CN1247423C - 控制在材料输送系统中被输送的材料的运动的分布式方法 - Google Patents
控制在材料输送系统中被输送的材料的运动的分布式方法 Download PDFInfo
- Publication number
- CN1247423C CN1247423C CNB998160512A CN99816051A CN1247423C CN 1247423 C CN1247423 C CN 1247423C CN B998160512 A CNB998160512 A CN B998160512A CN 99816051 A CN99816051 A CN 99816051A CN 1247423 C CN1247423 C CN 1247423C
- Authority
- CN
- China
- Prior art keywords
- district
- information
- container
- speed
- thread
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title claims description 246
- 238000000034 method Methods 0.000 title claims description 65
- 230000033001 locomotion Effects 0.000 claims description 191
- 238000011144 upstream manufacturing Methods 0.000 claims description 149
- 230000014509 gene expression Effects 0.000 claims description 71
- 230000005540 biological transmission Effects 0.000 claims description 61
- 230000000717 retained effect Effects 0.000 claims description 11
- 238000003860 storage Methods 0.000 claims description 10
- 230000001133 acceleration Effects 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 3
- 238000011088 calibration curve Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 abstract description 6
- 238000000151 deposition Methods 0.000 abstract 3
- 239000000126 substance Substances 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 50
- 230000008569 process Effects 0.000 description 40
- 238000004519 manufacturing process Methods 0.000 description 36
- 230000004044 response Effects 0.000 description 36
- 238000012545 processing Methods 0.000 description 34
- 238000012546 transfer Methods 0.000 description 34
- 235000012431 wafers Nutrition 0.000 description 32
- 230000006870 function Effects 0.000 description 29
- 238000004891 communication Methods 0.000 description 23
- 239000004065 semiconductor Substances 0.000 description 23
- 238000006243 chemical reaction Methods 0.000 description 22
- 230000036316 preload Effects 0.000 description 22
- 230000000875 corresponding effect Effects 0.000 description 20
- 230000033228 biological regulation Effects 0.000 description 18
- 230000008859 change Effects 0.000 description 15
- 230000009471 action Effects 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- 238000007726 management method Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 11
- 230000036541 health Effects 0.000 description 10
- 101100332287 Dictyostelium discoideum dst2 gene Proteins 0.000 description 7
- 101100264226 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) XRN1 gene Proteins 0.000 description 7
- 230000001276 controlling effect Effects 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 6
- 230000007704 transition Effects 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 238000010338 mechanical breakdown Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000009466 transformation Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000012217 deletion Methods 0.000 description 3
- 230000037430 deletion Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000013507 mapping Methods 0.000 description 3
- 230000008520 organization Effects 0.000 description 3
- 230000037361 pathway Effects 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 2
- 241000219098 Parthenocissus Species 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000004422 calculation algorithm Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 101150090341 dst1 gene Proteins 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 241000206601 Carnobacterium mobile Species 0.000 description 1
- 230000006578 abscission Effects 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 239000003532 endogenous pyrogen Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 229940084428 freezone Drugs 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000012905 input function Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 108010052620 leukocyte endogenous mediator Proteins 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41815—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
- G05B19/4182—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell manipulators and conveyor only
