CN201495105U - Ingot furnace heater capable of gradient temperature control - Google Patents
Ingot furnace heater capable of gradient temperature control Download PDFInfo
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- CN201495105U CN201495105U CN2009203085364U CN200920308536U CN201495105U CN 201495105 U CN201495105 U CN 201495105U CN 2009203085364 U CN2009203085364 U CN 2009203085364U CN 200920308536 U CN200920308536 U CN 200920308536U CN 201495105 U CN201495105 U CN 201495105U
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- graphite rod
- graphite
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- temperature control
- ingot
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Abstract
The utility model relates to an ingot furnace heater capable of gradient temperature control, which comprises a plurality of U-shaped graphite rod units connected in parallel and arranged layer by layer on the inner side of the furnace wall of an ingot furnace, wherein, each U-shaped graphite rod unit is made up of two graphite rods connected in series and arranged in parallel to serve as the side edges of the U shape respectively, one end of one graphite rod and one end of the other graphite rod are connected through one electric connection part to serve as the bottom part of the U shape, and the open ends of the U shape, that is, the other ends of the two graphite rods, are connected respectively with two copper electrodes. Compared with other ingot furnaces, the utility model realizes the accurate control over the temperature gradient of crystallization by means of peripheral power reduction rather than increasing local thermal loss, without weakening the heat-insulating effect, thereby reducing useless power losses.
Description
Technical field
The utility model relates to a kind of ingot furnace well heater, particularly a kind of ingot furnace well heater of gradient temperature control.
Background technology
Heating chamber is the heart of polycrystalline silicon ingot or purifying furnace, dress graphite heater, thermofin, crucible and silicon material etc. in it.The growth technique process of polysilicon must realize that therefore, the structure design of polycrystalline silicon ingot casting furnace heating chamber seems most important by the adjustment of heating chamber.The principle of work of traditional polycrystalline silicon ingot or purifying furnace: polycrystalline silicon ingot or purifying furnace before preheating, forvacuum in the body of heater, the liftable thermal insulation layer leaves with fixed bottom thermofin and overlaps the gap.When the silicon material melts the beginning crystallization fully, charge into argon gas, the heat-insulating frame lifting device slowly upwards promotes thermal insulation layer and well heater, crucible bottom is by the distance heat radiation between thermal insulation layer and the thermofin, heat absorption argon gas and water cooled furnace wall are carried out heat displacement back and are produced cooling, the formation temperature gradient, crystal is from crucible bottom oriented growth upwards gradually, and the liquidus temperature gradient is near constant.Vacuum unit and charge-air mass flow director mate mutually, make the body of heater internal pressure keep constant set(ting)value.
There is the bigger deficiency of energy waste in this kind mode for realizing the controlled temperature gradient by increasing the amount of localized heat loss.In addition, well heater or lagging material and crucible relative movement, translational speed needs highly stable, and the operational requirement height in moving process, causes the vibration of equipment unavoidably, can produce certain vibration interference to crystallization.
The utility model content
There is the bigger deficiency of energy expenditure in the heating system that the purpose of this utility model is to overcome in the background technology, and a kind of ingot furnace well heater of gradient temperature control is provided.
The technical solution of the utility model is as follows:
A kind of ingot furnace well heater of gradient temperature control, the U-shaped graphite rod unit that comprises a plurality of parallel connections, described U-shaped graphite rod unit multilayer up and down is parallel to inboard, ingot furnace furnace wall, wherein, each described U-shaped graphite rod unit is that two graphite rods are in series, two graphite rods are arranged in parallel and form the side of U-shaped, and an end of two graphite rods links together by a conductive connecting element, constitute the bottom of U-shaped; The opening end of U-shaped, promptly the other end of two graphite rods connects two copper electrodes respectively.
Mode of connection between aforesaid graphite rod and the copper electrode is for being threaded.
Aforesaid furnace wall is the square that lagging material is formed, the every face of described square be equipped with protrude in the furnace wall collude the shape projection, described graphite rod U-shaped bottom one end frame colludes on the shape projection in described.
The aforesaid shape projection of colluding is that the thermal insulation fire-resistant brick is located on the furnace wall at interval and is formed.
Aforesaid ingot furnace well heater, wherein said graphite rod are common graphite or high purity graphite.
Well heater of the present utility model adopts graphite rod series connection earlier frame mode in parallel again, can effectively realize the temperature control requirement, be that graphite rod can layering independence temperature control, realize control ingot casting crystalline thermograde, thereby can conveniently realize controlling the crystallization velocity of ingot casting; Simple because of the electrode manufacturing simultaneously, so the cost of material is low the manufacturing of integral device and maintenance cost are reduced; Be different from other ingot furnaces by increasing the mode that the amount of localized heat loss realizes the controlled temperature gradient, the utility model adopts periphery to fall the thermograde that power is realized crystallization control, controlled temperature is accurate, because of not weakening heat insulation effect, has reduced useless power loss.And the utility model need not mobile lagging material in crystallisation process, reduced vibration interference.
