120576423XU CN 201120576423 U CN201120576423 U CN 201120576423U CN 202415378 U CN202415378 U CN 202415378U
- Authority
- CN
- China
- Prior art keywords
- chamber
- cylinder
- workpiece
- biplate
- vacuum lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Images
Abstract
The utility model discloses a biplate or double-sided film coating system, which comprises a plurality of vacuum chambers which are linearly arranged. A through hole is arranged between any two adjacent vacuum chambers, a first vacuum chamber is a sheet inlet chamber, a last vacuum chamber is a sheet outlet chamber, at least one film coating chamber is disposed between the sheet inlet chamber and the sheet outlet chamber, chamber doors are arranged on the chamber walls of the left side and the right side of the film coating chamber in a workpiece conveying direction, and one of magnetron sputtering targets is installed on each of the chamber doors. According to the biplate or double-sided film coating system, the plurality of vacuum chambers are linearly arranged, and the magnetron sputtering targets are disposed on the chamber doors of two sides of each film coating chamber, so that double sides of a single workpiece or two workpieces can be simultaneously coated, the production efficiency of a film coating production line can be effectively improved, and simultaneously each of the magnetron sputtering targets is installed on the chamber doors so that equipment maintenance is convenient, and the installation of the magnetron sputtering targets is simple.
Description
Technical field
The utility model relates to sheet material coating technique field, particularly a kind of biplate or double-sided coating system that is applicable to sheet materials such as glass, steel plate.
Background technology
In the glass coating production line commonly used at present, it generally is the form of monolithic plated film that the surface coating of glass is processed, and its production efficiency is quite low.Simultaneously, when workpiece hour, the whole plated film course of processing of workpiece is generally accomplished in same Vakuumkammer, this makes the internal vacuum chamber complex structure, cost of equipment maintenance is also quite high; When this production line is used for adding man-hour than large-scale workpiece, owing to there is not special-purpose handling equipment, generally be after glass cleans, send into work rest through a dead lift earlier; Send into Vakuumkammer by work rest through live roll again, make that glass coating Production Line efficient is low, labor strength is big; Manpower Resource Investment is also high, simultaneously, and in the course of conveying of this mode; Glass is contaminated easily, reduces the wash result of glass in the preorder cleaning machine, influences quality product.Also there is the mechanical manipulator of employing to carry at present, but its complex structure, production cost is quite high.
The utility model content
The purpose of the utility model is to overcome the deficiency of prior art, and a kind of biplate or double-sided coating system are provided, and two-sided while plated film or the biplate glass that this coating system can be realized sheet material such as glass is plated film simultaneously, effectively improves Production Line efficient.
The technical scheme of the utility model is: a kind of biplate or double-sided coating system; Comprise linearly a plurality of Vakuumkammers of formula arrangement; Be provided with through hole between two adjacent arbitrarily Vakuumkammers; First Vakuumkammer is for entering the sheet chamber, and last Vakuumkammer is the slice chamber, advances between sheet chamber and the slice chamber to be provided with at least one coating chamber; Coating chamber is positioned on the locular wall of the workpiece throughput direction left and right sides and is equipped with the chamber door, on each chamber door magnetron sputtering target is housed.
The said CD feeding port outside of entering the sheet chamber is provided with into horse, and the piece mouth outside of slice chamber is provided with out horse.
In order to reduce workpiece in the contaminated phenomenon of course of conveying; Throughput direction according to workpiece; Saidly enter horse the place ahead and be provided with special-purpose biplate workpiece input unit, biplate workpiece input unit comprises cleaning machine transport platform, biplate transporting mechanism and hinge frame, according to the throughput direction of workpiece; Cleaning machine transport platform, biplate transporting mechanism and hinge frame set gradually, and the hinge frame is provided with and draws linkage;
Wherein, the hinge frame comprises bracing frame and 2 hinge bins, and 2 hinge bins are located at the bracing frame middle part; On draw linkage to comprise to draw cylinder and hinge articulated elements, on draw cylinder to be fixed on the bracing frame, on draw that cylinder is terminal to be connected with the hinge articulated elements, between 2 hinge bins through the connection of hinge articulated elements;
The hinge frame with advance between the horse through band synchronously to be connected.
When biplate workpiece input unit uses; Its working process is: workpiece is after cleaning machine cleans; Deliver on the biplate transporting mechanism by the cleaning machine transport platform, by the biplate transporting mechanism workpiece delivered on the hinge frame on the corresponding hinge bin by part again, then through on draw cylinder pulling hinge articulated elements; 2 hinge bins of the closed drive of hinge articulated elements change vertical state into by horizontality; Thereby make 2 workpiece also be in vertical state, through synchronous band 2 workpiece are sent into into horse simultaneously again, advance horse and 2 workpiece are sent into into sheet chamber through live roll.
In order to realize this biplate or double-sided coating system better; Throughput direction according to workpiece; Saidly go out the horse rear and also can be provided with special-purpose biplate workpiece take-off equipment; The structure of biplate workpiece take-off equipment and biplate workpiece input unit symmetry, its principle is identical, and the course of conveying of workpiece is opposite with biplate workpiece input unit.
