CN1234919C - Electroplating apparatus - Google Patents
Electroplating apparatus Download PDFInfo
- Publication number
- CN1234919C CN1234919C CNB011120681A CN01112068A CN1234919C CN 1234919 C CN1234919 C CN 1234919C CN B011120681 A CNB011120681 A CN B011120681A CN 01112068 A CN01112068 A CN 01112068A CN 1234919 C CN1234919 C CN 1234919C
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- Prior art keywords
- electroplating
- bath
- electroplating bath
- electroplate liquid
- film
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroplating Methods And Accessories (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
The subject of the present invention is to provide a convenient plating apparatus for meeting the demand that plural plating films are continuously formed with one conveying rail. The plating apparatus has at least two lines of plating-bath moving means, in which each line of the plating-bath moving means has plural plating baths containing a plating solution different in composition. The plating-bath moving means has empty plating bath and a washing bath. These plating baths are selected in accordance with the plating film to be formed on the electrically conductive part 21. As a result, a combination of plural plating films can be continuously formed on the electrically conductive part 21 with one conveying rail.
Description
Technical field
The present invention relates to electroplanting device, electroplating bath is moved freely, the electroplating film of the metallic substance of a plurality of combinations is formed individual layer or two-layer at least above electroplanting device.
Background technology
Cover the lead material on the surface of the such conductive component of Cu monomer, Cu alloy or Fe-Ni alloy with the electrolytic coating of Sn monomer or Sn alloy, have satisfactory electrical conductivity and physical strength that Cu monomer or Cu alloy possess.And this lead material is to have the erosion resistance that Sn monomer or Sn alloy possess and the high-performance conductor of good solder adhesion concurrently.Therefore, they are widely used in the so electric and electronic device field of various terminals, junctor, lead-in wire and power cable field etc.
In addition, under with the situation of mounting semiconductor chip to the circuit card, electroplate or electric plating by the fusion of using the Sn alloy, improve the solder adhesion of this time leading part at the following leading part of semi-conductor chip.The typical example of this Sn alloy is scolder (a Sn-Pb alloy), because solder adhesion, erosion resistance are good, is widely used so electroplate as the industry that is used for Electrical and Electronic industrial parts such as junctor and lead frame.
Fig. 3 represents the sectional view of basic comprising of lead material of the A-A section of semiconductor lead frame shown in Figure 2.For example, conductive component 21 is that the Cu of main component is an alloy by Cu, with Cu or is that the Fe-Ni of main component is that alloy constitutes with Fe-Ni.And, on the surface of these conductive components 21, implement 2 layers of electroplating film of different metal material.For example, the 2nd electroplating film 23 of the 1st electroplating film 22 of Sn and Sn-Bi forms in proper order by this.Wherein, the thickness of the 1st electroplating film 22 is t
1, the 2nd electroplating film 23 thickness be t
2The time, well-known, with t
1Be set at about 3～15 μ m, t
2Be set at about 1～5 μ m, t
2/ t
1After being set at about 0.1～0.5, no matter cost aspect, or solder adhesion, thermotolerance aspect, perhaps the heat seal strength aspect of the weld portion of the bond strength of scolder or aluminum steel etc. all has good characteristic, can obtain to improve as the performance of lead material.
Fig. 4 is the configuration of automatic plating machine integral body.At first, in bath 31 is cleaned in alkaline electrolysis, remove the lip-deep organic pollution materials such as the binding property of pellicle or the deleterious grease of solder adhesion that scolder is electroplated of conductive component 21.Then, after in washing bath 32, cleaning, in chemical corrosion bath 33, carry out chemical corrosion and handle (mainly utilizing the processing of redox reaction), make the surperficial homogenizing of the conductive component 21 of uneven surface by the existence of crystal boundary and inclusion etc.
Then, after in washing bath 34, cleaning, in acid activity bath 35, remove the oxide film that in washing bath 34, adheres to.Then, after in washing bath 36, cleaning, in scolder electroplanting device 37, implement to electroplate.Because the scolder electroplate liquid is a strongly-acid, so the surface after electroplating is acidity.Such surface with the passing of time and the pellicle variable color, the solder adhesion deterioration.Therefore, in washing bath 38, neutralizing treatment bath 39, acid residual on the plate surface is neutralized, remove adsorbed organic matter.Then, in washing bath 40, hot water bath 41, clean, in drying installation 42, the clad conductive component 21 of electricity is carried out drying.
