CN1367371A - Circuit board checking device and method - Google Patents
Circuit board checking device and method Download PDFInfo
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- CN1367371A CN1367371A CN02101648A CN02101648A CN1367371A CN 1367371 A CN1367371 A CN 1367371A CN 02101648 A CN02101648 A CN 02101648A CN 02101648 A CN02101648 A CN 02101648A CN 1367371 A CN1367371 A CN 1367371A
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- 238000007689 inspection Methods 0.000 claims abstract description 130
- 238000001514 detection method Methods 0.000 claims abstract description 87
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- 238000013461 design Methods 0.000 claims description 4
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The subject of the invention is to provide a substrate inspection apparatus capable of highly accurately inspecting wiring patterns on plural inspected substrates in a short time and the inspection method. Four holders 13, which are used to fix the inspected substrates 11 at reference positions, are provided at equal intervals on peripheral parts of a turntable 61. In the substrate inspection device 1, the turntable 61 is turned in 90 DEG increments to convey the holders 13 to a carry-in part 2, to a displacement detection part 3, to an inspection part 4, and to a carry-out part 5, which are disposed at equal intervals around the table. The carrying-in of the inspected substrates 11, the detection of displacement thereof from the reference positions, the inspection of the substrates, and the carrying-out of the substrates are continuously performed at the respective conveying positions. Since these handlings are simultaneously performed in parallel with each other at the carry-in part 2, at the detection part 3, at the inspection part 4, and at the carry-out part 5, plural inspected substrates 11 are rapidly inspected with a high accuracy.
Description
" technical field "
The present invention is about checking that printed wiring circuit board, integrated circuit combination etc. are examined the circuit board testing fixture and the circuit board inspection method of the distribution combination of circuit board.But the present invention is not confined to printed wiring circuit board, integrated circuit combination, is applicable to the electric wiring on the various circuit boards such as checking multilayer wired circuit board, LCD and the employed glass circuit board of plasma display (Plasma Display) yet.
" background technology "
The circuit board testing fixture generally is examined circuit board at each and all must handles respectively, moves into the inspection position, checks that the circuit layout that is examined circuit board makes up, will be examined circuit board and takes out of each procedure of checking the position being examined circuit board.
In above-mentioned circuit board testing fixture in the past, because each each procedure of moving into, check, taking out of that is examined circuit board is carried out individual treated, and be examined circuit board after overall process finishes at each, the next one that will begin in a minute is examined the inspection operation of circuit board, even so shortened each procedure, but shortening on the overall supervision time is limited, therefore a plurality ofly to be examined circuit board and to cause long problem of supervision time with regard to exist in order checking.
In addition, tend to granular, densification gradually, and to be moved into the position deviation that is produced when checking the position be cause to be examined circuit board, produced the problem that waits under the degree of accuracy of checking owing to be examined the distribution combination of circuit board.In order to solve this type of problem, proposed a kind ofly, function is checked in the additional position on the circuit board testing fixture, revises the organization plan of then checking to moving into the position deviation that is examined circuit board of checking the position.But in this structure, the position time of checking that is examined circuit board must allow some leeway, and this has just hindered and has shortened the overall supervision time.
The present invention will solve existing problem in this type of conventional art exactly, and its purpose is to provide circuit board testing fixture and the circuit board inspection method that can check a plurality of distribution combinations that are examined circuit board with higher degree of accuracy at short notice.
" summary of the invention "
Circuit board testing fixture of the present invention, to move into position, position deviation detection position, check the position and take out of the position and be arranged on the circumference by the interval of appointment, and will the unit of appointment be examined circuit board along of the interval conveyance of described circumference by appointment, on each position, carry out concurrently and above-mentionedly be examined the moving into of circuit board, above-mentionedly be examined the processing of taking out of that is examined circuit board that the detection of the departure that departs from the reference position of circuit board, above-mentioned distribution inspection, the inspected that is examined circuit board finish.This circuit board testing fixture comprises, with above-mentioned circumference concentric configuration, at least be provided with four turntables that keep the circuit board maintaining body that is examined circuit board of above-mentioned appointment unit at edge part by appointed interval, the above-mentioned turntable of each anglec of rotation driven in rotation according to appointment, the circuit board that is examined that each circuit board maintaining body of above-mentioned turntable is kept is moved into the position conveyance to the position deviation detection position from above-mentioned, check position and the turntable drive unit of taking out of the position, be disposed at the above-mentioned position of moving into, with above-mentioned specified quantity be examined circuit board move into above-mentioned turntable the circuit board maintaining body move into device, be disposed at above-mentioned position deviation detection position, the position deviation testing agency that the above-mentioned departure that departs from the reference position that is examined circuit board of above-mentioned turntable institute conveyance is detected, be disposed at above-mentioned inspection position, by means of the testing fixture of checking that the distribution that is examined circuit board that aid is brought above-mentioned turntable is checked, data according to the detected departure of above-mentioned position deviation testing agency, check being examined the correction mechanism that the relative position between circuit board and the above-mentioned inspection aid revises and being disposed at the above-mentioned position of taking out of of position to being in, the inspected that above-mentioned turntable is brought finishes is examined the mechanism that takes out of that circuit board is taken out of this turntable.
And above-mentioned position deviation testing agency can comprise to be detected set specifically labelled marker detection mechanism on the above-mentioned check circuit plate, begins the departure calculation mechanism that the amount of movement till detect mark performs calculations to the above-mentioned departure that departs from the reference position that is examined circuit board at the driving mechanism that drives above-mentioned marker detection mechanism on the plane parallel with above-mentioned turntable, according to above-mentioned marker detection mechanism from assigned address.Particularly, above-mentioned marker detection mechanism comprises the image mechanism in the visual field with optical axis and specified size, above-mentioned departure is calculated mechanism, use above-mentioned image mechanism according to beginning from above-mentioned assigned address to the amount of movement that in the visual field, captures the image mechanism till the specifically labelled image that is examined circuit board, with the departure of the optical axis that departs from image mechanism of specifically labelled image in the visual field of image mechanism, calculate out the departure that departs from the reference position that is examined circuit board.In addition, this circuit board testing fixture can also comprise the original point position mechanism that above-mentioned marker detection mechanism is positioned the mechanicalness initial point, the above-mentioned departure that is examined circuit board, and the initial point that is coordinate system with above-mentioned mechanicalness initial point carries out coordinate Calculation.
According to said structure, by by each rotation angle of appointment rotating drive turntable successively, make a plurality of circuit board maintaining bodies that are arranged on the turntable, by conveyance successively to moving into the position, the circuit board that is examined of specified quantity is removed to turntable by moving into mechanism, and is fixed by this circuit board maintaining body.Be fixed on each circuit board maintaining body specified quantity be examined circuit board, by the rotation of turntable, removed to the position deviation detection position successively, checked the position and taken out of the position.
Conveyance is detected the departure that departs from the reference position to the circuit board that is examined of position deviation detection position by position deviation testing agency.This position deviation amount, for example can utilize the marker detection mechanism that is arranged on the position deviation detection position to detect and be located at the telltale mark that is examined on the circuit board, according to marker detection mechanism from assigned address to the amount of movement that detects mark, evolved by departure calculation mechanism.Particularly, use image mechanism to take the telltale mark that is examined circuit board, according to the amount of movement of image mechanism till assigned address begins to be captured in the visual field to the telltale mark that is examined circuit board and the departure of the optical axis that departs from image mechanism of the positioning image the visual field of image mechanism, calculate out the position deviation amount.
Be examined circuit board from the position deviation detection position by conveyance when checking the position, control the driving of checking aid according to the detected departure that departs from the reference position in position deviation detection position, thereby revise to check aid with respect to the relative position that is examined circuit board, this inspection aid is set at is examined the circuit board top, and the distribution that is examined circuit board is checked by this inspection aid.Then, remove to the circuit board that is examined through checking of taking out of the position, taken out of turntable by taking out of mechanism from checking the position.
Like this because in each position, all be handle concurrently be examined the moving into of circuit board, position deviation detects, check, take out of, so a plurality of distribution inspection that is examined circuit board can be carried out at short notice.And, checking the position, can according to the detected departure that departs from the reference position that is examined circuit board of position deviation testing agency revise check aid at the setting value that is examined circuit board, thereby check that aid is correctly set at the check circuit plate, make inspection can under very high bearing accuracy, carry out and have the reliability of height.
In the foregoing circuit board checking device, also comprise, be set on the turntable, when rotating above-mentioned turntable with specified angle, can with the optical axis of the image mechanism that is positioned above-mentioned mechanicalness initial point, form the locational initial point mark of the assigned address relation in the design, detect when the initial point mark of above-mentioned turntable when above-mentioned specified angle is rotated by image mechanism, calculate the correction departure testing agency of departure of the relative position of the initial point mark that causes because of the mechanicalness error and image mechanism, corresponding to above-mentioned departure, the correction mechanism that the departure data that depart from the reference position that are examined circuit board are revised.
According to this structure, can calculate because of the image mechanism that causes of error and the relative position deviation amount of turntable in machining and the assembling, corresponding this relative position deviation amount, correction is examined the departure that departs from the reference position of circuit board.Therefore, be corrected with the image mechanism of separate drive systems and the relative position deviation of turntable, the reliability that is examined the departure data of circuit board is enhanced.
In the foregoing circuit board checking device, also comprise, be arranged at the aid telltale mark that detects aid towards the assigned address of turntable, to check that aid is set in the set mechanism of mechanicalness initial point, be set at, when rotating above-mentioned turntable with specified angle, can with the aid telltale mark of the inspection aid that is positioned the mechanicalness initial point, form the locational auxiliary camera structure of assigned address relation and ought rotate above-mentioned turntable with specified angle, when the auxiliary camera structure is set on the position that concerns with aid telltale mark formation assigned address, drive and check aid, the auxiliary camera structure, according to checking that auxiliary body is from specifying the amount of movement till the reference position begins to be captured the visual field to the specifically labelled image of aid, with the positional information with respect to the optical axis of auxiliary camera structure of aid telltale mark image in the visual field of auxiliary camera structure, the calculation mechanism of calculating out the relative position deviation amount of inspection aid and turntable.
According to this structure, check that aid is set at the mechanicalness initial point, meanwhile turntable is rotated specified angle, and the aid telltale mark that the auxiliary camera structure is set at the inspection aid that is in the mechanicalness initial point forms on the position of assigned address relation.In addition, the auxiliary camera structure drives and check that aid is till the aid telltale mark is caught in the visual field.Take the aid telltale mark by the auxiliary camera structure, the aid that goes out according to the image calculation of this shooting in the visual field of auxiliary camera structure is specifically labelled with respect to the auxiliary position information of establishing the optical axis of phase mechanism.Then, the amount of movement of the inspection auxiliary body till the auxiliary camera structure is captured in the visual field according to the specifically labelled image of aid, the position information with respect to the optical axis of auxiliary camera structure with aid telltale mark image calculates out the relative position deviation amount of inspection aid and turntable.
In the foregoing circuit board checking device, administration of power supply and the above-mentioned calculation mechanism of electric power to above-mentioned auxiliary camera structure is provided, be separately positioned on the different apparatus main bodies with above-mentioned turntable, when the auxiliary camera structure will check that the aid telltale mark of aid is arranged on the relevant position, above-mentioned calculation mechanism and electric power feed mechanism and above-mentioned auxiliary camera structure, by the contact that is in contact with one another and electrically links together, electrically linked together.And, above-mentioned contact is set on the turntable, comprise with turntable concentric ground and extending, can cover the angle that above-mentioned auxiliary camera structure moves for the setting of the relative position of confirming to check aid and turntable conductor, be set at apparatus main body one side, can and the contacted contact position of conductor and and the non-contacting position of free of conductors between the brush that moves and when the auxiliary camera structure is made a video recording, the mobile device that above-mentioned brush is moved to contact position constitutes.
According to said structure, the auxiliary camera structure will check that the aid telltale mark is set in the relevant position, electrically linked together at the auxiliary camera structure on the turntable and the calculation mechanism and the administration of power supply that are configured on the apparatus main body by joint configuration, can be checked that therefore the departure of aid detects processing.Particularly, the auxiliary camera structure will be checked when the aid telltale mark is set in the relevant position, the brush that is arranged on apparatus main body one side moves to contact position from non-contacting position, contact with the conductor on being arranged on turntable, the auxiliary camera structure is electrically linked together with calculation mechanism and administration of power supply.And when the relevant position was removed, brush moved to non-contacting position from contact position to auxiliary shooting instrument, forms contactless state with conductor with the aid orientation tool, and the auxiliary camera structure is disengaged with calculation mechanism and being electrically connected of administration of power supply.