In the biplate workpiece input unit of said structure, its biplate transporting mechanism can be following two kinds of structure formations:
(1) said biplate transporting mechanism comprises that workpiece conveyor, first transmits cylinder, the first cylinder travelling belt, second transmits the cylinder and the second cylinder travelling belt; Workpiece conveyor is located at the output terminal of cleaning machine transport platform; Workpiece conveyor and the vertical setting each other of cleaning machine transport platform; Workpiece conveyor one side is provided with the hinge frame; The first transmission cylinder and second transmits cylinder and is located at the workpiece conveyor two ends respectively, and the first cylinder travelling belt is located at an end of workpiece conveyor and hinge frame, and the second cylinder travelling belt is located at the other end of workpiece conveyor and hinge frame; First transmits cylinder is located at first cylinder travelling belt top and round being displaced on the first cylinder travelling belt, and the second transmission cylinder is located at second cylinder travelling belt top and is come and gone and is displaced on the second cylinder travelling belt;
Workpiece conveyor is provided with 2 workpiece positions, near first transmit cylinder workpiece position be first workpiece position, near second transmit cylinder workpiece position be second workpiece position, first workpiece position is provided with first lift cylinder, second workpiece position is provided with second lift cylinder;
First transmits cylinder and second transmits the air cylinder structure symmetry, and the end that the first transmission cylinder and second transmits cylinder is respectively equipped with supporting plate, and supporting plate is provided with vacuum pad.
When biplate workpiece input unit uses; The working process of this biplate transporting mechanism is specially: first workpiece delivered to first workpiece position of workpiece conveyor earlier by the cleaning machine transport platform; First lift cylinder holds up this workpiece earlier; Transmit the cylinder action by first then, drive its terminal supporting plate and get into this workpiece below, the vacuum pad on the supporting plate sucks workpiece; Then first cylinder travelling belt action, first this workpiece of transmission cylinder drive moves to hinge frame place and puts it on the corresponding hinge bin; Second workpiece delivered to first workpiece position of workpiece conveyor earlier by the cleaning machine transport platform; By the operation of workpiece conveyor it is delivered to second workpiece position then; Second lift cylinder on second workpiece position holds up workpiece earlier at this moment; Transmit the cylinder action by second then, drive its terminal supporting plate and get into this workpiece below, the vacuum pad on the supporting plate sucks workpiece; Then second cylinder travelling belt action, second this workpiece of transmission cylinder drive moves to hinge frame place and puts it on the corresponding hinge bin; In this process, the sequence of batching products of first workpiece and second workpiece can be adjusted according to actual process.
(2) said biplate transporting mechanism comprises back and forth movement in the lateral round travelling belt of hinge frame, and round travelling belt is located at the output terminal of cleaning machine transport platform, comes and goes travelling belt and the vertical setting each other of cleaning machine transport platform, comes and goes travelling belt one side the hinge frame is set;
Come and go travelling belt and be provided with 3 workpiece positions, comprise intermediate piece position and 2 side workpiece positions, intermediate piece position correspondence is located at the output terminal of cleaning machine transport platform, and 2 side workpiece positions are located at the both sides of intermediate piece position respectively.
When biplate workpiece input unit uses; The working process of this biplate transporting mechanism is specially: first workpiece delivered on the intermediate piece position that comes and goes travelling belt by the cleaning machine transport platform earlier; By round travelling belt it is delivered to the side workpiece position of intermediate piece position one side then, by travelling belt this workpiece is delivered to hinge frame place again and send on the corresponding hinge bin; Second workpiece delivered on the intermediate piece position that comes and goes travelling belt by the cleaning machine transport platform earlier; By round travelling belt it is delivered to the side workpiece position of intermediate piece position opposite side then, by travelling belt this workpiece is delivered to hinge frame place again and send on the corresponding hinge bin; In this process, the sequence of batching products of first workpiece and second workpiece can be adjusted according to actual process.
In biplate or the double-sided coating system; Said a plurality of Vakuumkammer also comprises pre-treatment chamber, transition chamber, surge chamber and after-processing chamber; According to the throughput direction of workpiece, enter sheet chamber, pre-treatment chamber, transition chamber, coating chamber, surge chamber, after-processing chamber and slice chamber and set gradually.Wherein, enter the sheet chamber and the slice chamber is low vacuum chamber, as the transition of atmosphere and vacuum; Pre-treatment chamber and after-processing chamber mainly accomplish technologies such as clean or the depositing treatment of workpiece surface; Transition chamber and surge chamber mainly are the transition of arriving pre-treatment chamber or after-processing chamber as coating chamber.According to the arts demand of reality, the quantity of treatment chamber, transition chamber, surge chamber or after-processing chamber can be provided with flexibly.
The said CD feeding port place of entering the sheet chamber is provided with first vacuum lock; The piece mouth place of slice chamber is provided with second vacuum lock; The through hole of advancing between sheet chamber and the pre-treatment chamber is provided with the 3rd vacuum lock; Through hole between pre-treatment chamber and the transition chamber is provided with the 4th vacuum lock, and the through hole between surge chamber and the after-processing chamber is provided with the 5th vacuum lock, and the through hole between after-processing chamber and the slice chamber is provided with the 6th vacuum lock.