Fig. 5 is the sectional view on the B-B direction of the chemical corrosion bath 33 in the whole electroplanting device shown in Figure 4.
The effect of this chemical corrosion bath 33 is same as described above.The structure of this electroplanting device is described here.In this electroplanting device, horizontal push rod 331 and conveyance track 332 are movable on above-below direction.And, determine the upper limit position and the lower position of their movable range, move repeatedly betwixt.Suspension hook 333 hangs on the conveyance track 332 with proper spacing according to the operation purpose.Be generally the distance between the center of adjacent bath.Then, hang and want the plating auxiliary frame 334 of galvanized conductive component 21 to be hung on this suspension hook 333, be set in this electroplanting device.The following describes horizontal push rod 331.Distance between the horizontal push rod 331 basically with the center of adjacent bath between distance equate.Then, this horizontal push rod 331 is arranged on the arm, if to the operator to suspension hook 333 being sent to a span, then this part is restored.Then, this horizontal push rod 331 is sent a span at upper limit position, and this part can be restored in the lower position.In addition, conveyance track 332 moves up at upper and lower, but does not move on direct of travel.By carrying out this operation repeatedly, this electroplanting device shows its function.
In above-mentioned electroplanting device, a pre-electroplating treatment production line and a scolder electroplating assembly line are arranged.For example, the Sn electroplating film that forms as the 1st electroplating film 22 is arranged on conductive component 21, as the situation of the electroplating film of the Sn-Bi of the 2nd electroplating film 23, and on conductive component 21, form Sn electroplating film as the 1st electroplating film 22, as the situation of the electroplating film of the Sn-Ag of the 2nd electroplating film 23.In this case, the 1st electroplating film 22 can use identical Sn electroplate liquid, but the electroplate liquid that the 2nd electroplating film 23 uses is then different.Therefore, on conductive component 21, form after the former the electroplating film end, electroplanting device is stopped once, after the electroplate liquid that the electroplate liquid in the bath is replaced with latter's use, then on conductive component 21, form electroplating film.
As mentioned above, in this scolder electroplanting device, a pre-electroplating treatment production line and a scolder electroplating assembly line are arranged.Therefore, under the electroplating film with a plurality of combinations was formed on situation on the conductive component 21, when the combination transposing of electroplating film, generation can not be carried out the problem of operation continuously.In other words, in this electroplanting device, the conductive component 21 of electrodepositable is impregnated in the electroplate liquid of preparation successively, can forms the electroplating film of same electrical plated film combination continuously.But, can not be according to the use of wanting galvanized conductive component 21, the electroplating film of a plurality of combinations is formed on the conductive component 21 continuously.That is, for the scolder production line, in the transposing of electroplate liquid whenever necessary between long and bothersome problem.
And, except above-mentioned, aspect management scolder production line, also want expensive work.For example, have in an electroplating bath, used certain electroplate liquid after, use electroplate liquid to constitute the situation of another different electroplate liquids.At this moment, if remove the former electroplate liquid unreliablely, then the formation of the latter's electroplate liquid just may change.In addition, different if the electroplate liquid that uses constitutes, then the anode that uses in this electroplating bath is also different, must change.That is, aspect electroplate liquid management or electroplating bath management etc. safeguard, also there is the problem of wanting expensive work.
Summary of the invention
To achieve these goals, in the present invention, slide mechanism is set in electroplating assembly line, thus, can be formed on continuously on the conductive component 21 with the individual layer or the electroplating film more than 2 layers of a conveyance track with a plurality of combinations.
Electroplanting device of the present invention has:
Electroplating assembly line, this electroplating assembly line comprises at least: have the prime electroplating bath mobile unit of electroplating bath and have the back level electroplating bath mobile unit of electroplating bath, in the electroplating bath of this prime electroplating bath mobile unit, stored the electroplate liquid that forms Sn Metal plating film, in the electroplating bath of this back level electroplating bath mobile unit, stored the electroplate liquid of formation with the described Sn metal Sn alloy plating film that is major metal; And
The conveyance unit, the described conductive component of this conveyance unit conveyance above described electroplating assembly line, so as to form 1 layer of electroplating film constituting by described Sn metal on the surface of conductive component, the 1 layer of electroplating film that constitutes by described Sn alloy or 2 layers of electroplating film that constitute by described Sn metal and described Sn alloy.
