CN1285037A - 编码器 - Google Patents

编码器 Download PDF

Info

Publication number
CN1285037A
CN1285037A CN98813708A CN98813708A CN1285037A CN 1285037 A CN1285037 A CN 1285037A CN 98813708 A CN98813708 A CN 98813708A CN 98813708 A CN98813708 A CN 98813708A CN 1285037 A CN1285037 A CN 1285037A
Authority
CN
China
Prior art keywords
mentioned
light receiving
optical window
subjected
receiving unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN98813708A
Other languages
English (en)
Other versions
CN1229627C (zh
Inventor
堺好弘
长谷川秀法
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Publication of CN1285037A publication Critical patent/CN1285037A/zh
Application granted granted Critical
Publication of CN1229627C publication Critical patent/CN1229627C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

本发明提供防止高速时位置精度降低的编码器的缝隙结构。一种把代码图形设置在旋转圆板1上、通过用受光元件4接受透过或者反射了上述代码图形的来自发光元件2的光来检测上述旋转圆板1的旋转速度、旋转位置的编码器,其中,被配置在上述旋转圆板1与上述受光元件4之间的、透过或者反射了上述代码图形的光通过的受光窗在上述旋转圆板1的半径方向的不同位置上彼此具有相位差并具有多个被配置的固定缝隙3,将上述受光窗的沿上述旋转圆板1的半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,将上述固定缝隙3的内周侧的受光窗的开口面积与外周侧受光窗的开口面积设定为相等。

