CN1701440A - 节约成本的高频包装 - Google Patents

节约成本的高频包装 Download PDF

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CN1701440A
CN1701440A CNA2004800008421A CN200480000842A CN1701440A CN 1701440 A CN1701440 A CN 1701440A CN A2004800008421 A CNA2004800008421 A CN A2004800008421A CN 200480000842 A CN200480000842 A CN 200480000842A CN 1701440 A CN1701440 A CN 1701440A
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G·施梅塔
K·魏德纳
J·查普夫
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Abstract

为了生成一种高频包装,一个元器件通过触点与一个电路载体相连,这些触点将所述元器件相对于电路载体间隔开,在元器件和电路载体上涂覆一层薄膜,并且这层薄膜被金属喷镀。

Description

节约成本的高频包装
通常的、密封的、用于模块的高频包装最主要由被铣削的金属壳体构成,该壳体被镀金并且接下来用一个被钎焊的金属壳进行封闭。密封的单个元器件-陶瓷壳体、例如其用于OFW-元器件同样花费巨大,并且对于损耗功率较大的元器件来说越来越不适用了。
当不需要密封性而是需要一种良好的屏蔽时,普通的HF-金属壳体非常贵、非常大并且不再气密地密封,如其经常应用于模块那样。
同样昂贵的是基于最新的LTCC-技术(低温共烧陶瓷技术)的HF-模块壳体。在此,陶瓷只是在盖子被钎焊时用于线路安装。
典型的基于HTCC-技术(高温共烧陶瓷技术)的OFW-过滤器壳体被滚子接缝焊接,并且直到约5GHz对于元器件来说可没有大的耗损功率地被使用。盖子焊接当然比较复杂,并且壳体只是可以应用于一个限定的频率范围。
现有的、密封的CSP-壳体由于在高频范围内将要用到的金-锡-钎焊盖子同样是昂贵的。
DE 100 41 770 A1中公开了一种具有一个第一电介质层、一个高频结构层和至少一个低频结构层的基底,其中高频结构层包括一个高频-配电系统。一个由此而形成的模块还包括一个盖子。
WO 97/45955 A1、WO 99/43084 A1、DE 195 48 048 A1和DE 19818 824 A1中公开了位于电路载体上的电子元器件,这些电子元器件利用盖子、特别是以薄膜的方式被覆盖。此处所用的金属薄膜用手工操作非常困难,并且经常不能被证明为是长期稳定的。
由这一点出发,本发明的任务是给出一个节约成本的用于制造高频包装的方法。
这个任务通过在独立权利要求中给定的发明来解决。有利的方案在从属权利要求中得出。
与此对应,一个电路载体与一个元器件通过触点相连,这些触点将元器件相对于电路载体隔开,从而在元器件、电路载体和触点之间形成空心空间。在该元器件和电路载体上涂覆一层薄膜,使得该薄膜紧紧地贴靠在电路载体(所述元器件位于该电路载体上)的上表面上,并且紧紧地贴靠在元器件的不是面对电路载体的侧面上。在将薄膜涂覆到元器件和电路载体上后,薄膜设置一个金属喷镀涂层。
该金属喷镀涂层最好通过溅射或者蒸镀来涂覆,并且接下来加强电流。
在薄膜中可以在元器件的背对电路载体的侧面上打开一个窗口,通过该窗口可以接触元器件。窗口的打开在薄膜被金属化之前进行,因此触点可以同样通过所述金属喷镀涂层制造出来。
在一个特别精心描述的本发明的改进方案中,一个钎焊凸缘(Lot-bump)设置在电路载体的侧面上,在该侧面上装配有元器件。这个钎焊凸缘如此超出元器件:该钎焊凸缘从电路载体看去比元器件要高。由此,通过电路载体、元器件、薄膜和薄膜的金属喷镀涂层构成的包装在侧面(在该侧面上在电路载体上设置元器件)通过钎焊凸缘例如与另一个电路载体电连接。
元器件特别是一个有源元器件、一个高频元器件和/或一个超高频元器件。
在元器件之外,在电路载体上还设置一个或者多个无源的元器件。该无源的元器件最好设置在电路载体的与元器件对置的侧面上。
本发明其它的优点和特征借助于附图从对实施例的说明中得出。附图示出:
图1是一个单面装备的电路载体的视图,该电路载体具有位于电路载体背面上的丝网印刷的钎焊凸缘;
图2是一个双面装备的电路载体的视图,该电路载体具有位于电路载体前面的、被安放的钎焊头或者钎焊凸缘以及一个位于电路载体后面的、安装在上表面处的无源元器件。
包装的过程在凹槽里进行,并且可以例如如下文中实施的那样进行。与本发明的通用性相对应,在过程链中可以作很多的改动。
元器件1以芯片的形式被隆起,并且被印刷的触点2以钎焊凸缘的形式被包围熔化。另一种方案中,一个电路载体3也被隆起。
元器件1单独地、翻转地以触点2浸渍在熔剂中,并且放置在例如用陶瓷制成的电路载体3的连接垫上。此处,在元器件1、触点2和电路载体3之间生成一个空心空间4。
接着将一个薄膜5完全平坦地层压在元器件1上,并且在接触位置处以及在模块边缘(锯齿痕迹)处例如借助于激光进行平整。
薄膜5通过完全平坦的涂层例如借助于铜-溅射设置一个金属喷镀涂层6,该金属喷镀必要时加强电流。
最好在电路载体3上以在陶瓷上进行金属喷镀涂层的方式围绕一个或者多个框架12,在这些框架处薄膜5被平整。在此,通过元器件1张紧的金属屏蔽层以金属喷镀涂层6的方式直接与电路载体3相连。由此形成了一种密封的包装。
因为触点2以凸缘的形式在空心空间4中被空气包围,也就是在触点2之间的绝缘常数约为1,因此可以使用直到超高频技术的技术。具有高的损耗功率的元器件、例如GaAs-芯片(砷化镓芯片)可以在其被安放之前被磨细。可以借助于激光或者类似方式在薄膜5内在元器件1背对电路载体3的侧面上暴露地切削出窗口7,使得铜-喷镀涂层6直接在元器件上表面上被接触。因此,热量导出不会被薄膜5阻止。元器件基底背面的接地连接可以以相同的方式来实现。
在按照图1的实施方式中,在电路载体3的与元器件1对置的侧面上以一个钎焊凸缘的方式设置一个接触元件8。
在按照图2的实施方式中,在电路载体3的与元器件1对置的侧面上设置一个无源的元器件9并且以钎料10来钎焊。
此外,在电路载体3的侧面(在该侧面上存在元器件1)上以一个钎焊凸缘的方式设置一个接触元件11,该接触元件在电路载体3的上表面上高出具有触点2的元器件1。
所示的变型方案只是说明了优选的实施方式。作为元器件例如Si芯片或者GaAs-芯片也可以进行混合装备。LTCC-陶瓷用作电路载体的基底得到了考验,其它的具有尽可能微小的延伸系数的陶瓷、如HTCC或者Al2O3或者如FR5的有机基底同样可以考虑使用。按照图1的实施方式例如通过一种填料是有取置能力的(pick & place-faehig),这可以实现一种节约成本的装备。
如果芯片必须通过引线结合法来接触,那么芯片可以或者设置在背面或者也用一个安全罩安装在屏蔽薄膜5下边。
本发明所有的实施方式说明了以下优点:
-超高频能力(>20GHz),因为没有不充满的(在所述凸缘之间ε=1)、短的、恒定长度的信号传输时间(倒装芯片代替引线结合器),
-密封的密封性和ESD-屏蔽在制造成本非常小的情况下使用,
-元器件可以散热、例如通过运用冷却体,
-通用性:可以与HTCC-技术和LTCC-技术结合的不同的元器件载体和电路载体、SMD元器件也可以例如安装在电路载体背面上,
-易于与不同的包装类型匹配。

