CN1466206A - 球栅阵列半导体封装件 - Google Patents

球栅阵列半导体封装件 Download PDF

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CN1466206A
CN1466206A CNA021231923A CN02123192A CN1466206A CN 1466206 A CN1466206 A CN 1466206A CN A021231923 A CNA021231923 A CN A021231923A CN 02123192 A CN02123192 A CN 02123192A CN 1466206 A CN1466206 A CN 1466206A
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substrate
power supply
pad
chip
ground
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CN1303685C (zh
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黄建屏
何俊吉
黄致明
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Siliconware Precision Industries Co Ltd
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Abstract

一种球栅阵列半导体封装件,接置至少一芯片于一基板上,并形成多条焊线用以电性连接该芯片的信号焊垫至该基板的信号焊线垫,并以导电性黏胶粘接一电源片及一接地片的两端分别于该芯片及该基板上的预定位置处,且该电源片及接地片以不影响焊线布设方式。由于基板上无需设置电源环及接地环,减少基板上布局的限制,并仅形成有连接信号焊垫至信号焊线垫的焊线,使焊线间发生短路的机率降低,产品优良率提高。此外,电源片及接地片亦提供屏蔽功能,使芯片免受外界的电磁干扰,有助于提升封装件的性能。电源片及接地片的顶面外露,使封装件的散热效率获得有效改善。

Description

球栅阵列半导体封装件
技术领域
本发明是关于一种半导体封装件,特别是关于一种得以增加电性及散热效率的球栅阵列(Ball Grid Array,BGA)半导体封装件。
背景技术
封装产品主流之一,球栅阵列式(Ball Grid Array,BGA)半导体封装件,其特征在于基板底面上植布多条以数组方式排列的焊球,使得相同单位面积内设有较多的输入/出连接端(I/O Connection),可适应高密度电子组件(Electronic Component)及电子电路(Electronic Circuit)的半导体芯片所需,以符合电子产品对于电性功能与处理速度的需求。植接于基板上的焊球用以连接封装件至外界装置如印刷电路板(PrintedCircuit Board,PCB)等,以供芯片与外界装置电性连接,因此需要提供封装件的接地(Ground)、电源(Power)及信号(Signal)传导等功能。因此,在结构设计上,基板上设置有相对应的机制分别与该不同作用的焊球电性连通,以期达到封装件内部组件运作上预期的功效。
有鉴于此,美国专利第5,581,122、5,545,923及5,726,860号发明于基板上设置有接地环(Ground Ring)、电源环(Power Ring)及信号焊线垫(Signal Finger)的设计。如附图5及附图6所示的半导体结构中,于一基板10上表面100的芯片接置区101以外的区域布设有一接地环11、一电源环12及多条信号焊线垫13。接置一芯片14于该芯片接置区101后,遂进行打线(Wire Bonding)作业,以形成多条接地线(GroundWire)15、电源线(Power Wire)16及信号线(Signal Wire)17;接地线15是连接该芯片14上的该焊垫140至接地环11,电源线16连接该焊垫140至电源环12,信号线17则连接该焊垫140至信号焊线垫13。之后,在后续制造过程中,植接多个焊球18于基板10的下表面102上,并经由导电迹线19使焊球18与该接地环11、电源环12及信号焊线垫13电性连通,如此就能与外界装置(未图标)电性相通而使芯片14得以进行运作。须知,图标仅为说明之用,故皆为简化的结构,实际上的结构则精密复杂许多。