When the power supply that must carry out the auxiliary camera structure, operation control, turntable and apparatus main body are electrically linked together, so when carrying out electric contact effectively, by conductor and brush, Yi Bian turntable makes the auxiliary camera structure carry out work according to the rotation of specified angle scope on one side.
In the foregoing circuit board checking device, the above-mentioned flat shape that is examined circuit board is similar to rectangle, foregoing circuit plate maintaining body can comprise, with be examined circuit board in the 1st convergence part that is connected mutually, one side in adjacent 2 limits, the 2nd convergence part that is connected mutually with another side in above-mentioned 2 limits, to with above-mentioned 2 limits that are examined circuit board in the limit of one side opposite face act on, the 1st pushing portion that circuit board is urged to the 1st convergence part will be examined, to with above-mentioned 2 limits that are examined circuit board in the limit of another side opposite face act on, to be examined that circuit board is urged to the 2nd pushing portion of the 2nd convergence part and to the above-mentioned the 1st, the 2nd pushing portion is examined the switching mechanism that switches between the releasing position of the pushing position of circuit board and the pushing state that releasing is examined circuit board in pushing.And, above-mentioned switching mechanism generally can comprise, act on above-mentioned the 1st, the 2nd pushing portion, make above-mentioned the 1st, the 2nd pushing portion be in the cam mechanism of pushing position at ordinary times and be in when moving into the position and taking out of the position when foregoing circuit plate maintaining body, act on above-mentioned cam mechanism, make the 1st, the 2nd pushing portion be in the cancel system of removing the position.
According to this structure, the circuit board maintaining body of turntable is moved to when moving into the position, and the circuit board that is examined that flat shape is similar to rectangle is loaded into the circuit board maintaining body, and the switching mechanism of circuit board maintaining body switches to the pushing position from removing the position.Thus, the 1st pushing portion is moved to the pushing position, is examined wherein being connected mutually with the 1st convergence part of circuit board on one side, and the 2nd pushing portion is moved to the pushing position simultaneously, the another side that is examined circuit board is connected with the 2nd convergence part, is examined circuit board and is fixed by the circuit board maintaining body.Particularly, moved to the pushing position simultaneously, be examined 2 adjacent in circuit board limits thus and be connected, be examined circuit board mutually with the 1st, the 2nd convergence part respectively and fixed by cam mechanism the 1st, the 2nd pushing portion by the circuit board maintaining body.
By operation of cam mechanism, make and be examined 2 limits and the 1st adjacent in the circuit board, the 2nd convergence part and be connected and separate, can simply and accurately locate and be fixed on the reference position of turntable being examined circuit board thus.In addition, by switching mechanism, be examined circuit board and to the handover process of taking out of the position, remained on exactly on the circuit board maintaining body from moving into the position.And, generally speaking, switching mechanism makes the 1st, the 2nd pushing portion be in the pushing position, and will move into the position and take out of the position as removing the position, except that moving into the position and taking out of the position, can mechanically keep being examined circuit board thus, and only move into the position and taking out of the position, just can operate switching mechanism, switch to and remove the position from the outside.
Circuit board inspection method of the present invention comprises, to be arranged at intervals with the turntable of a plurality of circuit board maintaining bodies with specified angle, rotate successively at interval by above-mentioned specified angle, and make the circuit board maintaining body with according to each specified angle be provided with respectively move into the position, the position deviation detection position, the mobile successively step of order of checking the position and taking out of the position, and carry out concurrently, in the above-mentioned position of moving into, to be examined circuit board is installed on the circuit board maintaining body, and fixed, in above-mentioned position deviation detection position, detect the departure that departs from the reference position of detected circuit plate, in above-mentioned inspection position, correspondence is examined the departure that departs from the reference position of circuit board, regulate after the relative position of checking aid and turntable, inspection is examined the distribution of circuit board, in the above-mentioned position of taking out of, with the step that is examined each procedure that circuit board takes out from the circuit board maintaining body through checking.
According to this circuit board inspection method, all angles rotation driven in rotation table according to appointment, the a plurality of circuit board maintaining bodies that are arranged on the turntable are removed successively to moving into the position, move into mechanism by circuit board the circuit board that is examined of specified quantity is contained on the turntable, and fixed by the circuit board maintaining body.The specified quantity that each circuit board maintaining body is fixed be examined the rotation of circuit board by turntable, removed to the position deviation detection position successively, checked the position and taken out of the position.When being examined circuit board and being removed to the position deviation detection position by turntable, the departure that departs from the reference position that is examined circuit board is detected.Be examined circuit board and removed when checking the position by turntable, the departure that departs from the reference position that correspondence is examined circuit board is regulated the relative position of checking aid and turntable, and inspection is examined the distribution of circuit board then.Then,, removed to taking out of the position through the circuit board of checking that is examined, and this is examined circuit board from the circuit board maintaining body, takes out by turntable.
Thus, simultaneously on each position, parallel execution is examined the moving into of circuit board, position deviation detects, checks, takes out of, so can check a plurality of distributions that are examined circuit board at short notice.
And, in being examined the detection operation of the departure that departs from the reference position of circuit board, detection comprises, the image mechanism that will have the optical axis and the appointment visual field is positioned the initial point setting step of mechanicalness initial point, begin to move described image mechanism until being examined the step that formed specifically labelled image comes into view on the circuit board from the mechanicalness initial point, according to above-mentioned image mechanism in the visual field, capture telltale mark the time amount of movement and the departure of the optical axis of specifically labelled image in the visual field of image mechanism and image mechanism, the step that the departure that departs from the reference position that is examined circuit board is performed calculations.In checking operation, according to the departure adjustment of calculation check aid with respect to the relative position that is examined circuit board.In addition, can on being examined the assigned address of circuit board, each form 2 above-mentioned telltale marks respectively, use above-mentioned image mechanism, in the visual field, catch above-mentioned telltale mark successively, the coordinate system that utilization is an initial point with above-mentioned mechanicalness initial point detects specifically labelled coordinate position, and calculation departs from the departure of reference position.
And, can also rotate above-mentioned turntable by specified amount, the initial point flag settings that the appointment place of this turntable is formed is in circuit board deviation detection position, above-mentioned image mechanism is according to the departure the optical axis of the image of initial point mark in the amount of movement that begins from the mechanicalness initial point to be moved when capturing till the initial point mark the visual field and the visual field and image mechanism, calculate the relative deviation amount of turntable and image mechanism, according to this departure the relative position adjustment of checking aid and being examined circuit board is revised then.
In addition, turntable can also be arranged on assigned address, rotate this turntable by specified amount, to have optical axis and specify the auxiliary camera head in the visual field to be arranged on above-mentioned inspection position, drive and check aid, make the specifically labelled image of a pair of aid that is positioned at the position of facing turntable of checking aid, in the visual field of auxiliary camera head, be captured successively; At this moment, according to amount of movement and the specifically labelled departure that departs from the optical axis the visual field of assisting camera head of aid of checking that aid begins from the mechanicalness initial point, the relative deviation amount of aid and turntable is checked in calculation, according to this departure inspection aid and the relative position adjustment that is examined circuit board is revised then.And, in foregoing circuit plate inspection method, can utilize the reference inspection aid, carry out the calculation of the relative deviation amount of checking aid and turntable.
" description of drawings "
Fig. 1 is the planimetric map that expression relates to the major part of circuit board testing fixture structure example of the present invention.
Fig. 2 is the oblique view that expression relates to the major part of circuit board testing fixture structure example of the present invention.
Fig. 3 relates to the frame assumption diagram of circuit board testing fixture of the present invention.
Fig. 4 is the synoptic diagram that explanation is defined in the Cx ' Cy ' coordinate on the turntable.
Fig. 5 is expression to the CxCy coordinate of the uneven drive controlling video camera of coordinate axis and is defined in the synoptic diagram that Cx ' Cy ' coordinate on the turntable carries out the coordinate axis inclined degree of initial point when adjusting.
Fig. 6 is the oblique view of major part that expresses support for the circuit board holding device of frame.
Fig. 7 is the synoptic diagram of the relation of expression CxCy coordinate and XY coordinate.
Fig. 8 is illustrated in a specifically labelled example schematic that forms on the holding plate.
Fig. 9 is that expression will be configured in the video camera on the turntable and be arranged on the syndeton synoptic diagram that the control part etc. of apparatus main body side electrically links together.
Figure 10 is the explanation synoptic diagram of the set-up procedure of Cx ' Cy ' the origin position of correction 1 automatically.
Figure 11 is the synoptic diagram on opportunity that expression control relates to each control signal of circuit board testing fixture of the present invention." explanation of symbol " 1 circuit board testing fixture 2 is moved into portion's (moving into device) 3 position deviation test sections (position deviation testing agency) 31 video cameras (marker detection mechanism, image mechanism) 4 inspection portions (testing fixture) 41 of 32 camera driver mechanisms (original point position mechanism) check that aid 42 contact probes 43 check aid driving mechanism (set mechanism) 44 control part (correction mechanisms, calculation mechanism, administration of power supply) 45 image processing parts (departure calculation mechanism, drift correction amount calculation mechanism) 46 tester controllers, 47 scanners, 48 operation boards 5 are taken out of portion's (taking out of mechanism) 55,56 video cameras (auxiliary camera structure), 6 circuit board conveying units, 61 turntables, 62 drive units (turntable drive unit), 7 dispenser devices 8 are taken in machine 11 and are examined circuit board 12A, 12B, 12C, 12D telltale mark 49A, 74 the 2nd convergence part 75 the 2nd pushing portion 76 the 2nd clamping section (the 2nd clamp system) 80 cam gears (switching mechanism), 84 collapse coil spring 92 tooth bars, 93 cylinders (cancel system), 94 stretch coil springs, 100 contact arrangements 110 the 1st contact portion of 49B aid telltale mark 70 circuit board holding devices (circuit board maintaining body) 71 the 1st convergence parts 72 the 1st pushing portions 73 the 1st clamping section (the 1st clamp system)
120 the 2nd contact portions
123 air cylinders (travel mechanism)
T0 initial point mark
P1 moves into the position
P2 position deviation detection position
P3 checks the position
P4 takes out of the position
" specific embodiment "
With reference to accompanying drawing a kind of embodiment that relates to circuit board testing fixture of the present invention is specifically described.The example that relates to circuit board testing fixture structure of the present invention that Fig. 1～Fig. 3 represents.Fig. 1 is the planimetric map of major part, and Fig. 2 is the major part oblique view, and Fig. 3 is a block diagram.
This circuit board testing fixture 1 comprises moves into the portion that moves into 2 that position P1 is moved in appointment in the apparatus main body with being examined circuit board 11, be arranged on from then on move into position P1 in the direction of the clock (the R direction of Fig. 1) change on 90 ° the deviation detection position P2, be used for detecting the position deviation test section 3 of the position deviation amount that departs from the reference position that is examined circuit board 11, be configured in and check on the P3 of position, to being examined circuit board 11, the inspection portion 4 that formed distribution is checked on 11, to be examined circuit board 11 through what check to what take out of position P4 by 6 conveyances of circuit board conveying unit, 11 remove the portion that takes out of 5 to the apparatus main body outside, to remove to 2 that move into position P1 and be examined circuit board 11 by moving into portion 2,11 remove to position deviation detection position P2 and from the position deviation detection position P2 inspection position P3 of half-twist in the direction of the clock, are examined circuit board 11 after will checking simultaneously, 11 remove to from checking that position P3 is by turning clockwise 90 ° the circuit board conveying unit 6 of inspection position P4.
Move into front one side (downside among Fig. 1) that position P1 is configured in circuit board testing fixture 1, position deviation detection position P2 is configured in the left side (left side among Fig. 1) of the frontal of circuit board testing fixture 1, check that position P3 is configured in the back side one side (upside among Fig. 1) of circuit board testing fixture 1, takes out of the right side (right side among Fig. 1) that position P4 is configured in the frontal of circuit board testing fixture 1.
Circuit board conveying unit 6 comprises turntable 61 and the driving mechanism that is made of the motor such as stepper motor 62 that rotate this turntable 61 of driving.Motor 62 is set at the bottom of turntable 61, and the center O T of turntable 61 is fixed on the turning axle of this motor 62 (with reference to Fig. 2).
Between motor 62 and the turning axle 61, be provided with the turning axle that ball bearing supports motor 62.In the marginal portion of turntable 61 upper surfaces, 4 are used for fixing 2 supports 13 that are examined circuit board 11,11 respectively and are configured on the orthogonal crossing diameter.The Width center line of each support 13 is consistent with diameter.Turntable 61 is fixed in the rotating shaft of motor 62, makes each support 13a, 13b, 13c, 13d correctly be positioned at moving into position P1, position deviation detection position P2, check position P3 and taking out of position P4 of circuit board respectively.In the bottom of motor 62, the scrambler of the anglec of rotation of the rotation amount that shows this motor 62 and turntable is set, this video data is transfused to control part 44, is used for the drive controlling of turntable.