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P80/00—Climate change mitigation technologies for sector-wide applications
- Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
- Control Of Conveyors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/212,002 US6240335B1 (en) | 1998-12-14 | 1998-12-14 | Distributed control system architecture and method for a material transport system |
US09/212,002 | 1998-12-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1342214A CN1342214A (zh) | 2002-03-27 |
CN1247423C true CN1247423C (zh) | 2006-03-29 |
Family
ID=22789151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB998160512A Expired - Fee Related CN1247423C (zh) | 1998-12-14 | 1999-12-14 | 控制在材料输送系统中被输送的材料的运动的分布式方法 |
Country Status (10)
Country | Link |
---|---|
US (2) | US6240335B1 (ko) |
EP (1) | EP1141439B1 (ko) |
JP (1) | JP3989683B2 (ko) |
KR (1) | KR100437926B1 (ko) |
CN (1) | CN1247423C (ko) |
AU (1) | AU2183400A (ko) |
CA (1) | CA2354624A1 (ko) |
HK (1) | HK1039162A1 (ko) |
TW (1) | TW452564B (ko) |
WO (1) | WO2000035782A2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104395172A (zh) * | 2012-01-03 | 2015-03-04 | 波音公司 | 运输和处理系统以及运输商品的方法 |
Families Citing this family (157)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4040377C1 (ko) * | 1990-12-17 | 1992-02-06 | Thermoselect Ag, Vaduz, Li | |
SE512647C2 (sv) * | 1998-01-22 | 2000-04-17 | Sunds Defibrator Ind Ab | Förfarande och styrsystem för att styra ett transportörsystem samt en anläggning för balning av pappersmassa |
US7269475B1 (en) * | 1998-03-02 | 2007-09-11 | Xerox Corporation | Distributed control system with global contraints for controlling object motion with smart matter |
US6240335B1 (en) * | 1998-12-14 | 2001-05-29 | Palo Alto Technologies, Inc. | Distributed control system architecture and method for a material transport system |
US6389494B1 (en) * | 1998-12-30 | 2002-05-14 | Emc Corporation | System for interfacing a data storage system to a host utilizing a plurality of busses for carrying end-user data and a separate bus for carrying interface state data |
US7117275B1 (en) | 1999-01-04 | 2006-10-03 | Emc Corporation | Data storage system having separate data transfer section and message network |
US7073020B1 (en) | 1999-01-04 | 2006-07-04 | Emc Corporation | Method for message transfer in computer storage system |
US6662076B1 (en) * | 1999-02-10 | 2003-12-09 | Advanced Micro Devices, Inc. | Management of move requests from a factory system to an automated material handling system |
US6507945B1 (en) * | 1999-05-05 | 2003-01-14 | Symyx Technologies, Inc. | Synthesizing combinatorial libraries of materials |
DE19930660A1 (de) * | 1999-07-02 | 2001-01-11 | Siemens Ag | Verfahren zur Überwachung oder zur Installation neuer Programmcodes in einer industriellen Anlage |
US6615274B1 (en) * | 1999-12-09 | 2003-09-02 | International Business Machines Corporation | Computer network control systems and methods |
US6711450B1 (en) * | 2000-02-02 | 2004-03-23 | Advanced Micro Devices, Inc. | Integration of business rule parameters in priority setting of wafer processing |
US20020045956A1 (en) * | 2000-02-18 | 2002-04-18 | Kapitan Brian A. | Network distributed motion control system |
US7010575B1 (en) | 2000-03-31 | 2006-03-07 | Emc Corporation | Data storage system having separate data transfer section and message network having bus arbitration |
US7007194B1 (en) | 2000-06-29 | 2006-02-28 | Emc Corporation | Data storage system having point-to-point configuration |
US6993621B1 (en) | 2000-03-31 | 2006-01-31 | Emc Corporation | Data storage system having separate data transfer section and message network with plural directors on a common printed circuit board and redundant switching networks |
US7003601B1 (en) | 2000-03-31 | 2006-02-21 | Emc Corporation | Data storage system having separate data transfer section and message network with plural directions on a common printed circuit board |
US6779071B1 (en) * | 2000-04-28 | 2004-08-17 | Emc Corporation | Data storage system having separate data transfer section and message network with status register |