Description

编码器
技术领域
本发明涉及安装在伺服电机等的旋转轴上的光学式编码器,特别是涉及配置在使光入射的缝隙上的受光窗的形状。
技术背景
光学式旋转编码器在用玻璃等构成的旋转的圆板上设置了代码图形,在该代码图形上入射来自LED等发光元件的光,把透过或者反射代码图形的光直接或者经过受光窗,由光电二极管等受光元件进行受光。而且,通过电路基板把受光元件的微小电流放大、变换为调整了的电信号以后,进行倍增、内插和脉冲化,检测出上述圆板的旋转速度或者旋转位置。
由于在上述旋转编码器中,用受光元件受光的光量不同,因此在受光元件内的微小电流中将产生差异。从而,在用电路基板把该微小电流放大以生成电信号时,在各受光元件中的放大率中将产生差异。
对于旋转编码器的高精度化,在倍增、内插或脉冲化的情况下,如果在各基本信号中存在放大率的差别,则由于频率特性等问题将存在高速时位置精度降低等问题。
因此本发明是鉴于上述情况而进行的,目的在于提供能够防止高速时位置精度降低的编码器。
发明的公开
本发明的编码器是一种把代码图形设置在旋转圆板上并通过用受光元件接受透过或者反射上述代码图形的来自发光元件的光来检测上述旋转圆板的旋转速度,旋转位置的编码器,被配置在上述旋转圆板与上述受光元件之间的、透过或者反射了上述代码图形的光通过的受光窗在上述旋转圆板的半径方向的不同位置上彼此具有相位差并具有多个被配置的固定缝隙,将上述受光窗的沿上述旋转圆板的半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,将上述固定缝隙的内周侧的受光窗的开口面积与外周侧受光窗的开口面积设定为相等。
另外,本发明的编码器是一种把代码图形设置在旋转圆板上并通过用受光元件接受透过或者反射了上述代码图形的来自发光元件的光来检测上述旋转圆板的旋转速度、旋转位置的编码器,上述受光元件具有多个被配置的受光单元,该受光单元接受透过或者反射了上述代码图形的来自发光元件的光,并且在上述旋转圆板的半径方向的不同位置上彼此具有相位差,将上述受光单元的沿上述旋转圆板的半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,将上述受光元件的内周侧的受光单元的面积与外周侧的受光单元的面积设定为相等。
如果依据本发明的编码器,则由于受光窗或者受光单元的形状沿旋转圆板半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,因此与旋转圆板的半径方向的位置无关,将受光窗或者受光单元的面积设定为相等。
附图的简单说明
图1是本发明实施形态的编码器的结构图。
图2是图1所示的旋转缝隙圆板1的平面图
图3是图1所示的固定缝隙3中设置的受光窗的详细图。
图4是图1所示的受光元件4中设置的受光单元的详细图。
图5示出受光元件4的电流波形。
图6示出放大了的电压波形。
图7示出实施形态的旋转缝隙圆板1以及固定缝隙3和以往的旋转缝隙圆板122以及固定缝隙23。
图8是其它实施形态的固定缝隙9中设置的受光窗的详细图。
图9是其它实施形态的固定缝隙10中设置的受光窗的详细图。
图10是其它实施形态的受光元件11中设置的受光单元的详细图。
图11是其它实施形态的受光元件12中设置的受光单元的详细图。
图12是其它实施形态的受光元件13中设置的受光单元的详细图。
用于实施发明的最佳形态
图1是本发明实施形态的编码器的结构图,图2是构成编码器的旋转缝隙圆板1的平面图。图1中,1是在要检测旋转位置或旋转速度的电机轴上直接或者经过联接器等联结节进行轴固定的玻璃等旋转缝隙圆板,在旋转缝隙圆板1上,如图2所示,设置了基本间距6的代码图形。2是红外线LED等发光元件,3是使从发光元件2发射的并且透过了旋转缝隙圆板1上的代码图形的平行光线透过的具有后述形状的受光窗的固定缝隙,4是光电二极管等受光元件。5是电路基板,由:把在受光元件4中进行了光电变换的信号变换为电压的放大单元51;用于倍增、内插或者脉冲化的波形处理电路52;输出电路53以及LED驱动电路54构成。
图3示出设置在固定缝隙3中的受光窗。位于同一半径上的不同半径位置的受光窗31、32、33、34对于基本间距6配置为分别各具有90°的相位差。为了使各受光窗在外周侧至内周侧其受光窗的开口面积相同,设定为使得从外周侧向内周侧其径向长度依次地加长。
在以恒定转数使固定缝隙圆板1旋转的状态下,发射红外线LED等发光元件2的光,通过使透过了旋转缝隙圆板1的代码图形以及固定缝隙3的受光窗的光入射到受光元件4(参照图4)上,可以得到被进行了光电变换的微小电流(参照图5)。
如图4所示,构成受光元件4的各受光单元41、42、43、44分别对应于固定缝隙3的受光窗31、32、33、34。
另外,由于固定缝隙3的各受光窗的开口面积相同,因此由受光元件4的各受光单元接受的光量相等,由此,如图5所示,关于微小电流,用各受光单元41、42、43、44得到的微小电流71、72、73、74显示出相同的大小。
图6示出把图5所示特性的电流变换为电压的结果。用受光单元得到的微小电流通过放大单元51,使用串联电阻法等变换为电压。其结果,如图6所示,各信号81、82、83、84也都成为具有相同振幅(电压)的波形。
在把由上述那样得到的信号81、82、83、84通过波形处理电路52进行倍增、内插或者脉冲化时,由于各信号都具有相同的频率特性,因此不存在高速时相位差的变动,另外,也不增大使用电桥电路等进行倍增时所发生的高速时的颤动(flutter)。另外,在进行A/D变换以把旋转位置数字化的情况下,也能够在广泛的范围内实现位置精度良好的编码器。
另外,由于把构成固定缝隙3的各受光窗半径方向的长度设定为从内周侧向外周侧依次地缩短,因此能够将旋转缝隙圆板1的直径设计得较小。即,如图7所示,以往的构成固定缝隙23的各受光窗的半径方向的长度在旋转缝隙圆板22的半径方向被设定为相同。而构成本实施形态的固定缝隙3的各受光窗的半径方向的长度由于设定为向外周侧依次地缩短,因此与此相随能够减小旋转缝隙圆板1的直径。
另外,如图8以及图9所示,为了提高分辨率,有在缝隙9以及10上形成了相位相同的多个受光窗91、92、93、94以及101、102、103、104(受光窗组)的编码器,而在这种情况下,以相同相位的受光窗的闭口面积的总和与其它相位的受光窗的闭口面积总和设定为相等。
另外,如图10所示,即使在固定缝隙与受光元件为共同的结构、即在光电二极管上形成缝隙的结构中,也设定成使得受光元件11的各受光单元111、112、113、114的径向长度从外周侧向内周侧依次地地加长,设定成使得各受光单元的面积相等。
进而,如图11以及图12所示,即使在固定缝隙与受光元件为共同的结构、即在光电二极管上形成缝隙的结构中,一边对应于前面的图8以及图9所示的固定缝隙9、10,一边在受光元件12以及13上设置相同相位的多个受光单元121、122、123、124以及131、132、133、134(受光单元组),并且设定为使得相同相位的受光单元的面积总和与其它相位的受光单元的面积总和相等。
如以上所说明的那样,如果依据本发明的编码器,则由于在把代码图形设置在旋转圆板上,通过用受光元件接受透过或者反射上述代码图形的来自发光元件的光来检测上述旋转圆板的旋转速度、旋转位置的编码器中,被配置在上述旋转圆板与上述受光元件之间的、透过或者反射了上述代码图形的光通过的受光窗在上述旋转圆板的半径方向的不同位置上彼此具有相位差并具有多个被配置的固定缝隙,将上述受光窗的沿上述旋转圆板的半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,将上述固定缝隙的内周侧的受光窗的开口面积与外周侧受光窗的开口面积设定为相等,或者由于在把代码图形设置在旋转圆板上并通过用受光元件接受透过或者反射了上述代码图形的来自发光元件的光来检测上述旋转圆板的旋转速度、旋转位置的编码器中,上述受光元件具有多个被配置的受光单元,该受光单元接受透过或者反射了上述代码图形的来自发光元件的光,并且在上述旋转圆板的半径方向的不同位置上彼此具有相位差,将上述受光单元的沿上述旋转圆板的半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,将上述受光元件的内周侧的受光单元的面积与外周侧的受光单元的面积设定为相等,因此能够与旋转圆板的位置无关地使受光元件接受的光量相同。从而,能够避免高速时的相位差的变动,避免增大使用电桥电路等进行倍增时引起的高速时的颤动。另外,即使在进行A/D变换把旋转位置变换为数字信号的情况下,也能够在广泛的范围内提供旋转位置精度良好的编码器。进而,为了与旋转圆板的位置无关地使受光窗或者受光单元的面积相等,以内周侧为基准向外周侧把半径方向长度设定为依次地缩短,从而与以往相比较能够较小地设计旋转圆板的直径,特别是能够使分辨率高的磁道多的编码器实现小型化。
产业上的可利用性
本发明能够用于检测伺服电机等的旋转轴位置或者旋转速度,以高精度地进行位置或者速度控制的用途中。

