CN109881179B - Full-wrapping parylene coating process and coating device - Google Patents
Full-wrapping parylene coating process and coating device Download PDFInfo
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- CN109881179B CN109881179B CN201910317824.4A CN201910317824A CN109881179B CN 109881179 B CN109881179 B CN 109881179B CN 201910317824 A CN201910317824 A CN 201910317824A CN 109881179 B CN109881179 B CN 109881179B
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Abstract
The invention discloses a full-wrapping parylene coating process and a coating device, which belong to the technical field of chemical vapor deposition, wherein a workpiece to be coated is placed on a moving platform, and the moving platform is placed in a vacuum deposition chamber; sealing the vacuum deposition chamber and vacuumizing the vacuum deposition chamber through a vacuum system; controlling the temperature of the vacuum deposition chamber region by using a cooling controller; placing the parylene material into an evaporation chamber for heating and gasifying, and forming gas after cracking reaction in the cracking chamber, wherein the gas enters a vacuum deposition chamber; opening the vibration rotation executing mechanism to enable the vibration rotation executing mechanism to continuously vibrate and rotate, and enabling the workpiece to be coated to move on the vibration rotation executing mechanism to realize point contact; and (5) turning off the heating power supply and taking out the machined part. According to the invention, point contact is realized through rolling of the ball, the ball rolls in the ball movable gap, so that the workpiece to be coated rolls on the ball, point contact is realized, full coating of the workpiece to be coated is ensured, and product reliability is improved.
Description
Technical Field
The invention relates to a parylene coating process and a coating device, in particular to a full-wrapping parylene coating process and a coating device, and belongs to the technical field of chemical vapor deposition.
Background
The prior parylene coating process is that the parylene material is heated and gasified in an evaporation chamber, then moves to a coating chamber through a cracking chamber under the action of vacuum pressure difference, and is subjected to cracking reaction in the cracking chamber, and gas after cracking enters the coating chamber through a pipeline and is subjected to polymerization reaction to form a waterproof and anti-corrosion coating layer, however, the prior parylene coating process and device are difficult to ensure the full coating of a coated workpiece, and in order to improve the reliability of products, the full-coating parylene coating process and device need to be developed.
Disclosure of Invention
The invention mainly aims to provide a full-wrapping parylene coating process and a coating device, which ensure full wrapping of coated workpieces and improve product reliability.
The aim of the invention can be achieved by adopting the following technical scheme:
a full-package parylene coating process comprises the following steps:
step 1: placing a workpiece to be coated on a movable platform, and placing the movable platform into a vacuum deposition chamber;
step 2: sealing the vacuum deposition chamber and vacuumizing the vacuum deposition chamber through a vacuum system;
step 3: controlling the temperature of the vacuum deposition chamber region to be 20-80 ℃ by using a cooling controller;
step 4: placing the parylene material into an evaporation chamber for heating and gasifying, and forming gas after cracking reaction in the cracking chamber, wherein the gas enters a vacuum deposition chamber;
step 5: opening the vibration rotation executing mechanism to enable the vibration rotation executing mechanism to continuously vibrate and rotate, and enabling the workpiece to be coated to move on the vibration rotation executing mechanism to realize point contact;
step 6: and after the completion, the heating power supply is turned off, and the vacuum deposition chamber is turned on to take out the machined part.
Preferably, the vibration rotation executing mechanism comprises a movable support frame vibration device and a flat plate coating movable support frame arranged on the movable support frame vibration device, and the movable support frame vibration device generates vibration to drive the flat plate coating movable support frame to enable a workpiece to be coated to move on the flat plate coating movable support frame so as to realize point contact.
Preferably, the flat plate coating film movable support comprises a support body with a plurality of ball movable gaps formed in the support body and balls arranged in the ball movable gaps.
Preferably, the balls are spherical balls, and the diameter of the balls is smaller than the width of the movable gap of the balls.
Preferably, a ball guide rail groove is arranged in the ball movable gap, and the balls roll in the ball guide rail groove.
Preferably, ball separators are provided at both sides of the ball guide groove, and the ball separators are used for separating the balls.
Preferably, the ball separator is fixed on two sides of the ball guide rail groove through positioning pieces, the positioning pieces can be positioning screws, ball clearance positioning holes are formed in the ball separator, and the positioning pieces are arranged in the ball clearance positioning holes.
