The utility model content
In view of this; The purpose of the utility model is to provide a kind of heat exchanger, can be simultaneously in vertical direction and horizontal direction formation temperature gradient, with top layer and the edge of the row of the impurity in the silicon liquid to silicon ingot in long brilliant process; Reduce the impurity at silicon ingot middle part; Thereby obtain high-quality polysilicon, reduce the calorific loss in the long brilliant process simultaneously, reduce power consumption.
For realizing above-mentioned purpose, the utility model provides following technical scheme:
A kind of heat exchanger comprises body of heater, insulation cavity, crucible, well heater and cooled copper, and wherein, said insulation cavity and cooled copper all are arranged on the inside of said body of heater; Said crucible is positioned at the inside of said insulation cavity; Said well heater is arranged on the bottom and the top of said crucible; The opening of said insulation cavity is corresponding with said cooled copper; It is characterized in that; The opening part of said insulation cavity is provided with said cooled copper and belongs to parallel plane first track and second track; Said first track and second track are positioned at different heights, and the medullary ray of said first track is vertical with the medullary ray of said second track, slidably are provided with two warming plates on said first track; Slidably be provided with two warming plates on said second track, four warming plates link to each other with corresponding drive unit with it respectively.
Preferably, in above-mentioned heat exchanger, the mating surface of two warming plates on said first track is the scarp, and the mating surface of two warming plates on said second track is the scarp.
Preferably, in above-mentioned heat exchanger, said drive unit comprises cylinder and actuating strut, and wherein, an end of said actuating strut links to each other with said warming plate, the other end passes said body of heater and links to each other with the piston rod of said cylinder.
Preferably, in above-mentioned heat exchanger, further comprise the corrugated tube that is sheathed on the said actuating strut;
One end and said furnace sealing, the other end of said corrugated tube are provided with sealing plate;
The end that said actuating strut is not connected with warming plate is connected to said sealing plate, and the piston rod of said cylinder is connected to said sealing plate simultaneously.
Preferably, in above-mentioned heat exchanger, said warming plate comprises framework and thermal baffle, and said thermal baffle embeds in the said framework.
Preferably, in above-mentioned heat exchanger, also be provided with spacing ring on the said framework, said spacing ring is sheathed on first track or second track that contacts with said framework, and said first track and second track are provided with limit switch.
Preferably, in above-mentioned heat exchanger, said cooled copper is provided with one deck lagging material.
This shows that the disclosed heat exchanger of the utility model is in the polycrystalline silicon growth process; The zone that aperture control crucible through controlling four warming plates and cooled copper are carried out heat exchange produces thermograde simultaneously in vertical direction and horizontal direction, makes silicon liquid from low to high, therefrom mind-set is lowered the temperature gradually all around; Under the effect of temperature head; Impurity is drained into the top layer and the edge of silicon ingot, thereby reduce the impurity at silicon ingot middle part, guarantee that the polysilicon at silicon ingot middle part has high-quality.In addition,, can reduce consumption of heat energy, thereby save electric energy because four warming plates are opened gradually.
Embodiment
The crucible of polycrystalline silicon ingot or purifying furnace is molten into silicon liquid with primary silicon, in silicon liquid, has a certain amount of impurity.In the polycrystalline silicon growth process, crucible and cooled copper are carried out heat exchange, and formation temperature gradient in silicon liquid utilizes temperature head that impurity is repelled to high temperature from low temperature, and solidify earlier at the low temperature place.Existing hot topic has only full-shut position and full-gear; Hot topic can only all be opened in the polycrystalline silicon growth process, can only in silicon liquid, form the thermograde of vertical direction accordingly, therefore utilizes temperature head finally can only impurity be drained into the top layer of silicon ingot (being polysilicon); Though the impurity in the silicon ingot of middle and lower part is less compared to the impurity of top layer; But the impurity in the silicon ingot middle and lower part still is evenly distributed, and the quality of polysilicon is lower, can not obtain high-purity polycrystalline.
The utility model discloses a kind of heat exchanger; Can be in long brilliant process simultaneously in vertical direction and horizontal direction formation temperature gradient; Impurity in silicon liquid row to the top layer and the edge of silicon ingot, is reduced the impurity at silicon ingot middle part, thereby obtains high-quality polysilicon; Reduce the calorific loss in the long brilliant process simultaneously, reduce power consumption.
