CN1757440B - Substrate processing device - Google Patents
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- CN1757440B CN1757440B CN2005101068318A CN200510106831A CN1757440B CN 1757440 B CN1757440 B CN 1757440B CN 2005101068318 A CN2005101068318 A CN 2005101068318A CN 200510106831 A CN200510106831 A CN 200510106831A CN 1757440 B CN1757440 B CN 1757440B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/706843—Metrology apparatus
- G03F7/706851—Detection branch, e.g. detector arrangements, polarisation control, wavelength control or dark/bright field detection
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Coating Apparatus (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Materials For Photolithography (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
To provide a slit coater capable of detecting foreign matter possibly coming in contact with the slit nozzle, with high precision. In the apparatus, a flexible plate 61 is arranged in the forward side, or the +X side, of progressing of the slit nozzle 1, and the backward side, or the -X side, of the plate 61 is irradiated with a laser beam. When there is a to-be-detected target NG, e.g. foreign matter, on a substrate 90 along which the slit nozzle 1 progresses during coating treatment, the target NG comes in contact with the plate 61 before coming in contact with the slit nozzle 1. When the plate 61 comes in contact with the target NG, its contact part is flexed and deformed to move relatively to the -X side, blocking the laser beam. The target NG is detected on the basis of a reduction in the amount of the laser beam received.
Description
Technical field
The present invention relates to a kind of substrate board treatment that on the substrate of the maintenance face of being maintained at, applies treatment fluid.
Background technology
In liquid crystal square glass substrate, semiconductor substrate, film liquid crystal flexible base, board, base board for optical mask, the manufacturing process of colour filter with various substrates such as substrates, all use substrate board treatment, i.e. application processing apparatus to substrate surface coating treatment fluid.Have as such application processing apparatus is known, by spraying treatment fluid from gap nozzle, gap nozzle is moved relative to substrate, make slit rotary applicator machine of substrate overturn or the like after carrying out treatment fluid is coated on the narrow-gap type coating machine of all slit coatings of substrate and slit coating.
When these application processing apparatus carried out slit coating, leading section and the approaching state of substrate at gap nozzle made gap nozzle move with respect to substrate.For this reason, if the surface attachment of substrate foreign matter, or owing to have foreign matter to cause having on the substrate words of protrusion between the maintenance face of substrate and this substrate of maintenance, these foreign matters or protrusion can contact with gap nozzle, thus cause gap nozzle damage, substrate damage or cause applying problems such as bad.
Therefore,, contact with foreign matter etc. in order to prevent this gap nozzle all the time, the flat board that the long chi shape of front side configuration of advancing at gap nozzle is arranged, contact the vibration of the flat board of generation based on this dull and stereotyped and foreign matter etc., the technology of detection foreign matter etc. is suggested (for example, with reference to Patent Document 1 and 2).
Patent Document 1:JP spy opens the 2000-24571 communique.
Patent Document 2:JP spy opens the 2002-1195 communique.
But, above-mentioned prior art, check objects to be detected such as foreign matter because be based on plate vibration (swing changes), so with good grounds sometimes vibration etc. of moving or following the external device (ED) action because of for example gap nozzle, the dull and stereotyped vibration and think and detected object to be detected that the precision of detection object to be detected is very low by mistake with the interference that produces outside object to be detected contact.
Summary of the invention
The present invention is in view of above-mentioned problem, and purpose is to provide a kind of vibration effect without interruption, detects the substrate board treatment of object to be detected accurately.
In order to address the above problem, embodiment 1 described invention is a kind of substrate board treatment of the coating of substrates treatment fluid to the maintenance face of being maintained at, it is characterized in that having can be from along the nozzle of the slit-shaped ejiction opening that extends with the 1st direction of above-mentioned maintenance face almost parallel to aforesaid substrate ejection treatment fluid; By make said nozzle with respect to aforesaid substrate along relatively moving with above-mentioned maintenance face almost parallel and with mutually perpendicular the 2nd direction of above-mentioned the 1st direction, said nozzle sprays the travel mechanism of scanning to aforesaid substrate; With respect to said nozzle, the front side that relative fixed is advanced at the said nozzle of above-mentioned ejection scanning, and the detection member that extends along above-mentioned the 1st direction; Detection by object to be detected in above-mentioned ejection scanning process and above-mentioned detection with member contact produce, above-mentioned detection with member with respect to the testing agency that relatively move of said nozzle to the rear side opposite with above-mentioned front side.
In addition, embodiment 2 described inventions, on the basis of the substrate board treatment that embodiment 1 is put down in writing, above-mentioned detecting unit has with respect to the said nozzle relative fixed, and during to above-mentioned relatively moving above-mentioned detection with the light-projecting portion of at least a portion projecting laser of the mobile alignment of member; Accept the light accepting part of above-mentioned laser.
In addition, embodiment 3 described inventions, the above-mentioned detection member in the substrate board treatment that embodiment 2 is put down in writing is non-transparent component.
In addition, embodiment 4 described inventions, in embodiment 2 or 3 substrate board treatments of being put down in writing, above-mentioned detection has pliability with member.
In addition, embodiment 5 described inventions, in embodiment 2 or 3 substrate board treatments of being put down in writing, above-mentioned light accepting part is that spot type is subjected to optical sensor.
In addition, embodiment 6 described inventions, in embodiment 2 or 3 substrate board treatments of being put down in writing, above-mentioned light accepting part is to be subjected to optical sensor along the line style that above-mentioned the 2nd direction is extended.
In addition, embodiment 7 described inventions, in embodiment 2 or 3 substrate board treatments of being put down in writing, above-mentioned light accepting part is configured in the position that can accept from the direct sunshine of the above-mentioned laser of above-mentioned light-projecting portion.
In addition, embodiment 8 described inventions, in the substrate board treatment that embodiment 4 is put down in writing, above-mentioned light accepting part be configured in can not be directly from the direct sunshine of the above-mentioned laser of above-mentioned light-projecting portion, and can accept by the catoptrical position of the above-mentioned above-mentioned detection that relatively moves with the above-mentioned laser of the partial reflection of member.
In addition, embodiment 9 described inventions, in the substrate board treatment that embodiment 4 is put down in writing, above-mentioned detection is fixed on a plurality of positions of above-mentioned the 1st direction with respect to said nozzle with member.
