CN1441321A - Development liquid supply device - Google Patents
Development liquid supply device Download PDFInfo
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- CN1441321A CN1441321A CN 02120200 CN02120200A CN1441321A CN 1441321 A CN1441321 A CN 1441321A CN 02120200 CN02120200 CN 02120200 CN 02120200 A CN02120200 A CN 02120200A CN 1441321 A CN1441321 A CN 1441321A
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Abstract
Provided is a developer supply system capable of highly accurately detecting the alkali concentration and the dissolved resin concentration in developer recovered from the developing process of a liquid crystal substrate and a printed board, and capable of supplying the developer of more accurately adjusted concentration to the developing process. The developer supply system is provided with a supply tank (1) for storing the developer to be supplied, a recovered liquid supply mechanism (2) for feeding the used developer to the supply tank (1), a raw liquid supply mechanism (3) for feeding a new developer raw liquid to the supply tank, and a specific concentration meter (5) for detecting the alkali concentration and the resin concentration in the used developer at a fixed temperature based on an ultrasonic wave transmission speed and an electromagnetic conductivity. The feeding of the developer raw liquid by the raw liquid supply mechanism (3) is controlled based on the concentration detected by the concentration meter (5).
Description
Technical field
What the present invention relates to is developer liquid supply device, what relate in detail is alkali concn and the dissolving resin concentration that can manage the developer solution that reclaims from the development treatment of crystal liquid substrate or printed base plate, supplies with the feedway that is adjusted to certain density developer solution again to development treatment.
Prior art
Tetramethylammonium oxyhydroxide aqueous alkalis such as (TMAH) uses as developer solution in the development of the photoresists in the manufacturing process of crystal liquid substrate or printed base plate.Such developer solution recently along with the maximization of substrate size and the progress of processing are used in a large number, in order to reduce cost, resupplies development treatment after handling.
; resemble above-mentioned developer solution; in use repeatedly owing to react, react with airborne carbonic acid gas and oxygen with acid in the resin; alkali concn reduces; in addition since be used for when carrying out development treatment resist resin resin concentration rise; in order to ensure the thickness and precision of the film of the size accuracy of resist pattern and unexposed portion, necessarily manage the alkali concn of developer solution as much as possible, and be necessary the management of dissolving resin concentration below finite concentration.
Concentration management about developer solution, for example in No. 2561578 communique of special permission to having put down in writing " developer solution management devices ", it is that the alkali that uses in the development to photoresists (photoresist) is the device that developer solution manages, developer solution is supplied with in circulation to developing apparatus, and the alkali concn of round-robin developer solution and dissolving resin concentration two sides in the developer solution are managed simultaneously, prevent the deterioration of developing performance.
In the above-mentioned developer solution management devices, detect dissolving resin concentration in the developer solution by extinction photometer, detect alkali concn in the developer solution by conductivity meter, and, the liquid level of the developer solution in the device is measured by liquid level, so, keep certain in order to make dissolving resin concentration, alkali concn and liquid level, the new developer solution that the development stoste of developer solution in the discharger or supply alkali system and pure water or supply are in harmonious proportion in advance.
Above-mentioned developer solution management devices, its purpose is the alkali concn and the mensuration of dissolving resin concentration and the developer solution that more renews that carry out with intermittent mode with respect to original, because can carry out The real time measure and control continuously to the alkali concn in the developer solution and dissolving resin concentration, so can improve the precision of thickness of the film of the size accuracy of resist pattern of development and unexposed portion, eliminate because the low problem of running rate that fluid exchange is brought.For example, the above-mentioned TMAH concentration as developer solution uses is adjusted to 2.38 weight % usually, but in above-mentioned developer solution management devices, can reaches in 2.38 ± 0.02 weight % scopes by management.
Summary of the invention
, in the development treatment of crystal liquid substrate and printed base plate, wish to obtain the developer solution of more desirable GOOD TASTE, the precision of pattern and the thickness and precision of film, the yield rate of goods are further improved., in the original developer solution management devices as described above,, the concentration of developer solution is regulated very difficult with higher precision because the mensuration precision of alkali concn in the developer solution and dissolving resin concentration is had problems.