WO2002008831A2 (en) | 2000-07-06 | 2002-01-31 | Pri Automation, Inc. | Reticle storage and retrieval system |
US6591162B1 (en) * | 2000-08-15 | 2003-07-08 | Asyst Technologies, Inc. | Smart load port with integrated carrier monitoring and fab-wide carrier management system |
US6351684B1 (en) * | 2000-09-19 | 2002-02-26 | Advanced Micro Devices, Inc. | Mask identification database server |
JP3508130B2 (ja) * | 2000-09-21 | 2004-03-22 | 村田機械株式会社 | 搬送システム |
WO2002059738A1 (en) * | 2001-01-26 | 2002-08-01 | Asyst Technologies, Inc. | Control system for transfer and buffering |
US6854583B1 (en) * | 2001-02-06 | 2005-02-15 | Middlesex General Industries, Inc. | Conveyorized storage and transportation system |
US6678566B2 (en) * | 2001-05-02 | 2004-01-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Backup control system (BCS) for optimizing utilization of multiple fabrication facilities |
US7640582B2 (en) | 2003-04-16 | 2009-12-29 | Silicon Graphics International | Clustered filesystem for mix of trusted and untrusted nodes |
US7617292B2 (en) * | 2001-06-05 | 2009-11-10 | Silicon Graphics International | Multi-class heterogeneous clients in a clustered filesystem |
CA2449963A1 (en) * | 2001-06-07 | 2002-12-12 | David W. Zeitler | Tiered control architecture for material handling |
US6873882B2 (en) * | 2001-06-20 | 2005-03-29 | Itoh Electric Company Limited | Zone controller |
US20030093555A1 (en) * | 2001-11-09 | 2003-05-15 | Harding-Jones William Paul | Method, apparatus and system for routing messages within a packet operating system |
US6848933B1 (en) * | 2001-11-13 | 2005-02-01 | Rockwell Automation Technologies, Inc. | System and methodology providing coordinated and modular conveyor zone control |
TWI256372B (en) * | 2001-12-27 | 2006-06-11 | Tokyo Electron Ltd | Carrier system of polishing processing body and conveying method of polishing processing body |
US20030125817A1 (en) * | 2001-12-31 | 2003-07-03 | Scharwat Frank E. | Multiple action controller system |
US20030130774A1 (en) | 2002-01-03 | 2003-07-10 | Tripathi Pradeep R. | Vehicle inspection enforcement system and method offering multiple data transmissions on the road |
US6970953B2 (en) * | 2002-01-04 | 2005-11-29 | Hewlett-Packard Development Company, L.P. | System and method for terminating a bus |
US7925376B2 (en) * | 2002-01-14 | 2011-04-12 | Walgreen Co. | Dump station apparatus and method for filling stock orders |
US7280889B2 (en) | 2002-03-08 | 2007-10-09 | Humphrey Products Company | Networkable zone control modules and method and coveyor system incorporating the same |
AU2003220444A1 (en) * | 2002-03-21 | 2003-10-08 | Rapistan System Advertising Corp. | Graphical system configuration program for material handling |
US7627631B2 (en) | 2002-05-02 | 2009-12-01 | Bea Systems, Inc. | Systems and methods for collaborative business plug-ins |
EP2790210A3 (en) | 2002-06-19 | 2014-12-31 | Murata Machinery, Ltd. | Automated material handling system |
US6999847B2 (en) * | 2002-07-26 | 2006-02-14 | Unelab Llc | Specimen carrier transfer apparatus for a conveyor track |
US7487099B2 (en) * | 2002-09-10 | 2009-02-03 | International Business Machines Corporation | Method, system, and storage medium for resolving transport errors relating to automated material handling system transaction |
KR20100040746A (ko) * | 2002-10-11 | 2010-04-20 | 브룩스 오토메이션, 인크. | 단일 트랙 위치로부터 오버헤드 호이스트 수송 차량에 의한 하나 이상의 재료 저장 선반 레벨로의 접근 |
US20070092359A1 (en) * | 2002-10-11 | 2007-04-26 | Brooks Automation, Inc. | Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
US20040118659A1 (en) * | 2002-12-20 | 2004-06-24 | Clinton Haris | Method and system for operating a semiconductor factory |
US7221993B2 (en) * | 2003-01-27 | 2007-05-22 | Applied Materials, Inc. | Systems and methods for transferring small lot size substrate carriers between processing tools |
US7778721B2 (en) * | 2003-01-27 | 2010-08-17 | Applied Materials, Inc. | Small lot size lithography bays |
US7584474B2 (en) * | 2003-02-25 | 2009-09-01 | Bea Systems, Inc. | Systems and methods for transaction chaining |