In addition, embodiment 10 described inventions, in the substrate board treatment that embodiment 1 is put down in writing, above-mentioned detecting unit has the rate of travel of member is used in detection with respect to the above-mentioned detection of said nozzle displacement meter.
In addition, embodiment 11 described inventions, in the substrate board treatment that embodiment 10 is put down in writing, above-mentioned detecting unit possesses a plurality of above-mentioned displacement meters, and a plurality of above-mentioned displacement meters are configured in above-mentioned detection respectively and use member on a plurality of positions of above-mentioned the 1st direction.
In addition, embodiment 12 described inventions, in the substrate board treatment that embodiment 11 is put down in writing, above-mentioned detection is arranged along above-mentioned the 1st direction with member, and, can be made of to a plurality of partial component that above-mentioned rear side relatively moves separate and relative said nozzle, a plurality of above-mentioned displacement meters are configured in respectively on above-mentioned a plurality of partial component.
In addition, embodiment 13 described inventions, in the substrate board treatment that embodiment 1 is put down in writing, above-mentioned detection is made of conductor with member, above-mentioned detecting unit and above-mentioned detection be configured in above-mentioned detection above-mentioned rear side across insulating component between with member with member, have by conductor and constitute, and, the switching member that extends along above-mentioned the 1st direction and, the above-mentioned detection of electrical detection is with the mechanism that contacts of member and above-mentioned switching member.
In addition, embodiment 14 described inventions, in the substrate board treatment that embodiment 13 is put down in writing, above-mentioned detection has pliability with member.
According to embodiment 1～14 described invention, do not detect vibration with member, use moving of member and detect, so the influence that can vibrate without interruption can detect object to be detected accurately.
In addition, especially according to embodiment 2～9 described inventions, the variation based on the light income of light accepting part can easily detect relatively moving with member.
In addition, according to embodiment 3 described inventions, can cover laser reliably especially, improve accuracy of detection.
In addition, especially according to embodiment 4 described inventions, have pliability because detect with member, contact with object to be detected with member even detect, the part flexible deformation only takes place in it, can prevent to detect the breakage with member.In addition, can enlarge the zone of covering laser, improve accuracy of detection.
In addition, according to embodiment 5 described inventions, can make testing agency's miniaturization especially.
In addition, especially according to embodiment 6 described inventions, because line style is subjected to optical sensor roughly along the mobile alignment of laser, the variation of detection laser light income reliably.
In addition, according to embodiment 7 described inventions, can make testing agency's miniaturization especially.
In addition, especially according to embodiment 8 described inventions,, can alleviate the burden of the adjustment operation of light accepting part configuration because do not need subtend configuration light accepting part and irradiation portion accurately.
In addition, especially according to embodiment 9 described inventions, can prevent to improve accuracy of detection because of detecting bending with the member dead weight generation.
In addition, especially according to embodiment 10～12 described inventions,, can easily detect relatively moving with member by displacement meter.
In addition, especially according to embodiment 11 described inventions,, can improve the precision of detection object to be detected because can detect with the relatively moving of member according to a plurality of displacement meters.
In addition, especially according to embodiment 12 described inventions, detection is made of a plurality of partial component separate and that can relatively move with member, by the displacement meter that disposes respectively, can further improve the precision that detects object to be detected.
In addition, especially according to embodiment 13 and 14 described inventions,, can easily detect and detect relatively moving with member by more simple structure.
In addition, flexible especially according to embodiment 14 described inventions because detection has with member, contact with object to be detected with member even detect, the part flexible deformation only takes place in it, can prevent to detect the breakage with member.
Description of drawings
Fig. 1 is the stereogram of the schematic configuration of expression narrow-gap type coating machine.
Fig. 2 is the figure of an example of expression object to be detected.
Fig. 3 is the figure of an example of expression object to be detected.
Fig. 4 is the stereogram of foreign matter test section in first embodiment.
Fig. 5 is the side view of foreign matter test section in first embodiment.
Fig. 6 is the side view of foreign matter test section in first embodiment.
Fig. 7 is the figure of the motion flow of expression narrow-gap type coating machine.
Fig. 8 is the side view of foreign matter test section in second embodiment.
Fig. 9 is the side view of foreign matter test section in second embodiment.
Figure 10 is the side view of foreign matter test section in the 3rd embodiment.
Figure 11 is the side view of foreign matter test section in the 3rd embodiment.
Figure 12 is the side view of foreign matter test section in the 4th embodiment.
Figure 13 is the side view of foreign matter test section in the 4th embodiment.
Figure 14 is the side view of foreign matter test section in the 5th embodiment.
Figure 15 is the side view of foreign matter test section in the 5th embodiment.
Figure 16 is the stereogram of foreign matter test section in the 6th embodiment.
Figure 17 is the stereogram of foreign matter test section in the 7th embodiment.
Figure 18 is the side view of foreign matter test section in the 7th embodiment.
Figure 19 is the side view of foreign matter test section in the 7th embodiment.
The specific embodiment
Embodiments of the present invention are described with reference to the accompanying drawings.
1. the summary of substrate board treatment
Fig. 1 is that expression is as the substrate board treatment that relates to embodiment of the present invention, the i.e. stereogram of the schematic configuration of narrow-gap type coating machine 1.Narrow-gap type coating machine 1 is, the application processing apparatus that is called as the coating processing of slit coating, slit coating promptly is to the surface applied of the substrate 90 resist liquid as treatment fluid, and above-mentioned narrow-gap type coating machine 1 is used in and is etched in technical process such as electrode layer that substrate 90 surfaces form etc. selectively.Becoming the substrate 90 of coating object of narrow-gap type coating machine 1 representational is the square glass substrate that is used to make the picture panel of liquid crystal indicator, but also can be semiconductor substrate, film liquid crystal flexible base, board, base board for optical mask, colour filter be with other substrates such as substrates.
As shown in Figure 1, narrow-gap type coating machine 1 roughly is divided into and implements coating coating handling part of handling 2 and the control part 8 of controlling the coating handling part.And then coating handling part 2 roughly is divided into the objective table 3 that is used to keep substrate 90, to the ejection mechanism 4 that remains on the substrate 90 ejection liquid against corrosion on the objective table 3 with make ejection mechanism 4 to travel mechanism 5 that prescribed direction moves.