然而上述半导体结构的设计却有诸多缺点。首先,接地环及电源环的设置占据基板面积造成基板上布局(Routability)的限制,不利于高密度输入/出连接端的设置及芯片高度集成化的发展,且基板尺寸无法进一步缩减,故不符合半导体结构轻薄短小的要求。再者,为减少信号的噪声,现有半导体结构通常还在基板上设计有去耦装置(Decoupling Pad)(未图标),以供安置电容器(Capacitor)(未图标)用以减少噪声,如此则更限制基板上的布局。此外,需形成众多接地线、电源线及信号线,进一步增加制造过程的复杂性,如附图6所示,该焊线以多层布设,故需精确控制不同层之间焊线线弧(Loop)的高度,无疑使制造过程的困难提高,且多层的焊线会造成模压(Molding)作业的困难,于模压注胶时,模流(Mold Flow)冲击力(Impact)极可能导致焊线间彼此触碰而发生短路(Short)现象,这会严重影响产品的优良率。
因此,如何有效解决上述缺陷,开发出一种高电性且不增加基板上布局限制并确保制成品优良率的半导体装置,实为一个需要探讨的课题。
发明内容
本发明的一目的在于提供一种不需设置电源环及接地环的球栅阵列半导体封装件。
本发明的另一目的在于提供一种不需布设电源线及接地线的球栅阵列半导体封装件。
本发明的再一目的在于提供一种不会增加基板上布局限制的球栅阵列半导体封装件。
本发明的又一目的在于提供一种得以增加散热效率并具屏蔽功能的球栅阵列半导体封装件。
为达成上述及其它目的,发明了一种球栅阵列半导体封装件。该半导体封装件是包括:一基板,具有一第一表面与一相对的第二表面,于该基板的第一表面上界定有一芯片接置区,于该芯片接置区周围布设有多条信号焊线垫(Signal Finger),并于该信号焊线垫外的区域形成有一电源片接置区及一接地片接置区分别位于该基板的两侧;至少一芯片,具有一作用表面(Active Surface)与一相对的非作用表面(Non-active Surface),于该芯片作用表面上的周围位置处布设有多条信号焊垫(Signal Pad)、电源焊垫(Power Pad)及接地焊垫(Ground Pad),并于该作用表面上没有布设焊垫的区域形成有一电源层(Power Plane)及一接地层(Ground Plane),该电源焊垫是整合(Consolidate)并电性连通至该电源层,且该接地焊垫是整合并电性连通至该接地层,同时,该芯片的非作用表面是粘接于该基板的芯片接置区上,使该芯片上的电源层及接地层分别朝向该基板的电源片接置区及接地片接置区;多条焊线,用以电性连接该芯片的信号焊垫至该基板第一表面上的信号焊线垫;一电源片(Power Plate),其一端粘接于该芯片的电源层,另一端粘接至该基板的电源片接置区,且该电源片以不影响该焊线布设的方式设置;一接地片(Ground Plate),其一端粘接于该芯片的接地层,另一端粘接至该基板的接地片接置区,且该接地片以不影响该焊线布设的方式设置;一封装胶体,形成于该基板的第一表面上,用以包覆该芯片、该焊线、该电源片及该接地片;以及多个焊球,植接于该基板第二表面上。
其中,该基板的第二表面上预定位置处形成有多条信号焊球垫(Signal Ball Pad)、电源焊球垫(Power Ball Pad)及接地焊球垫(GroundBall Pad),并该基板形成有多条贯穿该基板的通孔(Via),该通孔用以使该信号焊球垫与该基板第一表面上的信号焊线垫电性连通,且使该电源焊球垫及接地焊球垫分别与该基板第一表面上的电源片接置区及接地片接置区电性连通;而该焊球则植接于该基板第二表面的该信号焊球垫、电源焊球垫及接地焊球垫上。再者,该芯片作用表面上的电源焊垫及接地焊垫以重配(Re-distribution)方式形成有多条引线,该引线用以使该电源焊垫及接地焊垫分别电性连通至该电源层及接地层。