US7260441B2 (en) * | 2003-07-03 | 2007-08-21 | Honda Giken Kogyo Kabushiki Kaisha | Method of inspecting a workpiece during a production run in which workpieces are supplied to workstations by an autoloader |
CN100353270C (zh) * | 2003-08-29 | 2007-12-05 | 神钢电机株式会社 | 传送系统 |
US7735631B2 (en) * | 2003-09-03 | 2010-06-15 | Siemens Aktiengesellschaft | Mail processing system and method of delivering articles to delivery locations therein |
JP4584556B2 (ja) * | 2003-09-08 | 2010-11-24 | 株式会社エヌ・ティ・ティ・ドコモ | プログラム制御装置及びプログラム制御方法 |
US7440932B2 (en) | 2003-10-02 | 2008-10-21 | International Business Machines Corporation | Method and system for automating issue resolution in manufacturing execution and material control systems |
US20050094343A1 (en) * | 2003-10-31 | 2005-05-05 | Mintz Richard C.Jr. | Decentralized control of motors |
US20050209721A1 (en) * | 2003-11-06 | 2005-09-22 | Applied Materials, Inc. | Methods and apparatus for enhanced operation of substrate carrier handlers |
US7720557B2 (en) * | 2003-11-06 | 2010-05-18 | Applied Materials, Inc. | Methods and apparatus for enhanced operation of substrate carrier handlers |
US7218983B2 (en) | 2003-11-06 | 2007-05-15 | Applied Materials, Inc. | Method and apparatus for integrating large and small lot electronic device fabrication facilities |
US20050107909A1 (en) * | 2003-11-14 | 2005-05-19 | Siemens Technology-To-Business Center Llc | Systems and methods for programming motion control |
US20050065633A1 (en) * | 2003-11-14 | 2005-03-24 | Michael Wynblatt | Systems and methods for relative control of load motion actuators |
US20050107911A1 (en) * | 2003-11-14 | 2005-05-19 | Siemens Technology-To-Business Center Llc | Systems and methods for controlling load motion actuators |
TWI290875B (en) * | 2004-02-28 | 2007-12-11 | Applied Materials Inc | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility |
US7274971B2 (en) | 2004-02-28 | 2007-09-25 | Applied Materials, Inc. | Methods and apparatus for electronic device manufacturing system monitoring and control |
US7177716B2 (en) * | 2004-02-28 | 2007-02-13 | Applied Materials, Inc. | Methods and apparatus for material control system interface |
US7184852B2 (en) * | 2004-04-07 | 2007-02-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment |
US7010377B2 (en) * | 2004-04-29 | 2006-03-07 | International Business Machines Corporation | Method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment |
EP1617326A1 (en) * | 2004-07-14 | 2006-01-18 | Sap Ag | Technique for handling hierarchical application data |
US7123975B2 (en) * | 2004-07-22 | 2006-10-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Manufacturing management system and method |
JP4229020B2 (ja) * | 2004-07-27 | 2009-02-25 | ブラザー工業株式会社 | 制御装置、搬送制御装置、搬送システム及び画像形成システム |
EP1779208A2 (en) * | 2004-08-04 | 2007-05-02 | Siemens Energy & Automation, Inc. | Integrated control card for conveying systems |
US7142938B2 (en) * | 2004-10-13 | 2006-11-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Manufacturing management system and method |
US20060095153A1 (en) * | 2004-11-04 | 2006-05-04 | Chang Yung C | Wafer carrier transport management method and system thereof |
US8497761B2 (en) | 2005-01-13 | 2013-07-30 | Rite-Hite Holding Corporation | System and method for remotely controlling docking station components |
US7873962B2 (en) * | 2005-04-08 | 2011-01-18 | Xerox Corporation | Distributed control systems and methods that selectively activate respective coordinators for respective tasks |
US7791741B2 (en) * | 2005-04-08 | 2010-09-07 | Palo Alto Research Center Incorporated | On-the-fly state synchronization in a distributed system |
US8819103B2 (en) * | 2005-04-08 | 2014-08-26 | Palo Alto Research Center, Incorporated | Communication in a distributed system |
US7751928B1 (en) | 2005-03-11 | 2010-07-06 | Amazon Technologies, Inc. | Method and system for agent exchange-based materials handling |
US7774243B1 (en) * | 2005-03-11 | 2010-08-10 | Amazon Technologies, Inc. | Method and system for predestination item transfer among agents within a materials handling facility |
US7706007B2 (en) * | 2005-04-08 | 2010-04-27 | Palo Alto Research Center Incorporated | Synchronization in a distributed system |