Preferably, the vibration device of the movable support frame comprises a plurality of vibration triangular blocks arranged below the movable support frame for the flat plate coating, and vibration rollers are arranged below the vibration triangular blocks and roll to drive the movable support frame for the flat plate coating to vibrate.
Preferably, the parylene material includes one of parylene C, parylene D, parylene N, parylene F, and parylene HT.
The utility model provides a full parcel parylene coating film device, is in including moving support frame vibrating device and setting the dull and stereotyped coating film removes the support frame on the moving support frame vibrating device, it drives to remove support frame vibrating device produces vibration dull and stereotyped coating film removes the support frame and makes to treat the coating film work piece and remove on the dull and stereotyped coating film removes the support frame, it is in to realize the point contact to remove support frame vibrating device includes a plurality of setting the vibration triangular block of dull and stereotyped coating film removes the support frame below, vibration triangular block below is equipped with the vibration gyro wheel, the vibration gyro wheel rolls and drives dull and stereotyped coating film removes the support frame vibration, dull and stereotyped coating film removes the support frame and is in including the support frame body that a plurality of ball activity space was seted up inside and the ball that sets up in the ball activity space is located be equipped with the ball guide groove in the ball activity space, be located the both sides in ball guide groove are equipped with the ball separator.
The beneficial technical effects of the invention are as follows: according to the full-wrapping parylene coating process and the coating device, the vibration device of the movable support frame generates vibration to drive the flat coating movable support frame to enable the workpiece to be coated to move on the flat coating movable support frame, the flat coating movable support frame comprises the support frame body with the plurality of ball movable gaps formed in the inside and the balls arranged in the ball movable gaps, point contact is achieved through rolling of the balls, rolling of the balls in the ball movable gaps is achieved, the workpiece to be coated rolls on the balls, point contact is achieved, full-wrapping coating of the workpiece to be coated is achieved, full wrapping of the coated workpiece is guaranteed, and product reliability is improved.
Drawings
Fig. 1 is a schematic diagram of the overall structure of a fully wrapped parylene coating apparatus of the present invention;
fig. 2 is a schematic diagram of a plate coating moving support frame structure of the full-wrapped parylene coating device of the present invention;
FIG. 3 is a side view of a movable support frame for plate coating of the fully wrapped parylene coating apparatus of the present invention;
fig. 4 is a schematic structural view of a ball separator of the fully wrapped parylene coating apparatus of the present invention.
In the figure: 100-flat plate coating film movable support frame, 200-movable support frame vibration device, 1-ball, 2-ball movable gap, 3-ball separator, 4-positioning piece, 5-ball guide rail groove and 6-ball gap positioning hole.
Detailed Description
In order to make the technical solution of the present invention more clear and obvious to those skilled in the art, the present invention will be described in further detail with reference to examples and drawings, but the embodiments of the present invention are not limited thereto.
As shown in fig. 1, the full-package parylene coating process provided in this embodiment includes the following steps:
step 1: placing a workpiece to be coated on a movable platform, and placing the movable platform into a vacuum deposition chamber;
step 2: sealing the vacuum deposition chamber and vacuumizing the vacuum deposition chamber through a vacuum system;
step 3: controlling the temperature of the vacuum deposition chamber region to be 20-80 ℃ by using a cooling controller;
step 4: placing the parylene material into an evaporation chamber for heating and gasifying, and forming gas after cracking reaction in the cracking chamber, wherein the gas enters a vacuum deposition chamber;
step 5: opening the vibration rotation executing mechanism to enable the vibration rotation executing mechanism to continuously vibrate and rotate, and enabling the workpiece to be coated to move on the vibration rotation executing mechanism to realize point contact;
step 6: and after the completion, the heating power supply is turned off, and the vacuum deposition chamber is turned on to take out the machined part.
In this embodiment, as shown in fig. 1-2, the vibration rotation executing mechanism includes a moving support frame vibration device 200 and a plate coating film moving support frame 100 disposed on the moving support frame vibration device 200, the moving support frame vibration device 200 generates vibration to drive the plate coating film moving support frame 100 to move a workpiece to be coated on the plate coating film moving support frame 100, so as to implement point contact, the plate coating film moving support frame 100 includes a support frame body with a plurality of ball moving gaps 2 formed therein and balls 1 disposed in the ball moving gaps 2, the balls 1 are spherical balls, the diameter of the balls 1 is smaller than the width of the ball moving gaps 2, ball guide rail grooves 5 are disposed in the ball moving gaps 2, and the balls 1 roll in the ball guide rail grooves 5.