Claims (9)

1.一种方法,其中
-一个电路载体(3)与一个元器件(1)通过触点(2)相连,该触点将元器件(1)相对于电路载体(3)间隔开,
-一个薄膜(5)涂覆在元器件(1)和电路载体(3)上,
-薄膜(5)被金属喷镀。
2.按照权利要求1所述的方法,其中薄膜(5)的金属喷镀涂层(6)加强电流。
3.按照前述权利要求中任意一项所述的方法,其中在所述薄膜(5)中、在元器件(1)的背对电路载体(3)的侧面上打开一个窗口(7)。
4.按照前述权利要求中任意一项所述的方法,其中在电路载体(3)上安装一个接触元件(8,11)、特别是一个钎焊凸缘。
5.按照权利要求4所述的方法,其中在电路载体(3)的布置元器件(1)的侧面上设置一个接触元件(11)并且超出元器件(1)。
6.按照前述权利要求中任意一项所述的方法,其中元器件(1)是一个高频元器件、特别是一个超高频元器件。
7.按照前述权利要求中任意一项所述的方法,其中在电路载体(3)上设置一个无源的元器件(9)。
8.按照权利要求7所述的方法,其中无源的元器件(9)设置在电路载体(3)的与元器件(1)对置的侧面上。
9.按照权利要求1至8中任意一项所述的方法生产出来的高频包装。
CNB2004800008421A 2003-06-30 2004-06-29 节约成本的高频包装 Expired - Fee Related CN100382306C (zh)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105702664A (zh) * 2012-11-16 2016-06-22 日月光半导体制造股份有限公司 半导体封装构造及其制造方法
CN106816420A (zh) * 2015-11-30 2017-06-09 讯芯电子科技(中山)有限公司 一种声波元件封装结构及其制造方法
CN107275241A (zh) * 2013-02-27 2017-10-20 日月光半导体制造股份有限公司 具有热增强型共形屏蔽的半导体封装及相关方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100691160B1 (ko) * 2005-05-06 2007-03-09 삼성전기주식회사 적층형 표면탄성파 패키지 및 그 제조방법
KR100703090B1 (ko) * 2005-08-30 2007-04-06 삼성전기주식회사 후면 접지형 플립칩 반도체 패키지
DE102006025162B3 (de) 2006-05-30 2008-01-31 Epcos Ag Flip-Chip-Bauelement und Verfahren zur Herstellung
DE102010054782A1 (de) * 2010-12-16 2012-06-21 Epcos Ag Gehäustes elektrisches Bauelement
JP5799541B2 (ja) 2011-03-25 2015-10-28 株式会社ソシオネクスト 半導体装置及びその製造方法
FR2984882A1 (fr) 2011-12-23 2013-06-28 Saint Gobain Ct Recherches Procede de fabrication d'un produit mesoporeux.
KR101356791B1 (ko) * 2012-01-20 2014-01-27 한국과학기술원 박막형 수퍼커패시터 및 그의 제조 방법
US10542630B2 (en) 2014-06-23 2020-01-21 Tdk Corporation Housing for an electric component, and method for producing a housing for an electric component
US10741501B1 (en) * 2018-10-22 2020-08-11 Keysight Technologies, Inc. Systems and methods for sheathing electronic components

