CN101591805A - Three is a body polysilicon directional crystallization furnace - Google Patents
Three is a body polysilicon directional crystallization furnace Download PDFInfo
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- CN101591805A CN101591805A CNA200810038393XA CN200810038393A CN101591805A CN 101591805 A CN101591805 A CN 101591805A CN A200810038393X A CNA200810038393X A CN A200810038393XA CN 200810038393 A CN200810038393 A CN 200810038393A CN 101591805 A CN101591805 A CN 101591805A
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- plasma gun
- directional crystallization
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Abstract
The present invention relates to a kind of three is a body polysilicon directional crystallization furnace, comprising: crucible (7); Described crucible (7) is composite ceramics crucible of the no end or cold-crucible; Two sides at crucible (7) are settled induction coil (6); A plasma gun (9) is settled on top at crucible (7); The front end of described crucible (7), induction coil (6) and plasma gun (9) is placed in the stove (20) of a sealing; At the other charging opening (11) that is provided with of the upper end side of container (20); The invention has the beneficial effects as follows: can implement purifying technique to silicon materials, have the function of polysilicon directional crystallization and ingot casting again.
Description
Technical field
The present invention relates to a kind of device of producing polysilicon.
Background technology
Because the sun power that starts of the whole world utilizes upsurge, polycrystalline silicon material is in great shortage, provides the production process of solar battery sheet blank with polycrystalline silicon ingot casting, is adopted by most enterprise.Therefore, the manufacturer of polycrystalline silicon ingot or purifying furnace grows with each passing day, for example, external foremost specialized vendor has GT-Solar, EMC, ALD, PVA etc., domestic production producer is more, more well-known have that 48 in group of ZhongDian Science ﹠ Technology, Shaoxing Seiko, Shanghai Chinese rainbow, capital, Beijing fortune are logical, Changzhou Hua Shengtian dragon etc., wherein Seiko and Germany's cooperation, Chinese rainbow has Japanese background, 48 technical forces are more intense, but do not have a tame enterprise to produce this multi-functional special-purpose metallurgical equipment of solar-grade polysilicon that integrates, do not see the report that similar clause is arranged abroad yet.
In the prior art, both at home and abroad the polycrystalline silicon ingot or purifying furnace of producing adopts graphite thermal field well heater more, slowly heats polysilicon in the quartz crucible with the heat exchange pattern of resistive heating, and the time of generally melting 250 kilograms of left and right sides furnace charges reaches 5-6 hour; Also there is part to adopt Frequency Induction Heating,,, can't makes its fusing, also just can not embody the strong point of induction heating by electromagnetic induction because the conductivity of solid-state polysilicon is extremely low if adopt Frequency Induction Heating.
Summary of the invention
It is a body polysilicon directional crystallization furnace that the technical issues that need to address of the present invention have provided a kind of three, is intended to solve the defective of type of heating in the prior art, and improves the deficiency of its function singleness.
In order to solve the problems of the technologies described above, the present invention is achieved by the following technical solutions:
The present invention includes: crucible; Described crucible is composite ceramics crucible of the no end or cold-crucible; Two sides at crucible are settled induction coil; A plasma gun is settled on top at crucible; The front end of described crucible, induction coil and plasma gun is placed in the stove of a sealing; Upper end side side at container is provided with a charging opening.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described in further detail:
As seen from Figure 1: the present invention includes: crucible 7; Described crucible 7 is composite ceramics crucible of the no end or cold-crucible; Two sides at crucible 7 are settled induction coil 6; A plasma gun 9 is settled on top at crucible 7; The front end of described crucible 7, induction coil 6 and plasma gun 9 is placed in the stove 20 of a sealing; Upper end side side at container 20 is provided with a charging opening 11.
Increase the plasma arc heating system among the present invention, comprise melting plasma power supply 13, striking mechanism 14, plasma gun 9, and plasma gun revolution 19 and hoisting appliance 17, all and body of heater joint portion all must keep the dynamic envelope under the hot conditions close; Among the figure: haulage gear 1, water pipe 2, crucible fixed mechanism 3, water-cooled body 4, induction power supply 5, peep hole 8, bell turner 10, plasma gun fixed mechanism 12, vacuum pump 15, furnace cover lifting mechanism 16, water pipe and cable 18.
All adopt whole crucible displacement to carry out directional freeze in order to change existing polycrystalline silicon ingot or purifying furnace, the present invention adopts composite ceramics crucible of the no end or cold-crucible, and utilizing the continuous casting technology to produce strand is the indivisible integral part of the present invention;
Polysilicon strand inherent upright connect influence the battery sheet yield rate, also will influence simultaneously the photovoltaic efficiency of solar cell, solve associated technology between quality examination and temperature control, the continuous casting by multidisciplinary cooperation, thereby changed in the past the defective of operation by rule of thumb.