In addition, in the following description, the expression direction and towards the time, take the circumstances into consideration to use the XYZ rectangular coordinate systems of illustrated 3 dimensions.This XYZ axle is relatively-stationary with respect to objective table 3.Here, X-axis and Y direction are horizontal directions, and Z-direction is vertical direction (+Z side is the top).In addition, X-direction is depth direction (+X side is a face side), and Y direction is left and right directions (+Y side is the right side).
Objective table 3 is that the stone materials such as granite of rectangular shape constitute by having roughly, and its upper surface is processed into approximate horizontal and smooth, as the maintenance face 30 of substrate 90 and the performance function.Disperse to be formed with a plurality of vacuum suction mouths at maintenance face 30.Adsorbing substrate 90 by these vacuum suction mouths, when coating is handled, making substrate 90 keep level thus in the position of regulation.In addition, be provided with can be along a plurality of lifter pin LP of vertical direction (Z-direction) lifting in accordance with regulations interval on maintenance face 30.
Ejection mechanism 4 mainly constitutes 2 elevating mechanisms 43 of its lifting by the gap nozzle 41 of ejection liquid against corrosion, the nozzle support portion 42 that supports gap nozzle and the two ends of support nozzle support portion 42.
2 elevating mechanisms 43 are connected the both ends, the left and right sides of nozzle support portion 42.These elevating mechanisms 43 possess AC servomotor and ball screw etc. respectively, can make nozzle support portion 42 and the gap nozzle 41 that supported by nozzle support portion 42 in vertical direction (Z-direction) lifting.By these two elevating mechanisms 43, adjust the interval (gap) between gap nozzle 41 and the substrate 90 or the posture of gap nozzle 41 relative substrates 90 etc.
As shown in Figure 1, all by the ejection mechanism 4 that comprises these gap nozzles 41, nozzle support portion 42 and two elevating mechanisms 43, the bridge formation structure that set up along Y direction at the both ends, the left and right sides of formation objective table 3.Travel mechanism 5 makes all moving along X-direction of ejection mechanism 4 with such bridge formation structure.
Travel mechanism 5 as shown in the figure is the left-right symmetry structure symmetry of-Y side (+Y the sides with), have respectively about it, guide the walking track 51 that moves, the generation of ejection mechanism 4 to be used for the linear encoder 53 that moves the linear motor 52 of the locomotivity that sprays mechanism 4 and be used to detect the position of ejection mechanism 4 to X-direction.
Two walking tracks 51 extend along X-direction in the end (left and right end portions) of the Y direction of objective table 3 respectively and are provided with.By guide the bottom of two elevating mechanisms 43 respectively along these two walking tracks 51, the moving direction that sprays mechanism 4 is defined as X-direction.
Two linear motors 52 constitute as the AC coreless linear motor with retaining element 52a and moving meter 52b respectively.Retaining element 52a in the side (left and right side) of the Y direction of objective table 3 along the X-direction setting.On the other hand, moving meter 52b is fixedly installed on the outside of elevating mechanism 43.The magnetic force of linear motor 52 by producing between these retaining elements 52a and the moving meter 52b moves ejection mechanism 4.
In addition, two linear encoders 53 have 53a of scale portion and test section 53b respectively.The 53a of scale portion in the bottom of the retaining element 52a that is fixedly mounted on the linear motor 52 on the objective table 3 along the X-direction setting.On the other hand, the test section 53b setting that is fixed in the more lateral of the moving meter 52b of the linear motor 52 that is fixedly installed on elevating mechanism 43 is with the 53a of scale portion configuration opposed to each other mutually.Linear encoder 53 based on the relative position relation of 53a of scale portion and test section 53b, detects the position (more particularly, the position of the ejiction opening of gap nozzle 41) of the ejection mechanism 4 on X-direction.
According to above structure, gap nozzle 41 can be at the upper space of the maintenance face 30 that is keeping substrate 90, on the X-direction parallel with maintenance face 30, moves with respect to maintenance face 30.When applying processing, gap nozzle 41 is spraying from ejiction opening under the state of liquid against corrosion, and the speed with regulation on X-direction moves, and has finished the roughly scanning on full surface (ejection scanning) by 41 pairs of substrates 90 of gap nozzle.Handle by such coating,, on the surface of substrate 90, formed the liquid layer against corrosion of regulation thickness at the roughly full uniform surface ground coating liquid against corrosion of substrate 90.The narrow-gap type coating machine 1 of present embodiment, the moving direction of handling gap nozzle 41 in (ejection scanning) process in coating is+directions X.
In addition, the various piece of such coating handling part 2 and control part 8 electrically connect, and control the work of coating handling part 2 various pieces by control part 8 with being all together.Control part 8 possesses the microcomputer that is made of CPU, RAM and ROM etc., and the control function of control part 8 is by CPU program and data according to the rules, utilizes RAM to carry out that calculation process realizes.In addition, the face side of control part 8 is provided with and is used for the expression portion 83 that operating personnel do the operating portion 82 of input operation and are used to represent various data, and these are used as user interface performance function.
2. foreign matter test section
In addition, narrow-gap type coating machine 1 has the function that detects the foreign matter that may contact with gap nozzle 41 etc. when coating is handled doing.
Fig. 2 and Fig. 3 are to see the side view that the expression coating concerns between gap nozzle 41 and the substrate 90 handling from-Y side.During coating is handled, gap nozzle 41 with the relative substrate 90 in its bottom at interval for example the mode in the gap of 50 μ m～200 μ m be configured in the top of substrate 90, and keep under the condition of this state to+directions X and move.
In coating is handled, in zone that gap nozzle 41 should move (below be called " mobile subject area "), exist the foreign matter Fm that the upper surface at substrate 90 as shown in Figure 2 adheres to or the protrusion 90a (part higher that produces because between substrate 90 and maintenance face 30, accompany foreign matter Fm) of substrate as shown in Figure 3 90 sometimes than other position.Apply processing by force at the state that has such foreign matter Fm or protrusion 90a, Fm such as these foreign matters, 90a contacts with the bottom (leading section) of gap nozzle 41, may produce problems such as gap nozzle 41 breakages.
For fear of such phenomenon occurring, in narrow-gap type coating machine 1, as shown in Figure 1, relatively gap nozzle 41 fixedly installed be used to detect gap nozzle 41+Fm such as foreign matter of X side, the foreign matter test section 6 of 90a.In addition, below, the foreign matter Fm and the protrusion 90a that will become the detected object of foreign matter test section 6 are generically and collectively referred to as " object to be detected " NG.