In circuit board is checked, control part 44 output of display encoder on one side, on one side control be sent to the number of drive pulses of motor 62, make turntable see in the direction of the clock that from upside the step with 90 ° rotates.And, moving 90 ° of turntable revolution, 2 are examined circuit board 11,11 and are just moved into from moving into portion 2, load, are fixed in from the support 13 of moving into position P1.Moving into position P1,2 that are loaded, are fixed on the support 13 of turntable 61 are examined circuit board 11,11, rotation by turntable 61, removed to position deviation detection position P2 successively, check position P3 and take out of position P4, and carried out detection, the inspection of distribution combination and the taking out of of circuit board of the position deviation amount of circuit board described later in each position.
Therefore, check in the processing being examined circuit board 11 many, moving 90 ° of turntable revolution, just can move into position P1, position deviation detection position P2, check position P3 and take out of position P4, carry out simultaneously and abreast, utilize and move into portion 2 and move into 2 processing that are examined circuit board 11,11, utilize position deviation test section 3 to detect each to be examined the processing of the position deviation amount of circuit board 11, the processing that utilizes inspection portion 4 check circuit plates and utilization and to take out of portion 5 and will be examined the processing that circuit board 11 is taken out of.Like this, on the one hand with the marginal portion of turntable as mobile route, be examined circuit board 11 to 2,11 be rotated mobile, on the other hand on the assigned address of this mobile route, the moving into of executive circuit plate, the detection of position deviation amount, the processing of checking and taking out of simultaneously and abreast, thereby can promptly be examined circuit board 11 to many and check processing.
The control of the rotation amount of pass and turntable 61, the shield of blocking light or the reflecting plate of reflection ray can be set on the position of the allocation position that is equivalent to the support 31 on the turntable 61, on the other hand, moving into position P1, position deviation detection position P2, checking position P3 and take out of on the P4 of position optical flame detector is set, detect shield or reflecting plate by this optical flame detector, can detect the position of rotation of turntable 61, and utilize this testing result that motor 62 is stopped on the desirable position.
Circuit board testing fixture 1 move into side (among the figure main body left side), the dispenser device 7 that supply is examined circuit board 11 is set, move into portion 2 by moving into device and constitute from moving into shovel loader that position P1 extends to dispenser device 7 etc.On the other hand, circuit board testing fixture 1 take out of side (the main body right side among the figure), be provided with and take in the machine of taking in 8 that is examined circuit board 11 through checking, take out of portion 5 by constituting to taking in the conveyance devices such as shovel loader that machine 8 extends from taking out of position P4.
Position deviation test section 3 comprises, has the video camera 31 of solid-state imagers such as CCD, CMOS and drives the camera driver device 32 of this video camera 31.And, camera driver device 32 comprises again, on the P2 of position deviation detection position according to the Cx direction drive division 32X (please refer to Fig. 2) of the Cx direction mobile camera 31 that is equivalent to turntable wiring direction (above-below direction among Fig. 1), on the P2 of position deviation detection position according to the Cy direction drive division 32Y (please refer to Fig. 2) of the Cy direction mobile camera 31 that is equivalent to turntable diametric(al) (left and right directions among Fig. 1).
And in this embodiment, when support 13a, 13b, 13c, 13d were positioned at position shown in Figure 1, initial point mark T0 can be arranged on, and was the appropriate location on the radius that is positioned at-135 ° of angle positions of angle reference (θ=0 °) with the Cy axle.The desired location of initial point mark T0 has more than on the radius that is limited to-135 ° of angle positions, can also be set in and be arranged on the radius of the not inconsistent any angular position of parts such as support 13 on the turntable 61.And, 4 support 13a, 13b, 13c, 13d lay respectively on the radius of 0 °, 90 °, 180 °, 270 ° angle position of turntable 61, and the center h0 of each support 13a, 1 3b, 13c, 13d is set on the position that the mobile route S with initial point mark T0 intersects.On each support 13a, 13b, 13c, 13d, being provided with and being examined with 2 that circuit board 11,11 is fixed on h0 is the locational circuit board holding device of left-right symmetric at center.To be described in detail in the back about this circuit board holding device.
Position deviation test section 3, utilize video camera 31 to take to be brought by position deviation detection position P2 2 are examined in the circuit board 11,11 on each piece formed 2, add up to 4 telltale mark 12A, 12B, 12C, 12D (for example mark such as initial point), by calculating these telltale marks 12A～12D's, be defined in the position in the Cx ' Cy ' coordinate system (please refer to Fig. 2) on the position deviation detection position P2 of turntable 61, just can calculate 2 bias direction that departs from the reference position and departures that are examined circuit board 11,11.
The circuit board testing fixture 1 that relates to present embodiment, as hereinafter described, decision is examined the Cx ' Cy ' coordinate of the position of circuit board 11 on the CxCy coordinate of the control camera driver on the position deviation detection position P2 of turntable 61 and the turntable 61, is in consistent location by correction.The reference position of telltale mark 12A～12D is meant, checking on the P3 of position, when being examined circuit board 11,11 and being positioned at the inspection aid 41 of adjusting the reference position and being examined the position of circuit board 11,11, the coordinate in Cx ' Cy ' coordinate system of telltale mark 12A～12D.Therefore, be examined under the state of assigned address that circuit board 11,11 is fixed on support 13 exactly at 2, when putting these support 13 conveyances in place offset difference detection position P2, if the center h0 of this support 13 and Oc ° of Cx ' Cy ' true origin are consistent, the position of telltale mark 12A～12D is just consistent with the reference position in the Cx ' Cy ' coordinate system that calculates according to the photographed images of the telltale mark 12A～12D of video camera 31.
Then, at each desired location of video camera 31, the departure of picture centre that calculates the picture center of photographed images and telltale mark 12A～12D is as position deviation data, and stored.If the position deviation of the installation support 13 of turntable 61 assigned address, perhaps be examined circuit board 11,11 and be fixed on the position of departing from assigned address, when being examined circuit board 11,11 and being put in place offset difference detection position P2 by conveyance, the Cx ' Cy ' coordinate position of telltale mark 12A～12D just with to the reference position produces deviation.Therefore, position deviation data is to represent that each is examined the data that circuit board 11 departs from the situation of reference position.
And, the circuit board testing fixture 1 that relates to present embodiment, the video camera 31 of the position deviation inspection portion 3 by being independent of turntable 61, shooting is fixed on a pair of telltale mark 12A that is examined circuit board 11 on the turntable 61,12B (perhaps 12C, 12D), calculate telltale mark 12A according to this photographed images, 12B (perhaps 12C, therefore 12D) the position coordinates in the defined Cx ' Cy ' of the position deviation detection position of turntable 61 P2 coordinate system is necessary to make on the CxCy coordinate that defines for the driving of controlling video camera 31 and the turntable 61 defined Cx ' Cy ' coordinate to agree.
As shown in Figure 4, allowing turntable 61 change 135 ° clockwise makes initial point mark T0 be in position deviation detection position P2, this initial point mark T0 as the radial direction of initial point Oc ', turntable 61 as Cy ' axle, be exactly Cx ' Cy ' coordinate by the defined coordinate of foregoing.If turntable 61 is comparatively desirable with the assembling of position deviation inspection portion 3, Cx ' Cy ' coordinate is just consistent with CxCy coordinate safety, as long as make turntable 61 change 135 ° clockwise, initial point mark T0 will be in the picture center of the video camera 31 of origin position, promptly is positioned on the optical axis of video camera 31.But, in general, turntable 61 and position deviation inspection portion 3 are very little in the possibility that fit on can reach desired level, Cx ' Cy ' coordinate and CxCy coordinate can not be agreed, so, when turntable 61 was changeed 135 ° clockwise, initial point mark T0 mostly departed from the optical axis of video camera 31, perhaps departs from the visual field.
Therefore, in relating to the circuit board testing fixture 1 of present embodiment, mobile camera 31, initial point mark T0 is entered take the visual field and take the image of initial point mark T0 down, calculate the departure that departs from the picture center of initial point mark T0 according to this photographed images, calculate the departure of Cx ' Cy ' true origin Oc ' and CxCy true origin Oc according to the amount of movement of this departure and video camera 31.
And, as shown in Figure 5, under the capable situation of Cy ' axle and Cy axle irrelevancy, even initial point Oc ' and initial point OC are coincided together, because the coordinate axis of Cx ' Cy ' coordinate and CxCy coordinate is inconsistent, so also need on positive dirction and negative direction, the angle (in the present embodiment being 10 °) by appointment rotate turntable 61, initial point mark T0 is moved, simultaneously mobile camera 31 is taken initial point mark T0 in each shift position, calculates the deviation angle θ c of Cy ' axle and Cy axle.Photographed images according to the initial point mark T0 of each shift position, calculate the departure that departs from the picture center of initial point mark T0, calculate the coordinate of the shift position of the initial point mark T0 in the Cx ' Cy ' coordinate again according to the amount of movement of this departure and video camera 31, and utilize this coordinate Calculation to go out above-mentioned deviation angle θ c.
In other words, turntable 61 is rotated respectively from the position of 5 ° of above-mentioned ROT13s+10 ° and-10 °, mobile camera 31 can capture the initial point mark T0 of postrotational each position in the visual field, according to the departure that departs from the picture center of the initial point mark in the visual field of the amount of movement of video camera 31 and video camera 31, calculate initial point mark To turntable 61+10 ° of locational coordinates.With the initial point mark+setting coordinate of 10 ° of positions is cx1, cy1, is cx2, cy2 with the setting coordinate of-10 ° of positions of origin, deviation angle θ c just can calculate by following relational expression.
θc＝tan
-1(cy1-cy2)/(cx1-cx2)
Then, according to the rotation amount of Cy ' axle with the deviation angle θ c correction turntable 61 of Cy axle, the position of Cx ' Cy ' origin Oc ' (promptly, desired location to the Cx ' Cy ' coordinate of position deviation detection position P2 is adjusted) also be corrected, simultaneously the modified value of the departure of Cx ' Cy ' true origin Oc ' and CxCy true origin Oc as the drive controlling of video camera 31, this CxCy coordinate and Cx ' Cy ' coordinate in software (that is, on drive controlling) are consistent.Therefore, when the check circuit plate, be used for the CxCy coordinate of controlling and driving video camera 31 in fact to be replaced as Cx ' Cy ' coordinate.
Therefore, on turntable 61, take put in place 2 telltale mark 12A～12D that are examined circuit board 11,11 of offset difference detection position P2 of conveyances with video camera 31, when utilizing this photographed images to calculate the position information of telltale mark 12A～12D in the CxCy coordinate, this position information is the position information of the Cx ' Cy ' coordinate that is defined on the turntable 61.In addition, will be described in detail in the back in the coordinate regulatory function on the software (below, just be called automatic correction 1) about CxCy coordinate and Cx ' Cy ' coordinate.And, in circuit board is checked,, so in the following description, Cx ' Cy ' coordinate is replaced to the CxCy coordinate describes because be to revise by automatic correction 1 initial stage of carrying out.
Here, describe with regard to the circuit board holding device of support 13 with reference to Fig. 6.Circuit board holding device 70 makes the 1st clamping section 73 and the 2nd clamping section 76 synchronous workings, is positioned at assigned address on the turntable 61 with being examined circuit board 11, switches being examined circuit board 11 between clamped condition and releasing orientation.
The 1st clamping section 73 comprises, the 1st convergence part 71 with clamp circuit board 11 and the 1st pushing portion 72 relative of being examined with the 1st convergence part 71.Configuration is examined circuit board 11 between the 1st convergence part 71 and the 1st pushing portion 72, make the 1st pushing portion 72 with one side 11c contact that is examined circuit board 11 or separate by cam gear 80, thereby make the limit 11a and the limit 11c that are examined circuit board 11 be in the state that clamps/unclamp.Equally, the 2nd clamping section 76 comprises the 2nd convergence part 74 and clamps circuit board 11 and the 2nd pushing portion 75 relative with the 2nd convergence part 76 of being examined.Configuration is examined circuit board 11 between the 2nd convergence part 74 and the 2nd pushing portion 75, make the 2nd pushing portion 75 with one side 11d contact that is examined circuit board 11 or separate by cam gear 80, thereby make the limit 11b and the limit 11d that are examined circuit board 11 be in the state that clamps/unclamp.Make the 1st clamping section 73 and the 2nd clamping section 76 synchronous workings then, can be positioned at accurately on the turntable 61 being examined circuit board 11, and with its clamping.