For the purpose, technical scheme and the advantage that make the utility model embodiment clearer; To combine the accompanying drawing among the utility model embodiment below; Technical scheme among the utility model embodiment is carried out clear, intactly description; Obviously, described embodiment is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Referring to Fig. 1 to Fig. 5, this heat exchanger comprises body of heater 1, insulation cavity 2, crucible 3, well heater 4, cooled copper 5, first track 61, second track 62, a plurality of warming plate 71~74 and a plurality of drive unit 81~84.
Wherein, insulation cavity 2 and cooled copper 5 all are arranged on the inside of body of heater 1; Crucible 3 is positioned at the inside of insulation cavity 2; Well heater 4 is arranged on the bottom and the top of crucible 3; The opening of insulation cavity 2 is corresponding with cooled copper 5; Opening part is provided with first track 61 and second track 62; The plane parallel at first track 61 and second track 62 and cooled copper 5 places; First track 61 and second track 62 are arranged at different height, and the medullary ray of first track 61 is vertical with the medullary ray of second track 62; On first track 61, slidably be provided with two warming plates 71 and 72; On second track 62, slidably be provided with two warming plates 73 and 74; Four warming plates 71,72,73 link to each other with corresponding drive unit with it respectively with 74, and promptly warming plate 71 links to each other with drive unit 81, and warming plate 72 links to each other with drive unit 82; Warming plate 73 links to each other with drive unit 83, and warming plate 74 links to each other with drive unit 84.
In the heat exchanger in the utility model; The opening part of insulation cavity 2 is provided with warming plate 71,72,73 and 74; And warming plate 71 and 72 moves along two side directions of first track 61 to opening under the driving of drive unit 81 and 82 respectively, and warming plate 73 and 74 moves along second track 62 two other direction to opening under the driving of drive unit 83 and 84 respectively.
The process that adopts above-mentioned heat exchanger to heat, as depicted in figs. 1 and 2.Warming plate 71 and 72 moves in opposite directions on first track 61 and finally draws close under the driving of drive unit 81 and 82, and simultaneously, warming plate 73 and 74 moves in opposite directions on second track 62 and finally draws close under the driving of drive unit 83 and 84.Afterwards, well heater 4 begins heating, and the primary silicon 30 that is positioned at crucible 3 along with the rising of temperature in the body of heater 1 begins to melt.
Adopt above-mentioned heat exchanger to carry out in the crystalline process, like Fig. 3 and shown in Figure 4.Four warming plates 71,72,73 and 74 that are positioned at insulation cavity 2 are opened to the four direction of opening part under the driving of its respective drive device simultaneously; Crucible 3 increases with the zone that cooled copper 5 is carried out heat exchange gradually; In the thermograde on forming vertical direction, also formation temperature gradient in the horizontal direction, make silicon liquid from low to high, therefrom cooling gradually around the mind-set; Make impurity in the silicon liquid under the effect of temperature head; Impurity is drained into the top layer and the edge of silicon ingot, thereby reduce the impurity at silicon ingot middle part, guarantee that the polysilicon at silicon ingot middle part has high-quality.In addition,, can reduce consumption of heat energy, thereby save electric energy because four warming plates are opened gradually.
The disclosed heat exchanger of present embodiment is in the polycrystalline silicon growth process, through the aperture control crucible of controlling four warming plates and the zone that cooled copper is carried out heat exchange; Produce thermograde simultaneously in vertical direction and horizontal direction; Make silicon liquid from low to high, therefrom cooling gradually around the mind-set, under the effect of temperature head, impurity is drained into the top layer and the edge of silicon ingot; Thereby the impurity at reduction silicon ingot middle part guarantees that the polysilicon at silicon ingot middle part has high-quality.In addition,, can reduce consumption of heat energy, thereby save electric energy because four warming plates are opened gradually.
