KR101258121B1 - Dissembling and reassembling method of platform for LCD mother glass inspection machine - Google Patents

Abstract

According to the present invention, when disassembling after disassembling the X0 and X1 axis, providing a reference position of the assembly and installing a reference position jig unit for fine adjustment of the position; Installing a Y-axis disassembly jig for lifting the Y-axis upward; Separating the X0 and X1 axes from the Y axis; Lifting the Y axis from the X0 and X1 axes; An decomposition step including the step of lowering the Y axis onto the fixture using the Y axis decomposition jig and fixing the fixture to the fixture;

Lifting the Y axis; Assembling the X0 and X1 axes to the main surface; Finely adjusting the position of the X0 and X1 axes using the reference position jig unit; And lowering the Y axis and assembling with the X0 and X1 axes, and then disassembling and reassembling the platform for an LCD mother glass inspection equipment, including a reassembling step of finely adjusting a position thereof.

According to the above method of disassembling and reassembling the platform for LCD mother glass inspection equipment, the reassembly time can be shortened by precise positioning and fine adjustment by the main positioning plate and the reference position jig unit installed on the X0 and X1 axes. And precise settings are possible.

Description

Disassembling and reassembling method of platform for LCD mother glass inspection machine}

The present invention relates to a platform for LCD mother glass inspection machine (Platform for LCD mother glass inspection machine), and more specifically, to disassemble and package to supply the LCD mother glass inspection equipment platform manufactured to order manufacturers to LCD manufacturers A method for disassembling and reassembling a platform for an LCD mother glass inspection device for reassembly after transportation.

Recently, major LCD makers in Korea and abroad who produce liquid crystal displays (LCDs) have established 9 to 10 generations with the goal of securing an advantageous market position in the large LCD TV market and leading the standardization of large LCD TVs. It is trying to build an 11th generation next generation LCD line.

This is directly related to the issue of standardizing the size of the LCD substrate to take the lead in the screen size of large LCD TVs, and the size of LCD TVs that are sold a lot depends on the size of LCD panels produced by one large LCD maker optimally. It is determined that taking the lead in standardizing the size of LCD TV can take advantage of marketing.

In the 11th generation next-generation LCD line that is built in line with the strategic goals of the major LCD manufacturers, the inspection equipment capable of inspecting the enlarged mother glass will be required. In addition, inspection equipment for inspecting such a large mother glass requires a very large motion platform that can cope with it.

1 is a perspective view showing a platform for a typical LCD mother glass inspection equipment.

As shown, the platform for the LCD mother glass inspection equipment, the main surface of the granite (Granite) on which the mother glass is to be seated, and X0 and parallel to each other on the main surface 10 and An X1 axis (21) 22 and a Y axis (30) provided to be movable on the X0 and X1 axis (21) 22 while being orthogonal to such X0 and X1 axis (21) (22). And although not shown, the Y-axis 30 is installed a vision system for inspection.

Typically, such a platform for the LCD mother glass inspection equipment, such as the platform manufacturers, vendors (Vender), who have received a manufacturing order from the LCD manufacturer to manufacture the platform for the LCD mother glass inspection equipment to meet the first required design conditions and precision . Since the platform for the manufacture of the LCD mother glass inspection equipment is packaged, and then transported and installed in a clean room (LCD) room of the LCD manufacturer, it will be used as inspection equipment. Of course, inspection equipment, such as vision systems, may be additionally installed on the platform for LCD mother glass inspection equipment by other vendors before delivery to the LCD manufacturer.

On the other hand, the size of the platform for inspection equipment that can cope with the 11th generation of mother glass has a problem that the operation is limited by the current road traffic law of our country as the size of the large. In order to solve this problem, the platform for the LCD mother glass inspection equipment completed by the platform manufacturer must be disassembled and repacked, and then transported to the LCD manufacturer for reassembly in the clean room of the LCD manufacturer.

However, the platform for the LCD mother glass inspection equipment requires high precision, and the precision already set during the disassembly and reassembly process is very easy to sacrifice, especially in the manufacturer's clean room. Not only did they lack equipment to calibrate and align the platform, but it was also difficult to bring in.

Therefore, even if the already manufactured platform for the LCD mother glass inspection equipment is disassembled and reassembled, there is a need for a method for disassembling and reassembling the platform for the LCD mother glass inspection equipment that can maintain the required design conditions and precision.

The present invention was created in order to meet the above needs, and the method of disassembling and reassembling the platform for the LCD mother glass inspection equipment that can satisfy the degree and design requirements of each component even after disassembly and reassembly after fabrication completed The purpose is to provide.