In more detail, the 1st pushing portion 72 is fixed on the movable plate 87, and on this movable plate 87, has fixed 2 leading axles 85 again from the side.Between the push pedal 83 and movable plate 87 of leading axle 85 guiding thus, the state that is embedded in addition on the leading axle 85 is provided with collapse coil spring 84.In push pedal 83, be provided with roller bearing 82, and roller bearing 82 be connected mutually with cam 81 by the stretch coil spring 86 that is installed on the movable plate 87.In Fig. 6, the right-hand member of stretch coil spring 86 is fixed on the movable plate 87, and left end is fixed on the table 77, and the elastic force of stretch coil spring 86 is set to the elastic force that is weaker than collapse coil spring 84.
Therefore, under the clamped condition shown in the solid line, the roller 82 of push pedal 83 just is connected mutually with the application point 81a of the lug boss of cam 81, by collapse coil spring 84 movable plate 87 is pushed to clamping direction, elastic force by collapse coil spring 84 can be examined the pushing force of the 1st pushing portion 72 generation appointments of circuit board 11 in clamping, so can carry out clamp operation to being examined circuit board 11 under shakedown always.
In the lower face side of turntable 61, on cam 81, be provided with coaxial pinion wheel 91, the tooth bar 92 of pinion wheel 91 interlocks is corresponding with the piston rod 93a of cylinder 93 therewith.Tooth bar 92 is set at the downside surface of turntable 61.On the other hand, cylinder 93 and piston rod 93a, with turntable 61 be separately positioned on different apparatus main bodies corresponding to moving into position P1, taking out of the position of position P4.
One end is installed on the tooth bar 92 is fixed in stretch coil spring 94 on the turntable 61, make cam 81 all be in clamped condition (state of Fig. 6) usually.Be provided with the bullport 92a that is made of 2 slotted holes on the tooth bar 92, the guide needle that is convexly set on the turntable 61 embeds this bullport 92a.Under the state of Fig. 6, guide needle 95 is connected mutually with the right-hand member of bullport 92a, and tooth bar 92 stops at the position that makes cam 81 keep clamped condition thus.In other words, guide needle 95 has the function that makes tooth bar 92 stop at the detainer of clamped position and release position.
By the piston rod 93a of elongation cylinder 93, piston rod 93a is pushed to the left end of tooth bar 92, and tooth bar 92 moves to the upper right side of Fig. 6 along the long limit of bullport 92a thus.In Fig. 6,, make pinion wheel 91 approximately rotate 90 ° in the direction of the clock, and make cam 81 be indexed to releasing orientation (state shown in two dot-and-dash lines among Fig. 6) by mobile rack 92.By the displacement of cam 81, the roller bearing 82 of push pedal 83 is connected mutually with application point 81, and support 13 enters releasing orientation.The 2nd pushing portion 75 by and the same cam gear 80 of the 1st pushing portion 72 by driven in synchronism.
In the inspection of circuit board is handled, support 13 enters and moves into position P1, when taking out of position P4, piston rod 93a is relative with the end face of tooth bar 92, by control part 44 operation cylinders 93, make the effect of piston rod 93a opposing stretch coil spring 94, tooth bar 92 is depressed into the upper right side of Fig. 6, drives pinion wheel 91,91 and rotate, make the lug boss 81 of cam 81 avoid roller bearing 82.Therefore, by the effect of stretch coil spring 86, movable plate 87 is retreated to the release position, thus be examined circuit board reception, take out of and be able to possibility.
After finishing the reception that is examined circuit board, taking out of, piston rod 93a backs out from tooth bar 92, and tooth bar 92 is moved to the lower left of Fig. 6 by the elastic force of stretch coil spring.Thus, to counter-rotation, lug boss 81a acts in the push pedal 83 by roller bearing 82 by pinion wheel 91 cams 81, makes movable plate 87 move to clamped position.Tooth bar 92 by guide needle 95 and bullport 92a, is parked in the position of the lug boss 81a of cam 81 to push pedal 83 generation effects, and leaves the clamped condition that can also keep cam mechanism 80 after moving into the position or taking out of the position at turntable 61.And, all be provided with a tooth bar 92 at each support 13, in illustrated embodiment, to support 13, the font of pressing " eight " is provided with a pair of tooth bar 92 at each.In addition, moving into the position, taking out of the position one countercylinder 93 is set respectively.
In this circuit board holding device 70, to be examined circuit board 11 devices on turntable 61, synchronous working by the 1st clamping section 73 and the 2nd clamping section 76, adjacent 2 limit 11a, the 11b that are examined circuit board 11 are being subjected under the state of supporting in the 1st convergence part 71 and the 2nd convergence part 74, the 1st pushing portion 72 and the 2nd pushing portion 75 just with other 2 limit 11c, 11d contact separation, thus, promptly can the inspection reference position that circuit board is positioned at appointment on the turntable 61 accurately will be examined, and clamped, can switch to simply again and remove the releasing orientation that clamps.
And, cam gear by separately makes the 1st pushing portion 72 and the 2nd pushing portion 75 and is examined circuit board 11 contact separations, can carry out the switching of clamped condition and releasing orientation to support 13 exactly thus, and make to be examined circuit board 11 and to move to when taking out of the position, keep clamped condition always from moving into the position.And the circuit board 11 that is examined that is in clamped condition keeps by pushing spring 84 appointed pushing forces, thereby can improve the bearing accuracy that is examined circuit board 11.
Lay respectively at the upper and lower surface that is examined circuit board 11 in order to make, top described later checks that the contact probe 42 of aid 41 and bottom inspection aid 41 is in contact with one another, check simultaneously from the two sides, so, on the table 77 of support 13, be provided with opening, make to be examined circuit board 11 and to be supported to expose lower surface when frame 13 is clamped.
As shown in Figure 3, inspection portion 4 is made of top inspection unit 4U and bottom inspection unit 4D, its middle and upper part inspection unit 4U is used for checking the distribution combination that forms on the circuit board 11 being examined, and bottom inspection body 4D is used for checking the distribution combination that forms at the lower surface that is examined circuit board 11.Top inspection unit 4U is configured in the top of checking position P3 across turntable 61, and bottom inspection unit 4D is configured in the below of checking position P3 across turntable 61.These two inspection unit 4U, 4D have identical structure, and are symmetrical across turntable 61 in configuration.Therefore, here, only the structure to top inspection unit 4U describes, and inspection unit 4D then encloses same symbol about the bottom, and omits its explanation.
As shown in Figure 3, check that aid driving mechanism 43 comprises, make the directions X aid drive division 43X that checks that aid 41 moves at directions X at main body, the Y direction aid drive division 43Y that is connected and inspection aid 41 is moved in the Y direction with directions X aid drive division 43X, θ rotation aid drive division 43 θ that are connected and inspection aid 41 is rotated around the Z axle with Y direction aid drive division 43Y, and be connected with θ rotation aid drive division 43 θ and make the Z direction aid drive division 43Z that checks that aid 41 moves in the Z direction.Check that aid driving mechanism 43 is controlled the controlling and driving of portion 44.
Therefore, drive each aid drive division 43X, 43Y, 43Z, 43 θ that check aid driving mechanism 43 by control part 44, make the position of checking aid 41 obtain relatively determining at turntable 61, can also allow and check aid 41, make each contact probe 42 and be formed on specified connecting point position (inspection position) that the distribution that is examined on the circuit board 11 makes up and contact or separate in above-below direction (Z direction) lifting.
Because circuit board testing fixture 1, each is fixed 2 and is examined circuit board 11 on 4 supports 13 that are provided with on the turntable 61, with its from move into position P1 successively conveyance to checking position P3, allow a plurality of contact probes 42 that are configured on the inspection aid 41 contact with the distribution combination that is examined circuit board 11, check to carry out, so, 2 that fix on each support 13 are examined circuit board 11,11 by conveyance when checking position P3, just be necessary to make the probe 42 that respectively contacts who checks aid 41 to be examined circuit board 11 with this, 11 distribution combination contact exactly.Thus, because having possessed to allow, circuit board testing fixture 1 checks that aid 41 moves in XYZ θ direction, make each contact probe 42 who checks aid 41 and the distribution that is examined circuit board 11,11 make up contacted structure, be used for controlling and driving and check aid 41 so just be necessary to obtain, make and check aid 41 and be examined the tram information that is examined circuit board 11 in the XY coordinate that circuit board 11 is in desirable relative position relation.
In other words, as shown in Figure 7, be necessary checking position P3, the CxCy coordinate that is examined circuit board 11,11 positions that is used for defining on the support 13 that is fixed on turntable 61 and the driving for control inspection portion 4 are agreed at the XY coordinate (with reference to Fig. 2) that this inspection portion 4 sets, with the position information that is examined circuit board 11 in the CxCy coordinate as the position information that is examined circuit board 11 in the XY coordinate.Particularly, owing to be examined the position information of circuit board 11, be as the deviation information that departs from the reference position in the CxCy coordinate, be detected by position deviation test section 3, so just be necessary to allow CxCy coordinate and XY coordinate agree, the deviation information that departs from the reference position that this deviation information be can be used as in the XY coordinate is reflected.
Because inspection portion 4 also has the identical driving control device that is independent of turntable 61 with position deviation test section 3, have and use the function (serve as correction 2 automatically to call this function in the following text) of adjusting CxCy coordinate and XY coordinate with the same method of position deviation test section 3 so relate to the circuit board testing fixture 1 of present embodiment.The back will give a detailed account to automatic correction 2.
The coordinate adjustment of CxCy coordinate and XY coordinate (promptly, the location of the inspection aid 41 of inspection portion 4), be to take at the assigned address with turntable 61 adjacently situated surfaces of holding plate 411 set a pair of telltale mark 49A, 49B (such as the round dot mark etc.), utilize this photographed images to revise the position deviation of the Cx ' Cy ' coordinate of the XY coordinate of inspection portion 4 and turntable 61 by the set video camera of the assigned address on the turntable 61 55.As shown in Figure 1 and Figure 2, in-45 ° of slotted holes that radial location is set with respect to the benchmark angle of turntable 61, video camera 55 disposes towards upside, and the optical axis of video camera 55 and mobile route S are intersected.For example shown in Figure 8, telltale mark 49A, 49B are arranged on the transverse axis M direction on the symmetric position with respect to the 25cm of horizontal rectangular holding plate 411 center O.In addition, the formation position of telltale mark 49A, the 49B on the holding plate 411 has more than the example that is limited to Fig. 8.Also can form many in any symmetric position of relative holding plate 411 center O to telltale mark.
The location of the inspection aid 41 of bottom inspection unit 4D, also be to take a pair of telltale mark 49A, 49B by video camera set on the turntable 61 56, utilize this photographed images to position, but, as shown in Figure 1 and Figure 2, with respect to the benchmark angle of turntable 61+the set slotted hole of assigned address on 135 ° of position radiuses in, video camera 56 disposes towards downside, and the optical axis of video camera 56 and mobile route S are intersected.
What Fig. 9 was represented is, is arranged on control part 44 on the different device main body etc., the syndeton when electrically being linked together with video camera 55,56 and turntable 61 set on the turntable 61.
Because video camera 55,56 is installed on the turntable 61 that carry out to rotate, so the circuit and video camera 55, the 56 usefulness electric wires of carrying out to being arranged on video camera 55,56 on the different device main body and providing the data of the circuit of power supply, photographed images etc. with turntable 61 of input and output merely can't be linked together.So, in relating to the circuit board testing fixture 1 of present embodiment, the contact arrangement 100 that turntable 61 bottoms are set, (not shown with this circuit of connecting, disconnecting video camera 55,56 and apparatus main body side, for example utilize the feed circuit of video camera 55,56 and photographed images etc. to specify circuit of calculation etc.), when beginning to operate video camera 55,56, open contact arrangement 100, the circuit and the video camera 55,56 of apparatus main body side are connected, by this kind structure, related problem is solved.
The 2nd contact portion 120 is made of many handles (present embodiment is 6) brush 122 and displacement component 123, wherein many brush 122 is arranged on the holding components 121 to establish corresponding to the interval of formed multiple conducting wires 112 on the base component 111 of the 1st contact portion 110, and displacement component 123 is for the above-mentioned brush 122 of lifting, can be made of air cylinder etc.The a pair of brush 122 corresponding with power lead is connected with the power supply that is arranged on apparatus main body side (figure slightly), brush 122 corresponding to control line is connected with the control part 44 (with reference to Fig. 3) that is arranged on apparatus main body side, is connected with the image processing part 45 (with reference to Fig. 3) that is arranged on apparatus main body side corresponding to the brush 122 of DOL Data Output Line.