Claims (6)

1.一种编码器,其中,把代码图形设置在旋转圆板上,通过用受光元件接受透过或者反射了上述代码图形的来自发光元件的光来检测上述旋转圆板的旋转速度、旋转位置,其特征在于:
被配置在上述旋转圆板与上述受光元件之间的、透过或者反射了上述代码图形的光通过的受光窗在上述旋转圆板的半径方向的不同位置上彼此具有相位差并具有多个被配置的固定缝隙,
将上述受光窗的沿上述旋转圆板的半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,将上述固定缝隙的内周侧的受光窗的开口面积与外周侧受光窗的开口面积设定为相等。
2.如权利要求1中所述的编码器,其特征在于:
上述受光窗是由在同一半径上以同一相位配置的多个受光窗构成的受光窗组,将同一相位的受光窗的开口面积总和与其它相位的受光窗的开口面积总和设定为相等。
3.如权利要求2中所述的编码器,其特征在于:
将多个上述受光窗组配置在同一半径上。
4.一种编码器,其中,把代码图形设置在旋转圆板上,通过用受光元件接受透过或者反射了上述代码图形的来自发光元件的光来检测上述旋转圆板的旋转速度、旋转位置,其特征在于:
上述受光元件具有多个被配置的受光单元,该受光单元接受透过或者反射了上述代码图形的来自发光元件的光,并且在上述旋转圆板的半径方向的不同位置上彼此具有相位差,
将上述受光单元的沿上述旋转圆板的半径方向的长度设定为以内周侧为基准向外周侧依次地缩短,将上述受光元件的内周侧的受光单元的面积与外周侧的受光单元的面积设定为相等。
5.如权利要求4所述的编码器,其特征在于:
上述受光单元是由在同一半径上以同一相位配置的多个受光单元构成的受光单元组,将同一相位的受光单元的开口面积的总和与其它相位的受光单元的开口面积总和设定为相等。
6.如权利要求5中所述的编码器,其特征在于:
将上述多个受光单元组配置在同一半径上。
CNB988137089A 1997-12-19 1998-12-10 编码器 Expired - Fee Related CN1229627C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP351517/97 1997-12-19
JP9351517A JPH11183201A (ja) 1997-12-19 1997-12-19 エンコーダ