Description of drawings
Fig. 1 is the utility model ingot furnace heater front face structural representation;
Fig. 2 is the utility model ingot furnace well heater left side structural representation.
Among the figure, 1, the graphite supporting plate; 2, following inflation inlet; 3, go up inflation inlet; 4, lagging material; 5, graphite rod; 6, copper electrode; 7, quartz crucible; 8, plumbago crucible; 9, holder brick; 10, conductive connecting device.
Embodiment
As shown in Figures 1 and 2, the ingot furnace well heater of a kind of gradient temperature control of the present utility model, between the furnace wall of plumbago crucible 8 and lagging material 4 compositions, plumbago crucible 8 is interior for being used for polycrystalline silicon ingot casting crystalline quartz crucible 7, plumbago crucible 8 belows are provided with graphite supporting plate 1 and reach inflation inlet 2 down, and the top is provided with inflation inlet 3.
This well heater comprises the U-shaped graphite rod unit of a plurality of parallel connections, as shown in Figure 2, each graphite rod unit comprises two graphite rods that are arranged in parallel 5, these two graphite rods 5 are formed the side of U-shaped, one end of two graphite rods 5 connects a copper electrode 6 respectively, adopts engage thread to be connected between graphite rod 5 and the copper electrode 6; The other end respectively frame and is cascaded by conductive connecting device 10 and forms the base of U-shaped on holder brick 9.
When work, carry out material loading earlier, vacuumize, and energising, make the well heater under each graphite rod unit and the plumbago crucible begin the crucible heating is made the fusion of silicon material.Behind the fusion certain hour, upwards reduce the unitary power of each graphite rod in turn, make the interior formation temperature gradient of crucible, thereby crystal is grown from the bottom to top from the bottom.
Above-mentioned only is a specific embodiment of the present utility model, but design concept of the present utility model is not limited thereto, and allly utilizes this design that the utility model is carried out the change of unsubstantiality, all should belong to the behavior of invading the utility model protection domain.
Claims (4)
1. the ingot furnace well heater of a gradient temperature control, it is characterized in that: this well heater comprises the U-shaped graphite rod unit of a plurality of parallel connections, described U-shaped graphite rod unit multilayer up and down is parallel to inboard, ingot furnace furnace wall, wherein, each described U-shaped graphite rod unit is that two graphite rods are in series, one end of two graphite rods links together by a conductive connecting element, constitutes the bottom of U-shaped; The opening end of U-shaped, promptly the other end of two graphite rods connects two copper electrodes respectively.
2. the ingot furnace well heater of a kind of gradient temperature control as claimed in claim 1 is characterized in that: the mode of connection between described graphite rod and the copper electrode is for being threaded.
3. the ingot furnace well heater of a kind of gradient temperature control as claimed in claim 1, it is characterized in that: described furnace wall is the square that lagging material is formed, the every face of described square be equipped with protrude in the furnace wall collude the shape projection, described graphite rod U-shaped bottom one end frame colludes on the shape projection in described.
4. the ingot furnace well heater of a kind of gradient temperature control as claimed in claim 3 is characterized in that: the described shape projection of colluding is that the thermal insulation fire-resistant brick is located on the furnace wall at interval and is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203085364U CN201495105U (en) | 2009-08-21 | 2009-08-21 | Ingot furnace heater capable of gradient temperature control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203085364U CN201495105U (en) | 2009-08-21 | 2009-08-21 | Ingot furnace heater capable of gradient temperature control |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201495105U true CN201495105U (en) | 2010-06-02 |
Family
ID=42438313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009203085364U Expired - Fee Related CN201495105U (en) | 2009-08-21 | 2009-08-21 | Ingot furnace heater capable of gradient temperature control |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201495105U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103526286A (en) * | 2012-07-02 | 2014-01-22 | 浙江宏业新能源有限公司 | Precise temperature adjustment device of polycrystalline ingot furnace |
| CN107385514A (en) * | 2017-07-27 | 2017-11-24 | 晶科能源有限公司 | A kind of monocrystaline silicon stove annealing device |
| CN107460288A (en) * | 2017-08-09 | 2017-12-12 | 东北大学 | A kind of carbon steel, being segregated of steel alloy, loose improvement device and process |
-
2009
- 2009-08-21 CN CN2009203085364U patent/CN201495105U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103526286A (en) * | 2012-07-02 | 2014-01-22 | 浙江宏业新能源有限公司 | Precise temperature adjustment device of polycrystalline ingot furnace |
| CN107385514A (en) * | 2017-07-27 | 2017-11-24 | 晶科能源有限公司 | A kind of monocrystaline silicon stove annealing device |
| CN107385514B (en) * | 2017-07-27 | 2023-11-28 | 晶科能源股份有限公司 | Annealing device of monocrystalline silicon furnace |
| CN107460288A (en) * | 2017-08-09 | 2017-12-12 | 东北大学 | A kind of carbon steel, being segregated of steel alloy, loose improvement device and process |
| CN107460288B (en) * | 2017-08-09 | 2018-08-14 | 东北大学 | A kind of carbon steel, being segregated of steel alloy, loose improvement device and process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100602 Termination date: 20120821 |