CN105021940B - Check device - Google Patents

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Publication number
CN105021940B
CN105021940B CN201410179190.8A CN201410179190A CN105021940B CN 105021940 B CN105021940 B CN 105021940B CN 201410179190 A CN201410179190 A CN 201410179190A CN 105021940 B CN105021940 B CN 105021940B
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substrate
mentioned
unit
free degree
axis
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CN105021940A (en
Inventor
金完洙
郑相宪
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BIOPTRO Co Ltd
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BIOPTRO Co Ltd
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Abstract

The check device of the present invention, including:Inspection unit, check the "on" position of substrate;And transposable element, aforesaid substrate is transferred to by above-mentioned inspection unit by rotary motion.The check device of the present invention can quickly and reliably check the "on" position of substrate.

Description

Check device
Technical field
The present invention relates to the check device of the "on" position for checking substrate (APPARATUS FOR TESTING).
Background technology
In general, tellite (PCB, Printed Circuit Board) is nearly all required necessary One of part, the household appliances such as washing machine or TV are applied not only to, moreover, the daily necessities or vapour that are additionally operable to including mobile phone Car, artificial satellite etc..
Recently, with form tellite various electronic units integrated level raising, its pattern (pattern) Become quite finely, it is necessary to which very exquisite pattern printing technique, therefore, fraction defective is consequently increased, it is necessary to very carefully Check tellite.
The publication that Ebrean Registered Patent publication the 0176627th discloses a kind of energization situation for tellite Probe apparatus, it is improved to the various of soldering portion by the energization inspection for preventing soldering bad and the vibrations completion of probe is stable The adaptability of surface configuration.But also without the side for the "on" position that can rapidly, accurately, reliably check tellite Method.
Look-ahead technique document Prior Art
Patent document
Ebrean Registered Patent publication the 0176627th
The content of the invention
It is an object of the invention to provide a kind of check device for being used to reliably check the "on" position of substrate.
The technical problems to be solved by the invention are not limited by above-mentioned technical task, and for those skilled in the art and Speech, silent other technologies problem can be will be apparent by following content.
The check device of the present invention, including:Inspection unit, for checking the "on" position of substrate;And transposable element, pass through Aforesaid substrate is transferred to above-mentioned inspection unit by rotary motion.
The check device of the present invention, including:Mobile unit, the substrate of the 5th position is moved to first position;Alignment is single Member, confirm to be transferred to the aligned condition of the aforesaid substrate of the second place from above-mentioned first position;Inspection unit, check from above-mentioned Two positions are transferred to the "on" position of the aforesaid substrate of the 3rd position;Unloading unit, the 4th will be transferred to from above-mentioned 3rd position The aforesaid substrate of position is moved to the 6th position;And transposable element, it is rotated and is formed by by above-mentioned rotary motion Virtual concentric circles on above-mentioned first position, said second position, above-mentioned 3rd position, above-mentioned 4th position order move Send aforesaid substrate.
The check device of the present invention forms the transfer path of substrate by rotary indexing unit, so as to quickly and reliably right The "on" position of substrate is checked.
Brief description of the drawings
Fig. 1 is the generalized schematic of the check device of the present invention;
Fig. 2 is another check device generalized schematic of the present invention;
Fig. 3 is the first load units of check device and the generalized schematic of the second load units for forming the present invention;
Fig. 4 is the accessory plate generalized schematic for forming the check device of the present invention;
Fig. 5 is the inspection unit generalized schematic for forming the check device of the present invention;
Fig. 6 is the check device operation order generalized schematic of the present invention.
Reference
The load units of 110- first, 111- loading parts, the load units of 120- second, 130- mobile units, 131- Arm, 133- adsorption sections, 140- unloading units, 150- transposable elements, 151- indexable plates, 152- accessory plates, 153- holes, 155- holds with a firm grip portion, 157- rest portions, 159- rotary shafts, the auxiliary units of 161- first, the auxiliary units of 162- second, 163- 3rd auxiliary unit, 169- indexing units, 170- alignment units, 180- cleaning units, 190- inspection units, 191- folders Tool, 193- probes, 195- chassis, 200- substrates.
Embodiment
Below, embodiments of the invention are described in detail with reference to accompanying drawing.In the process, for the convenience of explanation And clear property, the size or shape of component shown in the drawings etc. is possible to exaggeration and represented.Furthermore, it is contemplated that the present invention composition and Effect special definition of a term is possible to become different according to user, the intention of network operator or convention.The definition of these terms Depending on need to be based on the entire content of this specification.
Fig. 1 is the generalized schematic of the check device of the present invention.
Check device as depicted may include inspection unit 190 and indexable unit 150.
Inspection unit 190 can check the "on" position of substrate 200.
The logical galvanoscopic mode carried out in inspection unit 190 can be diversified.For example, inspection unit 190 wraps Include with being formed at probe 193 that the circuit pattern of substrate 200 contacts and being examined by applying to the probe 193 contacted with circuit pattern Look into the "on" position of signal check substrate 200.
According to different substrates 200, the one side of 190 inspection substrates 200 of inspection unit or the two of substrate 200 is checked simultaneously Face.
For the driven of inspection unit 190, unsighted substrate 200 need to be transferred to inspection unit 190 and incited somebody to action Terminate logical galvanoscopic substrate 200 to exit from inspection unit 190.In order to which the transfer of aforesaid substrate 200 and exiting for substrate 200 are adopted With transposable element 150.