US7558986B2 (en) * | 2005-05-26 | 2009-07-07 | United Parcel Service Of America, Inc. | Software process monitor |
US7823021B2 (en) * | 2005-05-26 | 2010-10-26 | United Parcel Service Of America, Inc. | Software process monitor |
US8332826B2 (en) * | 2005-05-26 | 2012-12-11 | United Parcel Service Of America, Inc. | Software process monitor |
US7289867B1 (en) * | 2005-06-08 | 2007-10-30 | Advanced Micro Devices, Inc. | Automated integrated circuit device manufacturing facility using distributed control |
US7904182B2 (en) * | 2005-06-08 | 2011-03-08 | Brooks Automation, Inc. | Scalable motion control system |
JP2009500267A (ja) * | 2005-07-11 | 2009-01-08 | アシスト テクノロジーズ インコーポレイテッド | 半導体コンテナ用のベルトコンベア |
US7596435B1 (en) | 2005-08-03 | 2009-09-29 | Systech International, Llc | Vehicle communication system and method with mobile data collection |
EP1815972B1 (en) * | 2006-02-06 | 2013-12-18 | ABB Research Ltd. | Press line system and method |
US7672748B2 (en) * | 2006-04-17 | 2010-03-02 | Chartered Semiconductor Manufacturing, Ltd. | Automated manufacturing systems and methods |
US8376130B2 (en) * | 2006-07-10 | 2013-02-19 | Muratec Automation Co., Ltd. | Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport |
WO2008042294A2 (en) * | 2006-09-28 | 2008-04-10 | Yaskawa Electric America, Inc. | Automated conveying system |
WO2008075404A1 (ja) * | 2006-12-19 | 2008-06-26 | Systemv Management Inc., | 半導体製造システム |
US8160736B2 (en) * | 2007-01-31 | 2012-04-17 | Globalfoundries Singapore Pte. Ltd. | Methods and apparatus for white space reduction in a production facility |
US7684888B2 (en) * | 2007-05-08 | 2010-03-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Extendable MES for Cross-AMHS Transportation |
US7816617B2 (en) | 2007-05-21 | 2010-10-19 | Lockheed Martin Corporation | Configurable intelligent conveyor system and method |
DE112008001754T5 (de) * | 2007-07-09 | 2010-05-20 | Middlesex General Industries, Inc., Woburn | System und Verfahren zur Verbesserung des Durchsatzes und der Vehikelauslastung von Einschienenbahnfabriktransportsystemen |
US7847683B2 (en) * | 2007-09-12 | 2010-12-07 | International Business Machines Corporation | Emergency machine off feature with safety control interface |
JP2009087282A (ja) * | 2007-10-03 | 2009-04-23 | Fuji Xerox Co Ltd | 並列計算システムおよび並列計算方法 |
US20090248190A1 (en) * | 2008-03-28 | 2009-10-01 | Spangler John M | Portable modular manufacturing system |
US8201681B2 (en) * | 2008-07-14 | 2012-06-19 | Siemens Industry, Inc. | Method for gapping for sortation rate maximization |
WO2010033526A1 (en) * | 2008-09-19 | 2010-03-25 | Fenner Dunlop Americas, Inc. | Conveyor belt rip panels and belt rip monitoring |
US8055373B2 (en) * | 2008-09-19 | 2011-11-08 | Inotera Memories, Inc. | Automatic wafer storage system and a method for controlling the system |
US20100082145A1 (en) * | 2008-09-30 | 2010-04-01 | Rockwell Automation Technologies, Inc. | Routing manager |
DE102008059529A1 (de) * | 2008-11-28 | 2010-06-02 | Karlsruher Institut für Technologie | Dezentral gesteuerte Materialförderung |
US8315802B2 (en) * | 2009-02-11 | 2012-11-20 | Telogis, Inc. | Systems and methods for analyzing the use of mobile resources |
US20100234983A1 (en) * | 2009-03-12 | 2010-09-16 | Piovan Spa | Control system for granular material transport system |
US8275478B2 (en) * | 2009-03-13 | 2012-09-25 | Globalfoundries Inc. | Method and apparatus for routing wafer pods to allow parallel processing |
US8659189B2 (en) | 2011-01-20 | 2014-02-25 | Atronix Engineering, Inc. | Control system for a material handling application |
US8757363B2 (en) | 2011-05-09 | 2014-06-24 | Insight Automation, Inc. | Conveyor controllers |
DE102011105794A1 (de) * | 2011-06-24 | 2012-12-27 | Knapp Ag | Anordnung und Verfahren zur Pufferung und Beförderung von Gebinden auf Förderstrecken |
EP2586712B2 (de) * | 2011-10-31 | 2018-02-14 | Veltru AG | Verfahren und Vorrichtung zum Einlegen von Produkten in Behälter in einer Roboterstrasse |
ITMI20112082A1 (it) * | 2011-11-16 | 2013-05-17 | Inpeco Ip Ltd | Stazione di processo di dispositivi di trasporto di contenitori di prodotti biologici. |