Method for disassembling and reassembling the platform for LCD mother glass inspection equipment according to the present invention in order to achieve the above object, the main surface, X0 and X1 axis disposed parallel to each other on the main surface, and the X0 and X1 A disassembly and reassembly step for disassembling, transporting and reassembling the platform for an LCD mother glass inspection equipment having a Y axis movable perpendicularly to the X0 and X1 axes while being orthogonal to the axis. When disassembling after disassembling the X0 and X1 axes, the rectangular shape is provided to provide a reference position of the assembly and to extend downwardly from both ends below the longitudinal direction (X direction) of the X0 and X1 axes for fine adjustment of the position. And are respectively provided on both sides of the insert block, which is made of steel, and the front and rear directions (X direction) of the main surface plate, and the insertion blocks correspond to each other between the main surface plate and the main surface plate. L-shaped to form an insertion groove that can be inserted into the adjustment block made of steel combined with a longitudinal positioning screw for fine adjustment of the longitudinal position of the X0 and X1 axis, and the width direction of the X0 and X1 axis A first pair of steel plate having a pair of square shapes spaced apart from each other and detachably installed at a side adjacent to an edge of the main surface plate of both sides, and the first plate of both sides in the width direction of the X0 and X1 axes; The second and third plates having a square shape and spaced apart from each other at opposite sides, and disposed at the side portions of the main table so as to correspond to the first plates, respectively, and having fine widths in the width directions of the X0 and X1 axes. A steel first adjustment plate having a pair of square shapes, each of which has a first widthwise positioning screw for adjustment, and the second plate can be inserted and seated correspondingly. A second steel adjustment plate disposed on an upper portion of the main surface plate so as to have a U-shape formed by a seating groove, and having a second width adjustment screw coupled to a second width adjustment screw for fine adjustment of the width directions of the X0 and X1 axes; A third width direction adjustment for fine adjustment of the width direction positions of the X0 and X1 axes, the upper surface of the main plate being disposed above the main plate to have a curvature to correspond to the third plate; Installing a reference position jig unit including a screw-mounted steel third adjustment plate; a pull-up plate spaced apart from the main surface plate to lift the Y axis upward; and one end fixed to the main surface plate And a plurality of posts fixed at the other end to the pull-up plate to fix the pull-up plate to be spaced apart from the main surface plate, and pulling the Y-axis. Installing a Y-axis disassembly jig including a plurality of fastening members for fixing to the pull-up plate, separating the X0 and X1 axes from the Y-axis, and using the Y-axis disassembly jig to fix the Y-axis to the X0 axis. And lifting the X axis from the X1 axis, preparing a pair of fixtures for fixing both ends of the Y axis to the main surface plate, and lowering the Y axis onto the fixture using the Y axis disassembly jig. And a step of fixing, wherein the reassembling step is to separate the Y axis from the fixture and to lift the Y axis using the Y axis disassembly jig, and to assemble the X0 and X1 axes to the main surface plate. Finely adjusting the position of the X0 and X1 axes using the reference position jig unit; In the disassembly and reassembly method of the platform for the LCD mother glass inspection equipment comprising the step of lowering the Y axis and assembling with the X0 and X1 axis, the position of the fine adjustment,

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Fine adjustment of the position of the X0 and X1 axis 21, 22 in the reassembly step (S20) (S23) is the insertion block 110 of the reference position jig unit 100 is the adjustment block 120 Coupling to be inserted into the insertion groove 121 of the (S23a);
Inserting the second plate 130 of the reference position jig unit 100 to be seated in the seating groove 170a of the second adjustment plate 170 (S23b);
Finely adjusting (S23c) the position in the longitudinal direction of the X0 and X1 axes (21) (22) by using the longitudinal positioning screw (121); And finely adjusting the widthwise positions of the X0 and X1 axes 21 and 22 by using the first, second and third width adjustment screws 161, 171, and 181 (S23d). More).

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According to the method of disassembling and reassembling the platform for an LCD mother glass inspection equipment according to the present invention has the following effects.

First, since the X0 and X1 axes are disassembled, transported, and reassembled, instead of separating the X0 and X1 axes into several pieces, they are a one-body type edge stage that improves precision and reduces costs. Not only is this possible, the time for precision setting can be minimized.

Second, since the linear scale is dismantled and reassembled with the edge stage installed, cost reduction and the problem of fine setting during reassembly can be eliminated.