以金属材质制成的电源片,形成有一突出部(Protruding Portion)、一平坦部(Flat Portion)及一支撑部(Supporting Portion),该突出部是以导电性黏胶如银胶粘接于该芯片的电源层,该支撑部亦以导电性黏胶粘接于该基板的电源片接置区,使该平坦部为该突出部及支撑部所支撑于该芯片上方而不影响该焊线的布设。同理,该接地片亦得以金属材质制成,并以导电性黏胶粘接于该芯片及基板上,其中,该接地片亦形成有一突出部、一平坦部及一支撑部,该突出部粘接于该芯片的接地层,该支撑部粘接于该基板的接地片接置区,使该平坦部为该突出部及支撑部所支撑于该芯片上方而不影响该焊线的布设。
在上述的结构中,采用电源片及接地片的方式以取代现有封装件布设的电源线及接地线,具有诸多优点。首先,基板上无需设置用以分别连接电源线及接地线的电源环及接地环,因电源环及接地环占据基板而限制基板上布局(Routability)的缺点得以克服。再者,无需布设电源线及接地线,而仅形成有连接信号焊垫至信号焊线垫的焊线,故在模压时焊线间发生短路(Short)的机率得以降低,并使制造过程简化,提高产品的优良率。此外,电源片及接地片还可提供屏蔽(Shielding)功能,使芯片免受外界的电磁干扰(Electric Magnetic Interference,EMI),有助于提升半导体封装件的性能。
另一方面,该电源片平坦部的顶面得与该接地片平坦部的顶面呈共平面方式设置,使该电源片的顶面与该接地片的顶面外露出该封装胶体。此种设计则有助于借由外露的电源片及接地片表面排除芯片所产生的热能,故得以有效增进封装件的散热效率。
附图说明
为让本发明的上述和其它目的、特征以及优点能更明显易懂,将与较佳实施例,并配合附图,详细说明本发明的实施例,附图的内容简述如下:
附图1是本发明半导体封装件的第一实施例的剖视图;
附图2A是本发明半导体封装件的芯片的上视图;
附图2B是附图2A沿2B-2B线切开的局部剖视图;
附图3A至附图3F是显示本发明半导体封装件的第一实施例的制造过程剖面示意图;
附图4是本发明半导体封装件的第二实施例的剖视图;
附图5是一现有半导体结构的剖视图;以及
附图6是附图5半导体结构的局部上视图。
符号说明
1半导体结构      10基板
100上表面        101芯片接置区
102下表面        11接地环
12电源环         13信号焊线垫
14芯片           140焊垫
15接地线         16电源线
17信号线         18焊球
19导电迹线
2半导体封装件    20基板
200第一表面      201第二表面
202芯片接置区    203信号焊线垫
204电源片接置区  205接地片接置区
206信号焊球垫    207电源焊球垫
208接地焊球垫    209拒焊剂层
21芯片           210作用表面
211非作用表面    212信号焊垫
213电源焊垫      214接地焊垫
215电源层        216接地层
217引线          218隔层
219隔层          22焊线
23电源片         230突出部
231平坦部        232支撑部
24接地片         240突出部
241平坦部        242支撑部
25封装胶体       26S信号焊球
26P电源焊球      26G接地焊球
27通孔           28导电性黏胶
3半导体封装件    30电源片
300平坦部        301顶面
31接地片         310平坦部
311顶面          32封装胶体  33芯片
具体实施方式
实施例1
如附图1所示为本发明的球栅阵列半导体封装件2;附图2A所示为本发明半导体封装件2所使用的芯片21。