US9304510B2 (en) * | 2012-02-13 | 2016-04-05 | Ipeg, Inc. | Method and process of verifying physical connections within a material handling system |
US9558978B2 (en) | 2012-05-04 | 2017-01-31 | Kla-Tencor Corporation | Material handling with dedicated automated material handling system |
DE102012010844A1 (de) * | 2012-05-31 | 2013-12-05 | Multivac Sepp Haggenmüller Gmbh & Co. Kg | Verfahren für Pickerstraße und Verpackungsanlage |
RU2507566C1 (ru) * | 2012-06-15 | 2014-02-20 | Федеральный научно-производственный центр Открытое акционерное общество "Научно-производственное объединение "Марс" | Способ распределенного автоматизированного управления боевыми средствами и операционный пункт для его реализации |
US8881297B2 (en) * | 2012-09-06 | 2014-11-04 | Brooks Automation, Inc. | Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same |
EP2925647B1 (en) * | 2012-11-30 | 2018-09-19 | Intelligrated Headquarters LLC | Accumulation control |
US9733638B2 (en) * | 2013-04-05 | 2017-08-15 | Symbotic, LLC | Automated storage and retrieval system and control system thereof |
JP6044467B2 (ja) * | 2013-06-26 | 2016-12-14 | 株式会社ダイフク | 保管システム |
KR20150020757A (ko) * | 2013-08-19 | 2015-02-27 | 삼성전자주식회사 | 기판 처리 시스템 및 이의 제어 방법 |
JP6335603B2 (ja) * | 2014-04-15 | 2018-05-30 | キヤノン株式会社 | 台車搬送システム |
DE102014107591A1 (de) * | 2014-05-28 | 2015-12-03 | Artur Küpper GmbH & Co. KG | Förderbandanlage mit dezentralem Förderbandantrieb und Verfahren zum Betrieb der Förderbandanlage |
WO2015184539A1 (en) * | 2014-06-02 | 2015-12-10 | Ats Automation Tooling Systems Inc. | System and method for controlling a moving element in a linear motor conveyor |
DE102014222171A1 (de) | 2014-10-30 | 2016-05-04 | Interroll Holding Ag | Fördereinrichtung für Förderanlagen, modulares System und Verfahren zum Herstellen einer solchen Fördereinrichtung |
DE102015106026B3 (de) | 2015-04-20 | 2016-08-25 | Interroll Holding Ag | Verfahren zum Austausch einer Steuerungseinheit in einer Fördervorrichtung |
DE102015106024B4 (de) * | 2015-04-20 | 2023-06-07 | Interroll Holding Ag | Fördervorrichtung mit Konfigurationsänderung |
DE102015106034A1 (de) * | 2015-04-20 | 2016-10-20 | Interroll Holding Ag | Installationsverfahren zum Einrichten von Fördervorrichtungen |
DE102015107167A1 (de) | 2015-05-07 | 2016-11-10 | Interroll Holding Ag | Steuerungseinheit für eine Fördervorrichtung mit Hardware-Erkennung |
US10146439B2 (en) * | 2016-04-13 | 2018-12-04 | Samsung Electronics Co., Ltd. | System and method for high performance lockless scalable target |
DE102016112036A1 (de) | 2016-06-30 | 2018-01-04 | Interroll Holding Ag | Antriebseinheit für einen Trommelmotor, Trommelmotor, Hinterflansch und Herstellungsverfahren |
DE102016112051B4 (de) | 2016-06-30 | 2024-01-04 | Interroll Holding Ag | Modulsystem für motorbetriebene Förderrollen |
DE102016112054B4 (de) | 2016-06-30 | 2021-08-12 | Interroll Holding Ag | Trommelmotor mit alternativer Getriebeaufnahme |
DE102016114524B4 (de) | 2016-08-05 | 2020-09-03 | Interroll Holding Ag | Trommelmotor mit Frequenzumrichter und optionalem Bandspannungssensor |
DE102016114672A1 (de) | 2016-08-08 | 2018-02-08 | Interroll Holding Ag | Elektrische Steckverbindung für Motorrollen |
MX2019002780A (es) | 2016-09-09 | 2019-09-04 | Procter & Gamble | Sistema y método para llenar simultáneamente recipientes de formas y/o tamaños diferentes. |
WO2018049121A2 (en) | 2016-09-09 | 2018-03-15 | The Procter & Gamble Company | System and method for producing products based upon demand |
US10996232B2 (en) | 2016-09-09 | 2021-05-04 | The Procter & Gamble Company | System and method for independently routing container-loaded vehicles to create different finished products |
EP3509954B1 (en) | 2016-09-09 | 2021-10-20 | The Procter & Gamble Company | System and method for simultaneously filling containers with different fluent compositions |
CN109661623A (zh) | 2016-09-09 | 2019-04-19 | 宝洁公司 | 用于在单条生产线上同时生产不同产品的方法 |
EP3509979B1 (en) | 2016-09-09 | 2023-06-14 | The Procter & Gamble Company | System and method for independently routing vehicles and delivering containers and closures to unit operation stations |