Description of drawings
Fig. 1 is the explanatory view of the electroplating assembly line that uses in the electroplanting device of the present invention.
Fig. 2 is an explanatory view of implementing the present invention and existing galvanized semi-conductor chip.
Fig. 3 is the cross sectional illustration figure that the A-A direction from semiconductor lead frame shown in Figure 2 of the present invention and existing two-layer electroplating film formation is observed.
Fig. 4 is the explanatory view of the present invention and existing automatic plating machine configured in one piece.
Fig. 5 is the cross sectional illustration figure that observes from the B-B direction of the present invention and existing chemical corrosion bath.
Embodiment
Fig. 1 has the sliding function of implementing electroplanting device of the present invention, has 2 the 1st electroplating baths and have the layout diagram of the scolder electroplating assembly line of 3 the 2nd electroplating baths the 2nd row the 1st row.In addition, corresponding with the scolder electroplanting device 37 of whole electroplanting device shown in Figure 4.
In Fig. 1, this electroplanting device has preimpregnation bath the 371, the 1st electroplating bath the 372,373, the 2nd electroplating bath 374,375,376, washing bath 377.In addition, in each electroplating bath, overflow bath 378,379,380,381,382 is set.The function of these baths is to utilize the current in the electroplating bath that insoluble impurities etc. is taken in the bath.Then, the electroplate liquid that is taken in these baths is filtered, should be sent in the electroplating bath 372,373,374,375,376 by filtering electroplate liquid.
In the present invention, in the scolder electroplating assembly line, can on the conductive component 21 of electrodepositable, form the electroplating film of a plurality of combinations with a conveyance track according to use.
Specifically, the structure of this scolder electroplating assembly line is identical with Fig. 5.For example, in the scolder electroplating assembly line of this Fig. 1, in electroplating bath 373, pour into the electroplate liquid of Sn, in electroplating bath 375, pour into the electroplate liquid of Sn-Ag, in electroplating bath 376, pour into the electroplate liquid of Sn-Bi, and electroplating bath the 372, the 374th is empty.Then, these electroplating baths form electroplating film according under the conveyance track that is moved to necessary electroplating bath selection by the use of galvanized conductive component 21 on conductive component 21.As a result, on conductive component 21, form the individual layer electroplating film of Sn, form the 1st layer for Sn, the 2nd layer for the electroplating film of Sn-Ag or Sn-Bi etc.The structure of lead material is identical with Fig. 3, so shared symbol.
The 1st, only illustrate that the 1st electroplating film 22 with individual layer Sn is formed on the order on the conductive component 21.Here, as mentioned above, selection pours into the 1st electroplating bath 373 and the empty electroplating bath 374 of the electroplate liquid of Sn.The conductive component of handling in above-mentioned pre-electroplating treatment production line 21 is removed the hydrogen-oxygen film on surface in preimpregnation bath 371, and moves under the conveyance track at the 1st electroplating bath 373 during this period.Then, form the electroplating film of Sn here during the 2nd electroplating bath 374 move under the conveyance track.The conductive component 21 that has formed the electroplating film of Sn moves in the 2nd electroplating bath 374, but does not form electroplating film because of pouring into electroplate liquid in this electroplating bath.Then, in washing bath 377, clean electric clad conductive component 21.As a result, on conductive component 21, only form the individual layer electroplating film of Sn.
Here, in the electroplanting device of Fig. 1,, so as mentioned above, on conductive component 21, form the electroplating film of individual layer Sn owing in the 2nd row's electroplating bath moving-member, have empty electroplating bath.But, also have following situation.There is the 2nd row's electroplating bath moving-member electroplating bath not to be configured in situation under the conveyance track, also has the situation of under the conveyance track, selecting the washing bath in addition.Under the former situation, under the conveyance track, there is not electroplate liquid, on conductive component 21, do not form electroplating film.In the latter case, only clean electric clad conductive component 21, do not form electroplating film by pure water.
The 2nd, illustrate the 1st two-layer electroplating film 22 and the 2nd electroplating film 23 are formed on order on the conductive component 21.The step that forms electroplating film on conductive component 21 is identical with above-mentioned content.But, select the 2nd electroplating bath 375 or 376 specifically, on conductive component 21, form the 2nd electroplating film 23 of Sn-Ag or Sn-Bi.As a result, make conductive component 21 form the two-layer electroplating film of Sn and Sn-Ag or Sn and Sn-Bi.