Fig. 4 is the stereogram of expression foreign matter test section 6 structures.Fig. 5 and Fig. 6 see the side view of foreign matter test section 6 from-Y side.As shown in these figures, foreign matter test section 6 has, and in the object to be detected NG of the mobile subject area that is present in gap nozzle 41 and stage before gap nozzle 41 contacts, is used for the flat board 61 that contacts with object to be detected NG.
Dull and stereotyped 61 is the flexual nontransparent parts that have of the long chi shape longer than the size of the Y direction of substrate 90.For example, be that metal system thin slice or resin film about 0.05～0.3mm constitutes by thickness.Dull and stereotyped 61 fixing with respect to square rod shape flat support member 62 mode downward vertically that with the Y direction is length direction, this flat support member 62 be fixedly installed on gap nozzle 41+the X side.Therefore, dull and stereotyped 61, by the interval of the regulation of being separated by relatively be fixed on gap nozzle 41+X side (coating handle in the front side of advancing of gap nozzle 41).
Dull and stereotyped 61, which position of the Y direction of extending at the ejiction opening of gap nozzle 41 no matter, mode from the bottom of gap nozzle 41 to the imaginary line of+directions X extension that all must interdict from is configured.In particular, dull and stereotyped 61 length direction is along Y direction, and dull and stereotyped 61 lower end part is low in the bottom than the ejiction opening of gap nozzle 41, and for example the mode about 10 μ m disposes dull and stereotyped 61.
In addition, as shown in Figure 4, dull and stereotyped 61 a plurality of part 61f of the Y direction of flat panel support part 62 every predetermined distance be fixed.Because dull and stereotyped 61 have pliability, thus can be bent downwardly by the deadweight part, but by adopting such fixing means can prevent the part bending that produces because of deadweight, all and Y direction almost parallel ground of dull and stereotyped 61 bottom can be disposed.
Here, as shown in Figure 5, suppose in the mobile subject area of gap nozzle 41 to have object to be detected NG.Gap nozzle 41 begins further when the+X side shifting from the state of Fig. 5 because disposing in place than gap nozzle 41 more close+X sides dull and stereotyped 61, as shown in Figure 6, object to be detected NG with contact with flat board 61 before gap nozzle 41 contact.And dull and stereotyped like this 61 in case contact with object to be detected NG because dull and stereotyped 61 have pliability, so just make dull and stereotyped 61 contact portion bending, make its from the origin-location relatively-X side (applying the rear side that gap nozzle 41 is advanced the processing) moves.To such flat board 61 moving rearward, be relatively moving all the time to gap nozzle 41.Foreign matter test section 6 according to detecting this flat board 61 relatively moving rearward, detects object to be detected NG.
The foreign matter test section 6 of present embodiment is based on relatively moving of the such flat board 61 of the irradiating state detection of laser.Therefore, as shown in Figure 4, foreign matter test section 6 also has the light-projecting portion 63 of irradiating laser and accepts the light accepting part 64 of laser.
Light-projecting portion 63 is spot type semiconductor lasers of the laser of emission circular.Light-projecting portion 63 is fixedly installed on flat panel support part 62 via the supplemental support parts 63a that roughly is the L font, be configured in than dull and stereotyped 61-the Y side end is more close-position of Y side.On the other hand, light accepting part 64 is made of a plurality of photodiodes etc., is that the spot type with speed of circular is subjected to optical sensor.Light accepting part 64 also is fixedly installed on flat panel support part 62 via the supplemental support parts 64a that roughly is the L font, be configured in than dull and stereotyped 61+the Y side end is more close+position of Y side.Thus, all relative gap nozzle 41 of light-projecting portion 63 and light accepting part 64 both sides is by relative fixed.
Light-projecting portion 63 and light accepting part 64 are across the upper space of substrate 90, and subtend is configured on the Y direction.That is, towards+Y side configuration light-projecting portion 63, so that make it can be along the Y direction irradiating laser, on the other hand, light accepting part 64 be configured towards-Y side, so that make it can accept direct sunshine from the laser of light-projecting portion 63.
In addition, as shown in Figure 5, light-projecting portion 63 for dull and stereotyped 61-X side (coating handle in the rear side of advancing of gap nozzle 41) is along the Y direction projecting laser.To be laser become when contacting with object to be detected NG dull and stereotyped 61 rear sides (X side) of flat board 61 of mobile alignment when relatively moving.
Therefore, at the not contact condition (state of Fig. 5) of flat board 61 with object to be detected NG, because of the laser from light-projecting portion 63 is not covered by dull and stereotyped 61 fully, light accepting part 64 is accepted light.And on the other hand, dull and stereotyped 61 with the contact condition (state of Fig. 6) of object to be detected NG, covered by dull and stereotyped 61 from the part of the laser of light-projecting portion 63.Therefore, if the state of comparison diagram 5 and Fig. 6, when the state of dull and stereotyped 61 Fig. 6 that contact with object to be detected NG, the light income of the laser of light accepting part 64 reduces.For this reason, if the laser light income of light accepting part 64 reduces, then should judge to have object to be detected NG.
In the narrow-gap type coating machine 1 of present embodiment, detect object to be detected NG by control part 8 based on such principle.As shown in Figure 4, light-projecting portion 63 and light accepting part 64 are electrically connected on the control part 8, control by control part 8.In addition, the optical signal that is subjected to that is received by light accepting part 64 is input to control part 8, and control part 8 is subjected to optical signal to derive the light income of light accepting part 64 based on this.The frequent light incomes of the such light accepting part 64 of monitoring of control part 8 in coating is handled when light income reduces to littler than setting, just can be judged to be to detect based on above-mentioned principle and have object to be detected NG.
3. coating is handled
Next, explaining the coating that is accompanied by the such object to be detected NG of detection handles.Fig. 7 is the action flow chart of expression to the narrow-gap type coating machine 1 of substrate 90 coatings liquid against corrosion.This action is that each substrate 90 that becomes the coating object is implemented.Below, the action of narrow-gap type coating machine 1 is described with reference to this figure.In addition, in the action control of the various piece of this explanation, the part of particularly not mentioning is undertaken by control part 8.