The chimeric technology of anode material and crucible.Anode material selects to consider to reach in electroconductibility, the work-ing life of material the influence to the polysilicon secondary pollution.The present invention adopts a kind of new function pottery can satisfy above-mentioned requirements.
The present invention combines revolution plasma gun, continous way crystallographic orientation with vacuum induction melting, it is extremely low to have solved solid polysilicon conductivity, can't carry out the difficult problem of induction heating; By the characteristics of beam-plasma high temperature (more than the 5000K) rapid heating, make the solid silicon material reach molten state rapidly, electromagnetic induction heating is played a role.Under high-temperature plasma arc and induction heating dual function, fusing time is reduced more than 90%, efficient energy-saving, easy and simple to handle.
The beam-plasma melting also has the purification function to polysilicon, and carries out the operation for the multiple metallurgical novel process that reaches refining effect, possesses the function of a tractor serves several purposes.
In the directional freeze process,, help the impurity come-up, thereby can improve the polysilicon inner quality, can shorten the directional freeze time again, enhance productivity because the electromagnetic field effect of induction heating produces induction stirring to the molten bath.
Between plasma heating, electromagnetic induction and crystallographic orientation, by to polycrystal temperature of solidification, the isoparametric feedback of crystalline state, temperature field of molten pool and pulling speed are carried out adjusting automatically in real time, improve the quality and stability.
The present invention compares with single resistance or heating in medium frequency when adopting plasma arc to the polycrystalline silicon material melting, shortens to less than about the time from five hours one hour.
The type of heating that adopts plasma arc to combine with induction heating, can both can regulate power parameter in the different process stage, can also regulate the different heating array mode, to satisfy the optimizing condition of purifying technique and polysilicon crystallographic orientation, this is that general polycrystalline silicon ingot or purifying furnace can't be accomplished.
Because this multifunctional furnace structurally can be used each other, to compare if unite use with many stoves, its facility investment can reduce more than 20%;
Owing to after carrying out purifying technique, enter this operation of directed ingot casting while hot, after different stove purification operations cooling, the polycrystalline silicon ingot or purifying furnace fusing ingot casting that adds simple function again becomes base to compare, and heat energy will be saved greatly, with 250 kilograms of ingot furnaces is example, can save the 1000kwh electric energy at least.
Claims (1)
1. one kind three is a body polysilicon directional crystallization furnace, comprising: crucible (7); It is characterized in that: described crucible (7) is composite ceramics crucible of the no end or cold-crucible; Two sides at crucible (7) are settled induction coil (6); A plasma gun (9) is settled on top at crucible (7); The front end of described crucible (7), induction coil (6) and plasma gun (9) is placed in the stove (20) of a sealing; At the other charging opening (11) that is provided with of the upper end side of container (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200810038393XA CN101591805A (en) | 2008-05-30 | 2008-05-30 | Three is a body polysilicon directional crystallization furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200810038393XA CN101591805A (en) | 2008-05-30 | 2008-05-30 | Three is a body polysilicon directional crystallization furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101591805A true CN101591805A (en) | 2009-12-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA200810038393XA Pending CN101591805A (en) | 2008-05-30 | 2008-05-30 | Three is a body polysilicon directional crystallization furnace |
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| CN (1) | CN101591805A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102351194A (en) * | 2011-07-01 | 2012-02-15 | 王存惠 | Polysilicon reduction and ingot casting combined production device and production method |
| CN102997661A (en) * | 2012-11-26 | 2013-03-27 | 睿为科技（天津）有限公司 | Start melting device and method for preparing high-purity metallic oxide by using cold crucible |
| CN103896275A (en) * | 2012-12-27 | 2014-07-02 | 苏州晶科新能源装备科技有限公司 | Plasma refining and purifying furnace for producing solar energy polysilicon through metallurgy method |
| CN106352697A (en) * | 2016-10-12 | 2017-01-25 | 安徽贝意克设备技术有限公司 | Carbon tube furnace with rotatable crucible |
-
2008
- 2008-05-30 CN CNA200810038393XA patent/CN101591805A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102351194A (en) * | 2011-07-01 | 2012-02-15 | 王存惠 | Polysilicon reduction and ingot casting combined production device and production method |
| CN102997661A (en) * | 2012-11-26 | 2013-03-27 | 睿为科技（天津）有限公司 | Start melting device and method for preparing high-purity metallic oxide by using cold crucible |
| CN102997661B (en) * | 2012-11-26 | 2014-09-17 | 睿为科技（天津）有限公司 | Start melting device and method for preparing high-purity metallic oxide by using cold crucible |
| CN103896275A (en) * | 2012-12-27 | 2014-07-02 | 苏州晶科新能源装备科技有限公司 | Plasma refining and purifying furnace for producing solar energy polysilicon through metallurgy method |
| CN106352697A (en) * | 2016-10-12 | 2017-01-25 | 安徽贝意克设备技术有限公司 | Carbon tube furnace with rotatable crucible |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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Open date: 20091202 |