Promptly, by the mensuration of extinction photometer to the concentration of dissolving resin, because the majority of the peak absorption wavelength of the dissolving resin in the developer solution is in the wavelength coverage of ultraviolet light and visible light, and each peak value of variation according to resin concentration can change, and increasing along with resin concentration, peak absorption wavelength becomes overlap condition, interacts with the selection problem of measuring wavelength, the low problem of precision in fact unavoidably can occur measuring.Like this, bring up to more than the existing level management precision of the resin precision of developer solution very difficult, in addition, when resin concentration uprises, owing to measure the problem of precision, raising is also very difficult according to the mensuration precision of the mensuration alkali concn of conductance, the management precision of alkali concn is brought up to be in very difficult situation more than the existing level.
The present invention invents in view of above actual conditions, purpose provides alkali concn and the dissolving resin concentration that can manage the developer solution that reclaims from the development treatment of crystal liquid substrate or printed base plate, and supply with the developer liquid supply device be adjusted to certain density developer solution again to development treatment, can detect each composition of developer solution more accurately, supply with the developer liquid supply device of the developer solution that more correct concentration is conditioned to development treatment.
In order to solve above-mentioned problem, among the present invention when the alkali concn of the developer solution that detects recovery and dissolving resin concentration, use according to temperature and each constituent concentration in like manner by determined and measure the multicomponent densimeter of measuring the mode of ultrasonic velocity of propagation and electromagnetism conductance when precision does not have change according to concentration change, detect alkali concn and resin concentration more accurately, so, also reach more high precision for the concentration management of developer solution.
Promptly, main idea of the present invention is the developer liquid supply device that the developer solution of the aqueous solution formation of alkali is supplied with to development treatment, it is characterized in that having store the temperature control equipment necessarily regulated of the temperature of the supply storage tank of the developer solution that should supply with and the developer solution after the use that will reclaim, but also possesses the recovery liquid feed mechanism that the developer solution after using is carried to above-mentioned supply storage tank, with the stoste feed mechanism of new developer solution stoste to above-mentioned supply storage tank conveying, detect the alkali concn of the developer solution after the use of the uniform temperature of sending here by above-mentioned recovery liquid feed mechanism and the densimeter of resin concentration, above-mentioned densimeter, be according to the ultrasonic velocity of propagation of developer solution and the electromagnetism conductance of developer solution are measured, the relation of the electromagnetism conductance of the assigned temperature of making in advance and ultrasonic velocity of propagation under the prescribed concentration and developer solution, detect the multicomponent densimeter of alkali concn and resin concentration, and, according to the detected concentration of above-mentioned densimeter, can be by the conveying of above-mentioned stoste feed mechanism control developer solution stoste.
Description of drawings
Fig. 1 represents is the process flow diagram of the inscape of the developer liquid supply device that the present invention relates to.
Fig. 2 is with the chart of the accuracy of detection of the multicomponent densimeter of real-time confirmation.
Concrete form of implementation
A form of implementation to the developer liquid supply device that the present invention relates to describes with reference to the accompanying drawings.Fig. 1 is the process flow diagram of the inscape of the developer liquid supply device that the present invention relates to of expression.Fig. 2 is the chart with the mensuration precision of the multicomponent densimeter of real-time confirmation.Below in the explanation of form of implementation, developer liquid supply device is abbreviated as " feedway ".Developer liquid supply device.
Feedway of the present invention, be in the development treatment of in comprising development treatment, using rotary developer device etc., the developer liquid supply device that supply is formed by alkaline aqueous solution, when the alkali concn of the developer solution that reclaims from development treatment and dissolving resin concentration were managed, also having to development treatment provided through reaching the function of certain density developer solution after regulating again.
Among the present invention, as the developer solution of alkali system, aqueous solution or tetramethylammonium oxyhydroxide (TMAH), the trimethyl monoethanolamine oxyhydroxide organic base aqueous solution such as (Kelin (choline)) etc. that the inorganic base that is formed separately or formed with potpourri by inorganic bases such as potassium hydroxide, NaOH, sodium phosphate, sodium silicate is arranged that can list.
Feedway of the present invention, as shown in Figure 1, mainly be made up of following array apparatus: storage should be supplied with the supply storage tank (1) of developer solution to the developing apparatus that carries out development treatment (99), have the temperature control equipment that can necessarily regulate the temperature of the developer solution after the use of reclaiming and will use after developer solution be transported to the recovery liquid feed mechanism (2) of supply storage tank (1), with the stoste feed mechanism (3) of new development stoste to supply storage tank (1) conveying, check out by the alkali concn that reclaims the developer solution after the use that liquid supplying device (2) sends here and the densimeter (5) (hereinafter referred to as " the 1st densimeter ") of resin concentration with uniform temperature.