如图所示,该半导体封装件2是包括:一基板20,具有一第一表面200与一相对的第二表面201,于该基板20的第一表面200上界定有一芯片接置区202,于该芯片接置区202周围布设有多条信号焊线垫(Signal Finger)203,并于该信号焊线垫203外的区域形成有一电源片接置区204及一接地片接置区205分别位于该基板20的两侧;至少一芯片21,具有一作用表面(ActiveSurface)210与一相对的非作用表面(Non-active Surface)211,于该芯片21作用表面210上的周围位置处,布设有多条信号焊垫(Signal Pad)212、电源焊垫(Power Pad)213及接地焊垫(Ground Pad)214,并于该作用表面210上没有布设焊垫的区域形成有一电源层(Power Plane)215及一接地层(Ground Plane)216,该电源焊垫213是整合(Consolidate)并电性连通至该电源层215,且该接地焊垫214是整合并电性连通至该接地层216,同时,该芯片21的非作用表面211是粘接于该基板20的芯片接置区202上,使该芯片21上的电源层215及接地层216分别朝向该基板20的电源片接置区204及接地片接置区205;多条焊线22,用以电性连接该芯片21的信号焊垫212至该基板20第一表面200上的信号焊线垫203;一电源片(Power Plate)23,其一端粘接于该芯片21的电源层215,另一端粘接至该基板20的电源片接置区204,且该电源片23以不影响该焊线22布设的方式设置;一接地片(Ground Plate)24,其一端粘接于该芯片21的接地层216,另一端粘接至该基板20的接地片接置区205,且该接地片24以不影响该焊线22布设的方式设置;一封装胶体25,形成于该基板20的第一表面200上,用以包覆该芯片21、该焊线22、该电源片23及该接地片24;以及多条信号焊球26S、电源焊球26P及接地焊球26G,植接于该基板20的第二表面201上。
上述球栅阵列半导体封装件2是如附图3A至附图3F所示的步骤而制得。首先,如附图3A所示,制备一具有一作用表面210与一相对的非作用表面211的芯片21。如附图2A所示,于该芯片21作用表面210上的周围位置处布设有多条信号焊垫212、电源焊垫213及接地焊垫214。由于此焊垫的制法均采用现有技术,故于此不予以赘述。须知,图标焊垫的数目仅为简化说明而设,焊垫数目应视实际需要而设置。
如附图3B及附图2A所示,于该芯片21作用表面210上的电源焊垫213以重配(Re-distribution)方式形成有多条引线217,用以使该电源焊垫213经由该引线217整合并电性连通至一电源层215,同时,该接地焊垫214亦以重配方式形成的引线217而整合并电性连通至一接地层216。此述的重配技术,如附图2B所示,于外露出隔层(PassivatingFilm)218的电源焊垫213上以导电性材质如铝(Aluminum)或铜(Copper)形成引线217,还在引线217上涂布一绝缘性物质如氧化硅(SiliconOxide)或氮化硅(Silicon Nitride)以形成另一隔层219,并去除部分隔层219,以外露出部分引线217,所有电源焊垫213的引线217外露部分则整合形成电源层215。同理,接地层216亦以如附图2B所示的方式形成,故于此不予以赘述。
如附图3C所示,制备一具有一第一表面200与一相对的第二表面201的基板20,于该基板20的第一表面200上界定有一芯片接置区202,于该芯片接置区202周围布设有多条信号焊线垫203,并于该信号焊线垫203外的区域形成有一电源片接置区204及一接地片接置区205分别位于该基板20的两侧。该基板20的第二表面201上预定位置处形成有多条信号焊球垫(Signal Ball Pad)206、电源焊球垫(Power BallPad)207及接地焊球垫(Ground Ball Pad)208,其中,该基板20的第二表面201上还涂布有一拒焊剂(Solder Mask)层209,用以保护该基板20的第二表面201,并使该焊球垫外露出该拒焊剂层209以供后续植球之用。又,该基板20形成有多个贯穿该基板的通孔(Via)27,该通孔27作用是使该信号焊球垫206与该基板20第一表面200上的信号焊线垫203电性连通,且使该电源焊球垫207及接地焊球垫208分别与该基板20第一表面200上的电源片接置区204及接地片接置区205电性连通。
如附图3D所示,粘接该芯片21的非作用表面211至该基板20的芯片接置区202上,使该芯片21上的电源层215及接地层216分别朝向该基板20的电源片接置区204及接地片接置区205。再进行焊线(Wire Bonding)作业,用以形成多条焊线22,如金线,使该芯片21的信号焊垫212电性连接至该基板20第一表面200上的信号焊线垫203。