Third, because the LM guide rail can be integrated into one piece, there is no need for a separate setting process when reassembling, and the assembly time is shortened. The problem of stick slip does not occur.

Fourth, precise positioning and fine adjustment are possible by the main positioning table and the reference position jig unit installed on the X0 and X1 axes, so that reassembly time can be shortened and precise setting is possible.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms, and the inventor should appropriately interpret the concepts of the terms appropriately The present invention should be construed in accordance with the meaning and concept consistent with the technical idea of the present invention.

Therefore, the embodiments described in the present specification and the configurations shown in the drawings are merely the most preferred embodiments of the present invention and are not intended to represent all of the technical ideas of the present invention. Therefore, various equivalents It should be understood that water and variations may be present.

Hereinafter, with reference to the accompanying drawings to explain the disassembly and reassembly method of the platform for LCD mother glass inspection equipment according to an embodiment of the present invention. However, for convenience of description, the disassembling method of the platform for the LCD mother glass inspection equipment will be described, and then the reassembly method will be described sequentially.

Figure 2 is a flow chart for explaining the disassembly method of the platform for the LCD mother glass inspection equipment according to an embodiment of the present invention, Figure 3 and Figure 4 is the Y-axis by the Y-axis decomposition jig in the disassembly step shown in Figure 2 FIG. 5 is a perspective view for explaining a method of decomposing the X0 and X1 axes, and FIG. 5 is a perspective view for explaining a method of fixing the Y axis by a fixture in the disassembly step shown in FIG. 2.

Referring to the drawings, the platform for the LCD mother glass inspection equipment, the main surface 10, and the X0 and X1 axis (21) (22) disposed parallel to each other on the main surface 10, such X0 and X1 The Y-axis 30 is provided to be movable on the X0 and X1 axes 21 and 22 while being perpendicular to the axes 21 and 22. And the Y axis 30 is installed a vision system (Vision system) such as a camera for inspection.

 The platform for the LCD mother glass inspection equipment as described above is set by the manufacturer of the platform that has been ordered to satisfy all the design conditions, and after disassembly, it must be disassembled to be transported to the LCD manufacturer's clean room. When the decomposition step (S10) will be described sequentially.

First, when disassembling after disassembling the X0 and X1 axis (21) (22), the reference position jig unit 100 (see Figs. 8 and 9) for providing a reference position of the assembly and fine adjustment of the position Install (S11). X0 and X1 axis (21) (22) and the reference position unit 100 installed on the main surface plate 10, X0 and X1 axis (21) (22) set precisely before disassembly even if reassembly By providing a reference position for the assembly of the assembly, not only can shorten the time for reassembly, but also facilitate the precise setting to be redone during reassembly. However, the components and actions of the reference position jig unit 100 will be described in detail in the reassembly step (S20) to be described later.

 Next, the Y-axis disassembly jig 200 for lifting the Y-axis 30 upward is installed on the main surface plate 10 (S12). As shown in FIGS. 3 and 4, the Y-axis disassembling jig 200 includes a pull-up plate 210, a plurality of posts 220, and a plurality of fastening members 230. . In more detail, the pull-up plate 210 is spaced apart on the main surface 10 to the top of the Y-axis (30). And the post 220, one end is fixed to the main surface 10 and the other end is fixed to the pull-up plate 210 serves to fix the pull-up plate 210 spaced apart from the main surface 10. Finally, the fastening member 230, such as a bolt, serves to fix the pull-up plate 210 by pulling the Y-axis 30.

Next, the X0 and X1 axes 21 and 22 and the Y axis 30 are separated (S13). Although not shown for this purpose, the bolt coupling portion of the adapter plate (Adaptor plate) for assembling the X0 and X1 axis (21) 22 and the Y axis (30).

Next, the Y axis 30 is lifted from the X0 and X1 axes 21 and 22 using the Y axis disassembly jig 200 (S14). Then, as shown in Figure 4, the Y-axis 30 is fixed to the pull-up plate 210 of the Y-axis disassembly jig 200. Therefore, the supporters supported by the X0 and X1 axes 21 and 22 as well as the X0 and X1 axes 21 and 22 can be separated. In order to separate the X0 and X1 shafts 21 and 22, a hydraulic lifter may be used. In addition, by using an eye bolt (Eye bolt) it is possible to separate the X0 and X1 axis (21) 22 with a simple hoist crane (Hoist crane).

Next, as shown in FIG. 5, a pair of fixtures 300 are prepared to fix both ends of the Y-axis 30 to the main surface plate 10 (S15). The fixture 300 is fixed on the main surface 10 by a fastening member such as a bolt.