Supply with storage tank (1), not only the concentration adjustment with developer solution arrives certain desired value, and be the dashpot of supplying with the developer solution that concentration has been conditioned as required to developing apparatus (99), for example can constitute by the corrosion resistant container that approximately has 100～2000 liters of internal volumes.Supply with in the storage tank (1), for will store developer solution be adjusted to concentration and can keep with homogeneous, be provided with the developer solution stirring apparatus of forming by pump (71) and circulation stream (96).Above-mentioned dependence round-robin stirring apparatus is compared with the stirring apparatuss such as spiral that are provided with in the groove, and the phenomenon that particle takes place reduces the pollution that can lower developer solution.And the developer solution that stores in supplying with storage tank (1) can be fed into developing apparatus (99) by pump (12) and stream (97).
Developer solution after the recovery liquid storage tank (21) that recovery liquid supplying device (2) is stored for the time being by the developer solution after will using, the use that will store is to supplying with pump (22) and the stream formations such as (91) that storage tank (1) is supplied with.Reclaim liquid storage tank (21), for example can constitute by the corrosion resistant container that approximately has 500～3000 liters of internal volumes.Reclaim the developer solution liquid storage tank (21) both can be designed to directly to receive the use of discharging from developing apparatus (99) after, can be designed to again receive once for the time being by the developer solution after the use of taking care of in addition.
Reclaim in the liquid storage tank (21),, be provided with the stirring apparatus that constitutes by pump (24) and circulation stream (92) for the concentration of the developer solution after the use that makes reception reaches homogeneous.Above-mentioned dependence round-robin stirring apparatus, with supply with storage tank (1) in the same, the phenomenon minimizing of particle takes place, the pollution that can lower developer solution.
Pump (22) and circulation stream (91) for example, can be connected with the stream (93) that flow to the former liquid supplying device (3) that the back of supplying with storage tank (1) will narrate by mixer (4) and stream (94).The temperature control equipment that reclaims liquid supplying device (2) is set, purpose is that the 1st densimeter (5) that will narrate by the back correctly measures the concentration of the developer solution after using, for example, can constitute by the calibration cell (23) (temperature control equipment) that is provided with midway at stream (91).That is, the developer solution after the use that is recovered is adjusted to uniform temperature (for example 25 ℃) midway in the calibration cell (23) that stream (91) is provided with, and then, carries to supplying with storage tank (1).But, though not expression among the figure usually, in reclaiming liquid supplying device (2), is provided with under the situation that resin concentration is high in the developer solution after the use of reclaiming the decontamination line that the part to the developer solution after using can purify.And, can also can to reclaiming liquid storage tank (21) supply dilution water.
Developer solution after the use of reclaiming from developing apparatus (99), owing to react, react with airborne carbonic acid gas or oxygen with the acid in the resist, alkali concn can reduce, in addition, because be used for the dissolving resin of resist, resin concentration rises, and in the feedway of the present invention, utilizes former liquid supplying device (3) to add new developer solution stoste in the developer solution after using as required.
Former liquid supplying device (3) is main by the developer solution stoste that has stored high concentration, and for example concentration is that the stoste storage tank (31) of the stoste of 20～25 weight %, the development stoste that will store constitute to the pump (32) of supplying with storage tank (1) supply and stream (93).Stoste storage tank (31) is same with above-mentioned recovery liquid storage tank (21), for example can be made of the corrosion resistant container that approximately has 500～3000 liters of internal volumes.Stream (93) is connected with supply storage tank (1) by mixer (4) and stream (94).Mixer (4) the has been built-in fixedly stirrer of spiral is in order that by mixing developer solution stoste in the developer solution of stream (91) after the use that is transferred that reclaims liquid supplying device (2).
But above-mentioned supply storage tank (1), recovery liquid storage tank (21), stoste storage tank (31) contact with air in order to prevent developer solution and development stoste, seal with inactive gases such as nitrogen.In feedway of the present invention, keep certain in addition, in position be provided with the device of when supplying with development stoste, the developer solution after the remaining use being discharged outside system in order to make intrasystem amount of liquid.Though not expression is for example reclaimed on the liquid storage tank (21) and can be set up stream that is used to discharge or the overflow mechanism that comprises operation valve among the figure.