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4967262A (en) * 1989-11-06 1990-10-30 Micron Technology, Inc. Gull-wing zig-zag inline lead package having end-of-package anchoring pins
US6274391B1 (en) * 1992-10-26 2001-08-14 Texas Instruments Incorporated HDI land grid array packaged device having electrical and optical interconnects
US5477082A (en) * 1994-01-11 1995-12-19 Exponential Technology, Inc. Bi-planar multi-chip module
US5639989A (en) * 1994-04-19 1997-06-17 Motorola Inc. Shielded electronic component assembly and method for making the same
FR2728392A1 (fr) * 1994-12-16 1996-06-21 Bull Sa Procede et support de connexion d'un circuit integre a un autre support par l'intermediaire de boules
DE69621983T2 (de) * 1995-04-07 2002-11-21 Shinko Electric Industries Co., Ltd. Struktur und Verfahren zur Montage eines Halbleiterchips
DE19548048C2 (de) * 1995-12-21 1998-01-15 Siemens Matsushita Components Elektronisches Bauelement, insbesondere mit akustischen Oberflächenwellen arbeitendes Bauelement (OFW-Bauelement)
DE59704079D1 (de) * 1996-05-24 2001-08-23 Epcos Ag Elektronisches bauelement, insbesondere mit akustischen oberflächenwellen arbeitendes bauelement - ofw-bauelement
US5899705A (en) * 1997-11-20 1999-05-04 Akram; Salman Stacked leads-over chip multi-chip module
DE19806818C1 (de) * 1998-02-18 1999-11-04 Siemens Matsushita Components Verfahren zur Herstellung eines elektronischen Bauelements, insbesondere eines mit akustischen Oberflächenwllen arbeitenden OFW-Bauelements
DE19818824B4 (de) * 1998-04-27 2008-07-31 Epcos Ag Elektronisches Bauelement und Verfahren zu dessen Herstellung
FR2799883B1 (fr) * 1999-10-15 2003-05-30 Thomson Csf Procede d'encapsulation de composants electroniques
DE10002852A1 (de) * 2000-01-24 2001-08-02 Infineon Technologies Ag Abschirmeinrichtung und elektrisches Bauteil mit einer Abschirmeinrichtung
DE10016867A1 (de) * 2000-04-05 2001-10-18 Epcos Ag Bauelement mit Beschriftung
TW445612B (en) * 2000-08-03 2001-07-11 Siliconware Precision Industries Co Ltd Solder ball array structure to control the degree of collapsing
DE10136743B4 (de) * 2001-07-27 2013-02-14 Epcos Ag Verfahren zur hermetischen Verkapselung eines Bauelementes
DE10142542A1 (de) * 2001-08-30 2003-03-27 Infineon Technologies Ag Anordnung eines Halbleiterchips in einem Gehäuse, Chipkarte und Chipmodul
DE10164502B4 (de) * 2001-12-28 2013-07-04 Epcos Ag Verfahren zur hermetischen Verkapselung eines Bauelements
TW517368B (en) * 2002-01-22 2003-01-11 Via Tech Inc Manufacturing method of the passivation metal on the surface of integrated circuit
DE10256945A1 (de) * 2002-12-05 2004-06-17 Epcos Ag Elektronisches Bauelement mit mehreren Chips und Verfahren zur Herstellung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105702664A (zh) * 2012-11-16 2016-06-22 日月光半导体制造股份有限公司 半导体封装构造及其制造方法
CN107275241A (zh) * 2013-02-27 2017-10-20 日月光半导体制造股份有限公司 具有热增强型共形屏蔽的半导体封装及相关方法
CN107275241B (zh) * 2013-02-27 2020-05-19 日月光半导体制造股份有限公司 具有热增强型共形屏蔽的半导体封装及相关方法
CN106816420A (zh) * 2015-11-30 2017-06-09 讯芯电子科技(中山)有限公司 一种声波元件封装结构及其制造方法

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WO2005001934A3 (de) 2005-05-12
EP1639642A2 (de) 2006-03-29
KR100697434B1 (ko) 2007-03-20
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WO2005001934A2 (de) 2005-01-06
CN100382306C (zh) 2008-04-16

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