At first, by the transport mechanism of coating handling part 2 outsides, substrate 90 is moved into coating handling part 2, lifter pin LP is given in handing-over.It is after 90s to receive this substrate, and as to this reply, lifter pin LP descends and also buries in objective table 3.Thus, substrate 90 mountings of moving into are to the assigned position of the maintenance face 30 of objective table 3, and then by the absorption of vacuum suction mouth and keeping.When moving into such substrate 90, gap nozzle 41 as shown in Figure 1 wait to keep away on the position await orders (step S1).
Next, when adjusting the ejiction opening height of gap nozzle 41 by elevating mechanism 43, gap nozzle 41 by travel mechanism 5 move to the regulation that begin to spray liquid against corrosion the starting position (in particular, substrate 90-end of X side just above) (step S2).
Next, the ejiction opening from gap nozzle 41 begins to substrate 90 ejection liquid against corrosion (step S3).Meanwhile, by travel mechanism 5 beginning to+X side with fixing speed travelling slit nozzle 41 (step S4).That is (ejection scanning) is handled in the coating that begins when, gap nozzle 41 moves on substrate 90 to carry out to substrate 90 ejections liquid against corrosion.
Such coating handle last till always gap nozzle 41 move to the end position of regulation (in particular, substrate 90+end of X side just above) till (step S6).And, in the time-continuing process that such coating is handled, monitoring in the mobile subject area of gap nozzle 41 whether have object to be detected NG.That is,, monitoring whether the light income of light accepting part 64 is less than setting (step S5) by control part 8.
When detecting object to be detected NG (step S5 is a "Yes"), force to stop coating and handle by this supervision.That is, stop moving from gap nozzle 41 ejection liquid against corrosion and gap nozzle 41.And then, as alarm, detected the warning picture (step S7) of object to be detected NG in the expression portion 83 demonstration expressions of control part 8.
The flat board 61 that contacts with object to be detected NG, because arranged spaced in accordance with regulations is in the place ahead of advancing of gap nozzle 41, so when detecting object to be detected NG,, can prevent in advance that gap nozzle 41 from contacting with object to be detected NG by stopping to move of gap nozzle 41 immediately.Thus, can prevent effectively by contact the breakage of the gap nozzle 41 that causes with object to be detected NG.
In addition, by the output alarm, can the notifying operation personnel take place unusually, thereby can resume work efficiently.In addition, so long as can the notifying operation personnel take place unusually, alarm also can for example be exported alarm tone by loudspeaker with other method, and bright warning light waits activating alarm.
Behind the implementation step S7, gap nozzle 41 is moved to position to be kept away (step S9) like this by travel mechanism 5.Next,, substrate 90 is pushed to from maintenance face 30, by outside transport mechanism, substrate 90 is taken out of (step S10) from coating handling part 2 at this state by the rising of lifter pin LP.Because the coating of this substrate 90 is handled and not to be finished, so distinguish mutually with other the substrate 90 of having finished that coating handles.In addition, in this case, as shown in Figure 3, because consider and on objective table 3, adhered to foreign matter Fm, so preferably carry out the resuming work of cleaning etc. of objective table 3.
In addition, on the other hand, do not detect object to be detected NG in coating is handled, and gap nozzle 41 has been when having moved to the end position of regulation (step S6 is a "Yes"), normal termination is handled in coating, is exactly that just often end of a period is handled.That is, stop by travel mechanism 5 gap nozzle 41 being moved to position to be kept away (step S9) from gap nozzle 41 ejection liquid against corrosion (step S8).And, the substrate 90 of having finished the coating processing is taken out of (step S10) from coating handling part 2.
By above explanation, in narrow-gap type coating machine 1, gap nozzle 41+X side (when scanning ejection gap nozzle 41 the place ahead of advancing) fixed the flat board 61 of long chi shape, detect by this dull and stereotyped 61 flat board 61 that contact generation with object to be detected NG to-the relatively moving of X side (spraying the rear of advancing of the gap nozzle 41 in scanning).That is,, but detect dull and stereotyped 61 rearward relatively moving,, can improve the accuracy of detection of object to be detected NG so the influence that can vibrate without interruption detects object to be detected NG because be not to detect dull and stereotyped 61 vibration.
In addition, to by the dull and stereotyped 61 mobile alignment projecting lasers that contact the flat board 61 of generation with object to be detected NG, light income based on this laser detects relatively moving of flat board 61, therefore, can be easy to detect relatively moving of the flat board 61 relevant with object to be detected NG contact.
In addition, dull and stereotyped 61 is non-transparent substances, therefore can cover the laser in the relatively moving of the flat board 61 relevant with object to be detected NG contact reliably, can improve the accuracy of detection that relatively moves that contacts relevant flat board 61 with object to be detected NG.In addition, directly detect according to laser under the situation of object to be detected NG, though can not detect transparent object to be detected NG, in this implementation method, because detect the flat board 61 that contacts with object to be detected NG, so even transparent object to be detected NG also can be detected reliably.
In addition, because dull and stereotyped 61 have pliability, so even dull and stereotyped 61 contact the part generation flexible deformation who also just contacts with object to be detected.Therefore,, all change flat board 61 when not needing to detect object to be detected at every turn, be easy to, in addition, can also reduce operating cost so resume work owing to can not damage flat board 61 with contacting of object to be detected by dull and stereotyped 61.
In addition, dull and stereotyped 61 in case contact with object to be detected NG, and its peripheral part also moved when dull and stereotyped 61 contact portion bent, all laser is covered up through the mobile alignment of flat board 61.Therefore, for example do not have flexual flat board to compare, can enlarge the part of covering laser with employing, can be clearly the minimizing of light income of laser by dull and stereotyped 61 mobile generation.
4. other embodiments
Narrow-gap type coating machine 1 is not limited to above-mentioned embodiment (below be referred to as " first embodiment ").Below, other embodiment is described.
4.1 second embodiment: line style
Though adopted spot type to be subjected to optical sensor in the first embodiment, also can adopt line style to be subjected to optical sensor as light accepting part.Fig. 8 and Fig. 9 see from-Y side to adopt line style to be subjected to the side view of optical sensor as the foreign matter test section 6 second embodiment of light accepting part.
In second embodiment as shown in the figure, light-projecting portion 63L as the Linear Laser device of emitting linear shape laser (slit light), and be subjected to the light accepting part 64L of optical sensor as the line style with speed of linearity, and across the upper space of substrate 90, subtend configuration on Y direction.With in the mode of the mobile alignment of the flat board 61 when contacting with object to be detected NG roughly, the length direction of light accepting part 64L is configured along X-direction.In addition, laser also be its length direction along X-direction from light-projecting portion 63L throw light.