In order to detect the concentration of the developer solution after supplying with the use with uniform temperature that storage tank (1) carries, above-mentioned the 1st densimeter (5) for example can be set in the way of back segment stream (91) of calibration cell (23).In feedway of the present invention, in order not used the influence of the dissolving resin concentration change of back in the developer solution, detect resin concentration and alkali concn accurately, use be the particular concentration meter.Specifically, as above-mentioned the 1st densimeter (5), what use is according to the ultrasonic velocity of propagation in the developer solution of measuring and the electromagnetism conductance of developer solution, the relation (matrix) of ultrasonic velocity of propagation and electromagnetism conductance under ready-made assigned temperature and the prescribed concentration detects the multicomponent densimeter of resin concentration and alkali concn.
Above-mentioned multicomponent densimeter is by ultrasonic velocity of propagation and electromagnetism conductance in the solution of measuring uniform temperature, and The real time measure is the concentration of two kinds of compositions in the solution of forming by three kinds of compositions simultaneously.Promptly, the multicomponent densimeter, according to principle be as long as the temperature of solution is certain, in like manner ultrasonic velocity of propagation and the electromagnetism conductance with the corresponding solution of concentration of each composition also is specific, and be main by ultrasonic transducers, ultrasonic transmitter, electromagnetism conductance converter, electromagnetism conductance transmitter and can specify the microprocessor of calculation to form.
The multicomponent densimeter be applicable to resemble above-mentioned developer solution the situation of concentration determination under, alkali concn and dissolving resin concentration are carried out various combinations, each that measure in advance is combined under the uniform temperature condition relation of ultrasonic velocity of propagation and electromagnetism conductance makes matrix, according to pre-prepd matrix, promptly by writing in microprocessor, according to above-mentioned matrix, just can correctly extrapolate alkali concn and dissolving resin concentration according to measured value.As above-mentioned multicomponent densimeter, the commodity " FUD-1 Model-51 " by name of industry society of Fuji system can be used with ultrasonic multicomponent densimeter very ideally as the liquid that is known.
Feedway of the present invention according to the detected concentration of above-mentioned the 1st densimeter (5), just can be controlled by the conveying of former liquid supplying device (3) to developer solution stoste.The conveying of developer solution stoste is controlled by the control device of narrating later (having omitted diagram).Like this, the additional adjusting of the resin concentration that uses alkali concn that the back reduces in the developer solution and rising is over, can the developer solution that store in supplying with storage tank (1) be managed, make it keep certain alkali concn always and resin concentration always below finite concentration.
The concentration of the developer solution of supplying with for subtend developing apparatus (99) accurately manages, comparatively it is desirable to directly detect the concentration of the developer solution of supplying with storage tank (1), in addition, even the dissolving resin concentration at the developer solution after the use of being sent here by recovery liquid supplying device (2) surpasses under the situation of allowed band, though it is the same below designated value with dissolving resin concentration, can supply with developer solution stoste by former liquid supplying device (3), but, have the worry that the alkali concn of supplying with in the storage tank (1) surpasses desired value according to the quantity delivered of developer solution stoste.
So, be provided with in the feedway of the present invention to supplying with storage tank (1) and supply with the dilution water feedway of dilution water.And, regulate for the alkali concn to the developer solution in the supply storage tank (1) carries out final trace, also be provided with the temperature of supplying with developer solution in the storage tank (1) is carried out the 2nd temperature control equipment of certain adjusting and detected the alkali concn of the developer solution that has uniform temperature in the supply storage tank (1) and the 2nd densimeter (8) of resin concentration.So, in the feedway of the present invention, according to the detected concentration of the 2nd densimeter (8), for just controlling by the control device of narrating later by the conveying of the developer solution stoste of former liquid supplying device (3) and by the conveying of the dilution water of above-mentioned dilution water feedway.