Substrate 200 can be transferred to inspection unit 190 by transposable element 150 by rotary motion.Rotary motion shape now Into the transfer path of substrate 200, therefore, the transfer path of substrate 200 is formed along virtual circumference.That is, by indexable single Member 150, the transfer path of substrate 200 are formed along circle.
Transposable element 150 can press the order of first position, the second place, the 3rd position, the 4th position by rotary motion Transfer substrate 200.First position to the 4th position can be positioned at the substrate 200 formed according to the rotary motion of transposable element 150 Transfer on path (virtual circumference).
First position can be the position that substrate 200 is loaded into transposable element 150.
The second place can be the position for the aligned condition for confirming substrate.
3rd position can be the position for the "on" position that substrate 200 is checked by inspection unit 190.
4th position can be the substrate 200 for terminating to check in inspection unit 190 from the position that transposable element 150 unloads.
The actual energization inspection of substrate 200 is completed in the 3rd position by inspection unit 190.To complete to utilize inspection The reliable energization inspection of unit 190, need in the upstream of inspection unit 190, i.e., before substrate 200 flows into inspection unit 190, Confirm the aligned condition of substrate 200, and corrected when the aligned condition of mistake be present.Therefore, before the 3rd position The second place confirm substrate 200 aligned condition.Confirm being completed to its state in alignment unit 170 for substrate 200, and be Substrate 200 is loaded to above-mentioned alignment unit 170 and inspection unit 190 and substrate 200 is arranged at transposable element 150 in advance, And this position is exactly first position.In addition, it can be unloaded in the substrate 200 that the 3rd position completes to check in the 4th position.
Transposable element 150 may include the indexing for transferring substrate 200 and the substrate 200 being moved to along the track of concentric circles Plate 151.The quantity of indexable plate 151 can be included in indexable plate 151 load substrate 200 technique including in indexable plate 151 On put on substrate 200 technique quantity it is identical.For example, during superincumbent application substrate 200 movement-alignment-inspection Four techniques such as look into-unload, therefore, can possess four indexable plates 151.
To perform the technique completed in above-mentioned each position, check device may include that inspection unit 190 and transposable element 150 exist Interior various units.
For example, check device may include mobile unit 130, alignment unit 170, inspection unit 190, unloading unit 140 and Transposable element 150.
The substrate 200 of 5th position can be moved to first position by mobile unit 130.The 5th position now can be logical The position crossed outside the transfer path for the substrate 200 that transposable element 150 is formed.
Alignment unit 170 can utilize the aligned condition for imaging the substrate 200 that first-class confirmation is transferred to the second place.If alignment The confirmation result of unit 170 shows that the aligned condition of substrate 200 has mistake, then needs to make corrections to it.To pair of substrate 200 The correction of neat mistake, can be at least one middle completion in alignment unit 170, transposable element 150, inspection unit 190.
Inspection unit 190 can complete the energization inspection of the substrate 200 to being transferred to the 3rd position.
Unloading unit 140 is discharged in the 3rd position and completes to check and be transferred to the substrate 200 of the 4th position, and by unloading Substrate 200 is moved to the 6th position.6th position can be the transfer path of the substrate 200 formed by transposable element 150 Outside position.
Transposable element 150 can press the order of first position, the second place, the 3rd position, the 4th position by rotary motion Transfer substrate 200.
As described above, on the transfer path of the substrate 200 formed by transposable element 150, can possess including checklist Multiple units including member 190.Now, each unit spaced set is advisable.For example, the substrate formed by transposable element 150 Possess four lists of mobile unit 130, alignment unit 170, inspection unit 190 and unloading unit 140 on 200 transfer path Member, and if during using the center of indexable plate 150 as rotary shaft 159, each unit is that spacing is set with 90 degree.Therefore, to greatest extent Reduce the interference between each unit.In addition, because each unit does not interfere, therefore, multiple units can be made while driven.One example For mobile unit 130, alignment unit 170, inspection unit 190 and unloading unit 140 can be driven via storage capacitors simultaneously.
Embodiment shown in Fig. 1 is 150 right handed situation of transposable element, and in the plane, left side One position, upside are the second place, and right side is the 3rd position, and downside is the 4th position.If transposable element 150 is counterclockwise revolved Turn, then in the plane, right side is first position, and upside is the second place, and left side is the 3rd position, and downside is the 4th position.
If the interval for the indexable plate 151 4 and indexable plate 151 that transposable element 150 possesses confession placement substrate 200 corresponds to each The job position of unit, then when transposable element 150 rotates, the work for each indexable plate 151 and each unit of being alignd in certain angle Industry position.In the state of so alignment indexable plate 151, each unit can be made relative to each indexable plate 151 while driven.
According to above-mentioned composition, the transfer of substrate 200 is apart from the virtual circumference formed by transposable element 150 between each unit Partial section.Therefore, than inspection equipment of the in general using straight line path as the transfer path of substrate 200, between each unit Transfer distance is shorter.Therefore, can intensive setting each unit, realize the miniaturization of check device.In addition, because passing through rotary indexing list The transfer of first 150 completing substrates 200, therefore, than the inspection equipment using straight line transfer path, the height of substrate 200 can be achieved Speed transfer.In addition, need to only be rotated, therefore, than the inspection equipment using straight line transfer path, it is single that indexing can be achieved The miniaturization of member 150.
In superincumbent content, to first position to the 4th position and to the mobile unit 130 for relevant position, alignment Unit 170, inspection unit 190, unloading unit 140 are illustrated, and between each position or between each unit, pluggable pair Substrate 200 carries out position or the unit of Appendage Task.