如附图3E所示,以导电性黏胶28如银胶粘接一金属材质制成的电源片23的两端分别于该芯片21及基板20上。该电源片23形成有一突出部(Protruding Portion)230、一平坦部(Flat Portion)231及一支撑部(Supporting Portion)232,该突出部230是粘接于该芯片21的电源层215,而该支撑部232粘接于该基板20的电源片接置区204,使该平坦部231为该突出部230及支撑部232所支撑于该芯片21上方而不影响该焊线22的布设。同时,一金属材质制成的接地片24亦使用该导电性黏胶28粘接其两端分别于该芯片21及基板20上,其中,该接地片24亦形成有一突出部240、一平坦部241及一支撑部242,该突出部240粘接于该芯片21的接地层216,该支撑部242粘接于该基板20的接地片接置区205,使该平坦部241为该突出部240及支撑部242所支撑于该芯片21上方而不影响该焊线22的布设。然而,此电源片23及接地片24呈现的形状,并不受限于此实施例所述的形状,须知,任何其它可达到相同功能的形状,皆为本发明的范畴所涵盖。
如附图3F所示,进行模压(Molding)作业,使用一树脂化合物如环氧树脂(Epoxy Resin)于该基板20的第一表面200上形成一封装胶体25,以使该芯片21、该焊线22、该电源片23及该接地片24为该封装胶体25所包覆,从而免受外界水气或污染物质所侵害。然后,进行植球(Ball Implantation)作业,分别植接多条信号焊球26S、电源焊球26P及接地焊球26G于该基板20第二表面201的该信号焊球垫206、电源焊球垫207及接地焊球垫208上,此类焊球26的作用是使该芯片21得以与外界装置(未图标)电性连接。如此则完成本发明的半导体封装件2。由于模压与植球过程均为现有技术,故于此不予以赘述。
与现有半导体封装件相比较,本发明的特征在于采用电源片及接地片以取代现有封装件布设的电源线及接地线,其优点如下:首先,基板上无需设置用以分别连接电源线及接地线的电源环及接地环,因此电源环及接地环占据基板而限制基板上布局(Routability)的缺点得以屏除。再者,比较于现有技术所布设的电源线及接地线,电源片及接地片的设置在整个制造过程中较为简化,且本发明封装件中仅形成有连接信号焊垫至信号焊线垫的焊线,故在模压时焊线间发生短路(Short)的机率得以降低,使产品的优良率提高。此外,电源片及接地片还可提供屏蔽(Shielding)功能,使芯片免于受外界的电磁干扰(ElectricMagnetic Interference,EMI),有助于提升半导体封装件的性能。
实施例2
附图4所示为本发明半导体封装件的第二实施例。如图所示,本发明第二实施例的半导体封装件3是大致上与第一实施例的半导体封装件2相同,不同之处仅在于电源片30平坦部300的顶面301得与接地片31的平坦部310的顶面311呈共平面方式设置。在进行模压作业时,封装模具(未图标)的顶壁得直接压置于该电源片30的顶面301及接地片31的顶面311上,使该顶面301,311不为封装胶体32所包覆,故在封装胶体32形成后,该电源片30的顶面301及接地片31的顶面311得以外露出该封装胶体32。由于该电源片30及接地片31是以金属材质制成,此种顶面外露的设计,有助于使芯片33所产生的热量经由该电源片30及接地片31,以及其外露的顶面301,311而散逸至封装件3外,故有效增进该封装件3的散热效率。
以上所述,仅是用以说明本发明的具体实施例而已,并非用以限定本发明的可实施范围,在未脱离本发明权利要求书中所限定的精神与原理下完成的一切等效改变或修饰,皆属于本专利的保护范围之内。

Claims (20)

1.一种球栅阵列半导体封装件,其特征在于,该半导体封装件包括:
一基板,具有一第一表面与一相对的第二表面,于该基板的第一表面上界定有一芯片接置区,于该芯片接置区周围布设有多条信号焊线垫,并于该信号焊线垫外的区域形成有一电源片接置区及一接地片接置区分别位于该基板的两侧;
至少一芯片,具有一作用表面与一相对的非作用表面,于该芯片作用表面上的周围位置处,布设有多条信号焊垫、电源焊垫及接地焊垫,并于该作用表面上没有布设焊垫的区域形成有一电源层及一接地层,该电源焊垫是整合并电性连通至该电源层,且该接地焊垫是整合并电性连通至该接地层,同时,该芯片的非作用表面是粘接于该基板的芯片接置区上,使该芯片上的电源层及接地层分别朝向该基板的电源片接置区及接地片接置区;