Then, finally, the Y-axis 30 is lowered onto the fixture 300 using the Y-axis disassembly jig 200 and fixed to the fixture 300 using a fastening member such as a bolt (S16).

Main plate 10, X0 and X1 axis (21) (22) and Y axis (30) which are disassembled according to the disassembly method of the platform for the LCD mother glass inspection equipment according to the embodiment of the present invention described above are each packaged After that, it is transported to the LCD manufacturer's clean room. Therefore, even if the size of the platform for the inspection equipment is very large, it can be legally transported without violating the current road traffic law. In addition, since the X0 and X1 axes are disassembled, transported, and reassembled, respectively, without separating the X0 and X1 axes into several pieces, it is possible to improve precision and reduce costs as an edge stage of one body type. Not only is this possible, the time for precision setting can be minimized. Furthermore, since the linear scale is disassembled and reassembled in the state of being installed in the edge stage, cost reduction and the problem of fine setting at the time of reassembly can be eliminated. Thirdly, since the LM guide rail can be integrated into one piece, there is no need for a separate setting process when reassembling, and the assembly time is shortened. The problem of stick slip does not occur.

Hereinafter, the reassembly step (S20) of the platform for the LCD mother glass inspection equipment, which is disassembled by the above disassembly and transported to the LCD room, will be described with reference to the accompanying drawings.

6 is a flowchart illustrating a reassembly method of the platform for the LCD mother glass inspection equipment according to an embodiment of the present invention, Figure 7 is a method of finely adjusting the position of the X0 and X1 axis in the reassembly step shown in FIG. 8 and 9 are perspective views for explaining a method of finely adjusting the position of the X0 and X1 axes using the reference position jig unit in the reassembly step shown in FIG. 6.

In order to reassemble, the Y axis 30 is first separated from the fixture 300, and then the Y axis 30 is lifted up using the Y axis disassembly jig 200 (S21). Then, the fixing bolt or the like is disassembled to separate the fixture 300 from the main surface plate 10.

Next, after assembling the X0 and X1 axes 21 and 22 to the main surface plate 10 (S22), the position of the X0 and X1 axes 21 and 22 using the reference position jig unit 100. Finely adjust (S23). Before the reassembly and fine-positioning of the X0 and X1 axes 21 and 22 are described, the reference position jig unit 100 will be described first.

According to claim 1, wherein the reference position jig unit 100, the insertion block 110 of the substantially rectangular shape, the adjustment block 120 of the substantially rectangular shape, the first, second, third plate 130 140, 150, and first, second, and third adjustment plates 160, 170, and 180.

The insertion block 110 is installed to extend downward from both ends of the longitudinal direction (X direction) of the X0 and X1 axis (21) (22), respectively.

The adjustment block 120 is installed on both sides in the front and rear direction (X direction) of the main surface plate 10, respectively. And it has an L-shape to form an insertion groove (120a) that can be inserted correspondingly each insertion block 110 between the main surface plate (10). The adjustment block 120 is coupled to the longitudinal positioning screw 121 for fine adjustment of the longitudinal (X direction) position of the X0 and X1 axis (21) (22).

The first plate 130 is provided with a pair spaced apart from each other in the side adjacent to the edge of the main surface plate 10 of the both sides of the width direction (Y direction) of the X0 and X1 axis (21) (22).

The second and third plates 140 and 150 are disposed to be spaced apart from each other on the side opposite to the first plate 130 among both sides of the width direction of the X0 and X1 axes 21 and 22.

The first adjustment plate 160 is disposed on the side of the main surface plate 10 to correspond to the first plate 130, respectively. The first adjustment plate 160 is coupled to the first width adjustment screw 161 for fine adjustment of the width direction of the X0 and X1 axes 21 and 22, respectively. The first adjustment plate 160 should be detachably installed for reassembly of the X0 and X1 shafts 21 and 22, which will be described later.

The second adjustment plate 170 is disposed above the main surface plate 10 so as to have a U-shape formed by a seating groove 170a through which the second plate 140 may be inserted and seated correspondingly. The second adjustment plate 170 is coupled with a second width adjustment screw 171 for fine adjustment of the width direction of the X0 and X1 axes 21 and 22.

The third adjustment plate 180 is disposed above the main surface plate 10 so as to correspond to the third plate 150. The third adjustment plate 180 is formed such that the surface 180a in contact with the third plate 150 has a curvature. In addition, a third width adjustment screw 181 is coupled to the third adjustment plate 180 for fine adjustment of the width direction positions of the X0 and X1 axes 21 and 22.