When adopting line style to be subjected to optical sensor like this as light accepting part 64L, as shown in Figure 9, the covering of laser of the whole mobile alignment of the flat board 61 when contacting can be detected, the variation of the light income of the laser when dull and stereotyped 61 relatively move can be detected reliably with object to be detected NG.Therefore, can further improve the accuracy of detection of object to be detected.
In addition, on the other hand, line style is subjected to optical sensor and spot type compared by optical sensor, needs a lot of configuration spaces, therefore when seeking the miniaturization of foreign matter test section 6, adopts the such spot type of first embodiment to be subjected to optical sensor relatively good.
4.2 the 3rd embodiment: the catoptrical light that is subjected to
In the first embodiment, light-projecting portion 63 and the configuration of light accepting part 64 subtends, light accepting part 64 can be accepted the direct sunshine of laser, but light accepting part 64 is configured in the catoptrical position that can accept laser also to be fine.Figure 10 and Figure 11 see at the side view that light accepting part 64 is configured as the foreign matter test section 6 of catoptrical the 3rd embodiment that can accept laser from-Y side.
In the 3rd embodiment as shown in the figure, light-projecting portion 63 is to dispose in the same manner with first embodiment, and simultaneously, light accepting part 64 more is configured to-X lateral deviation from the position of the direct sunshine of accepting the laser by light-projecting portion 63 irradiations with moving.The light accepting part 64 of this moment is also with respect to gap nozzle 41 relative fixed.
By adopting such configuration, dull and stereotyped 61 with the contactless state of object to be detected NG, as shown in figure 10, can not shine light accepting part 64 from the laser (direct sunshine) of light-projecting portion 63.On the contrary, at the contact condition of flat board 61 with object to be detected NG, as shown in figure 11, and from the laser of light-projecting portion 63, the part diffuse reflection that relatively moves dull and stereotyped 61, a catoptrical part that produces by diffuse reflection shines light accepting part 64.
Therefore, relatively the state of Figure 10 and Figure 11 as can be known, at the state of dull and stereotyped 61 Figure 11 that contacts with object to be detected NG, light accepting part 64 is subjected to the light income rising that laser shines.Therefore in the 3rd embodiment,, just should judge to have object to be detected NG if the light income of light accepting part 64 rises.
If adopt the configuration of such light accepting part 64, as long as it is just passable to allow 64 of light accepting parts accept a catoptrical part, thus do not need to dispose accurately light accepting part 64, as not needing to make light-projecting portion 63 and light accepting part 64 subtend configuration strictly etc.Therefore, the configuration operation of light accepting part 64 becomes easily, and in addition, some is inaccurate because use can cause the configuration of light accepting part 64, but because allow to a certain degree deviation, so the accuracy of detection of object to be detected NG is descended.
In addition, because in this 3rd embodiment, to compare with first embodiment, the configuration of light accepting part 64 needs more space, so when seeking the miniaturization of foreign matter test section 6, can adopt the way of light-projecting portion 63 and light accepting part 64 subtends configuration as first embodiment.
4.3 the 4th embodiment: inflexibility parts
Though adopted the pliability member as flat board in the first embodiment, also can adopt the inflexibility member.Figure 12 and Figure 13 see from-Y side to adopt the side view of inflexibility parts as the foreign matter test section 6 of the 4th embodiment of flat board.
In the 4th embodiment as shown in the figure, dull and stereotyped 65 flat boards 61 that replace first embodiment have been disposed.This flat board 65 is identical except being the inflexibility with dull and stereotyped 61.Specifically, even flat board 65 is can not constitute by damaged harder material by contacting with object to be detected NG also, as metal, pottery etc. are the long chi shape nontransparent members longer than the Y direction size of substrate 90.
This dull and stereotyped 65 and first embodiment is configured in the same manner, with must blocking from gap nozzle 41 lower ends to the imaginary line of+X side extension.But dull and stereotyped 65 can be in the XZ plane be that the center rotates with back shaft 67 along Y direction, supported by flat support member 66 via this back shaft 67.Meanwhile, in dull and stereotyped 65 than the high tops of back shaft 67 by spring 68 to-X side strain, in dull and stereotyped 65 than back shaft 67 low bottoms by the rotation of brake 69 controls to+X side.Thus, can only be to-X side (rear of advancing of gap nozzle 41 in the ejection scanning process) rotation in dull and stereotyped 65 than the low bottom of back shaft 67.
As shown in Figure 12, at the contactless state of flat board 65 with object to be detected NG, dull and stereotyped 65 elastic forces by spring 68 are keeping the state in vertical.On the contrary, as shown in Figure 13, dull and stereotyped 65 when contact with object to be detected NG, and the bottom of flat board 65 is done to rotate relative to gap nozzle 41 and moved to-X side opposite with the elastic force of spring 68.Light-projecting portion 63 disposes in the mode to the mobile alignment irradiating laser that moves relative to rotation of such flat board 65.Therefore, even the 4th embodiment as long as the light income of light accepting part 64 reduces, just can detect relatively moving of flat board 65, can judge to have object to be detected NG.
In addition, adopting the such inflexibility member of this 4th embodiment as flat board, and then when adopting the such line style of second embodiment to be subjected to optical sensor,, there is not the position on the optical sensor that is subjected to of laser incident to change by dull and stereotyped 65 relatively move as light accepting part.Therefore, in this case,, also can detect dull and stereotyped 65 relatively move based on the change in location on the optical sensor of being subjected to that does not have laser incident.
4.4 the 5th embodiment: displacement meter
In the 4th embodiment, though be by laser detection flat board 65 to the relatively moving of-X side, also can detect dull and stereotyped 65 rate of travel by displacement meter.Figure 14 and Figure 15 see the side view that detects the foreign matter test section 6 of dull and stereotyped 65 the 5th embodiment that relatively moves by displacement meter from-Y side.
Such as shown in the figure, in the 5th embodiment, do not dispose light-projecting portion 63 and light accepting part 64, and be provided with measuring appliance (ピ Star Network テ ス タ) (measuring gage) 7 as displacement meter.Other structure is identical with the 4th embodiment.