多条焊线,用以电性连接该芯片的信号焊垫至该基板第一表面上的信号焊线垫;
一电源片,其一端粘接于该芯片的电源层,另一端粘接至该基板的电源片接置区,且该电源片以不影响该焊线布设的方式设置;
一接地片,其一端粘接于该芯片的接地层,另一端粘接至该基板的接地片接置区,且该接地片以不影响该焊线布设的方式设置;
一封装胶体,形成于该基板的第一表面上,用以包覆该芯片、该焊线、该电源片及该接地片;以及
多个焊球,植接于该基板的第二表面上。
2.如权利要求1所述的半导体封装件,其特征在于,该基板的第二表面上预定位置处形成有多条信号焊球垫、电源焊球垫及接地焊球垫,使该信号焊球垫与该基板第一表面上的信号焊线垫电性连通,且该电源焊球垫及接地焊球垫分别与该基板第一表面上的电源片接置区及接地片接置区电性连通。
3.如权利要求2所述的半导体封装件,其特征在于,该基板形成有多条贯穿基板的通孔,用以使该信号焊球垫、电源焊球垫及接地焊球垫分别与该信号焊线垫、该电源片接置区及接地片接置区电性连通。
4.如权利要求2所述的半导体封装件,其特征在于,该焊球植接于该基板第二表面的该信号焊球垫、电源焊球垫及接地焊球垫上。
5.如权利要求1所述的半导体封装件,其特征在于,该芯片作用表面上的电源焊垫及接地焊垫以重配方式形成有多条引线,该引线用以使该电源焊垫及接地焊垫分别整合并电性连通至该电源层及接地层。
6.如权利要求1所述的半导体封装件,其特征在于,该电源片是具有一突出部、一平坦部及一支撑部,该突出部粘接于该芯片的电源层,该支撑部粘接于该基板的电源片接置区,使该平坦部为该突出部及支撑部所支撑于该芯片上方而不影响该焊线的布设。
7.如权利要求1所述的半导体封装件,其特征在于,该电源片是以金属材质制成。
8.如权利要求1所述的半导体封装件,其特征在于,该电源片是以导电性黏胶粘接于该芯片及基板上。
9.如权利要求1所述的半导体封装件,其特征在于,该接地片是具有一突出部、一平坦部及一支撑部,该突出部粘接于该芯片的接地层,该支撑部粘接于该基板的接地片接置区,使该平坦部为该突出部及支撑部所支撑于该芯片上方而不影响该焊线的布设。
10.如权利要求1所述的半导体封装件,其特征在于,该接地片是以金属材质制成。
11.如权利要求1所述的半导体封装件,其特征在于,该接地片是以导电性黏胶粘接于该芯片及基板上。
12.一种球栅阵列半导体封装件,其特征在于,该半导体封装件包括:
一基板,具有一第一表面与一相对的第二表面,于该基板的第一表面上界定有一芯片接置区,于该芯片接置区周围布设有多条信号焊线垫,并于该信号焊线垫外的区域形成有一电源片接置区及一接地片接置区分别位于该基板的两侧;
至少一芯片,具有一作用表面与一相对的非作用表面,于该芯片作用表面上的周围位置处,布设有多条信号焊垫、电源焊垫及接地焊垫,并于该作用表面上没有布设焊垫的区域形成有一电源层及一接地层,该电源焊垫是整合并电性连通至该电源层,且该接地焊垫是整合并电性连通至该接地层,同时,该芯片的非作用表面是粘接于该基板的芯片接置区上,使该芯片上的电源层及接地层分别朝向该基板的电源片接置区及接地片接置区;
多条焊线,用以电性连接该芯片的信号焊垫至该基板第一表面上的信号焊线垫;
一电源片,具有一突出部、一平坦部及一支撑部,该突出部粘接于该芯片的电源层,该支撑部粘接于该基板的电源片接置区,使该平坦部为该突出部及支撑部所支撑于该芯片上方而不影响该焊线的布设;
一接地片,具有一突出部、一平坦部及一支撑部,该突出部粘接于该芯片的接地层,该支撑部粘接于该基板的接地片接置区,使该平坦部为该突出部及支撑部所支撑于该芯片上方而不影响该焊线的布设,并使该接地片平坦部的顶面是与该电源片平坦部的顶面呈共平面方式设置;
一封装胶体,形成于该基板的第一表面上,用以包覆该芯片、该焊线、该电源片及该接地片,使该接地片平坦部的顶面与该电源片平坦部的顶面外露出该封装胶体;以及
多个焊球,植接于该基板的第二表面上。
13.如权利要求12所述的半导体封装件,其特征在于,该基板的第二表面上预定位置处形成有多条信号焊球垫、电源焊球垫及接地焊球垫,使该信号焊球垫与该基板第一表面上的信号焊线垫电性连通,且该电源焊球垫及接地焊球垫分别与该基板第一表面上的电源片接置区及接地片接置区电性连通。