Publications (2)

Publication Number Publication Date
CN1285037A true CN1285037A (zh) 2001-02-21
CN1229627C CN1229627C (zh) 2005-11-30

Family

ID=18417827

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB988137089A Expired - Fee Related CN1229627C (zh) 1997-12-19 1998-12-10 编码器

Country Status (6)

Country Link
US (1) US6750445B1 (zh)
EP (1) EP1041364A4 (zh)
JP (1) JPH11183201A (zh)
KR (1) KR20010033220A (zh)
CN (1) CN1229627C (zh)
WO (1) WO1999032854A1 (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101379370B (zh) * 2005-07-05 2012-06-20 德克萨斯仪器股份有限公司 用于伺服系统的光位置传感器
CN103983290A (zh) * 2014-05-06 2014-08-13 上海精浦机电有限公司 复合型绝对值编码器
CN106104213A (zh) * 2014-12-09 2016-11-09 株式会社安川电机 编码器和带编码器的电机
CN106104214A (zh) * 2014-12-09 2016-11-09 株式会社安川电机 编码器和带编码器的电机

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0127491D0 (en) * 2001-11-16 2002-01-09 Trw Lucas Varity Electric Angular position sensor
JP2004056383A (ja) * 2002-07-18 2004-02-19 Fujitsu Ltd 携帯型電子機器および撮像装置
TW593970B (en) * 2003-06-18 2004-06-21 Opto Tech Corp Position detection device
US7697627B1 (en) 2006-02-06 2010-04-13 Griffin Technology, Inc. FM transmitter for portable electronic device having rotary encoder
WO2007108398A1 (ja) * 2006-03-20 2007-09-27 Kabushiki Kaisha Yaskawa Denki 光学式エンコーダ
JP4777208B2 (ja) 2006-10-06 2011-09-21 キヤノン株式会社 操作装置及びレンズ装置及び基準位置設定方法
EP2116814B1 (de) * 2008-05-09 2014-06-25 Siemens Aktiengesellschaft Messeinrichtung zur Ermittlung einer Lage und/oder einer Geschwindigkeit
JP5391157B2 (ja) 2010-06-23 2014-01-15 オークマ株式会社 回転角度検出装置
CN103852818B (zh) * 2014-03-27 2015-11-04 夏立新 具稳定精度的圆光栅
KR102441844B1 (ko) * 2015-02-04 2022-09-08 삼성전자주식회사 회전체를 제어하기 위한 방법 및 그 전자 장치
WO2020188668A1 (ja) * 2019-03-15 2020-09-24 株式会社ハーモニック・ドライブ・システムズ 光学式ロータリエンコーダ、サーボモータおよびアクチュエータ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4319134A (en) * 1978-06-16 1982-03-09 Sensor Technology, Inc. Optical encoder
US4680466A (en) * 1984-04-20 1987-07-14 Yokogawa Hokushin Electric Corporation Displacement transducer which simultaneously extracts signals via sequential switching
JPS6347223A (ja) 1986-08-11 1988-02-29 Shibuya Kogyo Co Ltd 容器集合装置の運転制御装置
JPH0447615Y2 (zh) * 1986-09-12 1992-11-10
JPS63262523A (ja) * 1987-04-21 1988-10-28 Matsushita Electric Ind Co Ltd 絶対位置検出方法及びその装置
JPH01302110A (ja) 1988-05-31 1989-12-06 Fanuc Ltd ロータリエンコーダ
JPH0247518A (ja) 1988-08-10 1990-02-16 Mitsubishi Electric Corp 温水装置
JPH0247518U (zh) * 1988-09-26 1990-03-30
US5073710A (en) * 1989-09-21 1991-12-17 Copal Company Limited Optical displacement detector including a displacement member's surface having a diffractive pattern and a holographic lens pattern
JP3110442B2 (ja) 1990-07-11 2000-11-20 松下電器産業株式会社 ファジィ制御装置および湯水混合制御装置
JPH0739677B2 (ja) * 1990-09-10 1995-05-01 日立建機株式会社 カウンタウエイト
JP2519757Y2 (ja) * 1990-10-30 1996-12-11 株式会社安川電機 光電式エンコーダ
JPH04120322U (ja) * 1991-04-12 1992-10-28 シチズン時計株式会社 光学式アブソリユートエンコーダ
JPH0552594A (ja) 1991-08-26 1993-03-02 Moritetsukusu:Kk 光電式エンコーダ
JP2806198B2 (ja) 1993-03-30 1998-09-30 三菱電機株式会社 エンコーダ装置
JPH09126814A (ja) 1995-11-02 1997-05-16 Koyo Electron Ind Co Ltd ロータリエンコーダ
JPH09159488A (ja) 1995-12-12 1997-06-20 Nikon Corp エンコーダ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101379370B (zh) * 2005-07-05 2012-06-20 德克萨斯仪器股份有限公司 用于伺服系统的光位置传感器
CN103983290A (zh) * 2014-05-06 2014-08-13 上海精浦机电有限公司 复合型绝对值编码器
CN103983290B (zh) * 2014-05-06 2016-05-11 上海精浦机电有限公司 复合型绝对值编码器
CN106104213A (zh) * 2014-12-09 2016-11-09 株式会社安川电机 编码器和带编码器的电机
CN106104214A (zh) * 2014-12-09 2016-11-09 株式会社安川电机 编码器和带编码器的电机