As above-mentioned dilution water feedway, usually, use in the supply groove (1) of Water Purifiers (6), can supply with ultrapure water from Water Purifiers (6) by stream (95).Above-mentioned the 2nd temperature control equipment, for the concentration of more correctly measuring developer solution is provided with, for example can constitute by the calibration cell (72) that in way, is provided with as the circulation stream (96) of the stirring apparatus of developer solution, promptly, in supplying with groove (1), by making for the moment delay of developer solution in calibration cell (72) in the circulation way, make the temperature of developer solution keep certain.In addition, as the 2nd densimeter (8), the same multicomponent densimeter that uses with the 1st densimeter (5).
Supply control to developer solution stoste and dilution water, be according to the detected concentration of above-mentioned the 2nd densimeter (8), undertaken by the quantity delivered of the dilution water supplied with to the quantity delivered of the developer solution stoste supplied with by former liquid supplying device (3) and by dilution water feed mechanism (Water Purifiers (6)) that step control carries out.Such control, for example can utilize the method for opening in " dilution process of acid or alkali stoste and the air mix facilities " openly put down in writing in the flat 10-180076 communique the spy is nibbling method.
Specifically, utilize above-mentioned nibbling method to supplying with the adjusting of the alkali concn in the storage tank (1), the developer solution stoste (or dilution water) of adding high concentration in the developer solution in the supply storage tank (1) at alkali concn step-down (or alkali concn uprises) is adjusted to prescribed concentration, the 2nd densimeter of carrying out (8) that is to use is measured the concentration determination operation and the modulating process of the concentration of developer solution, the latter is poor according to the concentration value measured in the concentration determination operation and desired value, calculate out developer solution stoste (or addition of dilution water) in shortage, 85～99% of (or addition) in shortage that supply is equivalent to calculate out, it is desirable to 92～99% amount, simultaneously, above-mentioned concentration determination operation and modulating process are carried out repeatedly value in the concentration value of measuring becomes the zone of predefined aimed concn.Like this, can manage the alkali concn of supplying with the developer solution in the storage tank (1) accurately.
And, in the even more ideal form of implementation of the present invention, carry out more high-precision management for concentration, in the 2nd thermostatic calibration cell (72), be provided with the temperature sensor (having omitted diagram) that detects developer temperatur the developer solution of supplying with storage tank (1).And the 2nd densimeter (8) has when detecting the alkali concn supplied with in the storage tank (1) and resin concentration, and the temperature of the developer solution that goes out based on the said temperature sensor can be assisted the function of correcting calculation.
Promptly, in the above-mentioned multicomponent densimeter of counting, by to various alkali concns and dissolving resin concentration makes up and each is combined under a plurality of temperature conditions through measuring the relation that obtains ultrasonic velocity of propagation and electromagnetism conductance in advance makes matrix, based on the temperature of such matrix and detected time developer solution, just can more correctly infer the alkali concn and the dissolving resin concentration of the developer solution that calculates out supply storage tank (1).
Feedway among the present invention is except carrying out all running control to device, for control based on the mensuration of above-mentioned the 1st densimeter (5) to developer solution stoste carry, in order to control based on the conveying of the mensuration of above-mentioned the 2nd densimeter (8) to developer solution stoste and dilution water, also be provided with control device (having omitted diagram) with calculation function.In such control device, the conversion of signals that comprises each metering machine is that the control signal that digital calculus treatment device, calculus treatment devices such as input media, programming controller and computing machine sends is converted into analog output unit.
Feedway among the present invention the developer solution after the use that stores in the recovery liquid storage tank (21) of recovery liquid supplying device (2) reaches uniform temperature in calibration cell (23) after, is carried to supplying with storage tank (1) through stream (91), stream (94).At this moment, measure alkali concn and the resin concentration that uses the back developer solution by the 1st densimeter (5) that in stream (91), is provided with.Based on its result, under the alkali concn of the 1st densimeter (5) the mensuration situation lower than reference value, perhaps resin concentration exceeds under the situation of ultimate value of benchmark, and the developer solution stoste of the high concentration that will store in stoste storage tank (31) through stream (93), stream (94) is carried to supplying with storage tank (1).
When supplying with developer solution stoste, will use the back developer solution to mix with developer solution stoste by the mixer (4) that is provided with at stream (91), stream (93) back segment.And, in supplying with storage tank (1), the developer solution that stores is mixed by the stirring apparatus of being made up of pump (71) and circulation stream (96), make it concentration homogeneous more.