ES2963833T3 (es) | 2016-09-09 | 2024-04-02 | Procter & Gamble | Sistemas y métodos para producir productos personalizados entremezclados con productos producidos en masa |
US10696489B2 (en) * | 2016-12-01 | 2020-06-30 | Packsize Llc | Balancing load among operational system zones |
US10930535B2 (en) | 2016-12-02 | 2021-02-23 | Applied Materials, Inc. | RFID part authentication and tracking of processing components |
JP6269793B1 (ja) * | 2016-12-05 | 2018-01-31 | 千住金属工業株式会社 | 搬送装置 |
EP3373232B1 (en) | 2017-03-09 | 2020-12-09 | Interroll Holding AG | Intralogistic arrangement |
US11185954B2 (en) | 2017-11-30 | 2021-11-30 | Canon Kabushiki Kaisha | Transport system, transport method, and article manufacturing method |
DE102017129460A1 (de) | 2017-12-11 | 2019-06-13 | Interroll Holding Ag | Vorrichtung zur Untersuchung einer Förderanlage sowie Steuereinheit, Motorrolle und Förderanlage und Verfahren |
JP6448836B2 (ja) * | 2018-05-02 | 2019-01-09 | キヤノン株式会社 | 台車搬送システム |
JP7179488B2 (ja) * | 2018-05-11 | 2022-11-29 | キヤノン株式会社 | 搬送システムおよびその制御方法 |
US11407597B2 (en) * | 2018-09-27 | 2022-08-09 | Siemens Logistics Llc | System and method for processing irregular parcels |
DE102019114469A1 (de) * | 2019-05-29 | 2020-12-03 | Deutsche Post Ag | Verfahren zur Überwachung und/oder Instandhaltung einer Förderanlage und Förderanlage |
IT201900019550A1 (it) * | 2019-10-22 | 2021-04-22 | Mecal Machinery S R L | Unità di carico e scarico per profilati |
CN111285048B (zh) * | 2020-02-28 | 2022-03-18 | 歌尔股份有限公司 | 一种线性传送系统及其控制方法 |
CN111708607A (zh) * | 2020-06-18 | 2020-09-25 | 哈工大机器人(合肥)国际创新研究院 | 基于web的在线仿真智能agv仿真调度方法及装置 |
US12012290B2 (en) | 2021-06-29 | 2024-06-18 | Agegis Sortation, Llc | System and method for automated sortation |
US11731169B2 (en) | 2021-06-29 | 2023-08-22 | Aegis Sortation, LLC | System and method for automated sortation |
US20240059327A1 (en) * | 2022-08-16 | 2024-02-22 | Rockwell Automation Technologies, Inc. | System and Method for Mover Self-Navigation in an Independent Cart System |
US20240199344A1 (en) * | 2022-12-14 | 2024-06-20 | Intelligrated Headquarters, Llc | Speed control system for peripheral conveyors of sorter systems |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4728863A (en) * | 1985-12-04 | 1988-03-01 | Wertheimer Michael R | Apparatus and method for plasma treatment of substrates |
US4829445A (en) * | 1987-03-11 | 1989-05-09 | National Semiconductor Corporation | Distributed routing unit for fully-automated flexible manufacturing system |
KR0170391B1 (ko) * | 1989-06-16 | 1999-03-30 | 다카시마 히로시 | 피처리체 처리장치 및 처리방법 |
US5078257A (en) * | 1989-11-21 | 1992-01-07 | Donald W. Carter, Jr. | Lattice production line and method of operating such a line |
US5324386A (en) * | 1991-03-19 | 1994-06-28 | Fujitsu Limited | Method of growing group II-IV mixed compound semiconductor and an apparatus used therefor |
US5228558A (en) * | 1991-12-23 | 1993-07-20 | Interroll Holding A.G. | Control system for an accumulating conveyor |
EP0613730A3 (en) * | 1993-03-01 | 1995-06-28 | Philips Nv | Sorting device with a field of transport units. |
TW359943B (en) * | 1994-07-18 | 1999-06-01 | Silicon Valley Group Thermal | Single body injector and method for delivering gases to a surface |
US6039316A (en) * | 1998-03-02 | 2000-03-21 | Xerox Corporation | Multi-hierarchical control system for controlling object motion with smart matter |
US6223886B1 (en) | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
US6240335B1 (en) | 1998-12-14 | 2001-05-29 | Palo Alto Technologies, Inc. | Distributed control system architecture and method for a material transport system |
-
1998
- 1998-12-14 US US09/212,002 patent/US6240335B1/en not_active Expired - Lifetime
-
1999
- 1999-12-14 CA CA002354624A patent/CA2354624A1/en not_active Abandoned
- 1999-12-14 AU AU21834/00A patent/AU2183400A/en not_active Abandoned
- 1999-12-14 CN CNB998160512A patent/CN1247423C/zh not_active Expired - Fee Related
- 1999-12-14 JP JP2000588055A patent/JP3989683B2/ja not_active Expired - Lifetime
- 1999-12-14 EP EP99966241A patent/EP1141439B1/en not_active Expired - Lifetime
