CN1314940C - 坐标检测装置 - Google Patents

坐标检测装置 Download PDF

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Publication number
CN1314940C
CN1314940C CNB028022750A CN02802275A CN1314940C CN 1314940 C CN1314940 C CN 1314940C CN B028022750 A CNB028022750 A CN B028022750A CN 02802275 A CN02802275 A CN 02802275A CN 1314940 C CN1314940 C CN 1314940C
Authority
CN
China
Prior art keywords
aforementioned
light
luminophor
coordinate
emitting component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028022750A
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English (en)
Chinese (zh)
Other versions
CN1464969A (zh
Inventor
加藤洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of CN1464969A publication Critical patent/CN1464969A/zh
Application granted granted Critical
Publication of CN1314940C publication Critical patent/CN1314940C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CNB028022750A 2001-06-29 2002-06-28 坐标检测装置 Expired - Fee Related CN1314940C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP200144/01 2001-06-29
JP200144/2001 2001-06-29
JP2001200144 2001-06-29

Publications (2)

Publication Number Publication Date
CN1464969A CN1464969A (zh) 2003-12-31
CN1314940C true CN1314940C (zh) 2007-05-09

Family

ID=19037317

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028022750A Expired - Fee Related CN1314940C (zh) 2001-06-29 2002-06-28 坐标检测装置

Country Status (5)

Country Link
JP (1) JP4222934B2 (ja)
KR (1) KR100908520B1 (ja)
CN (1) CN1314940C (ja)
TW (1) TWI221190B (ja)
WO (1) WO2003002934A1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004015326A1 (de) * 2004-03-30 2005-10-20 Leica Microsystems Vorrichtung und Verfahren zur Inspektion eines Halbleiterbauteils
KR100625510B1 (ko) * 2004-12-06 2006-09-20 주식회사 파이컴 평판디스플레이 패널 검사장치의 패널공급장치 및 이에 사용되는 서브 테이블
US7297972B2 (en) * 2005-08-26 2007-11-20 Electro Scientific Industries, Inc. Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target
JP2008070238A (ja) * 2006-09-14 2008-03-27 Olympus Corp 基板検査装置
CN101718828B (zh) * 2008-12-24 2012-08-08 四川虹欧显示器件有限公司 用于平板显示器的缺陷确认装置及其操作方法
CN102393576A (zh) * 2011-08-03 2012-03-28 深圳市华星光电技术有限公司 液晶显示器中玻璃基板的目视检查机及检查方法
US8854616B2 (en) 2011-08-03 2014-10-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof
CN103075970B (zh) * 2012-12-27 2015-07-01 深圳市华星光电技术有限公司 测长装置直交度补偿方法及使用该方法的测长装置
CN103604815B (zh) * 2013-11-26 2016-01-13 上海海事大学 玻璃晶片检测装置与标定方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6179107A (ja) * 1984-09-26 1986-04-22 Canon Inc 原稿サイズ検知装置
JPH07128013A (ja) * 1993-11-08 1995-05-19 Sony Corp 光学式位置検出装置
JPH0861915A (ja) * 1994-08-23 1996-03-08 San Denshi Kk 物体位置センサ
JPH11160242A (ja) * 1997-09-24 1999-06-18 Olympus Optical Co Ltd 基板検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6671041B2 (en) * 1997-09-24 2003-12-30 Olympus Optical Co., Ltd. Apparatus for inspecting a substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6179107A (ja) * 1984-09-26 1986-04-22 Canon Inc 原稿サイズ検知装置
JPH07128013A (ja) * 1993-11-08 1995-05-19 Sony Corp 光学式位置検出装置
JPH0861915A (ja) * 1994-08-23 1996-03-08 San Denshi Kk 物体位置センサ
JPH11160242A (ja) * 1997-09-24 1999-06-18 Olympus Optical Co Ltd 基板検査装置

Also Published As

Publication number Publication date
KR100908520B1 (ko) 2009-07-20
KR20030042455A (ko) 2003-05-28
WO2003002934A1 (fr) 2003-01-09
TWI221190B (en) 2004-09-21
JPWO2003002934A1 (ja) 2004-10-21
JP4222934B2 (ja) 2009-02-12
WO2003002934B1 (fr) 2003-03-06
CN1464969A (zh) 2003-12-31

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Granted publication date: 20070509

Termination date: 20140628

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