CN1312490A - 自动显影装置及补充显影补充液的方法 - Google Patents
自动显影装置及补充显影补充液的方法 Download PDFInfo
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- CN1312490A CN1312490A CN01102195.0A CN01102195A CN1312490A CN 1312490 A CN1312490 A CN 1312490A CN 01102195 A CN01102195 A CN 01102195A CN 1312490 A CN1312490 A CN 1312490A
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- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 150000005846 sugar alcohols Chemical class 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical compound [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-N sulfonic acid Chemical compound OS(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-N 0.000 description 1
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229940066771 systemic antihistamines piperazine derivative Drugs 0.000 description 1
- 239000003760 tallow Substances 0.000 description 1
- 229960003080 taurine Drugs 0.000 description 1
- 150000005621 tetraalkylammonium salts Chemical class 0.000 description 1
- DZLFLBLQUQXARW-UHFFFAOYSA-N tetrabutylammonium Chemical compound CCCC[N+](CCCC)(CCCC)CCCC DZLFLBLQUQXARW-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 150000004867 thiadiazoles Chemical class 0.000 description 1
- 150000003558 thiocarbamic acid derivatives Chemical class 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- 125000005270 trialkylamine group Chemical group 0.000 description 1
- WYXIGTJNYDDFFH-UHFFFAOYSA-Q triazanium;borate Chemical compound [NH4+].[NH4+].[NH4+].[O-]B([O-])[O-] WYXIGTJNYDDFFH-UHFFFAOYSA-Q 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- DRTQHJPVMGBUCF-UHFFFAOYSA-N uracil arabinoside Natural products OC1C(O)C(CO)OC1N1C(=O)NC(=O)C=C1 DRTQHJPVMGBUCF-UHFFFAOYSA-N 0.000 description 1
- 229940045145 uridine Drugs 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 229940075420 xanthine Drugs 0.000 description 1
- 229960003487 xylose Drugs 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3042—Imagewise removal using liquid means from printing plates transported horizontally through the processing stations
- G03F7/3071—Process control means, e.g. for replenishing
Landscapes
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Wet Developing In Electrophotography (AREA)
Abstract
Description
各天的处理量(m2×张) | |||||||||||
日 | 1 | 2 | 3 | 4 | 5 | 8 | 9 | 10 | 11 | 12 | 15 |
星期 | 一 | 二 | 三 | 四 | 五 | 一 | 二 | 三 | 四 | 五 | 一 |
AM | 0 | 0 | 0.8×120 | 0.2×120 | 0.8×120 | 0 | 0 | 0.8×120 | 0.2×120 | 0.8×120 | 0 |
PM | 0 | 0.8×121 | 0.8×120 | 0.2×120 | 0.8×120 | 0 | 0.8×121 | 0.8×120 | 0.2×120 | 0.8×120 | 0 |
計 | 0 | 96.8 | 192 | 48 | 192 | 0 | 96.8 | 192 | 48 | 192 | 0 |
最大PH波动范围 | ||
通常条件 | 干燥条件(1小时30ml的水的蒸发) | |
面积基准补充方式 | 0.1 | - |
电导率基准补充方式 | 0.02 | 0.06 |
实施例1的方式 | 0.01 | 0.02 |
最大PH变动范围 | |
面积经时补充方式 | 0.15 |
电导率基准补充方式 | 0.04 |
实施例2的方式 | 0.02 |
补充方式 | 感光板 | 显影液 | 补充液 | 处理条件 | |
实施例3 | 本发明方式 | 感光板A、感光板B感光板C,感光板D | 显影液A | 补充液A | 处理条件1 |