Holding components 121 is fixed on the top of the piston rod 123a of air cylinder 123, by stretching of this piston rod 123a, contact arrangement 100 can switch between, the lead 112 of the 1st contact portion 110 and non-on-state (state of representing with solid line among Fig. 9) that the brush of the 2nd contact portion 120 122 contacted on-states (state of representing with 2 dot-and-dash lines among Fig. 9) and lead 112 separate with brush 122.And, in above-mentioned automatic correction 2, when using video camera 55,56, make contact arrangement 100 enter on-state by operation displacement component 123, the circuit that is fixed on the video camera 55,56 on the turntable 61 and is arranged on apparatus main body side is just electrically linked together, and video camera 55,56 just can be taken.And, owing to when common inspection, do not use video camera 55,56, so contact arrangement 100 can be set in non-on-state.
In addition, under the situation that the connecting point position of the 2nd contact portion 120 of turntable 61 does not change, be that video camera 55,56 is parked in the inspection position, only by checking that aid revises under 2 the situation automatically, the contact electrode that is equivalent to the lead 112 of the 1st contact portion 110 can be arranged on video camera 55,56 and be positioned at connecting point position when checking the position.In the automatic correction 2 of present embodiment, for rotation by turntable 61, can make video camera 55,56 move to the telltale mark 49A that can take inspection portion 3, the position of 49B, so lead 112 is set to rail-like, like this, (that is, variation has taken place the connecting point position of the 2nd contact portion 120 of turntable 61) can operate video camera 55,56 exactly when video camera 55,56 moves the specified angle scope.
Get back to Fig. 3, control part 44 is by CPU (Central Processing Unit), ROM (Read Only Memory), RAM formations such as (Random Access Memory).In ROM, store program and the execution of carrying out correction 1,2 automatically and be examined the program that circuit board 11 is checked operations.CPU reads these programs from ROM and deposits into RAM again, and according to carrying out these programs from the indication of operation board 48 inputs, with the function that realizes that correction 1,2 automatically and circuit board are checked.
45 pairs of photographed images from video camera 31,55,56 inputs of image processing part are carried out the processing of appointment, this are handled the result again and import the control step 44.Particularly, in the marking image center that calculates initial point mark T0, telltale mark 12A～12D, aid telltale mark 49A, 49B, calculating with the picture center is the position at the marking image center in the XY coordinate of initial point, again this result of calculation is input to control part 44.As mentioned above, turntable 61 and position deviation inspection portion 3, inspection portion 4 are being carried out the initial point adjustment and when being examined deviation that circuit board 11 departs from the reference position and detecting, just can utilize the position information of telltale mark 49A, the 49B of this initial point mark T0, telltale mark 12A～12D, aid.
The switching controls of the switches set of scanner 47 is undertaken by tester controller 46.Tester controller 46 is carried out the switching of the switches set of scanner 47 according to the changeover program of switches set, and wherein, switches set is predefined according to the distribution combination that is examined circuit board 11.The switching of this switches set is to be used for switching successively and being connected on the power supply being formed on a plurality of distributions combination that is examined on the circuit board 11, at the state of the connection of each distribution combination of judgement section judges or insulation.Such as when connecting, judging part detects the output voltage of each distribution combination, compares by the critical value with this detected value and appointment, judges the quality of each distribution combination.Then, this judged result is transfused to tester controller 46, again by these tester controller 46 input control parts 44.If all the inspection of distribution combination finishes, even a bad distribution combination only occurs, control part 44 just is examined this circuit board 11 as defective products, and the combination of whole distributions all is good, just this is examined circuit board 11 as good product.
Below, just the running program of correction 1 describes automatically.
As mentioned above, revising the 1 CxCy coordinate that makes the Cx ' Cy ' coordinate on the position deviation detection position P2 that is set in turntable 61 and be set in position deviation test section 3 automatically agrees.This coordinate adjustment is undertaken by step S1 and step 2, wherein step S1 adjusts Cx ' Cy ' origin position (desired location of initial point mark T0), step S2 calculates the Cx ' Cy ' coordinate of the turntable 61 that origin position was adjusted and the CxCy origin departure of position deviation test section 3, with the modified value of this departure, on software, Cx ' Cy ' coordinate and CxCy coordinate are adjusted as the drive controlling of position deviation test section 3.
As shown in figure 10, step S1 is, when assembling circuit board checking device 1, setting on turntable 61 with initial point mark T0 is that origin position, diametric(al) are that Cy ' axle, tangential direction are the Cx ' Cy ' coordinate of Cx ' axle, rotating turntable 61, when making this Cx ' Cy ' rotation of coordinate move to position deviation detection position P2, can calculate the turned position (initial point Oc ' moves on to the turned position of initial point Oc among Figure 10) of the turntable 61 that the coordinate axis of the coordinate axis of the CxCy coordinate of sening as an envoy to and Cx ' Cy ' coordinate is parallel to each other.In other words, be to calculate the CxCy origin position that the coordinate axis of the coordinate axis of the CxCy coordinate of sening as an envoy to and Cx ' Cy ' coordinate is parallel to each other.
Automatically the concrete operations step of correction 1 is as follows.At first, insert power initiation circuit board testing fixture 1, rotate turntable 61, make control part 44 show the output of rotary encoders.When detecting turntable 61 near origin position according to the output of rotary encoder, control part 44 slows down the rotational speed of turntable 61 improving the accuracy of detection of position of rotation, when detecting turntable 61 when having arrived origin position, turntable 61 is stopped operating.
Go according to this, after turntable 61 is set at origin position, make turntable 61 rotate specified angle (among this embodiment, θ 1=135 °), initial point mark T0 is moved to position deviation detection position P2.Simultaneously, the Cx direction drive division 32X and the Cy direction drive division 32Y of operation camera driver mechanism 32 move to the CxCy origin with video camera 31.The location of this initial point, at first operate Cx direction drive division 32X, press assigned direction (for example+direction) actuated camera 31 of Cx coordinate, the detection part that moves together with video camera 31 contacts with limited switching, the operational boundaries switch makes the driving direction counter-rotating of video camera 31, presses distance to a declared goal mobile camera 31 then from the limited switching detection position to determine the Cx direction origin position of video camera 31.Close and the Cy direction, with same step, the Cy direction origin position of camera 31 is determined in the position after moving by distance to a declared goal from the limited switching detection position according to video camera 31.The initial position mechanically set of video camera 31 is mechanicalness initial point O like this
M(0,0).
As mentioned above, if turntable 61 and position deviation test section 3 can be assembled more satisfactoryly, be set in mechanical origin O so
MJust should there be the initial point mark T0 that moves to position deviation detection position P2 at the center, the visual field of the video camera 31 of (0,0) (center of picture).But, in general, owing to can not assemble turntable 61 and position deviation test section 3 ideally, so the many narrow visuals field that can depart from video camera 31 of initial point mark T0.
Secondly, mobile camera 31 makes initial point mark T0 enter the visual field of video camera 31, and passes through video camera 31 and take initial point mark T0.Then, calculate the picture centre of initial point mark T0 and the departure at picture center (δ x2, δ y2) according to this photographed images, more thus the amount of movement of departure and video camera 31 (δ x1, δ y1) calculate initial point mark T0 depart from mechanicalness initial point O
MDeparture (δ x1+ δ x2, the mechanicalness position of the video camera 31 of the departure when δ y1+ δ y2), the image that calculates initial point mark T0 is caught in the visual field of video camera 31 (Cx ' Cy ' origin Oc ' position) is the hypothesis initial point Os of CxCy coordinate.Under this state, CxCy origin Oc and Cx ' Cy ' origin Oc ' are agreed, owing to do not confirm the parallel degree of the coordinate axis of two coordinates, so just be assumed to be initial point Os.
Secondly, with reference position (θ=0), the present position of turntable 61 as rotation angle, allow turntable 61 by only rotating 10 ° clockwise, initial point mark T0 is moved in the CxCy coordinate, video camera 31 is moved to the shift position (X θ 1, Y θ 1) of initial point mark T0 from hypothesis initial point Os.If Cy axle and Cy ' axle are consistent, initial point mark T0 just enters the visual field of video camera 31, and Cy axle and Cy ' axle is not when consistent, even video camera 31 is moved to (X θ 1, the situation that initial point mark T0 can't enter video camera 31 visuals field also can take place in position Y θ 1), so need further suitably to adjust mobile camera 31, make initial point mark T0 enter the visual field of video camera 31, take the image of initial point mark T0 thus.
So, the departure of the amount of movement when in the visual field, capturing above-mentioned photographed images, center, the visual field and initial point mark center according to video camera 31, the coordinate position of initial point mark T0 in the CxCy coordinate of hypothesis initial point Os when calculating initial point mark T0 and rotating+10 ° (cx1, cy1).
Secondly, make turntable 61 return the position of hypothesis initial point Os, and from then on the position by rotating counterclockwise 10 °, initial point mark T0 just moves on the CxCy coordinate, simultaneously video camera 31 is moved to shift position (the X θ 2 of initial point mark T0, Y θ 2) on, use is same as turntable 61 by the method for only rotating 10 ° clockwise from the reference position of rotation angle, calculate with the coordinate position of the initial point mark T0 of initial point mark T0 when reference position rotation has been moved-10 ° the CxCy coordinate of hypothesis initial point Os (cx2, cy2).
Then, (cx1, cy1), (cx2 cy2), passes through following formula to the CxCy coordinate of the shift position of use initial point mark T0 when rotation is moved ± 10 °
θ c=tan
-1{ (cy1-cy2)/(cx1-cx2) } ... (1) calculates the deviation angle θ c of Cy axle and Cy ' axle, turntable 61 is rotated the deviation angle θ c that departs from the reference position of rotation angle, CxCy coordinate and Cx ' Cy ' coordinate are parallel to each other.Thus, the processing of end step S1.In addition, can clearly be seen that from above-mentioned (1) formula, if Cy axle and Cy ' axle is parallel to each other, so, the relative Cy rotational symmetry in shift position when initial point mark T0 rotation is moved ± 10 °, this moment cy1=cy2, θ c=0.
Then, the processing of beginning step S2.The rotation of the misalignment angle by turntable 61, variation has taken place in the position of initial point mark T0 in the CxCy coordinate, so, need once more video camera 31 to be moved to the shift position after initial point mark T0 moves misalignment angle θ c, take the image of this initial point mark T0, the position (Cxh, Cyh)) of initial point Os in the CxCy coordinate (supposed in the shift position that calculates initial point mark T0 according to this photographed images.
The correction of angle θ c is carried out in reference position to the rotation angle of turntable 61, simultaneously, to be used for the CxCy origin position correction of controlling and driving video camera 31 to (Cxh, Cyh), the CxCy coordinate of drive controlling turntable 61 and video camera 31 and Cx ' Cy ' coordinate are agreed.Thus, the processing of end step S2.
Therefore, be reflected in the θ c that calculates by automatic correction 1 in the Spin Control of turntable 61 as modified value, simultaneously (Cxh, Cyh) modified value as initial point is reflected in the drive controlling of video camera 31, like this, CxCy coordinate and Cx ' Cy ' coordinate are agreed, can detect (concrete is to detect to depart from the departure of reference position) with higher degree of accuracy to the placement location that is examined circuit board 11 by position deviation test section 3.
Secondly, just the sequence of operation of automatic correction 2 is illustrated.Because the automatic correction 2 of top inspection unit 4U and bottom inspection unit 4D is identical basically, so, in the following description, only top inspection unit 4U is described.
As mentioned above, revising the 2 Cx ' Cy ' coordinates that rotation by turntable 61 moved to check locational turntable 61 (with identical through the CxCy coordinate revised) automatically agrees with the XY coordinate that is set in inspection portion 4.This coordinate adjustment is a mechanicalness initial point of setting the 4XY of inspection portion coordinate with the main auxiliary instrument exactly, detect the departure of this XY coordinate and the deviation from origin of rotating this CxCy coordinate of turntable 61 when the CxCy rotation of coordinate being moved to check position P3, with this departure as the modified value of the drive controlling of inspection portion 4, in control, XY coordinate and CxCy coordinate are agreed.
Particularly, at first, the main auxiliary instrument that has formed aid telltale mark 49A, 49B exactly is installed is checked aid 41 to replace, each aid drive division 43X of operation inspection aid drive unit 43,43Y, 43Z, 43 θ make the main auxiliary instrument move to XYZ θ true origin.Move by this mechanicalness is set the initial position of XY coordinate of main auxiliary instrument as mechanicalness initial point O
M'.And the mechanicalness initial point of this main auxiliary instrument is set, and sets identically with the origin position of above-mentioned video camera 31, is to drive the main auxiliary instrument to colliding limited switching on each change in coordinate axis direction, and carries out after the inversion driving ormal weight.In addition, the part except contact probe group among the specifically labelled formation face of the aid of main auxiliary instrument and Fig. 8 is identical.