As described above, feedway among the present invention, when the alkali concn of measuring use back developer solution by the 1st densimeter (5) and resin concentration, fluid temperature is made as necessarily, and, as the 1st densimeter (5), because use be according to the ultrasonic velocity of propagation of measuring and electromagnetism conductance and the particular kind of relationship (matrix (matrix)) that makes in advance thus can detect the multicomponent densimeter of alkali concn and resin concentration simultaneously, can more correctly detect the alkali concn and the resin concentration that use the back developer solution, like this, can manage the resin concentration of supplying with the developer solution in the storage tank (1) reliably, make it below safe level, and regulate alkali concn accurately.
In addition, feedway among the present invention, by supplying with the calibration cell (72) (the 2nd temperature control equipment) that storage tank (1) is set up, make the temperature of developer solution keep certain, and by the 2nd densimeter (8), to the round-robin developer solution, promptly supply with the alkali concn and the resin concentration of developer solution in the storage tank (1) and measure.The result who measures when resin concentration surpasses permissible value, supplies with dilution water through stream (95) to supplying with storage tank (1) by Water Purifiers (6) (dilution water feed mechanism).In addition, when the alkali concn of measuring by the 2nd densimeter (8) is lower than desired value, same with aforesaid operations, the developer solution stoste of the high concentration of stoste storage tank (31) is supplied with to supplying with storage tank (1) by stoste feed mechanism (3), when alkali concn is higher than permissible value, by Water Purifiers (6), supply with dilution water to supplying with storage tank (1).
Feedway among the present invention, as described above, the fluid temperature of supply storage tank (1) developer solution that concentration for the time being has been conditioned is set at uniform temperature, so, again alkali concn and resin concentration are carried out high-precision mensuration by multicomponent densimeter the 2nd densimeter (8) identical, the alkali concn of developer solution and resin concentration are carried out trace adjustment with the 1st densimeter (5).And, at this moment, by having the control device of specific calculation function, based on the above-mentioned nibbling method control developer solution stoste that moves closer to aimed concn or the quantity delivered of dilution water.Like this, can more reliably the resin concentration of supplying with the developer solution in the storage tank be managed below safe level, more accurately alkali concn be regulated.Just can supply with the high-quality developer solution that concentration has been conditioned to developing apparatus (99) according to feedway of the present invention like this with high precision more.
Be pointed out that in passing.In the feedway of the present invention, in order to confirm accuracy of detection as the multicomponent densimeter of densimeter use, in stream (91), carry out the result of METHOD FOR CONTINUOUS DETERMINATION as the aqueous solution TMAH concentration of the TMAH that uses the back developer solution to reclaim, shown in the chart of Fig. 2, be 2.376 (mean value) ± 0.005 weight %, can detect the concentration of TMAH accurately.The dissolving resin concentration of setting as the management objectives value is 1000ppm.So in feedway of the present invention, its developer solution of TMAH concentration can finally regulate to(for) supply storage tank (1) is 2.380 (mean value) ± 0.005 weight %, resin concentration is 1000 ± 150ppm.
As described above, according to feedway of the present invention, use specific multicomponent densimeter, because by directly measuring ultrasonic velocity of propagation and electromagnetism conductance, can detect the concentration of each composition of developer solution accurately, so can supply with the high-quality developer solution that more high-precision concentration has been conditioned to development treatment.
Claims (3)
1. developer liquid supply device, the developer solution that the aqueous solution of alkali forms is supplied with to development treatment, it is characterized in that: have store the supply storage tank of the developer solution that should supply with, have the temperature control equipment that the temperature of the developer solution after the use that will reclaim necessarily regulates and will use after developer solution to the recovery liquid feed mechanism of above-mentioned supply storage tank conveying, with the stoste feed mechanism of new developer solution stoste to above-mentioned supply storage tank conveying, detect the alkali concn of the developer solution after the use of the uniform temperature of sending here by above-mentioned recovery liquid feed mechanism and the densimeter of resin concentration, above-mentioned densimeter, be according to the ultrasonic velocity of propagation of developer solution and the electromagnetism conductance of developer solution are measured, the relation of the assigned temperature of making in advance and ultrasonic velocity of propagation under the prescribed concentration and electromagnetism conductance, detect the multicomponent densimeter of alkali concn and resin concentration, and, according to the detected concentration of above-mentioned densimeter, can be by the conveying of above-mentioned stoste feed mechanism control developer solution stoste.