In this embodiment, as shown in fig. 3-4, ball separators 3 are disposed on two sides of the ball guide groove 5, the ball separators 3 are used for separating the balls 1, the ball separators 3 are fixed on two sides of the ball guide groove 5 through positioning members 4, the positioning members 4 can be positioning screws, ball clearance positioning holes 6 are disposed on the ball separators 3, and the positioning members 4 are disposed in the ball clearance positioning holes 6.
In this embodiment, the vibration device 200 for a moving support frame includes a plurality of vibration triangular blocks disposed below the moving support frame 100 for plating a film thereon, and a vibration roller is disposed below the vibration triangular blocks and is rolling to drive the moving support frame for plating a film thereon to vibrate.
In this embodiment, the parylene material includes one of parylene C, parylene D, parylene N, parylene F, and parylene HT.
As shown in fig. 1-4, the full-wrapping parylene coating device provided in this embodiment includes a moving support frame vibration device 200 and a flat coating moving support frame 100 disposed on the moving support frame vibration device 200, the moving support frame vibration device 200 generates vibration to drive the flat coating moving support frame 100 to move a workpiece to be coated on the flat coating moving support frame 100, so as to implement point contact, the moving support frame vibration device 200 includes a plurality of vibrating triangular blocks disposed below the flat coating moving support frame 100, a vibrating roller is disposed below the vibrating triangular blocks, the vibrating roller rolls to drive the flat coating moving support frame 100 to vibrate, the flat coating moving support frame 100 includes a support frame body with a plurality of ball moving gaps 2 disposed therein and balls 1 disposed in the ball moving gaps 2, ball guide rail grooves 5 are disposed in the ball moving gaps 2, and ball separators 3 are disposed on both sides of the ball guide rail grooves 5.
In this embodiment, as shown in fig. 1 to 4, the working principle of the full-package parylene film plating device provided in this embodiment is as follows:
step 1: placing a workpiece to be coated on a movable platform, and placing the movable platform into a vacuum deposition chamber;
step 2: sealing the vacuum deposition chamber and vacuumizing the vacuum deposition chamber through a vacuum system;
step 3: controlling the temperature of the vacuum deposition chamber region to be 20-80 ℃ by using a cooling controller;
step 4: placing the parylene material into an evaporation chamber for heating and gasifying, and forming gas after cracking reaction in the cracking chamber, wherein the gas enters a vacuum deposition chamber;
step 5: opening a vibration rotation executing mechanism to enable the vibration rotation executing mechanism to continuously vibrate and rotate, arranging a plurality of vibration triangular blocks below the flat plate coating moving support frame 100, arranging vibration rollers below the vibration triangular blocks, enabling the vibration rollers to roll to drive the flat plate coating moving support frame 100 to vibrate, enabling the flat plate coating moving support frame 100 to vibrate to enable balls 1 to roll in ball movable gaps 2, enabling a workpiece to be coated to roll on the balls 1, achieving point contact, and achieving full-wrapping coating of the workpiece to be coated;
step 6: and after the completion, the heating power supply is turned off, and the vacuum deposition chamber is turned on to take out the machined part.
To sum up, in this embodiment, the full-wrapping parylene coating process and the coating device provided in this embodiment, the moving support frame vibration device generates vibration to drive the flat coating moving support frame to move the workpiece to be coated on the flat coating moving support frame, the flat coating moving support frame includes a support frame body with a plurality of ball moving gaps formed therein and balls disposed in the ball moving gaps, and through rolling of the balls, point contact is achieved, full wrapping of the coated workpiece is ensured, and product reliability is improved.
The above description is merely a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art will be able to apply equivalents and modifications according to the technical solution and the concept of the present invention within the scope of the present invention disclosed in the present invention.