In Fig. 1, four indexable plates 151 and each unit are with 90 degree of interval settings, and therefore, transposable element 150 is by 90 degree of rotations Turn indexable plate 151, then the position of indexable plate 151 and each unit can be made corresponding.On x/y plane, along the rotation of transposable element 150 Turn direction, can be using the position of the indexable plate 151 on left side or right side in four indexable plates 151 up and down as first position.Or Person, as shown in Fig. 2 can be using the position of the indexable plate 151 of downside as first position.
Fig. 2 is another check device generalized schematic of the present invention.
Fig. 2 represents the check device using the position of the indexable plate 151 of downside as first position.In the implementation shown in Fig. 2 In example, because using the position of the indexable plate 151 of downside as first position, therefore, being loaded than the embodiment shown in Fig. 1, first 110 and second load units of unit, 120 setting to the right.Therefore, space utilization state is different.The substantially space profit of figure 1 above It is high with rate, but can be according to facility environment, also can application drawing 2.
If returning Fig. 1, check device, including:Mobile unit 130, the substrate 200 of the 5th position is moved to first Put;Alignment unit 170, confirm to be transferred to the aligned condition of the substrate 200 of the second place from first position;Inspection unit 190, inspection Look into the "on" position for the substrate 200 that the 3rd position is transferred to from the second place;Unloading unit 140, unload and transferred from the 3rd position To the 4th position substrate 200 and the substrate 200 of unloading is moved to the 6th position;And transposable element 150, it is rotated And by by rotary motion formation virtual concentric circles on first position, the second place, the 3rd position, the 4th position it is suitable Sequence transfers substrate 200.
To improve space availability ratio, in the plane centered on transposable element 150, the 5th position and the 6th position can positions Some direction in up and down.Fig. 1 represents the example for possessing the 5th position and the 6th position in lower section.
Transposable element 150 may include four indexable plates 151 for placing substrate 200.
When the n-th indexable plate (wherein, n is natural number less than 4) be located at first position, the (n+1)th indexable plate 151 is located at the Two positions, the n-th+2 indexable plate 151 is located at the 3rd position, and the n-th+3 indexable plate 151 is located at the 4th position.If here, n+1, n+ 2nd, n+3 is more than 4, then is counted again since 1.For example, as n=2, the n-th+3 indexable plate 151 should be the 5th indexable plate 151, but Because the quantity of indexable plate 151 is 4, therefore, turn into first inversion plate 151.As n=3, the n-th+2 indexable plate 151 should be the 5th turn Position plate 151, and the n-th+3 indexable plate 151 is the 6th indexable plate 151.Now, the 5th indexable plate 151 turns into first inversion plate 151, And the 6th indexable plate 151 turns into the second indexable plate 151.
As n=1, if first inversion plate 151 is located at first position, the second indexable plate 151 is located at the second place, and the 3rd Indexable plate 151 is located at the 3rd position, and the 4th indexable plate 151 is located at the 4th position.As n=2, if the second indexable plate 151 In first position, then the 3rd indexable plate 151 is located at the second place, and the 4th indexable plate 151 is located at the 3rd position, and first inversion plate 151 are located at the 4th position.
Therefore, original position is returned to when each indexable plate 151 rotates a circle.
To reduce or preventing to be arranged at the substrate 200 formed by the rotation of above-mentioned transposable element 150 to greatest extent Transfer path on each unit between interference, each unit can have the following operation free degree in xyz spaces:Following freedom Degree assumes that the free degree of the mobile unit 130 when being moved along the x-axis on x/y plane.
The operation free degree of mobile unit 130 may include x-axis, the z-axis free degree.If substrate 200 is left and right or symmetrical above and below When, for example, in the case that substrate 200 is rectangular or square, because of the mistake of integrated artistic, substrate 200 can be filled by different directions It is loaded in the first load units 110.So as to which the energization inspection carried out in inspection unit 190 can not be normally completed.Therefore, it is mobile single Member 130 can carry out the rotary motion using z-axis as rotary shaft, i.e., with rzThe free degree.Mobile unit 130 can utilize rzThe free degree exists Rotary plate 200 on x/y plane and substrate 200 is normally set.
The operation free degree of alignment unit 170 may include x-axis, the z-axis free degree.
The operation free degree of inspection unit 190 may include x-axis, y-axis, the z-axis free degree.According to circumstances, inspection unit 190 can Including rzThe free degree, so as to corresponding to various substrates.
The operation free degree of unloading unit 140 may include x-axis, the z-axis free degree.
The operation free degree of transposable element 150 may include rzThe free degree.
The free degree above represents the operation free degree of each unit in energization checking process, and itself and following setting are free Degree is different.Set the free degree can be drive check device before be used for initial setting setting the free degree.
Check device may include positioned at the upstream of mobile unit 130 and be mounted with the first load units 110 of substrate 200. Now, the substrate 200 for being loaded into the first load units 110 can be moved to first position by mobile unit 130.
First load units 110 can be come in the state of substrate 200 is loaded from the outside movement of check device. In the moving process of the first load units 110, substrate 200 is possible in the various pollutants matter such as dust.To carry out Reliable be powered checks that the various pollutants matter that removal is present in substrate 200 is advisable.Therefore, check device may include possess use The cleaning unit 180 of the roller of check surface of substrate 200 of the first load units 110 etc. is loaded into cleaning.
Cleaning unit 180 may be disposed between the first load units 110 and mobile unit 130.Cleaning unit 180 will terminate The substrate 200 of cleaning is moved to the 5th position, so that the substrate 200 for terminating cleaning is moved to first position by mobile unit 130. The part that cleaning is completed by cleaning unit 180 comprises at least the region checked in substrate 200 by inspection unit 190.