Said coating chamber has 4, and 4 coating chambers linearly formula are arranged between transition chamber and the surge chamber, and the through hole between adjacent two coating chambers is provided with the 7th vacuum lock arbitrarily.
Wherein, each vacuum lock can adopt the vacuum lock of traditional structure, also can adopt the vacuum lock of following structure:
(1) said first vacuum lock, second vacuum lock, the 3rd vacuum lock, the 4th vacuum lock, the 5th vacuum lock, the 6th vacuum lock are identical with the structure of the 7th vacuum lock; Comprise cylinder, valve body and core assembly; Valve body is the box structure of the rectangular parallelepiped of hollow; The left and right sides wall of valve body is fixedly connected with the Vakuumkammer that is positioned at its both sides respectively, has valve hole on the left and right sides wall of valve body, and valve hole communicates with the through hole of the Vakuumkammer that is positioned at the valve body both sides; Core assembly is located in the central space of valve body, and the cylinder end passes the valve body top and is connected with core assembly; Core assembly comprises symmetrically arranged two portable plates, moveable hinge is set between two portable plates also is connected through moveable hinge and cylinder end, and the bottom of two portable plates is respectively equipped with guide wheel; Be provided with at least one extension spring between two portable plates, each extension spring two ends is individually fixed on the sidewall of two portable plates.When each vacuum lock used, its principle is: when needs were closed vacuum lock, cylinder moved (when being provided with a plurality of cylinder; Each cylinder synchronous operation); It is terminal to drive core assembly motion downwards in the valve body central space, and when core assembly dropped to guide wheel and contacts with the valve body inner bottom surface, cylinder is terminal to continue decline; Through each moveable hinge two portable plates are strutted to both sides; Two portable plates slide to the two side of valve body central space under the guiding of guide wheel, when the outside of two portable plates was closely attached on the two side of valve body central space respectively, two portable plates were sealed corresponding valve hole respectively; Thereby separate the through hole on the Vakuumkammer of the valve body left and right sides, reach the purpose of sealing; When needs are opened the vacuum valve plate, cylinder operation, it is terminal to drive core assembly reversing motion in the valve body central space, through moveable hinge earlier with two portable plates after draw in the centre, make it rise to guide wheel again and be higher than the residing position of valve hole and get final product.
(2) said first vacuum lock, second vacuum lock, the 3rd vacuum lock, the 4th vacuum lock, the 5th vacuum lock, the 6th vacuum lock are identical with the structure of the 7th vacuum lock; Comprise cylinder, valve body, spool and clean cover plate down; Valve body is the rectangular structure of hollow, and the left and right sides wall of valve body is fixedly connected with the Vakuumkammer that is positioned at its both sides respectively, has valve hole on the left and right sides wall of valve body; Valve hole communicates with the through hole of the Vakuumkammer that is positioned at the valve body both sides; Spool is located at valve inner, and the cylinder end passes the valve body top and is fixedly connected with the spool top, and following cleaning cover plate is located at the valve body bottom.When each vacuum lock used, its principle was: when needs are closed vacuum lock, and the cylinder operation; Its terminal spool that drives moves downwards in the valve body central space; When spool fell to the bottom, the left and right sides face of spool was closely attached on the medial surface of valve body, and separate the valve hole on the wall of the valve body left and right sides this moment; Thereby block the through hole on the Vakuumkammer of the valve body left and right sides, reach the purpose of sealing; When needs are opened the vacuum valve plate, cylinder operation, it is terminal to drive spool upwards motion in the valve body central space, and spool rises to its end and is higher than the residing position of valve hole and gets final product.
When this biplate or double-sided coating system use; Its principle is: workpiece is sent into into sheet chamber by advancing horse through live roll, pass through pre-treatment chamber, transition chamber successively again after, get into coating chamber and carry out plated film; Because coating chamber is equipped with magnetron sputtering target in the both sides of glass; So can be simultaneously two sides or 2 workpiece of single workpiece be carried out plated film, after workpiece passed through surge chamber, after-processing chamber and slice chamber successively after plated film was accomplished, it are seen off by going out horse.
The utility model has following beneficial effect with respect to prior art:
This biplate or double-sided coating system adopt the setting of a plurality of Vakuumkammer linear arrangement; And each coating chamber all is provided with magnetron sputtering target on the door of the chamber of its both sides; Can realize two sides or two workpiece while plated films, the production efficiency of coating film production line effectively is improved single workpiece; Simultaneously, each magnetron sputtering target is located on the door of chamber, can be made things convenient for maintenance of the equipment, the installation of magnetron sputtering target is also simple.
The through hole of this biplate or double-sided coating system adjacent Vakuumkammer in many places is provided with vacuum lock, when needs carry out maintenance of the equipment, as long as corresponding vacuum lock is locked, can operate also simple to safeguarding separately that when Vakuumkammer its maintenance cost is low.Simultaneously, this vacuum lock is simple in structure, processing and manufacturing is easy, and safety greatly improves than traditional flap valve, and is also more durable, and the service intervals time is long.