In the above-mentioned heat exchanger; Two warming plates 71 and 72 and two warming plates 73 and 74 mating surface are meshing with each other, and can mesh the plane that cooperatively interacts for dentation; The scarp that perhaps cooperatively interacts; As shown in Figure 1, one of them warming plate mating surface is outward-dipping, and the mating surface of another warming plate slopes inwardly.Preferential employing mating surface is the structure formation on scarp among the utility model embodiment, adopts structure like this more to help reducing thermal-radiating leakage.
Driving warming plate 71,72,73 and 74 drive unit 81,82,83 and 84 implementations to two side shiftings has various ways, does not do one by one at this and introduces.There is a kind of of implementation in following mask body place of matchmakers.
Drive unit 81 comprises cylinder 811 and actuating strut 812; Wherein, One end of actuating strut 812 is connected with warming plate 71, the other end passes body of heater 1 and is connected with the piston rod of cylinder 811, and under the effect of cylinder 811, actuating strut 812 drives warming plate 71 and does unlatching or closing movement along first track 61.Drive unit 82 comprises cylinder 821 and actuating strut 822; Wherein, One end of actuating strut 822 is connected with warming plate 72, the other end passes body of heater 1 and is connected with the piston rod of cylinder 821, and under the effect of cylinder 821, actuating strut 822 drives warming plate 72 and does unlatching or closing movement along first track 61.Drive unit 83 comprises cylinder (not indicating among the figure) and actuating strut (not indicating among the figure); Wherein, One end of actuating strut is connected with warming plate 73, the other end passes body of heater 1 and is connected with the piston rod of cylinder; Under the effect of cylinder, actuating strut drives warming plate 73 and does unlatching or closing movement along second track 62.Drive unit 84 comprises cylinder (not indicating among the figure) and actuating strut (not indicating among the figure); Wherein, One end of actuating strut is connected with warming plate 74, the other end passes body of heater 1 and is connected with the piston rod of cylinder; Under the effect of cylinder, actuating strut drives warming plate 74 and does unlatching or closing movement along second track 62.
In the enforcement, can gasket be set, guarantee the resistance to air loss and the vacuum tightness of body of heater 1 in body of heater 1 and each actuating strut position contacting.
In order further to guarantee the resistance to air loss and the vacuum tightness of body of heater 1, further be provided with among the utility model embodiment and be set in the corrugated tube on each actuating strut.Concrete, be arranged with corrugated tube 813 on the actuating strut 812, be arranged with corrugated tube 823 on the actuating strut 822, be arranged with corrugated tube 833 on the actuating strut 832, be arranged with corrugated tube 843 on the actuating strut 842.
Only the mode of connection with actuating strut 812, corrugated tube 813 and cylinder 811 describes.
One end of corrugated tube 813 and body of heater 1 sealing, the other end are provided with sealing plate 8131; One end of actuating strut 812 is connected with warming plate 71, the other end is connected with sealing plate 8131 in the corrugated tube 813; Simultaneously, the piston rod of cylinder 811 (not indicating among the figure) also is connected with sealing plate 8131.When the piston rod to-and-fro movement of cylinder 811, drive actuating struts 812 motions through sealing plate 8131, actuating strut 812 drives warming plates 71 motions afterwards.
The structure formation of warming plate has multiple, only introduces wherein a kind of at this, and the warming plate among the utility model embodiment comprises framework and thermal baffle (not shown), and wherein, thermal baffle embeds in the framework.The use of its middle frame can reduce the frictional force of warming plate and track.
Preferably; On the framework of warming plate 71,72,73 and 74, also be provided with the spacing ring (not shown); Spacing ring on the warming plate 71 is sheathed on first track 61, and the spacing ring on the warming plate 72 is sheathed on first track 61, and the spacing ring on the warming plate 73 is sheathed on second track 62; Spacing ring on the warming plate 74 is sheathed on second track 62, and on first track 61 and second track 62, is provided with the limit switch (not shown).When each warming plate arrives limit switch present position, the action of corresponding cylinder response limit switch, and drive each actuating strut and make corresponding action.
In addition, on cooled copper 5, lagging material is set in the utility model, both can be incubated, can also make thermal field bottom directly not carry out heat exchange, play the effect of protecting cooling plate with cooling plate.
Each embodiment adopts the mode of going forward one by one to describe in this specification sheets, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation of spirit that does not break away from the utility model or scope in other embodiments among this paper.Therefore, the utility model will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.