实施例4 | 同上 | 感光板C、感光板D、感光板E | 显影液B | 补充液B | 处理条件2 |
实施例5 | 同上 | 感光板F | 显影液C | 补充液C | 处理条件3 |
实施例6 | 同上 | 感光板G | 显影液E | 补充液E | 处理条件4 |
实施例7 | 同上 | 感光板K | 显影液E | 补充液E | 处理条件5 |
实施例8 | 同上 | 感光板H | 显影液D | 补充液D | 处理条件6 |
实施例9 | 同上 | 感光板I | 显影液D | 补充液D | 处理条件7 |
实施例10 | 同上 | 感光板J | 显影液E | 补充液E | 处理条件8 |
比较例1 | 面积经时补充方式(无电导率检出) | 感光板A、感光板B | 显影液A | 补充液A | 处理条件1 |
比较例2 | 同上 | 感光板C、感光板D、感光板E | 显影液B | 补充液B | 处理条件2 |
比较例3 | 同上 | 感光板F | 显影液C | 补充液C | 处理条件3 |
比较例4 | 同上 | 感光板G | 显影液E | 补充液E | 处理条件4 |
比较例5 | 同上 | 感光板K | 显影液E | 补充液E | 处理条件5 |
比较例6 | 同上 | 感光板H | 显影液D | 补充液D | 处理条件6 |
比较例7 | 同上 | 感光板I | 显影液D | 补充液D | 处理条件7 |
比较例8 | 同上 | 感光板J | 显影液E | 补充液E | 处理条件8 |
比较例9 | 电导率补充液补充方式(特开昭64-21451、US4,882,246记载的方式) | 感光板A、感光板B | 显影液A | 补充液A | 处理条件1 |
显影温 显影时 显影槽 运转时经时补 停止时经时补 处理补充量自动 输送速度 处理图形显影机 度 间 容量(ml) 充量(ml/小时) 充量(ml/小时)(ml/cm2) | |
处理条件1 | 图3 30℃ 12秒 20000 1400mm/min 220 100 40 表6-a |
处理条件2 | 图1 30℃ 12秒 20000 1400mm/min 50 15 20 表6-b |
处理条件3 | 图1 30℃ 12秒 20000 1400mm/min 147 74 17 表6-c |
处理条件4 | 图1 30℃ 12秒 20000 1400mm/min 70 30 100 表6-c |
处理条件5 | 图1 30℃ 15秒 20000 1100mm/min 70 30 100 表6-c |
处理条件6 | 图1 30℃ 20秒 20000 800mm/min 100 75 75 表6-c |
处理条件7 | 图1 25℃ 20秒 20000 800mm/min 90 40 70 表6-c |
处理条件8 | 图1 30℃ 15秒 20000 1100mm/min 70 30 100 表6-c |
各天的处理量(m2×张) | ||||||||||||
日 | 1 | 2 | 3 | 6 | 7 | 8 | 9 | 10 | 13 | 14 | 15 | |
星期 | 一 | 二 | 三 | 四 | 五 | 一 | 二 | 三 | 四 | 五 | 一 | |
感光板A,C=1∶1 | AM | 0.8×12 | 0.8×12 | 0.8×12 | 0.8×42 | 0.8×6 | 0 | 0.8×6 | 0 | 0.8×6 | 0.8×4 | 0 |
PM | 0.8×12 | 0.8×12 | 0.8×12 | 0.8×42 | 0.8×6 | 0 | 0.8×6 | 0 | 0.8×6 | 0.8×4 | 0 | |
感光板B,D=1∶1 | AM | 0 | 0 | 0 | 0 | 0 | 0.8×6 | 0 | 0.8×6 | 0 | 0 | 0 |
PM | 0 | 0 | 0 | 0 | 0 | 0.8×6 | 0 | 0.8×6 | 0 | 0 | 0 | |
計(m2) | 19 | 19 | 19 | 67 | 10 | 10 | 10 | 10 | 10 | 6 | 0 |
各天的处理量(m2×张) | ||||||||||||
日 | 1 | 2 | 3 | 6 | 7 | 8 | 9 | 10 | 13 | 14 | 15 | |
星期 | 一 | 二 | 三 | 四 | 五 | 一 | 二 | 三 | 四 | 五 | 一 | |
感光板E | AM | 0.8×6 | 0.8×6 | 0.8×6 | 0.8×22 | 0.8×3 | 0.5×3 | 0.8×3 | 0.5×3 | 0.8×3 | 0.8×2 | 0 |
PM | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×22 | 0.8×4 | 0.5×4 | 0.8×4 | 0.5×4 | 0.8×4 | 0.8×2 | 0 | |
感光板C | AM | 0.8×6 | 0.8×6 | 0.8×6 | 0.8×20 | 0.8×3 | 0 | 0.8×3 | 0 | 0.8×3 | 0 | 0 |
PM | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×20 | 0.8×4 | 0 | 0.8×4 | 0 | 0.8×4 | 0 | 0 | |
感光板D | AM | 0 | 0 | 0 | 0 | 0 | 0.8×3 | 0 | 0.8×3 | 0 | 0 | 0 |
PM | 0 | 0 | 0 | 0 | 0 | 0.8×4 | 0 | 0.8×4 | 0 | 0 | 0 | |
計(m2) | 21 | 21 | 21 | 67 | 11 | 9 | 11 | 9 | 11 | 3 | 0 |
各天的处理量(m2×张) | ||||||||||||
日 | 1 | 2 | 3 | 6 | 7 | 8 | 9 | 10 | 13 | 14 | 15 | |
星期 | 一 | 二 | 三 | 四 | 五 | 一 | 二 | 三 | 四 | 五 | 一 | |
感光板 | AM | 0.8×13 | 0.8×13 | 0.8×13 | 0.8×42 | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×4 | 0 |
PM | 0.8×13 | 0.8×13 | 0.8×13 | 0.8×42 | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×7 | 0.8×4 | 0 | |
計(m2) | 21 | 21 | 21 | 67 | 11 | 11 | 11 | 11 | 11 | 6 | 0 |