This biplate or double-sided coating system also can be furnished with special-purpose biplate workpiece input unit, have replaced conventional artificial carrying link, have realized the automatic transport of glass pieces in coating process; Can effectively enhance productivity; Save expense of human, simultaneously, can avoid contacting of glass pieces and staff; Effectively avoided glass pieces contaminated phenomenon in course of conveying, thereby improved the quality of products.
Description of drawings
When Fig. 1 is in horizontality for glass pieces among the embodiment 1 in the hinge frame, the structural representation of this glass conveyer device.
When Fig. 2 is in vertical state for glass pieces among the embodiment 1 in the hinge frame, the structural representation of this glass conveyer device.
When Fig. 3 is in horizontality for glass pieces among the embodiment 2 in the hinge frame, the structural representation of this glass conveyer device.
When Fig. 4 is in vertical state for glass pieces among the embodiment 2 in the hinge frame, the structural representation of this glass conveyer device.
Fig. 5 is the structural representation of this biplate or double-sided coating system.
Fig. 6 is that the A of Fig. 5 is to view.
Fig. 7 is the structural representation of single vacuum lock among the embodiment 1.
Fig. 8 is the structural representation of single vacuum lock among the embodiment 3.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is done further to specify, but the embodiment of the utility model is not limited thereto.
Embodiment 1
A kind of biplate of present embodiment or double-sided coating system; Its structure such as Fig. 5 or shown in Figure 6; Comprise linearly a plurality of Vakuumkammers of formula arrangement, be provided with through hole between two adjacent arbitrarily Vakuumkammers, first Vakuumkammer is for entering sheet chamber 4; Last Vakuumkammer is slice chamber 23, advances to be provided with at least one coating chamber 20 between sheet chamber 4 and the slice chamber 23; Coating chamber is positioned on the locular wall of the workpiece throughput direction left and right sides and is equipped with the chamber door, on each chamber door magnetron sputtering target 32 is housed.
The CD feeding port outside of entering sheet chamber 4 is provided with into horse 3, and the piece mouth outside of slice chamber 13 is provided with out horse 24.
A plurality of Vakuumkammers also comprise pre-treatment chamber 18, transition chamber 19, surge chamber 21 and after-processing chamber 22, according to the throughput direction of workpiece, enter sheet chamber 4, pre-treatment chamber 18, transition chamber 19, coating chamber 20, surge chamber 21, after-processing chamber 22 and slice chamber 23 and set gradually.Wherein, enter the sheet chamber and the slice chamber is low vacuum chamber, as the transition of atmosphere and vacuum; Pre-treatment chamber and after-processing chamber mainly accomplish technologies such as clean or the depositing treatment of workpiece surface; Transition chamber and surge chamber mainly are the transition of arriving pre-treatment chamber or after-processing chamber as coating chamber.
The CD feeding port place of entering sheet chamber 4 is provided with first vacuum lock 25; The piece mouth place of slice chamber 23 is provided with second vacuum lock 31; The through hole of advancing between sheet chamber and the pre-treatment chamber is provided with the 3rd vacuum lock 26; Through hole between pre-treatment chamber and the transition chamber is provided with the 4th vacuum lock 27, and the through hole between surge chamber and the after-processing chamber is provided with the 5th vacuum lock 29, and the through hole between after-processing chamber and the slice chamber is provided with the 6th vacuum lock 30.
Said first vacuum lock 26, second vacuum lock 31, the 3rd vacuum lock 26, the 4th vacuum lock 27, the 5th vacuum lock 29, the 6th vacuum lock 30 are identical with the structure of the 7th vacuum lock 28; As shown in Figure 7; Comprise cylinder 33, valve body 34 and core assembly, valve body is the box structure of the rectangular parallelepiped of hollow, and the left and right sides wall of valve body is fixedly connected with the Vakuumkammer that is positioned at its both sides respectively; Have valve hole 35 on the left and right sides wall of valve body; Valve hole communicates with the through hole of the Vakuumkammer that is positioned at the valve body both sides, and core assembly is located in the central space of valve body, and the cylinder end passes the valve body top and is connected with core assembly; Core assembly comprises that moveable hinge 37 is set between 36, two portable plates of symmetrically arranged two portable plates also to be connected through moveable hinge and cylinder 33 ends, and the bottom of two portable plates is respectively equipped with guide wheel 38; Be provided with at least one extension spring 39 between two portable plates, each extension spring two ends is individually fixed on the sidewall of two portable plates.When each vacuum lock used, its principle is: when needs were closed vacuum lock, cylinder moved (when being provided with a plurality of cylinder; Each cylinder synchronous operation); It is terminal to drive core assembly motion downwards in the valve body central space, and when core assembly dropped to guide wheel and contacts with the valve body inner bottom surface, cylinder is terminal to continue decline; Through each moveable hinge two portable plates are strutted to both sides; Two portable plates slide to the two side of valve body central space under the guiding of guide wheel, when the outside of two portable plates was closely attached on the two side of valve body central space respectively, two portable plates were sealed corresponding valve hole respectively; Thereby separate the through hole on the Vakuumkammer of the valve body left and right sides, reach the purpose of sealing; When needs are opened the vacuum valve plate, cylinder operation, it is terminal to drive core assembly reversing motion in the valve body central space, through moveable hinge earlier with two portable plates after draw in the centre, make it rise to guide wheel again and be higher than the residing position of valve hole and get final product.