Also Published As

Publication number Publication date
EP1041364A4 (en) 2005-11-02
CN1229627C (zh) 2005-11-30
US6750445B1 (en) 2004-06-15
KR20010033220A (ko) 2001-04-25
JPH11183201A (ja) 1999-07-09
EP1041364A1 (en) 2000-10-04
WO1999032854A1 (fr) 1999-07-01

Similar Documents

Publication Publication Date Title
CN1229627C (zh) 编码器
CN1168952C (zh) 多转编码器
CN1237329C (zh) 确定可回转元件角度位置的轴向发光二极管检测器
US6175109B1 (en) Encoder for providing incremental and absolute position data
US11874143B2 (en) Dual absolute encoder
CN1302740A (zh) 用于转子、特别是待平衡的机动车轮的转角传感器
GB2389422A (en) Method for initialsing position with an encoder
CN1417633A (zh) 用于光学编码器的多分辨率光电二极管传感器阵列
US6360449B1 (en) Incremental encoder having absolute reference marks
JPH03140821A (ja) 光ロータリーエンコーダ
CN2874430Y (zh) 增量式磁敏编码器
US8618466B2 (en) Position-measuring device having a first measuring standard and at least two multiturn code disks
KR20200000044U (ko) 자기센서를 이용한 일체형 액추에이터
CN112585432A (zh) 光学位置编码器
CN1651867A (zh) 监视装置
CN100339684C (zh) 四传感器式编码装置
CN1039367A (zh) 离心机
CN1573299A (zh) 旋转检测器
JP3537761B2 (ja) 変速歯車装置
JP3448658B2 (ja) 光電子信号の多重検出方法及び多重検出装置
CN111486879A (zh) 一种磁性编码器、空心旋转增量式位置检测系统及方法
CN219802137U (zh) 一种光纤传输的电机编码器
CN212133687U (zh) 一种磁性编码器、空心绝对位置检测装置
JP2002005692A (ja) 光学式エンコーダ
CN217083772U (zh) 一种光磁组合的绝对值编码器

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20051130

Termination date: 20100111