Secondly, turntable 61 is turned clockwise 135 ° from mechanical origin (state of Fig. 1), video camera 55 is moved to check position P3.By automatic correction, with modified value θ c the drive controlling of turntable 61 is revised, like this, the optical axis that moves to the video camera 55 of checking position P3 just and the CxCy true origin Oc that is set in inspection position P3 of turntable 61 agree.
Secondly, the main auxiliary instrument is only moved-25mm in X-direction, 49A moves to mechanical origin O with the aid telltale mark
M', simultaneously, video camera 55 is reduced to the position (focal position of video camera 55) that can discern telltale mark 49A in Z-direction.If the CxCy coordinate is consistent with the XY coordinate, the picture centre of aid telltale mark 49A just should be in the picture center of video camera 55, if not so, in order to calculate the departure at two centers, make after the picture centre of aid telltale mark 49A enters the picture of video camera 55 at mobile main auxiliary instrument suitably, take the image of aid telltale mark 49A.Then, photographed images calculates the picture centre of aid telltale mark 49A and departure (the △ X1a at picture center thus, △ Y1a), departure (△ X1a thus again, △ Y1a) and the amount of movement of main auxiliary instrument (△ X2a, △ Y2a) calculate the aid telltale mark 49A in the CxCy coordinate the position (Xa, Ya)=(△ X1a+ △ X2a, △ Y1a+ △ Y2a).
Secondly, the main auxiliary instrument is retracted mechanical origin O
M' afterwards, move main auxiliary instrument+25mm in X-direction, make aid telltale mark 49B be in mechanicalness initial point O
M', the position (focal position of video camera 55) that video camera 55 is reduced to discern telltale mark 49B on Z-direction, if the image of aid telltale mark 49B does not enter the picture of video camera 55, just mobile main auxiliary instrument makes the image of aid telltale mark 49B enter the picture of video camera 55 again.Then, take the image of aid telltale mark 49B, photographed images calculates the picture centre of aid telltale mark 49B and departure (the △ X1b at picture center thus, △ Y1b), the amount of movement (△ X2b, △ Y2b) of departure (△ X1b, △ Y1b) and main auxiliary instrument calculates the position (Xb of the aid telltale mark 49B in the CxCy coordinate thus again, Yb)=(△ X1b+ △ X2b, △ Y1b+ △ Y2b).
Secondly, utilize aid telltale mark 49A, 49B the CxCy coordinate (Xa, Ya), (Xb Yb), calculates modified value △ X, △ Y, the △ θ d that send as an envoy to XY coordinate and CxCy coordinate are agreed according to following (2) formula～(4) formula.In addition, modified value (△ X, △ Y) is the modified value that XY origin O and CxCy origin Oc are agreed, and modified value △ θ d is the angle modification value that after the initial point adjustment of XY coordinate axis and θ axle coordinate axis is agreed.
△X＝(Xa+Xb)/2… (2)
△Y＝(Ya+Yb)/2… (3)
△θd＝tan
-1{(Yb-Ya)/(Xb-Xa)}… (4)
Secondly, according to modified value △ X, △ Y, △ θ d, confirm whether XY coordinate (being in the software) on the drive controlling of inspection portion 2 is consistent with the CxCy coordinate.This is confirmed to be, after the initial point Os of main auxiliary tool settings in software, take aid telltale mark 49A, the 49B of main auxiliary instrument with video camera 55, photographed images calculates the position of the CxCy coordinate of aid telltale mark 49A, 49B thus, and carry out according to this result of calculation.
In other words, the main auxiliary instrument is moved to mechanical origin O
M' afterwards, again with each aid drive division 43X, 43Y, 43Z, 43 θ of modified value △ X, △ Y, △ θ d operation inspection aid drive unit 43, make the main auxiliary instrument move to initial point Os in the software.If under this state, XY coordinate and CxCy coordinate are consistent, aid telltale mark 49A, the 49B of main auxiliary instrument just should be in respectively on the Cx axle of CxCy coordinate+25mm and-position of 25mm.At first rotate turntable 61, make the just in time position of aligning+25mm of video camera 55 in+direction by the angle θ of appointment.For example, the optical axis position of the video camera 55 on the turntable 61 departs from rotation center O
TAbout 350mm, so, θ=tan
-1(25/350) ≈ is 4.09 °.Then, take aid telltale mark 49A, calculate according to the amount of movement of this photographic images and video camera 55 position in the CxCy coordinate of aid telltale mark 49A (Cxa, Cya).
Secondly, rotate turntable 61 by the angle θ of appointment in-direction, video camera 55 is just in time aimed on the Cx axle of CxCy coordinate-position of 25mm, use the same method and take the image of aid telltale mark 49B, thus the amount of movement of photographic images and video camera 55 calculate aid telltale mark 49B the position (Cxb, Cyb).If the XY coordinate is consistent with the CxCy coordinate, the Cy coordinate Cyb of the Cy coordinate Cya of the aid telltale mark 49A of main auxiliary instrument and the aid telltale mark 49B of main auxiliary instrument just should be identical, so this just can judge the consistance of XY coordinate and CxCy coordinate than two Cy coordinates.If XY coordinate and CxCy coordinate are inconsistent in the allowed band of appointment, just adjust with parallel combination position deviation test section 3, and reaffirm above-mentioned automatic correction 2 and coordinate adjustment inspection portion 4.
In addition, the coordinate adjustment of the XY coordinate of the inspection aid 41 that is driven by the inspection aid drive unit 43 of bottom inspection body 4D and the CxCy coordinate of turntable 61 can utilize video camera 56, carries out with method same as described above.
Therefore, to be reflected in the drive controlling of checking aid drive unit 43 as modified value by △ X, △ Y, the △ θ d that automatic correction 2 calculates, confirm that in fact step only can make XY coordinate and CxCy coordinate agree when initial assembling is adjusted, and the probe 42 that respectively contacts who checks aid 41 is contacted exactly with the appointment contact position of conveyance to the distribution combination that is examined circuit board 11 of checking position P3.
In addition, in the explanation of the invention described above embodiment, when utilizing video camera 31 automatic shooting to be examined the telltale mark 12A～12D of circuit board 11 and initial point mark T0, and when utilizing auxiliary camera 55,56 automatic shooting to check telltale mark 49A, the 49B of aids 41, video camera is moved to and can the precalculated position of these mark income camera coverages be taken then.When manually taking, operate video camera on one side, confirm to mark whether to enter the visual field of video camera on one side by display picture, mobile camera or check aid when mark comes into view, stops the mobile of video camera or inspection aid simultaneously.
Below, be illustrated with regard to the circuit board checked operation of circuit board testing fixture 1.
Figure 11 is the illustrative circuitry plate time diagram on operation opportunity of checking.In this figure, (a)～(d) be the signal time chart that the circuit board holding device 70 of moving into the support 13 on the P1 of position of portion 2 and turntable 61 is moved in control operation, (e), (f) is the signal time chart of control operation position deviation test section 3, (g)～(i) being the signal time chart of control operation inspection portion 4, (j)～(l) is the signal time chart that the circuit board holding device 70 of taking out of the support 13 on the P4 of position of portion 5 and turntable 61 is taken out of in control operation.(a)～(l) theing contents are as follows of control signal CS1～CS43 is described.
CS1: the signal that control turntable 61 rotates.Connecting (high level) time period is the time period that turntable 61 rotates, and is the static time period of turntable 61 and disconnect (low level) time period.
CS11: control operation move into portion 2 lifting arm (be used for catching be examined circuit board 11, with its conveyance and be assemblied in support arm on the support 13), the signal of catching the chuck that is examined circuit board 11.High level time section (catching the time period that is examined circuit board 11) is exactly the time period of chuck locking, and low level time section (not catching the time period that is examined circuit board 11) is exactly the time period that chuck is opened.And the time period that level changes is that chuck is being opened or just in time period of locking.
CS12: the signal of the lifting arm of portion 2 is moved in control operation.The high level time section is the time period that lifting arm is in lifting position, and the low level time section is the time period that lifting arm is in down position.And the time period that level changes is the time period that lifting arm is rising or descending.
CS13: control operation is positioned at the signal of the circuit board holding device 70 of the support 13 of moving into position P1.The low level time section is catching of circuit board holding device 70 time period of being examined the chuck of circuit board 11 and opening (is examined circuit board 11 and is not fixed on time period on the support 13), and the high level time section is the time period (be examined circuit board 11 and be fixed on time period on the support 13) of chuck locking.And the time period that level changes is that chuck is being opened or just in time period of locking.
CS21: the signal of the camera operation of control video camera 31.The high level time section is the time period of carrying out camera operation, and the low level time section is the time period of not carrying out camera operation.
CS22: the signal of the move operation of control video camera 31.The high level time section is the time period of carrying out move operation, and the low level time section is the time period of not carrying out move operation.
CS31: the signal of the move operation of aid 41 on the XY direction is checked in control.The high level time section is the time period of carrying out move operation, and the low level time section is the time period of not carrying out move operation.
CS32: the signal of the move operation (descending operation) of aid 41 on the Z direction is checked in control.The high level time section is to check that aid 41 is positioned at the time period of down position (contact probe 42 and be examined the 11 contacted time periods of circuit board), and the low level time section is to check that aid 41 is positioned at the time period of lifting position (contact probe 42 and be examined the 11 discontiguous time periods of circuit board).And, the time period of the time period that level changes for checking that aid 41 is rising or descending.
CS33: control is examined the signal of the checked operation of circuit board 11.The high level time section is the time period that is being examined the inspection of circuit board 11, and the low level time section is the time period that is not examined the inspection of circuit board 11.
CS41: control operation is by the signal of conveyance to the circuit board holding device 70 of the support 13 of taking out of position P4.The low level time section is catching of circuit board holding device 70 time period of being examined the chuck of circuit board 11 and opening (is examined circuit board 11 and is not fixed on time period on the support 13), and the high level time section is the time period (be examined circuit board 11 and be fixed on time period on the support 13) of chuck locking.And the time period that level changes is that chuck is being opened or just in time period of locking.
CS42: the signal of the lifting arm of portion 5 is taken out of in control operation.The high level time section is the time period that lifting arm is in lifting position, and the low level time section is the time period that lifting arm is in down position.And the time period that level changes is the time period that lifting arm is rising or descending.
CS43: the lifting arm signal (be used for catching and be examined circuit board 11, conveyance to the support arm of taking in machine 8), that catch the chuck that is examined circuit board 11 of portion 5 is taken out of in control operation.The low level time section is exactly the time period (not catching the time period that is examined circuit board 11) that chuck is opened, and the high level time section is exactly the time period (catching the time period that is examined circuit board 11) of chuck locking.And the time period that level changes is that chuck is being opened or just in time period of locking.
Figure 11 has illustrated to be assembled to moving into after the support 13 on the P1 of position of turntable 61 2 being examined circuit board 11,11, allow turntable 61 rotate+90 ° and carry out conveyance at moment t0, till t10 constantly, check position P2, check position P3 and take out of position P4 and operate being examined the moving into of circuit board 11, the detection of position deviation, the inspection and the taking out of of circuit board of circuitous pattern simultaneously moving into position P1, position deviation.
At moment t0, the rotating operation of beginning turntable 61, at moment t2, the rotating operation of turntable 61 is once stopping, and the operation of moving into portion 2 and taking out of portion 5 also just stops.And the time from moment t0 to moment t2 is to make turntable 61 rotate 90 ° of needed times, is that the rotational speed according to turntable 61 changes.
That is to say, moving into position P1, when the lifting arm that will move into portion 2 was set in lifting position (control signal CS12 remains on high level), the chuck of lifting arm was just by locking (control signal CS11 remains on high level).Here it is a kind of time period in order to rotate at turntable 61, is examined circuit board 11,11 with following 2 and moves into turntable 61, just be examined circuit board 11,11 to the situation of moving into position P1 conveyance by moving into 2 that portion 2 catches dispenser device 7 to be supplied from moving into position P1.And,, move to the chuck of circuit board holding device 70 of support 13 of position deviation detection position P2 just by locking (control signal CS13 remains on low level) from moving into position P1 by the rotation of turntable 61.Here it is a kind ofly is examined the situation that circuit board 11,11 is fixed on support 13 with put in place 2 of offset difference detection position P2 of conveyance.