Measuring appliance 7 by main part 71 with can be relative the bar-shaped detecting element 72 of main part 71 rotations constitute, based on the rotation of detecting element 72, detect the addendum modification of detecting element 72 front ends.The relative flat support members of the main part 71 of measuring appliance 7 66 are fixing, on the other hand, the front end of detecting element 72, with dull and stereotyped 65 in bottom-X side (in ejection scanning process the advance rear of the gap nozzle 41) adjacency lower than back shaft 67.By such configuration, measuring appliance 7 can detect the rate of travel with respect to the gap nozzle 41 of flat board 65.Measuring appliance 7 electrically connects with control part 8, the displacement of the front end of expression detecting element 72, and promptly the signal of dull and stereotyped 65 rate of travel inputs to control part 8.
As shown in figure 14, at the contactless state of flat board 65 with object to be detected NG, dull and stereotyped 65 elastic forces by spring 68 are keeping the state in vertical, and measuring appliance 7 does not detect dull and stereotyped 65 rate of travel.On the contrary, as shown in figure 15, dull and stereotyped 65 when contact with object to be detected NG, because flat board 65 detects the rate of travel of flat board 65 relative to moving to-X sideway swivel at measuring appliance 7.Control part 8 can detect relatively moving of flat board 65 based on the rate of travel of the flat board of importing from measuring appliance 7 65, can judge thus to have object to be detected NG.
In the 5th embodiment,,, therefore be easy to detect relatively moving of flat board 65 so do not need the strict operation that light-projecting portion 63 and light accepting part 64 etc. are installed because without laser.In addition, in the 5th embodiment, because without laser, so flat board 65 also can be a transparent component.
4.5 the 6th embodiment: a plurality of displacement meters
The measuring appliance 7 of the 5th embodiment can be configured in a plurality of positions of Y direction.Figure 16 is the stereogram of structure of the foreign matter test section 6 of expression the 6th embodiment that disposed a plurality of measuring appliances 7.In addition, Figure 16 is used to express the configuration relation of flat board 65 and measuring appliance 7, in order to represent conveniently omitted the structure of a part of foreign matter test section 6, but the abridged structure to be identical with the 5th embodiment.
As shown in the figure, in the 6th embodiment, on Y direction with the regulation arranged spaced a plurality of measuring appliances 7 (they being 4 among the figure).The rate of travel of the flat board 65 that detects with these measuring appliances 7 is input to control part 8 respectively.Control part 8 is based at least one signal from measuring appliance 7, when detecting dull and stereotyped 65 relatively move, judges to have object to be detected NG.So just can improve the precision that detects object to be detected NG by dispose a plurality of measuring appliances 7 along Y direction.
In addition, illustrative dull and stereotyped 65 among the figure, constitute by 4 partial component 65a.These 4 partial component 65a arrange along Y direction, can be relatively independently do relative to rotation relative to gap nozzle 41 and move to-X side.And with respect to these 4 partial component 65a, difference allocating and measuring device 7 just can test section member 65a rate of travel separately by measuring appliance 7.
If dull and stereotyped 65 are made of a plurality of partial component 65a, compare with constitute flat board 65 by a member,, move and become responsive more because for contacting with object to be detected NG, can detect small object to be detected NG, further improve the precision that detects object to be detected NG.
4.6 the 7th embodiment: circuit
In the first embodiment, though by laser detection flat board 61 to the relatively moving of-X side, also can pass through electrical detection.Figure 17 is the stereogram of structure of foreign matter test section 6 of the 7th embodiment that relatively moves of expression electrical detection flat board 73.In addition, Figure 18 and Figure 19 are the side views from the foreign matter test section 6 of-Y side the 7th embodiment.
As shown in these figures, the flat board 61 that replaces first embodiment in the 7th embodiment with the 1st flat board 73.This 1st flat board 73 is except being identical with the flat board 61 of first embodiment and pliability arranged the conductor.But the 1st flat board 73 needs not be nontransparent member, can be transparent component.
In addition, the 1st flat board 73, identical with the flat board 61 of first embodiment, relatively flat support member 75 such being fixed of hanging down is so that the imaginary line that blocking is extended from lower end edge+directions X of gap nozzle 41.This flat support member 75 is to be the square rod shape insulating component of length direction with the Y direction, be fixedly installed on gap nozzle 41+the X side.
In addition, in the 7th embodiment, distinguish mutually with the 1st flat board 73, the 2nd flat board 74 that constitutes by conductor with the 1st dull and stereotyped 73 same sizes be configured in the 1st flat board 73-X side (rear side of advancing of gap nozzle 41 in the coating processing procedure).The length direction of the 2nd flat board 74 is along Y direction and for making the height of its lower end and the 1st dull and stereotyped 73 lower ends roughly the same, such being fixed of hanging down of the 2nd flat board 74 relative flat support members 75.Thus, the 1st dull and stereotyped the 73 and the 2nd flat board 74 is disposing along Y direction parallel to each other across insulating component.
As shown in figure 17, the 1st dull and stereotyped the 73 and the 2nd flat board 74 becomes the part of circuit 76, has added DC voltage (potential difference) between the 1st dull and stereotyped the 73 and the 2nd flat board 74.In addition, be provided with relay circuit 77 in the circuit 76, this relay circuit 77 for cutting out, is unlatching at the contact condition of the 1st dull and stereotyped the 73 and the 2nd flat board 74 at the contactless state of the 1st dull and stereotyped the 73 and the 2nd flat board 74.In other words, the 1st dull and stereotyped the 73 and the 2nd flat board 74 has the open/close switching member effect of transfer relay circuit 77.
The ON/OFF of relay circuit 77 is imported into control part 8 as signal.Thus, control part 8 can electrical detection go out contacting/contactless state of the 1st flat board 73 and the 2nd flat board 74.
Shown in Figure 180, the 1st dull and stereotyped 73 and the contactless state of object to be detected NG, the 1st dull and stereotyped 73 can not contact with the 2nd flat board 74, is in the state that is disposed abreast, and relay circuit 77 is closed condition.On the contrary, as shown in figure 19, the 1st dull and stereotyped 73 when contact with object to be detected NG, and the 1st flat board 73 relative gap nozzles 41 relatively move, contact with the 2nd flat board 74 to-X side.And by this contact, relay circuit 77 becomes opening, and it is imported into control part 8 as signal.Thus, control part 8 can detect relatively moving of flat board 73, can judge to have object to be detected NG.