On the other hand, the insertion block 110, the adjustment block 120, and the first, second, third plate 130, 140, 150, the first, second, third adjustment plate 160, 170 180 is preferably made of heat-treated steel. This is because the main surface plate 10 and the X0 and X1 axes 21 and 22 may be damaged by a positioning screw for fine adjustment of the position as a stone such as granite.

The step S23 of finely adjusting the positions of the X0 and X1 axes 21 and 22 by the reference position jig unit 100 as described above is as follows.

 First, in order to position the X0 and X1 axes 21 and 22 on the main surface plate 10, the insertion block 110 of the reference position jig unit 100 is moved by moving the X0 and X1 axes 21 and 22. It is coupled to be inserted into the insertion groove 121 of the adjustment block 120 (S23a). On the other hand, in this process, the formulation 1 adjusting plate 160 should be separated from the main table 10 for smooth reassembly of the X0 and X1 axis (21) (22).

Next, the second plate 130 of the reference position jig unit 100 is seated in the seating groove 170a of the second adjustment plate 170 by moving the X0 and X1 axes 21 and 22. It inserts (S23b). Accordingly, the second plate 130 is in two-sided contact with the second adjustment plate 170. In addition, since the third plate 140 is in point contact with the curvature 180a of the third adjustment plate 180, it is possible to provide a reference position of the assembly set before disassembly. On the other hand, after fixing the separated pair of the first adjustment plate 160 to the main surface plate 10 to be in close contact with the first plate 130.

As described above, when the X0 and X1 axes 21 and 22 are positioned at the reference position of the assembly by the reference position jig unit 100, the X0 and X1 axes 21 (using the longitudinal positioning screw 121) ( The position in the longitudinal direction of 22) is finely adjusted (S23c). Then, the first, second and third width adjustment screws 161, 171 and 181 are used to finely adjust the width direction positions of the X0 and X1 axes 21 and 22 (S23d). .

After the assembly and fine adjustment of the position of the X0 and X1 axes 21 and 22 are completed, the Y axis 30 is lowered and assembled with the Y axis 30 and the X0 and X1 axes 21 and 22. Then, the positions of the X0 and X1 axes 21 and 22 and the Y axis 30 are finely adjusted (S24). Equipment such as a laser interferrometer, a square master, or the like may be used for precise setting of the squareness and parallelism of the X0 and X1 axes 21 and 22 and the Y axis 30.

According to the method of reassembling the platform for the LCD mother glass inspection equipment according to the embodiment of the present invention described above by the reference position jig unit 100 installed on the main surface 10 and X0 and X1 (21) (22) axis Because of the precise positioning and fine adjustment, the reassembly time can be shortened and the precise setting is possible.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1 is a perspective view of a platform for a typical LCD mother glass inspection equipment,

2 is a flowchart illustrating a disassembly method of a platform for an LCD mother glass inspection equipment according to an embodiment of the present invention;

3 and 4 are perspective views for explaining a method of lifting the Y-axis by the Y-axis decomposition jig in the decomposition step shown in FIG.

5 is a perspective view for explaining a method of fixing the Y-axis by the fixture in the disassembly step shown in FIG.

6 is a flowchart illustrating a reassembly method of a platform for an LCD mother glass inspection equipment according to an embodiment of the present invention;

7 is a flowchart for explaining a method of finely adjusting the positions of the X0 and X1 axes in the reassembly shown in FIG. 6;

8 and 9 are perspective views for explaining a method of finely adjusting the position of the X0 and X1 axes using the reference position jig unit in the reassembly step shown in FIG.

<Brief description of symbols for the main parts of the drawings>

10: Main plate 21, 22: X1 and X2 axes

30: Y axis 100: Standard position jig unit

110: insertion block 120: adjustment block

121: Longitudinal positioning screw 130, 140, 150: First, second, third plate

160, 170, 180: 1st, 2nd, 3rd adjustment plate

161,171,181: 1st, 2nd, 3rd width positioning screw

200: Y-axis disassembly jig 210: Pull-up plate

220: post 230: fastening member

300: fixture S10: decomposition step

S20: Reassembly

Claims (4)

