CN1863938A - 用于硫化物薄膜沉积的聚硫化物热蒸汽源 - Google Patents
用于硫化物薄膜沉积的聚硫化物热蒸汽源 Download PDFInfo
- Publication number
- CN1863938A CN1863938A CNA2004800295089A CN200480029508A CN1863938A CN 1863938 A CN1863938 A CN 1863938A CN A2004800295089 A CNA2004800295089 A CN A2004800295089A CN 200480029508 A CN200480029508 A CN 200480029508A CN 1863938 A CN1863938 A CN 1863938A
- Authority
- CN
- China
- Prior art keywords
- polysulfide compound
- sulphur
- thin film
- barium
- sulfur
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
- C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
- C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
- C09K11/7728—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals containing europium
- C09K11/7729—Chalcogenides
- C09K11/7731—Chalcogenides with alkaline earth metals
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
- C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
- C09K11/64—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing aluminium
- C09K11/641—Chalcogenides
- C09K11/643—Chalcogenides with alkaline earth metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Luminescent Compositions (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (41)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US50890203P | 2003-10-07 | 2003-10-07 | |
US60/508,902 | 2003-10-07 | ||
PCT/CA2004/001799 WO2005033360A1 (en) | 2003-10-07 | 2004-10-06 | Polysulfide thermal vapour source for thin sulfide film deposition |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1863938A true CN1863938A (zh) | 2006-11-15 |
CN1863938B CN1863938B (zh) | 2010-11-03 |
Family
ID=34421793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2004800295089A Expired - Fee Related CN1863938B (zh) | 2003-10-07 | 2004-10-06 | 用于硫化物薄膜沉积的聚硫化物热蒸汽源 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7575775B2 (zh) |
KR (1) | KR20060122836A (zh) |
CN (1) | CN1863938B (zh) |
CA (1) | CA2540592A1 (zh) |
TW (1) | TW200522790A (zh) |
WO (1) | WO2005033360A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1721026A4 (en) * | 2004-03-04 | 2009-11-11 | Ifire Ip Corp | SOURCES OF REACTIVE METALS AND DEPOSITION METHOD FOR PHOSPHORES BASED ON THIOALUMINATE |
CN112626488B (zh) * | 2020-12-11 | 2022-12-20 | 中材人工晶体研究院有限公司 | 一种光学ZnS材料及其制备方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4976988A (en) | 1987-02-03 | 1990-12-11 | Nissan Motor Co., Ltd. | Vacuum evaporation method for zinc sulfide |
JP2583086B2 (ja) * | 1987-12-24 | 1997-02-19 | 日亜化学工業株式会社 | 硫化亜鉛蛍光体及び製造方法 |
GB9004480D0 (en) * | 1989-03-15 | 1990-04-25 | Asahi Chemical Ind | High luminance thin-fim electroluminescent device |
US6110529A (en) * | 1990-07-06 | 2000-08-29 | Advanced Tech Materials | Method of forming metal films on a substrate by chemical vapor deposition |
US5246687A (en) * | 1991-04-01 | 1993-09-21 | Hughes Aircraft Company | Solid-state preparation of high purity barium sulfate |
US6541695B1 (en) * | 1992-09-21 | 2003-04-01 | Thomas Mowles | High efficiency solar photovoltaic cells produced with inexpensive materials by processes suitable for large volume production |
KR970004829B1 (ko) * | 1993-10-30 | 1997-04-04 | 엘지전자 주식회사 | 컬러 전계 발광 표시소자 및 그 제작방법 |
EP0720418B1 (en) | 1994-07-04 | 2002-01-23 | Nippon Hoso Kyokai | Manufacturing method for ternary compound films |
KR0164457B1 (ko) | 1995-01-20 | 1999-04-15 | 김은영 | 백색발광용 전계발광소자 및 그 제조방법 |
JP2803631B2 (ja) * | 1995-07-03 | 1998-09-24 | 株式会社デンソー | エレクトロルミネッセンス素子およびその製造方法 |
GB9625916D0 (en) * | 1996-12-13 | 1997-01-29 | Gencoa Limited | Low friction coating |
US6025677A (en) | 1997-04-11 | 2000-02-15 | The Regents Of The University Of California | Blue light emitting thiogallate phosphor including a thin nucleation layer of strontium sulfide |
US6071432A (en) * | 1998-03-31 | 2000-06-06 | Sarnoff Corporation | Long persistence red phosphors |
JP2001294852A (ja) | 2000-04-14 | 2001-10-23 | Tdk Corp | 蛍光体とその製造方法、薄膜の製造装置、およびel素子 |
JP3479273B2 (ja) * | 2000-09-21 | 2003-12-15 | Tdk株式会社 | 蛍光体薄膜その製造方法およびelパネル |
US6610352B2 (en) * | 2000-12-22 | 2003-08-26 | Ifire Technology, Inc. | Multiple source deposition process |
US6447654B1 (en) | 2001-05-29 | 2002-09-10 | Ifire Technology Inc. | Single source sputtering of thioaluminate phosphor films |
US6686062B2 (en) | 2001-06-13 | 2004-02-03 | Ifire Technology Inc. | Magnesium calcium thioaluminate phosphor |
US6878973B2 (en) * | 2001-08-23 | 2005-04-12 | Lumileds Lighting U.S., Llc | Reduction of contamination of light emitting devices |
US6793782B2 (en) | 2001-12-21 | 2004-09-21 | Ifire Technology Inc. | Sputter deposition process for electroluminescent phosphors |
-
2004
- 2004-10-06 KR KR1020067008909A patent/KR20060122836A/ko not_active Application Discontinuation
- 2004-10-06 TW TW093130179A patent/TW200522790A/zh unknown
- 2004-10-06 US US10/959,555 patent/US7575775B2/en not_active Expired - Fee Related
- 2004-10-06 CA CA002540592A patent/CA2540592A1/en not_active Abandoned
- 2004-10-06 CN CN2004800295089A patent/CN1863938B/zh not_active Expired - Fee Related
- 2004-10-06 WO PCT/CA2004/001799 patent/WO2005033360A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
KR20060122836A (ko) | 2006-11-30 |
WO2005033360A1 (en) | 2005-04-14 |
US7575775B2 (en) | 2009-08-18 |
CA2540592A1 (en) | 2005-04-14 |
CN1863938B (zh) | 2010-11-03 |
US20050142289A1 (en) | 2005-06-30 |
TW200522790A (en) | 2005-07-01 |
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C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: YIFEILEI INTELLECTUAL PROPERTY CO.,LTD. Free format text: FORMER OWNER: IFIRE TECHNOLOGY INC. Effective date: 20071109 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20071109 Address after: alberta canada Applicant after: Ifire Technology Corp. Address before: alberta canada Applicant before: Ifire Technology Inc. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101103 Termination date: 20171006 |