Here, in the electroplanting device of Fig. 1, the metallic substance of the electroplate liquid of the 1st electroplating bath is Sn, and the metallic substance of the electroplate liquid of the 2nd electroplating bath is Sn-Ag or Sn-Bi.And these metals and the solution except the solvent that dissolves them are that same liquid is formed, so electroplating film can be formed on the conductive component 21 continuously.But also useful liquid is formed different electroplate liquids electroplating film is formed on situation on the conductive component 21.At this moment, by in the 2nd row's electroplating bath moving-member, having the washing bath that cleans usefulness, in this bath, can clean conductive component 21, thus the electroplating film of a plurality of combinations can be formed with a conveyance track continuously, and form irrelevant with the liquid of electroplate liquid.
Therefore, in the present invention, prepare in advance and pour into the electroplating bath that electroplate liquid is formed different a plurality of electroplate liquids.Then, can select these electroplating baths according to use.As a result, can form the electroplating film of a plurality of combinations with a conveyance track.
That is, the same with above-mentioned pre-electroplating treatment production line, can on conductive component 21, form continuously the electroplating film of a plurality of combinations with a conveyance track.Thus, according to the combination of electroplating film, needn't make electroplanting device temporarily be stopped to change electroplate liquid in the bath.As a result, can shorten the activity duration significantly, and needn't change electroplate liquid bothersomely.In addition, when the electroplate liquid of transposing in the same bath, do not sneak between each electroplate liquid, can reduce the work in safeguarding such as electroplate liquid management and electroplating bath, electroplating device significantly.
In addition, can form the electroplating film of a plurality of combinations continuously with a conveyance track.For example, have in the 1st electroplating bath and to select empty electroplating bath, form the method for electroplating film, or in the 1st and the 2nd electroplating bath, select the electroplating bath of sky, only form the method etc. of the electroplating film of individual layer with the 3rd electroplating bath with the 2nd and the 3rd electroplating bath.In addition, the electroplating bath of the electroplate liquid that pours into same composition is arranged on adjacent electroplating assembly line,, can on conductive component 21, form thick electroplating film by these baths of Continuous Selection.
No matter which kind of situation as mentioned above, by utilizing sliding function of the present invention, can form the electroplating film of a plurality of combinations with a conveyance track continuously.
As mentioned above, be that example is illustrated with the galvanized situation of scolder, but this electroplanting device is not limited to the galvanized utilization of scolder.For example, can be zinc-plated, copper facing, nickel plating etc.No matter which kind of situation is used this electroplanting device, can form the electroplating film of a plurality of combinations with a conveyance track on conductive component 21 continuously.
By above explanation as can be known, in electroplanting device of the present invention, can obtain following effect.
This electroplanting device can be removed with one by making the scolder electroplating assembly line have sliding function Send track to form continuously the electroplating film of individual layer or a plurality of combinations. Therefore, in each conduction of changing Electroplate liquid needn't be changed during the electroplating film that forms on the parts, electroplanting device needn't be stopped temporarily. By This can be formed on conductive component with the electroplate liquid of a plurality of combinations continuously with a conveyance track On, and, can save the time of changing electroplate liquid. In addition, in transposing in the same bath During electroplate liquid, do not sneak between each electroplate liquid, can reduce significantly the electroplate liquid management With the work in the maintenances such as electroplating bath, electroplating device.
Claims (5)
1. electroplanting device is characterized in that having:
Electroplating assembly line, this electroplating assembly line comprises at least: have the prime electroplating bath mobile unit of electroplating bath and have the back level electroplating bath mobile unit of electroplating bath, in the electroplating bath of this prime electroplating bath mobile unit, stored the electroplate liquid that forms Sn Metal plating film, in the electroplating bath of this back level electroplating bath mobile unit, stored the electroplate liquid of formation with the described Sn metal Sn alloy plating film that is major metal; And
The conveyance unit, the described conductive component of this conveyance unit conveyance above described electroplating assembly line, so as to form 1 layer of electroplating film constituting by described Sn metal on the surface of conductive component, the 1 layer of electroplating film that constitutes by described Sn alloy or 2 layers of electroplating film that constitute by described Sn metal and described Sn alloy.