Therefore, check device may include for the substrate 200 for being loaded into the first load units 110 to be moved into cleaning unit 180 the first auxiliary unit 161.The free degree of first auxiliary unit 161 is included in the x-axis free degree and z-axis freedom in xyz spaces Degree.
If the substrate 200 being loaded into the substrate 200 of the first load units 110 positioned at the superiors is defined as the superiors' base Plate, then at least on the time point using the first auxiliary unit 161 movement the superiors substrate, from ground to the height of the superiors' substrate Degree, is not fixed by the quantity for the substrate 200 for being loaded into the first load units 110.
If the superiors' substrate of the first load units 110 is moved to cleaning unit 180 by the first auxiliary unit 161, fill It is loaded in the thickness of the height reduction the superiors substrate of the substrate 200 of the first load units 110.Therefore, it is next most upper for movement Laminar substrate, the first auxiliary unit 161 need to decline the thickness of upper the superiors' substrate along z-axis.Therefore, the first auxiliary unit 161 Control become increasingly complex, and with the reduction for the substrate 200 for being loaded into the first load units 110, the first auxiliary unit 161 Driving distance increase, so as to increase traveling time.As the scheme to solve the above problems, the first load units can not be by first Auxiliary unit 161 move substrate 200 quantity influence and maintain the height of the superiors' substrate constant all the time.Therefore, first Load units 110 can rise the thickness of the substrate 200 of the first auxiliary unit 161 movement.Such principle can load single second Member 120 is applicable in the opposite manner.
When not possessing cleaning unit 180, the 5th position can be the position of the first load units 110.Now, the first dress Carrier unit 110, which is clamped, to be loaded into the substrates of the first load units 110 and is moved to first position.Now, mobile unit 130 can be carried out The shake action of first auxiliary unit 161.
Fig. 3 is the first load units of check device and the generalized schematic of the second load units for forming the present invention.
First, the embodiment suitable for the first load units 110 is illustrated.
Positioned at from ground h1The superiors' substrate (the n-th substrate) of height is moved to first position by mobile unit 130, then From ground to the height h of next the superiors' substrate (the (n-1)th substrate)2, the thickness of the n-th substrate will be reduced.Therefore, it is mobile the N-1 substrates, mobile unit 130 need to decline the thickness of the n-th substrate.The action of such mobile unit 130 is because causing and the first dress The interference problem of carrier unit 110, the complexity of control etc. and it is inadvisable.To consolidate the position of the moving substrate 200 of mobile unit 130 Fixed constant, the first load units 110 can rise the (n-1)th substrate the thickness of the n-th substrate.
Therefore, load units may include load substrate 200 and along the z-axis direction or gravity direction move loading part 111.
But recently because the trend of highly integrated miniaturization, the thickness of substrate 200 become very thin.Therefore, loading part 110 Because machine errors such as gap (back lash) is difficult to the thickness that reliably rises substrate 200.Therefore, in order to reduce such machine Tool error and extend command range.
Therefore, when the movement of the first auxiliary unit 161 is located at from the substrate 200 of the height of ground first, then the first load units After the substrate 200 of second height is dropped to third height by 110 loading part 111, the first height is risen to.Now, first The substrate 200 of height can be the superiors' substrate, and the substrate 200 of the second height can be loaded into below the superiors' substrate Substrate 200.
In figure 3, the first height is h1, the second height is h2, and third height is h3.Now, each height can have h1>h2 >h3Relation.According to such composition, load units are driven by the order of the left hand view in Fig. 2, middle graph and right part of flg.
Then, the embodiment suitable for the second load units 120 is illustrated.
At least on the time point that the substrate 200 moved by unloading unit 140 from the 4th position is unloaded, from ground to The height of the superiors' substrate is not influenceed and immobilized by the quantity for the substrate 200 for being loaded into the second load units 120.
With upper example on the contrary, being that substrate 200 after checking is loaded into the situations of the second load units 120.At this point it is necessary to will The superiors' substrate declines the thickness of substrate 200.Now, loading part 111 can also decline the thickness of substrate 200.In addition, to improve essence Density, also can suitably it rise after the big distance of the thickness of suppression ratio substrate 200.
I.e., in figure 3, there is the first height h1>Second height h2>Third height h3Relation when, loading part 111 is by The superiors' substrate of one height is dropped to after third height, rises to the second height.According to such composition, loading part 111 Order by the left hand view in Fig. 3, middle graph and right part of flg is driven.
When the first load units 110 load multiple substrates 200 and relatively thin substrate 200, the first auxiliary unit 161 is being utilized During mobile the superiors' substrate, the substrate 200 under it is possible to be adhered to the superiors' substrate movement.To prevent above-mentioned phenomenon, first Auxiliary unit 161 rises the first distance I after movement is loaded into the substrate 161 of the first load units 1101Afterwards, than One apart from short second distance section I2In move back and forth.Such action is similar to the action for shaking off some things.It is logical Cross the shake action of the first auxiliary unit 161 reliably only can be moved to cleaning unit 180 by the superiors' substrate 200.
When substrate 200 is moved into the indexable plate 151 for being arranged at first position, the position of substrate 200 is possible to be hit And turmoil.To reduce above-mentioned phenomenon to greatest extent, using accessory plate 152.
Fig. 4 is the accessory plate generalized schematic for forming the check device of the present invention.