In order to reduce workpiece in the contaminated phenomenon of course of conveying; According to the throughput direction of workpiece, advance to be provided with special-purpose biplate workpiece input unit, the concrete structure of biplate workpiece input unit such as Fig. 1 or shown in Figure 2 before the horse; Comprise cleaning machine transport platform 1, biplate transporting mechanism and hinge frame 2; According to the throughput direction of workpiece, cleaning machine transport platform 1, biplate transporting mechanism and hinge frame 2 set gradually, and the hinge frame is provided with and draws linkage;
Wherein, hinge frame 2 comprises that bracing frame 12 and 13,2 hinge bins of 2 hinge bins are located at bracing frame middle part; On draw linkage to comprise to draw cylinder 14 and hinge articulated elements 15, on draw cylinder to be fixed on the bracing frame, on draw that cylinder is terminal to be connected with the hinge articulated elements, between 2 hinge bins through the connection of hinge articulated elements;
Hinge frame 2 with advance between the horse 3 through band synchronously to be connected.
When biplate workpiece input unit uses; Its working process is: workpiece 16 is after cleaning machine cleans; Deliver on the biplate transporting mechanism by the cleaning machine transport platform, by the biplate transporting mechanism workpiece delivered on the hinge frame on the corresponding hinge bin by part again, then through on draw cylinder pulling hinge articulated elements; 2 hinge bins of the closed drive of hinge articulated elements change vertical state into by horizontality; Thereby make 2 workpiece also be in vertical state, through synchronous band 2 workpiece are sent into into horse simultaneously again, advance horse and 2 workpiece are sent into into sheet chamber through live roll.
Wherein, The biplate transporting mechanism comprises that workpiece conveyor 5, first transmits cylinder 6, the first cylinder travelling belt 7, second transmits the cylinder 8 and the second cylinder travelling belt 9; Workpiece conveyor is located at the output terminal of cleaning machine transport platform; The vertical setting each other of workpiece conveyor and cleaning machine transport platform, workpiece conveyor one side is provided with the hinge frame, and the first transmission cylinder and second transmits cylinder and is located at the workpiece conveyor two ends respectively; The first cylinder travelling belt is located at an end of workpiece conveyor and hinge frame; The second cylinder travelling belt is located at the other end of workpiece conveyor and hinge frame, and first transmits cylinder is located at first cylinder travelling belt top and round being displaced on the first cylinder travelling belt, and the second transmission cylinder is located at second cylinder travelling belt top and is come and gone and is displaced on the second cylinder travelling belt;
First transmits cylinder and second transmits the air cylinder structure symmetry, and the end that the first transmission cylinder and second transmits cylinder is respectively equipped with supporting plate, and supporting plate is provided with vacuum pad.
When biplate workpiece input unit uses; The working process of this biplate transporting mechanism is specially: first workpiece delivered to first workpiece position of workpiece conveyor earlier by the cleaning machine transport platform; First lift cylinder holds up this workpiece earlier; Transmit the cylinder action by first then, drive its terminal supporting plate and get into this workpiece below, the vacuum pad on the supporting plate sucks workpiece; Then first cylinder travelling belt action, first this workpiece of transmission cylinder drive moves to hinge frame place and puts it on the corresponding hinge bin; Second workpiece delivered to first workpiece position of workpiece conveyor earlier by the cleaning machine transport platform; By the operation of workpiece conveyor it is delivered to second workpiece position then; Second lift cylinder on second workpiece position holds up workpiece earlier at this moment; Transmit the cylinder action by second then, drive its terminal supporting plate and get into this workpiece below, the vacuum pad on the supporting plate sucks workpiece; Then second cylinder travelling belt action, second this workpiece of transmission cylinder drive moves to hinge frame place and puts it on the corresponding hinge bin; In this process, the sequence of batching products of first workpiece and second workpiece can be adjusted according to actual process.
When this biplate or double-sided coating system use; Its principle is: workpiece is sent into into sheet chamber by advancing horse through live roll, pass through pre-treatment chamber, transition chamber successively again after, get into coating chamber and carry out plated film; Because coating chamber is equipped with magnetron sputtering target in the both sides of glass; So can be simultaneously two sides or 2 workpiece of single workpiece be carried out plated film, after workpiece passed through surge chamber, after-processing chamber and slice chamber successively after plated film was accomplished, it are seen off by going out horse.