And, taking out of position P4, when the lifting arm that will take out of portion 5 was set in lifting position (control signal CS42 remains on high level), the chuck of lifting arm was just by locking (control signal CS43 remains on low level).Here it is a kind of time period in order to rotate at turntable 61,2 that inspection is finished are examined circuit board 11,11 and take out of, deliver to the machine of taking in 8 from taking out of position P4, just by the portion of taking out of 5 catch 2 be examined circuit board 11,11, from the support of taking out of position P4 13 of turntable 61 to the situation of taking in machine 8 conveyances.And, conveyance to the chuck of the circuit board holding device 70 of the support of taking out of position P4 13 of turntable 61 just by locking (control signal CS41 remains on high level).Here it is a kind ofly is examined the situation that circuit board 11,11 is fixed on the support 13 with conveyance to 2 that take out of position P4.
On the other hand, at position deviation detection position P2, when the rotating operation of moment t0 turntable 61 begins, stopped the driving (control signal CS22 is reversed to low level) of video camera 31.At this moment, when following 2 were examined circuit board 11,11 and are put in place offset difference detection position P2 by conveyance, video camera 31 just was set at the reference position on the opposing party's the residing CxCy coordinate of the telltale mark 12A that is examined circuit board 11.And, detect processing owing in the rotation process of turntable 61, do not carry out the position deviation of circuit board, so just do not carry out the camera operation (control signal CS21 remains on low level) of video camera 31.
Checking position P3, when the rotating operation of moment t0 turntable 61 begins, check that aid 41 is examined circuit board 11,11 to the mobile beginning (control signal CS31 is reversed to high level) of checking the position with respect to following 2, following 2 be examined circuit board 11,11 by conveyance before check position P3, this mobile end (CS31 is reversed to low level in the moment t1 of moment t2 front control signal).Check in the moving of aid 41 at this, following 2 that detect at position deviation detection position P2 are examined the departure that circuit board 11,11 departs from the reference position of CxCy coordinate and are used as modified value, then, in lifting position, check that aid 41 moves to assigned address on the XY coordinate from position deviation detection position P2, wherein the assigned address of XY coordinate is to being examined circuit board 11,11 by 2 of conveyance, and each contacts probe 42 and contacts with the appointment contact position of circuitous pattern and obtain.
Then, at moment t4, when the chuck of lifting arm is opened fully, 2 have been examined on the circuit board holding device 70 that circuit board 11,11 just installed support 13, remain on the state of opening (control signal CS11 remains on low level) for the chuck that makes lifting arm, and the moment t5 that allows lifting arm wait to keep away to have passed through the fixed time just begins the last lift operations (control signal CS12 to high level transition) of lifting arm to lifting position.At moment t6, lifting arm rises to the lifting position of appointment, lifting arm just is maintained at its lifting position (control signal CS12 remains on high level), for stationary installation 2 on support 13 are examined circuit board 11,11, and the lock operation (control signal CS13 is to the high level transition) of the chuck of beginning circuit board holding device 70, at moment t7, be examined the end of fixing of circuit board 11, its state just is held (control signal CS13 remains on high level).
At position deviation detection position P2, stop at the rotary manipulation one of moment t2 turntable 61, just begin the operation of making a video recording by 31 couples of telltale mark 12A～12D of video camera.This camera operation is performed until turntable 61 till moment t6 begins next time rotary manipulation.The camera operation of telltale mark 12A～12D is carried out on the opportunity of moment t2, t4, t6, t8 respectively.The interval on these opportunitys can be followed according to the needed time of move operation of the camera operation of video camera 31 and video camera 31 and be set.
Because video camera 31 is set on the reference position of telltale mark 12A in the CxCy coordinate, so, when stopping the rotation table 61 rotary manipulation at moment t2, the telltale mark 12A that is examined circuit board 11,11 by 2 of conveyance just enters into the picture of video camera 31.For this reason, when the rotary manipulation of moment t2 turntable 61 is stopped, make a video recording processing till moment t2a (control signal CS12 is reversed to high level) by 31 couples of telltale mark 12A of video camera.Even the time from moment t2 to moment t2a is the needed time of camera operation of video camera 31.
At moment t2a, the shooting of 31 couples of telltale mark 12A of video camera is handled one and is finished, in order to continue the processing of making a video recording, just to the reference position mobile camera 31 (control signal CS22 be reversed to high level) of telltale mark 12B in the CxCy coordinate to telltale mark 12B.Then, at moment t4, the mobile processing one of video camera 31 finishes (control signal CS22 is reversed to low level), is just made a video recording by 31 couples of telltale mark 12B of video camera and handles till moment t4a (control signal CS12 is reversed to high level).Time from moment t4 to moment t4a also is the needed time of camera operation of video camera 31, and is identical substantially with the time from moment t2 to moment t2a.
Below, carrying out video camera 31 equally and handle to the mobile processing and the shooting of the reference position of telltale mark 12C in the CxCy coordinate, video camera 31 is handled to the mobile processing and the shooting of the reference position of telltale mark 12D in the CxCy coordinate.Then, at moment t8a, the shooting of telltale mark 12D is handled one and is finished, in order to make a video recording to 2 telltale mark 12A that are examined circuit board 11,11 that next come at once by conveyance, just video camera 31 is moved to the reference position (from moment t8a to moment t10, control signal CS22 be reversed to high level) of telltale mark 12A in the CxCy coordinate.And, in the mobile processing time section of video camera 31, to come to be examined the departure that circuit board 11,11 departs from the reference position in the CxCy coordinate with the photographed images of telltale mark 12A～12D and carry out computing 2, its result of calculation just is stored among the RAM.
Checking position P3, once stopping, just beginning to check processing being examined circuit board 11,11 by 2 of conveyance at the rotary manipulation of moment t2 turntable 61.At first, check that aid 41 begins to descend (control signal CS32 is to the high level transition) to the down position of appointment, descend at moment t3 and finish, check that aid 41 just remains on (control signal CS32 remains on high level) on its position.Under this state, contact probe 42 and a side's the appointment contact position pushing that is examined circuit board 11 contact, to the inspection processing of the opposing party's the circuitous pattern that is examined circuit board 11 then by tester control 46 and scanner 47 carry out (control signal CS33 is reversed to high level).
Then, at moment t4, an end is handled in one side's the inspection that is examined circuit board 11, check that aid 41 just begins rise (control signal CS32 is to the low level transition) to the lifting position of appointment, finish in moment t5 rising, check processing for the circuit board 11 that is examined, just allow and check that aid 41 moves (control signal CS31 is reversed to high level) to the lifting position relative to the opposing party's the appointment that is examined circuit board 11 the opposing party.At moment t7, the mobile processing of checking aid 41 finishes, handle same with a side the inspection that is examined circuit board 11, allow and check the down position decline (control signal CS32 to high level transition) of aid 41 to appointment, from moment t8 to moment t9, come the opposing party's the circuitous pattern that is examined circuit board 11 is checked processing (control signal CS33 is reversed to high level) by tester control 46 and scanner 47, like this, end is at this point handled in 2 inspections that are examined circuit board 11,11.
At moment t9, an end is handled in 2 inspections that are examined circuit board 11,11, be examined circuit board 11,11 conveyances to checking position P3 with 2 with that, in order to check processing to a side the circuit board 11 that is examined at once, check that aid 41 is just risen to the lifting position (control signal CS32 is to the low level transition) of appointment, at moment t10, rotating of turntable 61 once beginning, with its while, check that aid 41 moves (control signal CS31 is reversed to high level) to the appointment lifting position that is examined circuit board 11 relative to a side.
Taking out of position P4, at moment t2, the rotary manipulation one of turntable 61 is stopped, and is examined circuit board 11,11 in order to take out of 2 of being finished by the inspected of conveyance, and the lifting arm of taking out of portion 5 just is lowered by down position (control signal CS42 is to the low level transition).At moment t3, the lifting arm of taking out of portion 5 descend to finish, then the chuck of the circuit board holding device 70 of support 13 just be opened (control signal CS41 is to the low level transition).At moment t4, in case the chuck of circuit board holding device 70 is opened and is finished, just begin to carry out the locking (control signal CS43 is to the high level transition) of lifting arm chuck, at moment t5, the locking of lifting arm chuck (control 2 by lifting arm and be examined circuit board 11,11) finishes, and lifting arm begins lifting position to appointment rise (control signal CS42 is to the high level transition) with regard to the blocking that keeping chuck at moment t6.Then, at moment t7, the descending operation of lifting arm finishes, and lifting arm just is maintained at its lifting position (control signal CS42 remains on to high level).
Thereafter, the chuck of the circuit board holding device 70 of support 13 with the state opened by conveyance to moving into position P1, the lifting arm of taking out of portion 5 is moved to a side of the machine of taking in 8 and is examined circuit board 11,11 with 2 at lifting position sends the machine of taking in 8 to.
As mentioned above, in relating to the circuit board testing fixture 1 of present embodiment, interval represented control and treatment at moment t0～moment t10 is carried out repeatedly, owing to moving into position P1, position deviation detection position P2, checking position P3 and taking out of position P4, to be examined the moving into of circuit board 11, position deviation detects, check, take out of and carry out parallel processing simultaneously, so just can check the circuitous pattern that is examined circuit board 11 of majority at short notice.
And, relate to the concrete formation that circuit board testing fixture 1 of the present invention is not limited to the above embodiments, can certainly be as a kind of formation of suitable formation being out of shape, appending, replacing or eliminating according to necessity.
Such as, in the present embodiment, be as a kind of like this formation, being examined mutually perpendicular 4 positions (station) of circuit board arrangement on turntable 61 to 2 checks, and the present invention is defined in this, also can be used as being examined the formation that circuit board arrangement is checked at the position more than 5 (station) on the turntable 61.And the number that is examined circuit board that disposes on 1 position can be 1, also can be more than 3.
As discussed above, according to the present invention, rotation is provided with the turntable of 4 circuit board maintaining bodies at least at edge part, with each circuit board maintaining body conveyance to the portion that moves into that is configured in around this turntable, the position deviation test section, inspection portion and take out of portion, owing to be examined moving into of circuit board, depart from the detection of the departure of checking the reference position, the taking out of continuously of circuit board that be examined that circuit board inspection and inspection finish carried out, so be examined moving into of circuit board concurrently, the detection of position deviation, every processing of checking and taking out of so just can be checked a plurality of distribution combinations that are examined circuit board at short notice.
And, checking the position, utilization is by the detected position deviation amount that departs from the reference position that is examined circuit board of position deviation testing agency, correctly revised and checked aid and the relative position that is examined circuit board, so, departed from the inspection reference position when circuit board is loaded on the turntable even will be examined, also can not be subjected to the influence of position deviation and carry out the inspection of high reliability with pinpoint accuracy.
In addition, use is configured in the image mechanism of position deviation detection position and takes by the telltale mark that be examined circuit board of conveyance to the position deviation detection position, the departure that departs from the optical axis of image mechanism according to the image of the telltale mark that utilizes this photographic images to calculate in the visual field of image mechanism, amount of movement when beginning in the visual field, to be captured from assigned address to telltale mark with image mechanism, calculation is examined the departure of checking the reference position that departs from of circuit board, can correctly detect the departure of checking the reference position that departs from that is examined circuit board thus under non-contacting state.
In addition, on the assigned address of turntable, set the initial point mark, press specified angle and rotate turntable, this turntable is moved to the position deviation detection position, use image mechanism to take above-mentioned initial point mark simultaneously, according to this photographic images, calculating with the mechanicalness error is the relative position deviation amount of the initial point mark and the image mechanism of cause, and then revise the departure that departs from the reference position that is examined circuit board, the correction that therefore is examined the position deviation of circuit board can be carried out under high-precision environment.Thereby can improve the inspection precision that circuit board is checked.
And, the auxiliary camera structure that use is configured on the turntable is taken formed aid telltale mark on the inspection aid, the auxiliary camera structure is according to the position information with respect to the optical axis of auxiliary camera structure of the image of aid telltale mark in the visual field of auxiliary camera structure that utilizes this photographic images to calculate, amount of movement when checking that aid is captured to the specifically labelled image of aid from specifying the reference position to begin in the visual field, the relative position deviation amount of aid and turntable is checked in calculation, therefore, even check aid and turntable the relative datum position deviation design load, also can not be subjected to the influence of this deviation, can under high-precision environment, carry out the inspection of high reliability.
In addition, when the auxiliary camera structure will check that the aid telltale mark of aid is set in the relevant position, by the set contact in turntable bottom, the auxiliary camera structure that is configured on the turntable is coupled together with administration of power supply that is configured in apparatus main body one side and calculation mechanism, so the auxiliary camera structure just has very high efficient with administration of power supply and calculation being connected of mechanism.