Possess the indexable plate 151 in transposable element 150, including:Rest portion, hole 153 is formed at its center and in hole 153 Place substrate 200 in end;Hold with a firm grip portion 155, fixed placement is in the substrate 200 of rest portion 157.Now, accessory plate 152 can possess in First position simultaneously rises, to be contacted when substrate 200 is moved to rest portion 157 by hole 153 with substrate 200.
Substrate 200 positioned at first position can be contacted by accessory plate 152 with rest portion 157 and accessory plate 152.Because not only Rest portion 157 is contacted with, but also is contacted with accessory plate 152, therefore, can more reduce the loosening of substrate 200.In this case, Substrate 200 is held with the portion of holding with a firm grip 155 and rises accessory plate 152, then substrate 200 can be fixed in the case of no loosening and put Put portion 157.
For example, accessory plate 152 can rise to the height h than rest portion 1574High or low height h5.In Fig. 4, h5Compare h4 It is high.In addition, in Fig. 4, for convenience of description, h4And h5Difference clearly, but in practical situations both, its difference may ratio It is few in accompanying drawing.Therefore, the substrate 200 being positioned in rest portion 157 and accessory plate 152 slight curvature and can maintain intimate plane State.
In addition, accessory plate 152 may be alternatively located at the 4th position.Now, accessory plate 152 can rise, with substrate 200 from shelving Portion 157 is contacted when moving by hole 153 with substrate 200.It is different from Fig. 4, positioned at the h of the accessory plate 152 of the 4th position5Compare h4It is low. Therefore, in unloading, the movement of substrate 152 is reduced to greatest extent.
Mobile unit 130 includes the arm (arm) 131 with the operation free degree set in xyz spaces and is formed at arm 131 End and sorbing substrate 200 adsorption section 133.For substrate 200 is held on into rest portion 157 without loosening, in rest portion 157 Desorbed in the state of reliably being contacted with substrate 200.To make rest portion 157 and substrate 200 reliably contact, adsorption section 133 can apply pressure to substrate 200.But the pressure applied of adsorption section 133 there is a possibility that substrate 200 bending damage, and And when desorbing, because recuperability rocks substrate 200.But accessory plate 152 is being risen into h5In the state of carry out Above-mentioned operation, then it can prevent the damage of substrate 200 and reduce rocking for substrate 200.
Return Fig. 1, in check device of the invention, transposable element 150 has a z-axis free for the rotation of rotary shaft Degree.Therefore, because alignment unit 170 has the x-axis free degree and the y-axis free degree, therefore, the overall alignment shape of substrate 200 can be confirmed State.
Alignment unit 170 confirms the aligned condition of substrate 200, and the alignment for the substrate 200 that alignment unit 170 is confirmed misses Difference, it can not be maked corrections in alignment unit 170.Because substrate 200 is held on indexable plate 151 and indexable plate 151 does not have x-axis and y The axle free degree, therefore, the alignment error of substrate 200 can not be maked corrections in indexable plate 151.Therefore, by by inspection unit 190 Relatively to x-axis or the alignment error of y-axis movement correction substrate 200.In other words, inspection unit 190 xy space utilizations x-axis from By the x-axis alignment error and y-axis alignment error of spending the substrate 200 confirmed with the correction of the y-axis free degree in alignment unit 170.
Inspection unit 190 is moved to z-axis by the substrate 200 relative to x/y plane and contacted with substrate 200, and by with base The contact of plate 200 carries out energization inspection to substrate 200.Such environment can be the feelings that inspection unit 190 includes probe 193 Condition.
Fig. 5 is the generalized schematic of inspection unit 190 for forming the check device of the present invention.
Inspection unit 190 may include multiple probes 193, the fixture 191 of support probe 193, the chassis for the setting of fixture 191 195.Can be in the region relative to the circuit pattern being checked on fixture 191Possesses probe 193.One end of probe 193 Protrude from region, and the other end is connected to electronic circuit.Electronic circuit applies inspection signal to circuit pattern and receives response Signal, to carry out energization inspection using the signal that should arrive received.
The time contacted by shortening inspection unit 190 with substrate 200 shortens the time needed for checking that is powered.Shortening and base The scheme for the time that plate 200 contacts, which is reduced, to be possessed in the distance between the substrate 200 of inspection unit 190 and inspection unit 190 Scheme and increase inspection unit 190 z-axis translational speed scheme.
The distance between substrate 200 and inspection unit 190 depend on initial setting or determined when setting.So determine After the distance between substrate 200 and inspection unit 190, it is powered and the mobile speed of inspection unit 190 is depended on the time required to checking Degree.
The translational speed of inspection unit 190 is faster, and the time being powered needed for checking is shorter.If the but checklist of high-speed mobile Member 190 contacts with substrate 200, then will damage substrate 200, and therefore, the speed of the inspection unit 190 when being contacted with substrate 200 needs It is limited within the scope of arranges value.If upper described, two speed that can compromise change the speed of inspection unit 190.For example, checklist The z of member 1901The translational speed of position is less than z2The translational speed of position.Now, z1Compare z in position2Position than substrate 200 closer to for Preferably.Therefore, inspection unit 190 is moved in the position near from substrate 200 with slow speed in z-axis direction, and from substrate 200 Moved with comparatively faster speed remote position.Therefore, substrate 200 and checklist are shortened in the case where not damaging substrate 200 The time of contact of member 190.