A kind of biplate of present embodiment or double-sided coating system; Compare with embodiment 1, its difference is the structure formation of its biplate transporting mechanism, like Fig. 3 or shown in Figure 4; The biplate transporting mechanism comprises that back and forth movement is in the lateral round travelling belt 17 of hinge frame; Come and go travelling belt 17 and be located at the output terminal of cleaning machine transport platform 1, come and go travelling belt and the vertical setting each other of cleaning machine transport platform, come and go travelling belt one side hinge frame 2 is set;
Come and go travelling belt 17 and be provided with 3 workpiece positions, comprise intermediate piece position and 2 side workpiece positions, intermediate piece position correspondence is located at the output terminal of cleaning machine transport platform, and 2 side workpiece positions are located at the both sides of intermediate piece position respectively.
When biplate workpiece input unit uses; The working process of this biplate transporting mechanism is specially: first workpiece delivered on the intermediate piece position that comes and goes travelling belt by the cleaning machine transport platform earlier; By round travelling belt it is delivered to the side workpiece position of intermediate piece position one side then, by travelling belt this workpiece is delivered to hinge frame place again and send on the corresponding hinge bin; Second workpiece delivered on the intermediate piece position that comes and goes travelling belt by the cleaning machine transport platform earlier; By round travelling belt it is delivered to the side workpiece position of intermediate piece position opposite side then, by travelling belt this workpiece is delivered to hinge frame place again and send on the corresponding hinge bin; In this process, the sequence of batching products of first workpiece and second workpiece can be adjusted according to actual process.
A kind of biplate of present embodiment or double-sided coating system compare with embodiment 1, and its difference is the structure of each vacuum lock; First vacuum lock, second vacuum lock, the 3rd vacuum lock, the 4th vacuum lock, the 5th vacuum lock, the 6th vacuum lock are identical with the structure of the 7th vacuum lock; As shown in Figure 8, comprise cylinder 33, valve body 34, spool 36 and clean cover plate 37 down that valve body is the rectangular structure of hollow; The left and right sides wall of valve body is fixedly connected with the Vakuumkammer that is positioned at its both sides respectively; Have valve hole 35 on the left and right sides wall of valve body, valve hole communicates with the through hole of the Vakuumkammer that is positioned at the valve body both sides, and spool is located at valve inner; The cylinder end passes the valve body top and is fixedly connected with the spool top, and following cleaning cover plate is located at the valve body bottom.When each vacuum lock used, its principle was: when needs are closed vacuum lock, and the cylinder operation; Its terminal spool that drives moves downwards in the valve body central space; When spool fell to the bottom, the left and right sides face of spool was closely attached on the medial surface of valve body, and separate the valve hole on the wall of the valve body left and right sides this moment; Thereby block the through hole on the Vakuumkammer of the valve body left and right sides, reach the purpose of sealing; When needs are opened the vacuum valve plate, cylinder operation, it is terminal to drive spool upwards motion in the valve body central space, and spool rises to its end and is higher than the residing position of valve hole and gets final product.
As stated, can realize preferably that just the utility model, the foregoing description are merely the preferred embodiment of the utility model, be not the practical range that is used for limiting the utility model; Be that all equalizations of being done according to the utility model content change and modification, all contained by the utility model claim scope required for protection.
Claims (10)
1. biplate or double-sided coating system is characterized in that, comprise linearly a plurality of Vakuumkammers of formula arrangement; Be provided with through hole between two adjacent arbitrarily Vakuumkammers; First Vakuumkammer is for entering the sheet chamber, and last Vakuumkammer is the slice chamber, advances between sheet chamber and the slice chamber to be provided with at least one coating chamber; Coating chamber is positioned on the locular wall of the workpiece throughput direction left and right sides and is equipped with the chamber door, on each chamber door magnetron sputtering target is housed.
2. biplate according to claim 1 or double-sided coating system is characterized in that, the said CD feeding port outside of entering the sheet chamber is provided with into horse, and the piece mouth outside of slice chamber is provided with out horse.
3. biplate according to claim 2 or double-sided coating system; It is characterized in that,, saidly enter horse the place ahead and be provided with biplate workpiece input unit according to the throughput direction of workpiece; Biplate workpiece input unit comprises cleaning machine transport platform, biplate transporting mechanism and hinge frame; According to the throughput direction of workpiece, cleaning machine transport platform, biplate transporting mechanism and hinge frame set gradually, and the hinge frame is provided with and draws linkage;
Wherein, the hinge frame comprises bracing frame and 2 hinge bins, and 2 hinge bins are located at the bracing frame middle part; On draw linkage to comprise to draw cylinder and hinge articulated elements, on draw cylinder to be fixed on the bracing frame, on draw that cylinder is terminal to be connected with the hinge articulated elements, between 2 hinge bins through the connection of hinge articulated elements;
The hinge frame with advance between the horse through band synchronously to be connected.