14.如权利要求13所述的半导体封装件,其特征在于,该基板形成有多条贯穿基板的通孔,用以使该信号焊球垫、电源焊球垫及接地焊球垫分别与该信号焊线垫、该电源片接置区及接地片接置区电性连通。
15.如权利要求13所述的半导体封装件,其特征在于,该焊球植接于该基板第二表面的该信号焊球垫、电源焊球垫及接地焊球垫上。
16.如权利要求12所述的半导体封装件,其特征在于,该芯片作用表面上的电源焊垫及接地焊垫以重配方式形成有多条引线,该引线用以使该电源焊垫及接地焊垫分别整合并电性连通至该电源层及接地层。
17.如权利要求12所述的半导体封装件,其特征在于,该电源片是以金属材质制成。
18.如权利要求12所述的半导体封装件,其特征在于,该电源片是以导电性黏胶粘接于该芯片及基板上。
19.如权利要求12所述的半导体封装件,其特征在于,该接地片是以金属材质制成。
20.如权利要求12所述的半导体封装件,其特征在于,该接地片是以导电性黏胶粘接于该芯片及基板上。
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CN100373596C (zh) * 2004-09-07 2008-03-05 日月光半导体制造股份有限公司 球格阵列封装基板及其制造方法及其球格阵列封装构造
CN101378023B (zh) * 2007-08-27 2010-12-01 矽品精密工业股份有限公司 半导体封装件及其制法
CN101419964B (zh) * 2007-10-26 2012-10-10 英飞凌科技股份公司 具有多个半导体芯片的装置
CN103378068A (zh) * 2012-04-17 2013-10-30 太阳诱电株式会社 电路模块及其制造方法
CN103400816A (zh) * 2013-06-26 2013-11-20 三星半导体(中国)研究开发有限公司 封装件及其制造方法
CN103400826A (zh) * 2013-06-21 2013-11-20 三星半导体(中国)研究开发有限公司 半导体封装及其制造方法

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JPH09148478A (ja) * 1995-11-21 1997-06-06 Hitachi Ltd 半導体集積回路装置
US6034423A (en) * 1998-04-02 2000-03-07 National Semiconductor Corporation Lead frame design for increased chip pinout
JP3063846B2 (ja) * 1998-04-28 2000-07-12 日本電気株式会社 半導体装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373596C (zh) * 2004-09-07 2008-03-05 日月光半导体制造股份有限公司 球格阵列封装基板及其制造方法及其球格阵列封装构造
CN101378023B (zh) * 2007-08-27 2010-12-01 矽品精密工业股份有限公司 半导体封装件及其制法
CN101419964B (zh) * 2007-10-26 2012-10-10 英飞凌科技股份公司 具有多个半导体芯片的装置
CN103378068A (zh) * 2012-04-17 2013-10-30 太阳诱电株式会社 电路模块及其制造方法
CN103400826A (zh) * 2013-06-21 2013-11-20 三星半导体(中国)研究开发有限公司 半导体封装及其制造方法
CN103400826B (zh) * 2013-06-21 2016-08-17 三星半导体(中国)研究开发有限公司 半导体封装及其制造方法
CN103400816A (zh) * 2013-06-26 2013-11-20 三星半导体(中国)研究开发有限公司 封装件及其制造方法

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