In addition, inspection unit 190 can carry out energization inspection to the two sides of substrate 200.Recently, it is highly integrated because of circuit pattern Change, multiple circuit patterns can be formed on the two sides of substrate 200.According to different situations, the circuit pattern of the one side of substrate 200 can connect It is connected to the circuit pattern of the another side of substrate 200.Therefore, check that inspection unit 190 is available to carry out rapid reliable be powered The the first inspection portion 192 contacted with the one side of substrate 200 and the second inspection portion 194 for being contacted with the another side of substrate 200 are to logical Electricity condition is checked.Now, the first inspection portion 192 and the second inspection portion 194 can contact with substrate 200 simultaneously.
When inspection unit 190 possesses the first inspection portion 192 and the second inspection portion 194, in initial setting up, in xyz spaces, The free degree in the first inspection portion 192 and the free degree in the second inspection portion 194 are possible to identical.For example, in initial setting up, first Inspection portion 194 of inspection portion 192 and second can have the x-axis free degree, the y-axis free degree, the z-axis free degree and rzThe free degree.
In contrast, when inspection unit 190 possesses the first inspection portion 192 and the second inspection portion 194, in initial setting up, In xyz spaces, the free degree quantity in the free degree quantity in the first inspection portion 192 and the second inspection portion 194 is possible to differ.The The position in the position in one inspection portion 192 and the second inspection portion 194 is relative.For example, it is necessary to by the second inspection portion 194 along When one direction is moved, second direction of the first inspection portion 192 along the opposite direction as first direction can also be moved.Consider This point, the first inspection portion 192 and the second inspection portion 194 need not assign the identical free degree.If on the contrary, give the first inspection portion 192 and second inspection portion 194 assign the identical free degree, it is likely that bring and obscure to user, and composition is become complicated. But according to the present invention, the free degree quantity in the free degree quantity in the first inspection portion 192 and the second inspection portion 194 is mutually different, Therefore above mentioned problem is not present when setting.The operation of free degree during setting and the free degree as each unit in driving oneself It is different by degree, it is the free degree that each unit is arranged to appropriate initial position before each unit is driven.
Inspection unit 190 utilizes be defined by gravity direction the first inspection portion 192 being contacted with above substrate 200 and contact The second inspection portion 194 below substrate 200 checks "on" position.During initial setting up, in xyz spaces, the first inspection portion 192 Free degree quantity be possible to fewer than the free degree quantity in the second inspection portion 194.Because than being arranged at aerial first The operation in inspection portion 192, the operation for being arranged at the second inspection portion 194 on ground are easier.For example, in initial setting up, in xyz Space, the first inspection portion 192 have the z-axis free degree, rzThe free degree, and the second inspection portion 194 has the x-axis free degree, y-axis free Degree, the z-axis free degree and rzThe free degree.If the setting of the setting free degree and the second inspection portion 194 plus the first inspection portion 192 is certainly By spending, then inspection unit 190 will have the x-axis free degree, the y-axis free degree, the z-axis free degree and rzThe free degree.Certainly, examined with second Look into as portion 194, the first inspection portion 192 can also have the x-axis free degree, the y-axis free degree, the z-axis free degree and rzThe free degree, but Even only there is the z-axis free degree.
Return Fig. 1, unloading unit 140 unloads the substrate 200 of the 4th position, and the substrate 200 of unloading is moved into the Six positions.The 6th position now can be the position of the second load units 120.Or the 6th position can be other position Put.Fig. 1 represents the situation of the latter.
In the case of figure 1, check device 120 may include that the second load units 120, the second auxiliary unit the 162, the 3rd are auxiliary Help unit 163 and indexing unit 169.
Second load units 120 be located at the downstream of unloading unit 140 and be loaded in inspection unit 190 terminate it is logical galvanoscopic Substrate 200.Second load units 120 can have the z-axis operation free degree.
The substrate 200 of 6th position can be moved to the 7th position by the second auxiliary unit 162.Second load units 162 can With the x-axis operation free degree.Needing to be marked or avoided with indexing unit 169 to conflict with the grade unit of cleaning unit 180 When, the second auxiliary unit 162 can also have the y-axis operation free degree.In addition, according to the transposable element 150 being rotated, The direction of the substrate 200 of first position and the direction of the substrate 200 in the 4th position differ.In the example of fig. 1, the 4th The substrate 200 put is that the substrate 200 of first position rotates 270 state in the plane.
For the substrate for making to be loaded into the direction of the substrate 200 of the second load units 120 Yu being loaded into the first load units 110 200 direction is identical, and the second auxiliary unit 162 can have rzThe operation free degree.In Fig. 1, if the second auxiliary unit 162 to turn The direction of rotation of bit location 150 is rotated by 90 °, then can set base to the identical direction of substrate 200 of the first load units 110 Plate 200.
The substrate 200 of 7th position can be moved to the second load units 120 by the 3rd auxiliary unit 163.Therefore, the 3rd is auxiliary Unit 163 is helped to have the x-axis free degree and the z-axis free degree.
Second dress unit 120 is made up of multiple, and the substrate of identical inspection result is loaded on each second load units 120 200.For example, possess three the second load units 120 in Fig. 1.Wherein, can from the first mobile unit 110 of first, left side It is normal substrate 200 by energization inspection result is loaded.Second the first mobile unit 110 can load the judgement of energization inspection result For the substrate 200 of short-circuit (short).3rd the first mobile unit 110 can load energization inspection result and be determined as open circuit (open) substrate 200.To save electric power, three above load units are arranged at from the 3rd auxiliary by the high order of frequency is loaded The near position of unit 163.Example shown in Fig. 1 is most for normal substrate 200, is secondly short-circuit substrate 200, is thirdly open circuit The situation of substrate 200.In the case where the second load units 120 are multiple, to improve space availability ratio, each second load units 120 can be set along y-axis.For substrate 200 is loaded into each second load units 120 set on the y axis, the 3rd auxiliary unit 163 can also have the y-axis operation free degree.