In the 7th embodiment, because laser of no use, so do not need the operation of strict configuration light-projecting portion 63 and light accepting part 64 etc., so just can easily detect relatively moving of flat board 73 with simple relatively structure.
In addition, in the 7th embodiment, also can adopt the inflexibility member identical as the 1st flat board 73 with the 4th embodiment.But, damaged possibility takes place when contacting with object to be detected NG in order to reduce, the 1st flat board 73 preferably has pliability.In addition, the 2nd flat board 74 can be any one in pliability/inflexibility, but preferably has pliability based on same reason.
5. other variation
In the above-mentioned embodiment, though the flat board 61,65,73 that has used long chi shape as the member that is used for contacting with object to be detected NG, also can use the members such as qin line that for example can give along the tension force of Y direction extension.
In addition, in above-mentioned first, second and the 4th embodiment, though laser is to dull and stereotyped 61,65 rear irradiation, also can to as dull and stereotyped 61,65 original position irradiating lasers before relatively moving, based on relatively moving of the rising detection flat board 61,65 of laser light income.In other words, as long as because can be by dull and stereotyped 61,65 relatively moving, the blocking state (laser light income) that changes laser get final product, so so long as the mobile alignment of the flat board 61,65 during the relatively moving of flat board 61,65, just can be to any position irradiating laser.
In addition, identical with the 6th embodiment in the first～the 4th and the 7th above-mentioned embodiment, flat board can be by separate and can constitute to-a plurality of partial component that the X side relatively moves.
In addition, above-mentioned foreign matter test section 6 also can use in the lump with other the foreign matter testing agency by laser detection object to be detected NG etc.
Claims (3)
1. a substrate board treatment is coated in treatment fluid on the substrate of the maintenance face of being held in, and it is characterized in that having:
Nozzle, it can be from spraying treatment fluid along the slit-shaped ejiction opening that extends with the 1st direction of above-mentioned maintenance face almost parallel to aforesaid substrate;
Travel mechanism, it moves in the 2nd direction with respect to aforesaid substrate by making said nozzle, and said nozzle sprays scanning with respect to aforesaid substrate, above-mentioned the 2nd direction and above-mentioned maintenance face almost parallel and perpendicular to above-mentioned the 1st direction;
Detect and use member, it is with respect to said nozzle, the front side that the said nozzle that relative fixed scans in above-mentioned ejection is advanced, and it extends along above-mentioned the 1st direction;
Testing agency, it detects above-mentioned detection relatively moving with member, above-mentioned detection with relatively moving of member be in above-mentioned ejection scanning process by object to be detected and above-mentioned detection with member contact produce, and be with respect to said nozzle relatively moving to the rear side opposite with above-mentioned front side
Above-mentioned testing agency has the rate of travel of member is used in detection with respect to the above-mentioned detection of said nozzle displacement meter.
2. as the substrate board treatment of claim 1 record, it is characterized in that above-mentioned testing agency possesses a plurality of above-mentioned displacement meters, a plurality of above-mentioned displacement meters are configured in above-mentioned detection respectively with on a plurality of positions of member in above-mentioned the 1st direction.
3. as the substrate board treatment of claim 2 record, it is characterized in that, above-mentioned detection is arranged along above-mentioned the 1st direction with member, and, by separate and can constitute to a plurality of partial component that above-mentioned rear side relatively moves with respect to said nozzle, a plurality of above-mentioned displacement meters are configured in respectively on above-mentioned a plurality of partial component.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004-291299 | 2004-10-04 | ||
| JP2004291299 | 2004-10-04 | ||
| JP2004291299A JP4490779B2 (en) | 2004-10-04 | 2004-10-04 | Substrate processing equipment |
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| Publication Number | Publication Date |
|---|---|
| CN1757440A CN1757440A (en) | 2006-04-12 |
| CN1757440B true CN1757440B (en) | 2011-05-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005101068318A Active CN1757440B (en) | 2004-10-04 | 2005-09-23 | Substrate processing device |
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| JP (1) | JP4490779B2 (en) |
| KR (1) | KR100658460B1 (en) |
| CN (1) | CN1757440B (en) |
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| CN107398396A (en) * | 2017-08-24 | 2017-11-28 | 武汉华星光电技术有限公司 | The apparatus for coating and coating method of photoresist |
| CN109701960B (en) * | 2018-12-28 | 2021-07-27 | 惠科股份有限公司 | Substrate cleaning apparatus and cleaning method |
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| CN1406156A (en) * | 2000-12-27 | 2003-03-26 | 东丽株式会社 | Mouthpiece and device and method for applying coating fluid |
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| JPS63212690A (en) * | 1987-02-27 | 1988-09-05 | 株式会社東芝 | Safety device for escalator or moving walk |
| JP3380321B2 (en) * | 1994-02-16 | 2003-02-24 | 富士写真フイルム株式会社 | Surface inspection equipment |
| KR20000000515U (en) * | 1998-06-11 | 2000-01-15 | 김영환 | Coating device for liquid crystal display device with foreign material detection function |
| JP3653688B2 (en) * | 1998-07-10 | 2005-06-02 | 平田機工株式会社 | Slit coat type coating device and slit coat type coating method |
| JP4325084B2 (en) * | 2000-06-19 | 2009-09-02 | 東レ株式会社 | Coating method and color filter manufacturing method using the same |
| JP3696164B2 (en) | 2002-02-08 | 2005-09-14 | 株式会社東芝 | Liquid film processing method and liquid film processing apparatus |
| JP4342147B2 (en) * | 2002-05-01 | 2009-10-14 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| KR100958256B1 (en) * | 2003-12-18 | 2010-05-17 | 엘지디스플레이 주식회사 | Coater |
| JP2005236152A (en) * | 2004-02-23 | 2005-09-02 | Tokyo Electron Ltd | Substrate processing apparatus |
| KR101074952B1 (en) * | 2004-08-31 | 2011-10-18 | 엘지디스플레이 주식회사 | Coating device of photoresist and coating method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1406156A (en) * | 2000-12-27 | 2003-03-26 | 东丽株式会社 | Mouthpiece and device and method for applying coating fluid |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2006102609A (en) | 2006-04-20 |
| CN1757440A (en) | 2006-04-12 |
| KR100658460B1 (en) | 2006-12-15 |
| KR20060051901A (en) | 2006-05-19 |
| JP4490779B2 (en) | 2010-06-30 |
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