In addition, the circuit board maintaining body is by the 1st convergence part and the 2nd convergence part that are connected respectively with 2 limits of facing mutually that are examined circuit board, other 2 limits that are examined circuit board are acted on respectively this is examined the 1st pushing portion and the 2nd pushing portion that circuit board is urged to the 1st convergence part and the 2nd convergence part, to the above-mentioned the 1st, the 2nd pushing portion, being examined the switching mechanism that switches between the releasing position of the pushing position of circuit board and the pushing state that releasing is examined circuit board in pushing constitutes, thereby can be positioned at the inspection reference position on the turntable accurately and be clamped changeable as required one-tenth disarm state of while being examined circuit board.In addition, switching mechanism is in when moving into the position and taking out of the position by the cam mechanism that acts on the 1st, the 2nd pushing portion usually, when foregoing circuit plate maintaining body, act on above-mentioned cam mechanism, making the 1st, the 2nd pushing portion be in the cancel system of removing the position constitutes, so, move into the position to being transferred to when taking out of the position from leaving being examined circuit board, can mechanically keep this to be examined circuit board.
Claims (16)
1. circuit board testing fixture, to move into position, position deviation detection position, check the position and take out of the position and be arranged on the circumference by the interval of appointment, and will the unit of appointment be examined circuit board along of the interval conveyance of described circumference by appointment, on each position, carry out above-mentioned the moving into of circuit board that be examined concurrently, above-mentionedly be examined the processing of taking out of that is examined circuit board that the detection of the departure that departs from the reference position of circuit board, above-mentioned distribution inspection, the inspected that is examined circuit board finish, it is characterized in that comprising:
Turntable with above-mentioned circumference concentric configuration, is provided with four circuit board maintaining bodies that are examined circuit board that keep above-mentioned appointment unit at its edge part by appointed interval at least;
The turntable drive unit, be used for the above-mentioned turntable of each anglec of rotation driven in rotation according to appointment, with each circuit board maintaining body of above-mentioned turntable kept be examined circuit board from above-mentioned move into the position conveyance to the position deviation detection position, check the position and take out of the position;
Move into device, be disposed at the above-mentioned position of moving into, be used for the circuit board maintaining body that circuit board is moved into above-mentioned turntable that is examined above-mentioned specified quantity;
Position deviation testing agency is disposed at above-mentioned position deviation detection position, is used for the above-mentioned departure that departs from the reference position that is examined circuit board of above-mentioned turntable institute conveyance is detected;
Testing fixture is disposed at above-mentioned inspection position, checks by means of the distribution that is examined circuit board that the inspection aid is brought above-mentioned turntable;
Correction mechanism is according to the data of the detected departure of above-mentioned position deviation testing agency, to revising at the relative position that is examined between circuit board and the above-mentioned inspection aid of checking the position; And
Take out of mechanism, be disposed at the above-mentioned position of taking out of, be used for the circuit board that is examined that the inspected that above-mentioned turntable is brought finishes is taken out of this turntable.
2. circuit board testing fixture according to claim 1 is characterized in that above-mentioned position deviation testing agency comprises:
The above-mentioned telltale mark set on the circuit board that is examined detects in marker detection mechanism;
Driving mechanism, the above-mentioned marker detection of driving mechanism on the plane parallel with above-mentioned turntable; And
Departure calculation mechanism begins to the amount of movement that detects till the mark the above-mentioned departure that departs from the reference position that is examined circuit board to be performed calculations from assigned address according to above-mentioned marker detection mechanism.
3. circuit board testing fixture according to claim 2 is characterized in that:
Above-mentioned marker detection mechanism comprises the image mechanism in the visual field with optical axis and specified size;
Above-mentioned departure is calculated mechanism, use above-mentioned image mechanism according to beginning from above-mentioned assigned address to the amount of movement that in the visual field, captures the image mechanism till the specifically labelled image that is examined circuit board, with the departure of the optical axis that departs from image mechanism of specifically labelled image in the visual field of image mechanism, calculate out the departure that departs from the reference position that is examined circuit board.
4. circuit board testing fixture according to claim 2 is characterized in that also comprising:
Original point position mechanism is positioned above-mentioned marker detection mechanism on the mechanicalness initial point;
The wherein above-mentioned departure that is examined circuit board, the initial point that is coordinate system with above-mentioned mechanicalness initial point carries out coordinate Calculation.
5. circuit board testing fixture according to claim 4 is characterized in that also comprising:
The initial point mark is set on the turntable, when rotating above-mentioned turntable with specified angle, can with the optical axis of the image mechanism that is positioned above-mentioned mechanicalness initial point, form on the position of the assigned address relation in the design;
Revise departure testing agency, detect when the initial point mark of above-mentioned turntable when above-mentioned specified angle is rotated, calculate the departure of the relative position of the initial point mark that causes because of the mechanicalness error and image mechanism by image mechanism; And
Correction mechanism corresponding to above-mentioned departure, is revised the departure data that depart from the reference position that are examined circuit board.
6. according to claim 1 to 5 any one described circuit board testing fixture wherein, it is characterized in that also comprising:
The aid telltale mark, be set at check aid on the assigned address of turntable;
Set mechanism is used for the inspection aid is set in the mechanicalness initial point;
The auxiliary camera structure is set at, when rotating above-mentioned turntable with specified angle, can with the aid telltale mark of the inspection aid that is positioned the mechanicalness initial point, form on the position of assigned address relation; And
Calculation mechanism, when rotate above-mentioned turntable with specified angle, when the auxiliary camera structure is set on the position that concerns with aid telltale mark formation assigned address, drive and check aid, the auxiliary camera structure, according to checking that auxiliary body is from specifying the amount of movement till the reference position begins to be captured the visual field to the specifically labelled image of aid, with the positional information with respect to the optical axis of auxiliary camera structure of aid telltale mark image in the visual field of auxiliary camera structure, calculate out the relative position deviation amount of inspection aid and turntable.
7. circuit board testing fixture according to claim 6 is characterized in that:
Administration of power supply and the above-mentioned calculation mechanism of electric power to above-mentioned auxiliary camera structure is provided, is separately positioned on the different apparatus main bodies with above-mentioned turntable;
When the auxiliary camera structure will check that the aid telltale mark of aid is arranged on the relevant position, above-mentioned calculation mechanism and electric power feed mechanism and the contact of this auxiliary camera structure by being in contact with one another and electrically linking together are electrically linked together.
8. circuit board testing fixture according to claim 7 is characterized in that above-mentioned contact, is set on the turntable, comprises
Conductor extends with turntable concentric ground, can cover the angle that above-mentioned auxiliary camera structure moves for the setting of the relative position of confirming to check aid and turntable;
Brush is set at apparatus main body one side, can and the contacted contact position of conductor and and the non-contacting position of free of conductors between move; And
Mobile device when the auxiliary camera structure is made a video recording, is used for above-mentioned brush is moved to contact position.
9. circuit board testing fixture according to claim 1 is characterized in that:
The above-mentioned flat shape that is examined circuit board is similar to rectangle,
Foregoing circuit plate maintaining body comprises:
The 1st convergence part, one side be examined circuit board in being connected mutually in the adjacent both sides;
The 2nd convergence part is connected mutually with another side in the above-mentioned both sides;
The 1st pushing portion, to the above-mentioned both sides that are examined circuit board in the limit of one side opposite face act on, will be examined circuit board and be urged to the 1st convergence part;
The 2nd pushing portion, to the above-mentioned both sides that are examined circuit board in the limit of another side opposite face act on, will be examined circuit board and be urged to the 2nd convergence part;
Switching mechanism is used for above-mentioned the 1st, the 2nd pushing portion, is examined in pushing between the releasing position of the pushing position of circuit board and the pushing state that releasing is examined circuit board to switch.
10. circuit board testing fixture according to claim 9 is characterized in that above-mentioned switching mechanism comprises:
Cam mechanism acts on above-mentioned the 1st, the 2nd pushing portion, makes above-mentioned the 1st, the 2nd pushing portion be in the pushing position at ordinary times;
Cancel system when foregoing circuit plate maintaining body is in when moving into the position and taking out of the position, acts on above-mentioned cam mechanism, the 1st, the 2nd pushing portion is in removes the position.
11. a circuit board inspection method is characterized in that:
To be arranged at intervals with the turntable of a plurality of circuit board maintaining bodies with specified angle, rotate successively at interval by above-mentioned specified angle, and make the circuit board maintaining body be provided with respectively according to each specified angle institute move into position, position deviation detection position, check the position and take out of the order of position mobile successively;
Carry out each following procedure concurrently,, will be examined circuit board and be mounted and fixed on the circuit board maintaining body in the above-mentioned position of moving into; In above-mentioned position deviation detection position, detect the departure that departs from the reference position of detected circuit plate; In above-mentioned inspection position, correspondence is examined the departure that departs from the reference position of circuit board, regulates after the relative position of checking aid and turntable, checks the distribution that is examined circuit board; In the above-mentioned position of taking out of, the circuit board that is examined that inspected is crossed takes out from the circuit board maintaining body.
12. circuit board inspection method according to claim 11 is characterized in that the detection operation that described detection is examined the departure that departs from the reference position of circuit board may further comprise the steps:
The image mechanism that will have the optical axis and the appointment visual field is positioned the original point position step of mechanicalness initial point;
Begin to move described image mechanism until being examined the step that formed specifically labelled image comes into view on the circuit board from the mechanicalness initial point;
According to above-mentioned image mechanism in the visual field, capture telltale mark the time amount of movement and the departure of the optical axis of specifically labelled image in the visual field of image mechanism and image mechanism, the step that the departure that departs from the reference position that is examined circuit board is performed calculations;
In checking operation, according to the departure adjustment of calculation check aid with respect to the relative position that is examined circuit board.
13. circuit board inspection method according to claim 12 is characterized in that:
Above-mentioned telltale mark forms 2 respectively on each is examined the assigned address of circuit board;
Above-mentioned image mechanism is caught above-mentioned telltale mark successively in the visual field, utilize the coordinate system that is initial point with above-mentioned mechanicalness initial point to detect specifically labelled coordinate position, and calculation departs from the departure of reference position.
14., it is characterized in that according to claim 12 or 13 described circuit board inspection methods:
Rotate above-mentioned turntable by specified amount, the initial point flag settings that the appointment place of this turntable is formed is in circuit board deviation detection position;
Above-mentioned image mechanism calculates the relative deviation amount of turntable and image mechanism according to the departure the optical axis of the image of initial point mark in the amount of movement that begins from the mechanicalness initial point to be moved when capturing till the initial point mark and the visual field and image mechanism the visual field;
Revise checking aid and the relative position adjustment that is examined circuit board according to this departure.
15., it is characterized in that according to claim 12 or 13 described circuit board inspection methods:
Turntable is arranged on assigned address;
Rotate this turntable by specified amount, will have optical axis and specify the auxiliary camera head in the visual field to be arranged on above-mentioned inspection position;
Drive and check aid, make the specifically labelled image of a pair of aid that is positioned at the position of facing turntable of checking aid, in the visual field of auxiliary camera head, be captured successively; At this moment, according to amount of movement and the specifically labelled departure that departs from the optical axis the visual field of assisting camera head of aid of checking that aid begins from the mechanicalness initial point, the relative deviation amount of aid and turntable is checked in calculation;
According to this departure, to checking aid and being examined the relative position adjustment that circuit board departs from the reference position and revising.
16. circuit board inspection method according to claim 15 is characterized in that:
Utilize the reference inspection aid, carry out the calculation of the relative deviation amount of checking aid and turntable.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4866/01 | 2001-01-12 | ||
| JP2001004866 | 2001-01-12 | ||
| JP395137/01 | 2001-12-26 | ||
| JP2001395137A JP2002277502A (en) | 2001-01-12 | 2001-12-26 | Substrate inspection device and substrate inspection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1367371A true CN1367371A (en) | 2002-09-04 |
Family
ID=26607587
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02101648A Pending CN1367371A (en) | 2001-01-12 | 2002-01-14 | Circuit board checking device and method |
| CN02201438U Expired - Fee Related CN2530243Y (en) | 2001-01-12 | 2002-01-14 | Circuit board checker |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02201438U Expired - Fee Related CN2530243Y (en) | 2001-01-12 | 2002-01-14 | Circuit board checker |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2002277502A (en) |
| KR (1) | KR20020060931A (en) |
| CN (2) | CN1367371A (en) |
| TW (1) | TW548413B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20020060931A (en) | 2002-07-19 |
| CN2530243Y (en) | 2003-01-08 |
| TW548413B (en) | 2003-08-21 |
| JP2002277502A (en) | 2002-09-25 |
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