The X0 and X1 are orthogonal to the main surface 10, the X0 and X1 axes 21 and 22 arranged side by side on the main surface 10, and the X0 and X1 axes 21 and 22, respectively. Disassembly and reassembly step (S10) (S20) for disassembling and transporting after disassembling and transporting the platform for the LCD mother glass inspection equipment having a Y-axis (30) movably installed on the shaft (21) (22) In the disassembling step S10, when disassembling after disassembling the X0 and X1 axes 21 and 22, the X0 and X1 axes may be provided to provide a reference position of assembly and to finely adjust the position. 21 and 22, the insertion block 110 made of a square-shaped steel is installed so as to extend downward from the lower end of both ends in the longitudinal direction (X direction), and both sides of the front and rear direction (X direction) of the main surface plate 10. Respectively installed in the L-shape to form an insertion groove 120a into which the respective insertion blocks 110 can be correspondingly inserted between the main surface plate 10 and the main plate 10. And an adjustment block 120 made of steel combined with a longitudinal positioning screw 121 for fine adjustment of the longitudinal position of the X0 and X1 axes 21 and 22, and the X0 and X1 axes 21. The first steel plate 130 having a pair of square shapes spaced apart from each other and detachably installed at both sides of the width direction (Y direction) adjacent to the edge of the main surface plate 10 in the width direction of the 22; The second and third steel plates 140 are disposed to be spaced apart from each other at sides of the widthwise sides of the X0 and X1 axes 21 and 22 opposite to the first plate 130 and have a square shape. 150 and a side part of the main surface plate 10 respectively corresponding to the first plate 130, and are each configured to finely adjust the widthwise position of the X0 and X1 axes 21 and 22, respectively. The steel first adjustment plate 160 and the second plate 140 having a pair of quadrangular shapes to which the one widthwise positioning screw 161 is coupled, respectively. The upper surface of the main plate 10 so as to have a U-shape formed by a seating groove 170a that can be inserted and seated therein, and finely adjusting the widthwise position of the X0 and X1 axes 21 and 22. A second adjustment plate 170 coupled to the second width adjustment screw 171 for the first and second plates 171 and an upper portion of the main surface plate 10 so as to correspond to the third plate 150; The surface 180a in contact with the plate 150 is formed to have a curvature, and the third widthwise positioning screw 181 for fine adjustment of the widthwise position of the X0 and X1 axes 21 and 22 is coupled. Installing a reference position jig unit 100 including the steel third adjustment plate 180 (S11) and spaced apart on the main surface 10 to lift the Y-axis 30 upwards The pull-up plate 210 is disposed, one end is fixed to the main surface plate 10 and the other end is fixed to the pull-up plate 210 A plurality of posts 220 for holding the pull-up plate 210 spaced apart from the main surface plate 10 and a plurality of fastening members for pulling the Y-axis 30 to fix the pull-up plate 210 ( Installing a Y-axis disassembly jig 200 including a step (S12), and separating the X0 and X1 axis (21) 22 and the Y axis (30) (S13), and the Y axis Lifting the Y axis 30 from the X0 and X1 axes 21 and 22 using the disassembly jig 200 (S14), and both ends of the Y axis 30 to the main surface plate 10. Preparing a pair of fixtures 300 for fixing to S15; And lowering the Y-axis 30 on the fixture 300 by using the Y-axis disassembling jig 200, and then fixing the Y-axis 30 on the fixture 300 (S16). ) Is the step of lifting up the Y-axis 30 using the Y-axis disassembly jig 200 after separating the Y-axis 30 from the fixture (S21), and the X0 and X1 axis ( 21) (22) assembling the main surface plate (10) (S22) and using the reference position jig unit 100 to finely adjust the position of the X0 and X1 axis (21) (22) (S23) and lowering the Y-axis 30 and assembled with the X0 and X1 axis (21) (22), and then fine-adjusting the position (S24) characterized in that the LCD mother glass inspection cabinet In the disassembly and reassembly of the cost platform, In the reassembling step (S20), finely adjusting the positions of the X0 and X1 axes 21 and 22 (S23), Coupling the insertion block 110 of the reference position jig unit 100 to be inserted into the insertion groove 121 of the adjustment block 120 (S23a); Inserting the second plate 130 of the reference position jig unit 100 to be seated in the seating groove 170a of the second adjustment plate 170 (S23b); Finely adjusting (S23c) the position in the longitudinal direction of the X0 and X1 axes (21) (22) by using the longitudinal positioning screw (121); And finely adjusting the widthwise positions of the X0 and X1 axes 21 and 22 by using the first, second and third width adjustment screws 161, 171, and 181 (S23d). Method for disassembling and reassembling the platform for the LCD mother glass inspection equipment further comprising. delete delete delete

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