Claims (8)
1. The full-package parylene coating process is characterized by comprising the following steps of:
step 1: placing a workpiece to be coated on a movable platform, and placing the movable platform into a vacuum deposition chamber;
step 2: sealing the vacuum deposition chamber and vacuumizing the vacuum deposition chamber through a vacuum system;
step 3: controlling the temperature of the vacuum deposition chamber region to be 20-80 ℃ by using a cooling controller;
step 4: placing the parylene material into an evaporation chamber for heating and gasifying, and forming gas after cracking reaction in the cracking chamber, wherein the gas enters a vacuum deposition chamber;
step 5: opening the vibration rotation executing mechanism to enable the vibration rotation executing mechanism to continuously vibrate and rotate, and enabling the workpiece to be coated to move on the vibration rotation executing mechanism to realize point contact;
step 6: after the completion, the heating power supply is turned off, and the vacuum deposition chamber is opened to take out the machined piece;
the vibration rotation executing mechanism comprises a movable support frame vibrating device (200) and a flat plate coating movable support frame (100) arranged on the movable support frame vibrating device (200), the movable support frame vibrating device (200) vibrates to drive the flat plate coating movable support frame (100) to enable a workpiece to be coated to move on the flat plate coating movable support frame (100) so as to realize point contact, and the flat plate coating movable support frame (100) comprises a support frame body with a plurality of ball movable gaps (2) formed inside and balls (1) arranged in the ball movable gaps (2).
2. The full-package parylene coating process according to claim 1, wherein the balls (1) are spherical balls, and the diameter of the balls (1) is smaller than the width of the ball movable gap (2).
3. The full-package parylene coating process according to claim 2, wherein a ball guide groove (5) is arranged in the ball movable gap (2), and the balls (1) roll in the ball guide groove (5).
4. A fully wrapped parylene coating process according to claim 3, characterized in that ball separators (3) are arranged on both sides of the ball guide grooves (5), the ball separators (3) being used for separating the balls (1).
5. The full-package parylene coating process according to claim 4, wherein the ball separator (3) is fixed on two sides of the ball guide rail groove (5) through positioning pieces (4), the positioning pieces (4) can be positioning screws, ball gap positioning holes (6) are formed in the ball separator (3), and the positioning pieces (4) are arranged in the ball gap positioning holes (6).
6. The full-wrapping parylene coating process according to claim 1, wherein the moving support frame vibration device (200) comprises a plurality of vibration triangular blocks arranged below the flat coating moving support frame (100), vibration rollers are arranged below the vibration triangular blocks, and the vibration rollers roll to drive the flat coating moving support frame (100) to vibrate.
7. The fully wrapped parylene coating process of claim 1, wherein the parylene material comprises one of parylene C, parylene D, parylene N, parylene F, and parylene HT.
8. The utility model provides a full parcel group relin coating film device, its characterized in that is in including removing support frame vibrating device (200) and setting flat coating film on removing support frame vibrating device (200) removes support frame (100), remove support frame vibrating device (200) and produce the vibration drive flat coating film removes support frame (100) and make to wait to coat the work piece and remove on flat coating film removes support frame (100), remove support frame vibrating device (200) including a plurality of setting and be in the vibration triangular block of flat coating film removes support frame (100) below, vibration triangular block below is equipped with the vibration gyro wheel, vibration gyro wheel roll drive flat coating film removes support frame (100) vibration, flat coating film removes support frame (100) including the support frame body that the inside has seted up a plurality of ball activity space (2) and set up ball (1) in ball activity space (2), be located be equipped with ball guide groove (5) in ball activity space (2), be located both sides in ball guide groove (5) are equipped with ball separator (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910317824.4A CN109881179B (en) | 2019-04-19 | 2019-04-19 | Full-wrapping parylene coating process and coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910317824.4A CN109881179B (en) | 2019-04-19 | 2019-04-19 | Full-wrapping parylene coating process and coating device |
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| Publication Number | Publication Date |
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| CN109881179A CN109881179A (en) | 2019-06-14 |
| CN109881179B true CN109881179B (en) | 2023-07-25 |
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| CN201910317824.4A Active CN109881179B (en) | 2019-04-19 | 2019-04-19 | Full-wrapping parylene coating process and coating device |
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| CN2513683Y (en) * | 2001-08-31 | 2002-10-02 | 庄缵福 | Horizontal film coating machine |
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| CN109881179A (en) | 2019-06-14 |
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