CN1897309B - 薄膜晶体管和基板及基板的制造方法和液晶显示器 - Google Patents

薄膜晶体管和基板及基板的制造方法和液晶显示器 Download PDF

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Publication number
CN1897309B
CN1897309B CN2006101058838A CN200610105883A CN1897309B CN 1897309 B CN1897309 B CN 1897309B CN 2006101058838 A CN2006101058838 A CN 2006101058838A CN 200610105883 A CN200610105883 A CN 200610105883A CN 1897309 B CN1897309 B CN 1897309B
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China
Prior art keywords
region
light
tft
display panel
gate electrode
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Expired - Fee Related
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CN2006101058838A
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English (en)
Chinese (zh)
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CN1897309A (zh
Inventor
郑宽旭
金雄植
崔弼模
宋锡天
孟昊奭
李相勋
朴根佑
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Samsung Display Co Ltd
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Samsung Electronics Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/13306Circuit arrangements or driving methods for the control of single liquid crystal cells
    • G02F1/13318Circuits comprising a photodetector
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6704Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133308Support structures for LCD panels, e.g. frames or bezels
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133308Support structures for LCD panels, e.g. frames or bezels
    • G02F1/13332Front frames
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/58Arrangements comprising a monitoring photodetector

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Light Receiving Elements (AREA)
CN2006101058838A 2005-07-14 2006-07-13 薄膜晶体管和基板及基板的制造方法和液晶显示器 Expired - Fee Related CN1897309B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050063870A KR101200444B1 (ko) 2005-07-14 2005-07-14 박막트랜지스터와 이를 이용한 박막트랜지스터 기판 및 그제조방법 및 액정표시장치
KR63870/05 2005-07-14

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CN1897309A CN1897309A (zh) 2007-01-17
CN1897309B true CN1897309B (zh) 2011-02-09

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US (2) US7821006B2 (enExample)
JP (1) JP2007027704A (enExample)
KR (1) KR101200444B1 (enExample)
CN (1) CN1897309B (enExample)
TW (1) TWI406417B (enExample)

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KR20050112878A (ko) * 2004-05-28 2005-12-01 삼성전자주식회사 전기 영동 표시 장치
DE102007057089B4 (de) * 2006-12-22 2010-04-29 Lg Display Co., Ltd. Flüssigkristallanzeige mit Photosensor und Herstellungsverfahren derselben
KR101362959B1 (ko) * 2007-03-30 2014-02-13 엘지디스플레이 주식회사 센싱기능을 가지는 액정표시장치 및 그의 제조방법
KR101419221B1 (ko) * 2007-06-19 2014-07-15 엘지디스플레이 주식회사 액정표시장치의 광센서 및 그의 제조방법
US20100128010A1 (en) * 2007-07-13 2010-05-27 Sharp Kabushiki Kaisha Liquid crystal display device and method for driving the same
CN101465359B (zh) * 2007-12-17 2010-09-01 瀚宇彩晶股份有限公司 具有光敏薄膜晶体管的大型光传感器
JP5439723B2 (ja) * 2008-01-22 2014-03-12 セイコーエプソン株式会社 薄膜トランジスタ、マトリクス基板、電気泳動表示装置および電子機器
TWI409537B (zh) 2008-04-03 2013-09-21 Innolux Corp 液晶面板及採用該液晶面板之液晶顯示裝置
CN101556395B (zh) * 2008-04-09 2011-02-16 群康科技(深圳)有限公司 液晶面板和液晶显示器
TWI368988B (en) 2008-08-12 2012-07-21 Chunghwa Picture Tubes Ltd Photo sensor and portable electronic apparatus
WO2011096276A1 (en) 2010-02-05 2011-08-11 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device
CN103840009B (zh) * 2012-11-26 2016-07-27 瀚宇彩晶股份有限公司 像素结构
JP2016029719A (ja) * 2014-07-17 2016-03-03 出光興産株式会社 薄膜トランジスタ
KR102223678B1 (ko) * 2014-07-25 2021-03-08 삼성디스플레이 주식회사 표시장치용 백플레인 및 그 제조 방법
JP6662665B2 (ja) 2015-03-19 2020-03-11 株式会社半導体エネルギー研究所 液晶表示装置及び該液晶表示装置を用いた電子機器
KR102483953B1 (ko) * 2015-10-16 2023-01-03 삼성디스플레이 주식회사 박막트랜지스터 기판 및 이를 구비한 유기 발광 표시 장치
US10330993B2 (en) 2016-12-23 2019-06-25 Semiconductor Energy Laboratory Co., Ltd. Display device
KR102669704B1 (ko) * 2018-12-04 2024-05-28 삼성디스플레이 주식회사 표시 모듈 및 이를 포함한 표시 장치 제조 방법
KR102688295B1 (ko) * 2019-07-22 2024-07-25 엘지디스플레이 주식회사 디스플레이 패널 및 디스플레이 장치
CN110649101B (zh) 2019-10-18 2022-04-15 京东方科技集团股份有限公司 薄膜晶体管及其制作方法、阵列基板和显示装置
WO2025137806A1 (zh) * 2023-12-25 2025-07-03 京东方科技集团股份有限公司 显示基板、显示面板、显示装置和背光调节方法

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Also Published As

Publication number Publication date
TWI406417B (zh) 2013-08-21
US7821006B2 (en) 2010-10-26
US20110013113A1 (en) 2011-01-20
JP2007027704A (ja) 2007-02-01
TW200709428A (en) 2007-03-01
US20070013823A1 (en) 2007-01-18
CN1897309A (zh) 2007-01-17
KR20070009906A (ko) 2007-01-19
US8541811B2 (en) 2013-09-24
KR101200444B1 (ko) 2012-11-12

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