Indexing unit 169 can mark the inspection of inspection unit 190 between the 6th position and the 7th position on substrate 200 As a result.Indexing unit 169 can possess laser irradiating device as indicia meanses etc., moreover, making to be marked with y-axis The industry free degree.If the second auxiliary unit 162 stops at indexing unit 169, indexing unit 169 can be to be marked with x The axle operation free degree.If the second auxiliary unit 162 has the x-axis free degree and the y-axis free degree concurrently, indexing unit 169 is fixed, and is led to The movement for crossing the second auxiliary unit 162 is marked.In Fig. 1, the second auxiliary unit 162 has the x-axis free degree, y-axis free Degree and rzThe operation free degree, and indexing unit 169 is fixedly installed on the side of the 6th position, such as right side.Therefore, substrate is placed Afterwards, the second auxiliary unit 162 of the 6th position to the right (y-axis) it is mobile and relative to fixed indexing unit 169 along x-axis and Y-axis moves, so as to be marked.Afterwards, moved along x-axis and y-axis and be moved to the 7th position.Second auxiliary unit 162 can profit With the various paths between the 6th position and the 7th position, and do not rushed with the auxiliary unit 163 of unloading unit 140 and the 3rd Within the scope of prominent, optional position that indexing unit 169 may be disposed on the path of the second auxiliary unit 162.In addition, second is auxiliary Help unit 162 in the path and the second auxiliary unit 162 utilized from the 6th position to the 7th position from the 7th position to the 6th The path that position utilizes is possible to different.In Fig. 1, two paths are identical, but can from the path of the 7th position to the 6th position Without indexing unit 169.
Fig. 6 is the check device operation order generalized schematic of the present invention.
Assuming that transposable element 150 possesses with 90 degree of spaced four indexable plates 151, and each unit is set with 90 degree of intervals Situation about putting.
(a) originally, mobile unit 130 is by the substrate of the 5th positionIt is moved to the indexable plate 151 of first position. SubstrateThe 5th position exited, the substrate of cleaning unit 180 will be passed into
(b) after, transposable element 150 is rotated in a clockwise direction 90 degree, and the substrate of first positionWill transfer To the second place.
In the second place, alignment unit 170 confirms substrateAligned condition, and newly arrived by mobile unit 130 Up in the indexable plate 151 of first position, will load originally in the substrate of the 5th position wait In substrateExit The 5th position, the substrate of cleaning unit 180 will be passed into
(c) after, transposable element 150 is rotated in a clockwise direction 90 degree, and the substrate of the second placeWill transfer To the 3rd position, and the substrate of first positionThe second place will be transferred to.
Inspection unit 190 is in the 3rd position detection substrate"on" position.In the second place, alignment unit 170 Confirm substrateAligned condition, and newly reached in the indexable plate 151 of first position, will loaded by mobile unit 130 Originally the substrate waited in the 5th positionIn substrateThe 5th position exited, will pass into cleaning unit 180 substrate
(d) after, transposable element 150 is rotated in a clockwise direction 90 degree, and the substrate of the 3rd positionWill transfer To the 4th position, and the substrate of the second placeThe 3rd position will be transferred to.And the substrate of first positionIt will move Deliver to the second place.
Substrate is carried out by unloading unit 140 in the 4th positionUnloading, and pass through checklist in the 3rd position First 190 pairs of substrates"on" position checked.In the second place, alignment unit 170 confirms substratePair Neat state, and newly reached by mobile unit 130 in the indexable plate 151 of first position, waited loading originally in the 5th position SubstrateIn substrateThe 5th position exited, the substrate of cleaning unit 180 will be passed into
(e) after, transposable element 150 is rotated in a clockwise direction 90 degree, and the substrate of the 3rd positionWill transfer To the 4th position, and the substrate of the second placeThe 3rd position will be transferred to.And the substrate of first positionIt will move Deliver to the second place.
In the 4th position by unloading unit 140 by substrateThe 6th position is moved to, and is completed in the 4th position To substrateUnloading.Inspection unit 190 is in the 3rd position detection substrate"on" position.In the second place, Alignment unit 170 confirms substrateAligned condition, and the indexable plate of first position is newly reached by mobile unit 130 On 151, it will load originally in the substrate of the 5th position waitIn substrateThe 5th position exited, will enter By the substrate of cleaning unit 180
If by said process, by the state of lasting (e) in pilot process is checked.In this case, whenever indexing Unit 150 is rotated by 90 ° leads to galvanoscopic substrate 200 with regard to end of output, and therefore, operating speed is fast.In addition, because of transposable element 150 Centered on each unit is set, therefore, be advantageous to the purpose for reaching miniaturization.In addition, because the check device of the present invention passes through indexing The rotation transfer substrate 200 of unit 150, therefore, simplifies the composition and operation complexity of transposable element 150, and thus error-free Reliable transfer substrate 200 by mistake.Therefore, energization inspection reliably is carried out to substrate 200.
Above-described embodiment only to illustrate rather than limitation, it will be understood by those within the art that, can be with The present invention is modified, deformed or equivalent substitution.And without departing from the spirit and scope of the present invention, it all should cover Among scope of the presently claimed invention.