- 1999-12-14 KR KR10-2001-7007431A patent/KR100437926B1/ko not_active IP Right Cessation
- 1999-12-14 WO PCT/US1999/029692 patent/WO2000035782A2/en active IP Right Grant
-
2000
- 2000-02-17 TW TW088121913A patent/TW452564B/zh not_active IP Right Cessation
-
2001
- 2001-04-03 US US09/825,619 patent/US6853876B2/en not_active Expired - Lifetime
-
2002
- 2002-01-11 HK HK02100199.7A patent/HK1039162A1/zh unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104395172A (zh) * | 2012-01-03 | 2015-03-04 | 波音公司 | 运输和处理系统以及运输商品的方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100437926B1 (ko) | 2004-06-30 |
HK1039162A1 (zh) | 2002-04-12 |
TW452564B (en) | 2001-09-01 |
US6240335B1 (en) | 2001-05-29 |
WO2000035782A2 (en) | 2000-06-22 |
EP1141439A4 (en) | 2008-06-04 |
EP1141439B1 (en) | 2012-12-26 |
US20010023377A1 (en) | 2001-09-20 |
CA2354624A1 (en) | 2000-06-22 |
JP3989683B2 (ja) | 2007-10-10 |
JP2002532892A (ja) | 2002-10-02 |
AU2183400A (en) | 2000-07-03 |
CN1342214A (zh) | 2002-03-27 |
EP1141439A2 (en) | 2001-10-10 |
US6853876B2 (en) | 2005-02-08 |
WO2000035782A3 (en) | 2000-10-12 |
KR20010089577A (ko) | 2001-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1247423C (zh) | 控制在材料输送系统中被输送的材料的运动的分布式方法 | |
Chen et al. | Integrated task assignment and path planning for capacitated multi-agent pickup and delivery | |
Stephan et al. | Cross-docking | |
CN100351723C (zh) | 用于自动化制造环境的代理人反应式调度 | |
Montoya-Torres | A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs | |
CN1614527A (zh) | 在制造执行与物料控制系统中自动解决问题的方法和系统 | |
CN1628273A (zh) | 在自动化制造环境中主动软件代理的特性化 | |
US20080004739A1 (en) | Combining automated and manual information in a centralized system for semiconductor process control | |
CN1783129A (zh) | 企业工厂控制方法和系统 | |
Nakata et al. | Dynamic bottleneck control in wide variety production factory | |
Lin et al. | Connecting transport AMHS in a wafer fab | |
Haneyah et al. | Generic planning and control of automated material handling systems: Practical requirements versus existing theory | |
Jang et al. | An AGV routing policy reflecting the current and future state of semiconductor and LCD production lines | |
Schmaler et al. | Simulation based evaluation of different empty vehicle management strategies with considering future transport jobs | |
KR102679052B1 (ko) | 플로팅 팩토리, 제조 서비스 장치의 동작 방법, 및 플로팅 팩토리와 제조 서비스 장치를 포함하는 통합 제품 관리 시스템 | |
US11681983B2 (en) | Systems and methods for prioritizing pick jobs while optimizing efficiency | |
US7076326B2 (en) | Proactive staging for distributed material handling | |
Kiba et al. | Simulation of a full 300mm semiconductor manufacturing plant with material handling constraints | |
Gong et al. | Conceptual design of a shop floor control information system | |
Na et al. | Lifter assignment problem for inter-line transfers in semiconductor manufacturing facilities | |
Reinhart et al. | Adaptive, location-based shop floor control | |
Subramaniam et al. | Automation challenges in the next generation semiconductor factory | |
Hammel et al. | Empowering existing automated material handling systems to rising requirements: FA: Factory automation | |
Jimenez et al. | AMHS factors enabling small wafer lot manufacturing in semiconductor wafer fabs | |
Zhou et al. | Cycle time variance minimization for WIP balance approaches in wafer fabs |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA AUTOMATIC MACHINERY CO., LTD. Free format text: FORMER OWNER: ASAISITE TECHNOLOGY COMPANY Effective date: 20091016 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20091016 Address after: Kyoto Japan Patentee after: Asyst Technologies Address before: American California Patentee before: Asyst Technologies Inc. |
|
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130516 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130516 Address after: Kyoto Japan Patentee after: Murata Machinery Co., Ltd. Address before: Kyoto Japan Patentee before: Asyst Technologies |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060329 Termination date: 20181214 |
|
CF01 | Termination of patent right due to non-payment of annual fee |