4. biplate according to claim 3 or double-sided coating system; It is characterized in that; Said biplate transporting mechanism comprises that workpiece conveyor, first transmits cylinder, the first cylinder travelling belt, second transmits the cylinder and the second cylinder travelling belt; Workpiece conveyor is located at the output terminal of cleaning machine transport platform; The vertical setting each other of workpiece conveyor and cleaning machine transport platform, workpiece conveyor one side is provided with the hinge frame, and the first transmission cylinder and second transmits cylinder and is located at the workpiece conveyor two ends respectively; The first cylinder travelling belt is located at an end of workpiece conveyor and hinge frame; The second cylinder travelling belt is located at the other end of workpiece conveyor and hinge frame, and first transmits cylinder is located at first cylinder travelling belt top and round being displaced on the first cylinder travelling belt, and the second transmission cylinder is located at second cylinder travelling belt top and is come and gone and is displaced on the second cylinder travelling belt;
Workpiece conveyor is provided with 2 workpiece positions, near first transmit cylinder workpiece position be first workpiece position, near second transmit cylinder workpiece position be second workpiece position, first workpiece position is provided with first lift cylinder, second workpiece position is provided with second lift cylinder;
First transmits cylinder and second transmits the air cylinder structure symmetry, and the end that the first transmission cylinder and second transmits cylinder is respectively equipped with supporting plate, and supporting plate is provided with vacuum pad.
5. biplate according to claim 3 or double-sided coating system; It is characterized in that; Said biplate transporting mechanism comprises that back and forth movement is in the lateral round travelling belt of hinge frame; Round travelling belt is located at the output terminal of cleaning machine transport platform, comes and goes travelling belt and the vertical setting each other of cleaning machine transport platform, comes and goes travelling belt one side the hinge frame is set;
Come and go travelling belt and be provided with 3 workpiece positions, comprise intermediate piece position and 2 side workpiece positions, intermediate piece position correspondence is located at the output terminal of cleaning machine transport platform, and 2 side workpiece positions are located at the both sides of intermediate piece position respectively.
6. biplate according to claim 1 or double-sided coating system; It is characterized in that; Said a plurality of Vakuumkammer also comprises pre-treatment chamber, transition chamber, surge chamber and after-processing chamber; According to the throughput direction of workpiece, enter sheet chamber, pre-treatment chamber, transition chamber, coating chamber, surge chamber, after-processing chamber and slice chamber and set gradually.
7. biplate according to claim 6 or double-sided coating system; It is characterized in that the said CD feeding port place of entering the sheet chamber is provided with first vacuum lock, the piece mouth place of slice chamber is provided with second vacuum lock; The through hole of advancing between sheet chamber and the pre-treatment chamber is provided with the 3rd vacuum lock; Through hole between pre-treatment chamber and the transition chamber is provided with the 4th vacuum lock, and the through hole between surge chamber and the after-processing chamber is provided with the 5th vacuum lock, and the through hole between after-processing chamber and the slice chamber is provided with the 6th vacuum lock.
8. biplate according to claim 7 or double-sided coating system is characterized in that, said coating chamber has 4, and 4 coating chambers linearly formula are arranged between transition chamber and the surge chamber, and the through hole between adjacent two coating chambers is provided with the 7th vacuum lock arbitrarily.
9. biplate according to claim 8 or double-sided coating system; It is characterized in that said first vacuum lock, second vacuum lock, the 3rd vacuum lock, the 4th vacuum lock, the 5th vacuum lock, the 6th vacuum lock are identical with the structure of the 7th vacuum lock, comprise cylinder, valve body and core assembly; Valve body is the box structure of the rectangular parallelepiped of hollow; The left and right sides wall of valve body is fixedly connected with the Vakuumkammer that is positioned at its both sides respectively, has valve hole on the left and right sides wall of valve body, and valve hole communicates with the through hole of the Vakuumkammer that is positioned at the valve body both sides; Core assembly is located in the central space of valve body, and the cylinder end passes the valve body top and is connected with core assembly; Core assembly comprises symmetrically arranged two portable plates, moveable hinge is set between two portable plates also is connected through moveable hinge and cylinder end, and the bottom of two portable plates is respectively equipped with guide wheel; Be provided with at least one extension spring between two portable plates, each extension spring two ends is individually fixed on the sidewall of two portable plates.