Claims (13)

1. a kind of check device, including:
Mobile unit, the substrate of the 5th position is moved to first position;
Alignment unit, confirm to be transferred to the aligned condition of the aforesaid substrate of the second place from above-mentioned first position;
Inspection unit, check the "on" position for the aforesaid substrate that the 3rd position is transferred to from said second position;
Unloading unit, unload and be moved to the aforesaid substrate of the 4th position from above-mentioned 3rd position and move the aforesaid substrate of unloading To the 6th position;
Transposable element, it is rotated and by above-mentioned first on the virtual concentric circles formed by above-mentioned rotary motion Put, said second position, the order of above-mentioned 3rd position and above-mentioned 4th position transfer aforesaid substrate;
First load units, it is arranged at the upstream of above-mentioned mobile unit and loads aforesaid substrate;And
First auxiliary unit, the aforesaid substrate for being loaded into above-mentioned first load units is moved to above-mentioned transposable element,
When will be loaded into be defined as the superiors' substrate positioned at the substrates of the superiors in the aforesaid substrate of above-mentioned first load units when,
At least on the time point that above-mentioned first auxiliary unit moves above-mentioned the superiors' substrate, the height of above-mentioned the superiors' substrate is not Fixed by the quantity for the substrate for being loaded into above-mentioned first load units.
2. check device according to claim 1, it is characterised in that:
In xyz spaces, the free degree of above-mentioned mobile unit includes the x-axis free degree, the z-axis free degree, the rotation using z-axis as rotary shaft The dynamic r of transhipmentzThe free degree;
In xyz spaces, the free degree of above-mentioned alignment unit includes the x-axis free degree, the y-axis free degree;
In xyz spaces, the free degree of above-mentioned inspection unit include the x-axis free degree, the y-axis free degree, z-axis, using z-axis as rotary shaft Rotary motion rzThe free degree;
In xyz spaces, the free degree of above-mentioned unloading unit includes the x-axis free degree, the z-axis free degree;
In xyz spaces, the free degree of above-mentioned transposable element includes the r using z-axis as the rotary motion of rotary shaftzThe free degree.
3. check device according to claim 1, it is characterised in that:
Including cleaning unit, cleaning is loaded into the check surface of the aforesaid substrate of above-mentioned first load units and will be cleaned above-mentioned Substrate is moved to above-mentioned 5th position.
4. check device according to claim 1, it is characterised in that:When above-mentioned first auxiliary unit moves the first height Substrate, then above-mentioned first load units decline the substrate of the second height rises to the first height again afterwards.
5. check device according to claim 1, it is characterised in that:Above-mentioned first auxiliary unit is loaded into above-mentioned in movement After the substrate of first load units, rise first distance after, carried out than first in short second distance section it is past Multiple motion.
6. check device according to claim 1, it is characterised in that:
Above-mentioned transposable element, including:
Rest portion, hole is formed at its center and places substrate in the end in above-mentioned hole;
Hold with a firm grip portion, fixed placement is in the substrate of above-mentioned rest portion;
And above-mentioned first position is arranged at including accessory plate, the accessory plate, rise when aforesaid substrate is moved to above-mentioned rest portion And contacted by above-mentioned hole with aforesaid substrate.
7. check device according to claim 1, it is characterised in that:Above-mentioned inspection unit spatially, utilizes x-axis in xyz The x-axis alignment error and y-axis alignment error for the aforesaid substrate that the free degree and the correction of the y-axis free degree confirm through above-mentioned alignment unit.
8. check device according to claim 1, it is characterised in that:Above-mentioned inspection unit by move along the z-axis direction and Contacted with the aforesaid substrate of x/y plane, and in above-mentioned z-axis direction, z1The translational speed of position compares z2Position translational speed is small, wherein z1Compare z in position2Position is near from aforesaid substrate.
9. check device according to claim 1, it is characterised in that:Above-mentioned inspection unit utilizes the one side with aforesaid substrate First inspection portion of contact and the second inspection portion contacted with the another side of aforesaid substrate are carried out to the "on" position of aforesaid substrate Check.
10. check device according to claim 9, it is characterised in that:During initial setting up, in xyz spaces, above-mentioned first inspection The free degree quantity for looking into portion is different with the free degree quantity in above-mentioned second inspection portion.
11. check device according to claim 9, it is characterised in that:Wherein, in initial setting up, in xyz spaces, on Stating the first inspection portion has the z-axis free degree, the r using z-axis as the rotary motion of rotary shaftzThe free degree, and above-mentioned second inspection portion With the x-axis free degree, the y-axis free degree, the z-axis free degree and r using z-axis as the rotary motion of rotary shaftzThe free degree.
12. check device according to claim 1, it is characterised in that:
Including:Second load units, positioned at the downstream of above-mentioned unloading unit and load above-mentioned inspection unit terminate it is logical galvanoscopic Substrate;
Second auxiliary unit, the substrate of above-mentioned 6th position is moved to the 7th position;
3rd auxiliary unit, the substrate of above-mentioned 7th position is moved to above-mentioned second load units;And
Indexing unit, between above-mentioned 6th position and above-mentioned 7th position, above-mentioned inspection unit is marked on aforesaid substrate Inspection result.
13. check device according to claim 1, it is characterised in that:Above-mentioned 5th position and above-mentioned 6th position with In plane centered on above-mentioned transposable element, some direction in up and down.
CN201410179190.8A 2014-04-30 2014-04-30 Check device Active CN105021940B (en)

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CN1304286A (en) * 2000-01-13 2001-07-18 株式会社村田制作所 Conveying device and method for component
CN1367371A (en) * 2001-01-12 2002-09-04 日本电产丽德株式会社 Circuit board checking device and method
CN1665012A (en) * 2003-12-19 2005-09-07 先进自动器材有限公司 System for processing electronic devices
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