2. the developer liquid supply device put down in writing of claim 1 is characterized in that:
Have to supplying with the 2nd temperature control equipment that storage tank is supplied with the dilution water feedway of dilution water, the temperature of the developer solution in the above-mentioned supply storage tank is necessarily regulated, detect the alkali concn of developer solution of the uniform temperature in the above-mentioned supply storage tank and the 2nd densimeter of resin concentration, above-mentioned the 2nd concentration is counted the multicomponent densimeter identical with above-mentioned densimeter, and, according to the concentration that above-mentioned the 2nd densimeter is measured, just can control by the stoste feed mechanism to the conveying of developer solution and by of the conveying of above-mentioned dilution water feed mechanism to dilution water.
3. the developer liquid supply device put down in writing of claim 2 is characterized in that:
In the 2nd temperature control equipment, has the temperature sensor that detects developer temperatur, and, the 2nd densimeter is when detecting the alkali concn supplied with in the storage tank and resin concentration, and the detected developer temperatur of temperature sensor according in above-mentioned the 2nd temperature control equipment has the revisal calculation function.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002050841A JP4026376B2 (en) | 2002-02-27 | 2002-02-27 | Developer supply device |
| JP50841/2002 | 2002-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1441321A true CN1441321A (en) | 2003-09-10 |
Family
ID=27784573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02120200 Pending CN1441321A (en) | 2002-02-27 | 2002-05-24 | Development liquid supply device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4026376B2 (en) |
| CN (1) | CN1441321A (en) |
| TW (1) | TWI310121B (en) |
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| CN101067720A (en) * | 2006-05-03 | 2007-11-07 | 3D系统公司 | Material delivery tension and tracking system for use in solid imaging |
| CN100456135C (en) * | 2004-06-30 | 2009-01-28 | 乐金显示有限公司 | Photo development apparatus and method for fabricating a color filter substrate using the same |
| CN101540278B (en) * | 2004-01-29 | 2011-06-15 | 有限会社Nas技研 | Substrate inspection device, and recovery tool |
| CN101639633B (en) * | 2008-07-29 | 2012-02-29 | 和舰科技(苏州)有限公司 | Supply pipeline of developing solution |
| CN102662311A (en) * | 2012-04-13 | 2012-09-12 | 京东方科技集团股份有限公司 | Chemical conveying device, developing device and developing system |
| CN103852978A (en) * | 2006-11-30 | 2014-06-11 | 三菱化学工程株式会社 | Method for regulating concentration of developing solution, apparatus for preparing the developing solution, and developing solution |
| CN105954983A (en) * | 2016-07-18 | 2016-09-21 | 京东方科技集团股份有限公司 | Developing method and developing system |
| CN107300838A (en) * | 2017-08-08 | 2017-10-27 | 武汉华星光电技术有限公司 | Developer solution dilution system |
| CN108345184A (en) * | 2017-01-23 | 2018-07-31 | 株式会社平间理化研究所 | Developing apparatus |
| CN108803258A (en) * | 2018-05-31 | 2018-11-13 | 深圳市华星光电半导体显示技术有限公司 | Development control system and developing control methods |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7854558B2 (en) * | 2009-02-16 | 2010-12-21 | Eastman Kodak Company | Developer waste reuse |
| JP7202229B2 (en) * | 2019-03-20 | 2023-01-11 | 株式会社Ｓｃｒｅｅｎホールディングス | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
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2002
- 2002-02-27 JP JP2002050841A patent/JP4026376B2/en not_active Expired - Fee Related
- 2002-05-02 TW TW91109164A patent/TWI310121B/zh not_active IP Right Cessation
- 2002-05-24 CN CN 02120200 patent/CN1441321A/en active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101540278B (en) * | 2004-01-29 | 2011-06-15 | 有限会社Nas技研 | Substrate inspection device, and recovery tool |
| CN100456135C (en) * | 2004-06-30 | 2009-01-28 | 乐金显示有限公司 | Photo development apparatus and method for fabricating a color filter substrate using the same |
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| CN108803258A (en) * | 2018-05-31 | 2018-11-13 | 深圳市华星光电半导体显示技术有限公司 | Development control system and developing control methods |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP4026376B2 (en) | 2007-12-26 |
| TWI310121B (en) | 2009-05-21 |
| JP2003248326A (en) | 2003-09-05 |
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