10. biplate according to claim 8 or double-sided coating system; It is characterized in that; Said first vacuum lock, second vacuum lock, the 3rd vacuum lock, the 4th vacuum lock, the 5th vacuum lock, the 6th vacuum lock are identical with the structure of the 7th vacuum lock, comprise cylinder, valve body, spool and cleaning cover plate down, and valve body is the rectangular structure of hollow; The left and right sides wall of valve body is fixedly connected with the Vakuumkammer that is positioned at its both sides respectively; Have valve hole on the left and right sides wall of valve body, valve hole communicates with the through hole of the Vakuumkammer that is positioned at the valve body both sides, and spool is located at valve inner; The cylinder end passes the valve body top and is fixedly connected with the spool top, and following cleaning cover plate is located at the valve body bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120576423XU CN202415378U (en) | 2011-12-31 | 2011-12-31 | Biplate or double-sided film coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120576423XU CN202415378U (en) | 2011-12-31 | 2011-12-31 | Biplate or double-sided film coating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202415378U true CN202415378U (en) | 2012-09-05 |
Family
ID=46740160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120576423XU Withdrawn - After Issue CN202415378U (en) | 2011-12-31 | 2011-12-31 | Biplate or double-sided film coating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202415378U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534539A (en) * | 2011-12-31 | 2012-07-04 | 肇庆市腾胜真空技术工程有限公司 | Double-plate or double-side film coating system |
| CN102943243A (en) * | 2012-11-27 | 2013-02-27 | 湘潭宏大真空技术股份有限公司 | Magnetron sputtering coating production line for capacitive touch screens |
| CN104018131A (en) * | 2014-05-05 | 2014-09-03 | 红安华州光电科技有限公司 | Double-sided shadow-eliminating indium tin oxide magnetron sputtering coating film production line |
| CN104556723A (en) * | 2014-12-23 | 2015-04-29 | 深圳达实智能股份有限公司 | Glass coating outlet pot-separating control method and system |
| CN104860548A (en) * | 2015-06-08 | 2015-08-26 | 东莞鑫泰玻璃科技有限公司 | Preparation method of infrared reflecting transparent coated glass |
| CN109881179A (en) * | 2019-04-19 | 2019-06-14 | 江苏可润光电科技有限公司 | A kind of package Parylene coating process and coating apparatus entirely |
| CN115181938A (en) * | 2022-09-13 | 2022-10-14 | 东晶电子金华有限公司 | Film coating equipment, film coating method of wafer and wafer |
-
2011
- 2011-12-31 CN CN201120576423XU patent/CN202415378U/en not_active Withdrawn - After Issue
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534539A (en) * | 2011-12-31 | 2012-07-04 | 肇庆市腾胜真空技术工程有限公司 | Double-plate or double-side film coating system |
| CN102534539B (en) * | 2011-12-31 | 2013-12-11 | 肇庆市腾胜真空技术工程有限公司 | Double-plate or double-side film coating system |
| CN102943243A (en) * | 2012-11-27 | 2013-02-27 | 湘潭宏大真空技术股份有限公司 | Magnetron sputtering coating production line for capacitive touch screens |
| CN104018131A (en) * | 2014-05-05 | 2014-09-03 | 红安华州光电科技有限公司 | Double-sided shadow-eliminating indium tin oxide magnetron sputtering coating film production line |
| CN104556723A (en) * | 2014-12-23 | 2015-04-29 | 深圳达实智能股份有限公司 | Glass coating outlet pot-separating control method and system |
| CN104556723B (en) * | 2014-12-23 | 2017-10-27 | 深圳达实智能股份有限公司 | Coating film on glass outlet point pot control method and system |
| CN104860548A (en) * | 2015-06-08 | 2015-08-26 | 东莞鑫泰玻璃科技有限公司 | Preparation method of infrared reflecting transparent coated glass |
| CN109881179A (en) * | 2019-04-19 | 2019-06-14 | 江苏可润光电科技有限公司 | A kind of package Parylene coating process and coating apparatus entirely |
| CN109881179B (en) * | 2019-04-19 | 2023-07-25 | 江苏可润光电科技有限公司 | Full-wrapping parylene coating process and coating device |
| CN115181938A (en) * | 2022-09-13 | 2022-10-14 | 东晶电子金华有限公司 | Film coating equipment, film coating method of wafer and wafer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102534539B (en) | Double-plate or double-side film coating system | |
| CN202415378U (en) | Biplate or double-sided film coating system | |
| CN205932076U (en) | Unloading system in automation of hanging transfer chain that is exclusively used in | |
| CN202245310U (en) | Automatic feeding and blanking machine | |
| CN205397179U (en) | Intelligence goods conveyor | |
| CN202880433U (en) | Workpiece tray transferring device | |
| CN108100553A (en) | A kind of marketing storage arrangement for possessing choke water-proof function | |
| CN107915047B (en) | Board loading and unloading machine for PCB (printed circuit board) | |
| CN201436259U (en) | Automatic loading and unloading system | |
| CN113619300B (en) | Packing box autogiration is carried and is beaten printing device | |
| CN103587965B (en) | Medicine-chest automatic palletizing production line | |
| CN204189722U (en) | Circuit breaker interpolation type retainer automatic assembling machine | |
| CN204189723U (en) | The automatic Material moving device of circuit breaker interpolation type retainer | |
| CN203529468U (en) | Automatic stacking production line for medicine chests | |
| CN205616257U (en) | Automatic pile up neatly transfer chain of elevator layer door plant automatic transportation line and elevator layer door plant | |
| CN109178950B (en) | Automatic material stacking device | |
| CN206066618U (en) | A kind of four side moulder milling machine auxiliary convolution handling equipment | |
| CN108263663A (en) | Ceramic tile vanning automatic production line | |
| CN202415373U (en) | Workpiece conveying device for biplate film coating | |
| CN108298121A (en) | System for ceramic tile transhipment packaging | |
| CN204751351U (en) | Production line of self preservation temperature building block | |
| CN210853078U (en) | Intelligent packing machine | |
| CN207607961U (en) | A kind of aluminium shape surface pre-treatment production system | |
| CN208530927U (en) | A kind of food holder vanning stacking device | |
| CN209374418U (en) | Gaily decorated basket internal circulation apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120905 Effective date of abandoning: 20131211 |
|
| RGAV | Abandon patent right to avoid regrant |