显 像 液 感 度 稳 定 性 | ||
通常条件 | 干燥条件(30ml/小时的水的蒸发) | |
实施例3 | ○ | ○ |
比较例1 | × | △ |
比较例9 | × | × |
实施例4 | ○ | ○ |
比较例2 | × | × |
实施例5 | ○ | ○ |
比较例3 | × | × |
实施例6 | ○ | ○ |
比较例4 | × | × |
实施例7 | ○ | ○ |
比较例5 | × | × |
实施例8 | ○ | ○ |
比较例6 | × | × |
实施例9 | ○ | ○ |
比较例7 | × | × |
实施例10 | ○ | ○ |
比较例8 | × | × |
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2000-022306 | 2000-01-31 | ||
JP2000022306 | 2000-01-31 | ||
JP2000022306 | 2000-01-31 |
Publications (2)
Publication Number | Publication Date |
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CN1312490A true CN1312490A (zh) | 2001-09-12 |
CN1267790C CN1267790C (zh) | 2006-08-02 |
Family
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Application Number | Title | Priority Date | Filing Date |
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CN01102195.0A Expired - Fee Related CN1267790C (zh) | 2000-01-31 | 2001-01-31 | 自动显影装置及补充显影补充液的方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6364544B1 (zh) |
EP (1) | EP1122610B1 (zh) |
CN (1) | CN1267790C (zh) |
DE (1) | DE60111283T2 (zh) |
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- 2001-01-31 DE DE60111283T patent/DE60111283T2/de not_active Expired - Lifetime
- 2001-01-31 US US09/772,956 patent/US6364544B1/en not_active Expired - Lifetime
- 2001-01-31 EP EP01102113A patent/EP1122610B1/en not_active Expired - Lifetime
- 2001-01-31 CN CN01102195.0A patent/CN1267790C/zh not_active Expired - Fee Related
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CN1301442C (zh) * | 2002-12-27 | 2007-02-21 | 富士胶片株式会社 | 光敏平版印刷版的自动处理方法及其自动处理装置 |
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CN102341756A (zh) * | 2009-03-09 | 2012-02-01 | 伊斯曼柯达公司 | 减少泡沫形成 |
CN102566329A (zh) * | 2011-12-06 | 2012-07-11 | 杭州科雷机电工业有限公司 | 一种冲版机显影药液浓度及补充的实时动态控制方法 |
CN103207542A (zh) * | 2012-01-13 | 2013-07-17 | 昆山允升吉光电科技有限公司 | 维护显影溶液稳定的装置 |
CN103207542B (zh) * | 2012-01-13 | 2015-05-13 | 昆山允升吉光电科技有限公司 | 维护显影溶液稳定的装置 |
CN108344662A (zh) * | 2017-01-23 | 2018-07-31 | 株式会社平间理化研究所 | 显影液的二氧化碳浓度显示装置及显影液管理装置 |
CN106802501A (zh) * | 2017-03-20 | 2017-06-06 | 信利(惠州)智能显示有限公司 | 显影液循环管理方法 |
CN106802501B (zh) * | 2017-03-20 | 2020-07-21 | 信利(惠州)智能显示有限公司 | 显影液循环管理方法 |
CN108732873A (zh) * | 2017-04-14 | 2018-11-02 | 台湾积体电路制造股份有限公司 | 显影液供应系统及显影液填充方法 |
CN108732873B (zh) * | 2017-04-14 | 2021-07-30 | 台湾积体电路制造股份有限公司 | 显影液供应系统及显影液填充方法 |
CN110262196A (zh) * | 2019-06-06 | 2019-09-20 | 深圳市华星光电技术有限公司 | 显影槽及控制显影槽的显影液导电率的方法 |
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Publication number | Publication date |
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DE60111283T2 (de) | 2006-05-11 |
EP1122610A3 (en) | 2002-06-19 |
DE60111283D1 (de) | 2005-07-14 |
EP1122610A2 (en) | 2001-08-08 |
US6364544B1 (en) | 2002-04-02 |
EP1122610B1 (en) | 2005-06-08 |
CN1267790C (zh) | 2006-08-02 |
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