2. electroplanting device as claimed in claim 1 is characterized in that,
By described prime and back level electroplating bath mobile unit, it is mobile that described electroplating bath is slided respectively, disposes the electroplating bath of having stored the electroplating bath of the electroplate liquid that forms described Sn Metal plating film and having stored the electroplate liquid that forms described Sn alloy plating film below described conveyance is unitary continuously.
3. as claim 1 or the described electroplanting device of claim 2, it is characterized in that,
In described prime or back level electroplating bath mobile unit, free electroplating bath or washing bath.
4. as claim 1 or the described electroplanting device of claim 2, it is characterized in that,
Described prime or back level electroplating bath mobile unit can not be configured in the unitary below of conveyance to described electroplating bath.
5. electroplanting device as claimed in claim 1 is characterized in that,
Described prime and back level electroplating bath mobile unit have the electroplating bath of having stored the electroplate liquid that same liquid forms respectively, and the electroplating bath of the electroplate liquid that above-mentioned same liquid forms has been stored in configuration continuously below above-mentioned conveyance is unitary.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP85536/2000 | 2000-03-27 | ||
| JP85536/00 | 2000-03-27 | ||
| JP2000085536A JP3588304B2 (en) | 2000-03-27 | 2000-03-27 | Plating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1322863A CN1322863A (en) | 2001-11-21 |
| CN1234919C true CN1234919C (en) | 2006-01-04 |
Family
ID=18601862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011120681A Expired - Fee Related CN1234919C (en) | 2000-03-27 | 2001-03-27 | Electroplating apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3588304B2 (en) |
| KR (1) | KR100574304B1 (en) |
| CN (1) | CN1234919C (en) |
| TW (1) | TW511291B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881540A (en) * | 2016-09-29 | 2018-04-06 | 国际电路企业株式会社 | The printed circuit board (PCB) plater of two or more coating can be performed simultaneously in a system |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3568486B2 (en) * | 2000-03-29 | 2004-09-22 | 三洋電機株式会社 | Method for manufacturing semiconductor device |
| US7772043B2 (en) | 2001-12-12 | 2010-08-10 | Sanyo Electric Co., Ltd. | Plating apparatus, plating method and manufacturing method for semiconductor device |
| JP4813935B2 (en) * | 2006-03-20 | 2011-11-09 | 上村工業株式会社 | Transport hanger |
| CN103305896B (en) * | 2012-03-07 | 2015-09-09 | 昆山东威电镀设备技术有限公司 | Continuous electroplating liquid conduction device and continuous liq electro-plating method |
| JP6463622B2 (en) * | 2014-11-27 | 2019-02-06 | Ykk株式会社 | Plating equipment, plating unit, and plating line |
| CN106319606B (en) * | 2016-07-18 | 2018-08-14 | 北京纽堡科技有限公司 | Matrix form electroplating assembly line |
| CN115573019B (en) * | 2022-12-09 | 2023-02-17 | 宁波德洲精密电子有限公司 | Electroplating cabinet for lead frame |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05255899A (en) * | 1992-03-12 | 1993-10-05 | Electroplating Eng Of Japan Co | Automatic plating device |
| JP2825732B2 (en) * | 1993-05-31 | 1998-11-18 | 大日本印刷株式会社 | Partial plating equipment for IC lead frames |
-
2000
- 2000-03-27 JP JP2000085536A patent/JP3588304B2/en not_active Expired - Fee Related
-
2001
- 2001-03-06 TW TW090105095A patent/TW511291B/en active
- 2001-03-26 KR KR1020010015541A patent/KR100574304B1/en not_active IP Right Cessation
- 2001-03-27 CN CNB011120681A patent/CN1234919C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881540A (en) * | 2016-09-29 | 2018-04-06 | 国际电路企业株式会社 | The printed circuit board (PCB) plater of two or more coating can be performed simultaneously in a system |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20010091034A (en) | 2001-10-22 |
| JP2001271200A (en) | 2001-10-02 |
| KR100574304B1 (en) | 2006-04-27 |
| CN1322863A (en) | 2001-11-21 |
| JP3588304B2 (en) | 2004-11-10 |
| TW511291B (en) | 2002-11-21 |
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Granted publication date: 20060104 Termination date: 20130327 |