CN118435322A - 基板处理模块、基板处理装置以及基板处理单元 - Google Patents

基板处理模块、基板处理装置以及基板处理单元 Download PDF

Info

Publication number
CN118435322A
CN118435322A CN202180105201.6A CN202180105201A CN118435322A CN 118435322 A CN118435322 A CN 118435322A CN 202180105201 A CN202180105201 A CN 202180105201A CN 118435322 A CN118435322 A CN 118435322A
Authority
CN
China
Prior art keywords
tank
chemical
module
substrate processing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180105201.6A
Other languages
English (en)
Chinese (zh)
Inventor
出口泰纪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dajin Youke Co ltd
Original Assignee
Dajin Youke Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dajin Youke Co ltd filed Critical Dajin Youke Co ltd
Publication of CN118435322A publication Critical patent/CN118435322A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
CN202180105201.6A 2021-12-23 2021-12-23 基板处理模块、基板处理装置以及基板处理单元 Pending CN118435322A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/047990 WO2023119584A1 (ja) 2021-12-23 2021-12-23 基板処理モジュール、基板処理装置、および基板処理ユニット

Publications (1)

Publication Number Publication Date
CN118435322A true CN118435322A (zh) 2024-08-02

Family

ID=86901839

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180105201.6A Pending CN118435322A (zh) 2021-12-23 2021-12-23 基板处理模块、基板处理装置以及基板处理单元

Country Status (4)

Country Link
JP (1) JP7814417B2 (https=)
CN (1) CN118435322A (https=)
TW (1) TW202329230A (https=)
WO (1) WO2023119584A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316341U (https=) * 1989-06-29 1991-02-19
JPH0521414A (ja) * 1991-07-13 1993-01-29 Sony Corp 処理装置
JP3163221B2 (ja) * 1993-08-25 2001-05-08 東京エレクトロン株式会社 プローブ装置
JPH0817872A (ja) * 1994-06-24 1996-01-19 Fujitsu Ltd 部品搭載装置
JPH0864570A (ja) * 1994-08-19 1996-03-08 Hitachi Ltd ウエハ洗浄装置
JPH08170935A (ja) * 1994-12-19 1996-07-02 Hitachi Ltd 車体の重心測定装置及び方法
JP2000301082A (ja) * 1999-04-20 2000-10-31 Tokyo Electron Ltd 処理装置
JP3789824B2 (ja) * 2002-01-22 2006-06-28 東京エレクトロン株式会社 液処理装置、および液処理方法
JP2016136580A (ja) * 2015-01-23 2016-07-28 株式会社荏原製作所 基板処理装置、ハウジングおよび処理ユニット

Also Published As

Publication number Publication date
JPWO2023119584A1 (https=) 2023-06-29
JP7814417B2 (ja) 2026-02-16
WO2023119584A1 (ja) 2023-06-29
TW202329230A (zh) 2023-07-16

Similar Documents

Publication Publication Date Title
CN101409218B (zh) 单片基底清洁装置和基底背面清洁方法
JP2000068355A (ja) 基板処理装置
KR20150088792A (ko) 반도체 웨이퍼의 세정 방법 및 장치
KR102238879B1 (ko) 기판 처리 장치 및 기판 반송 방법
TWI832068B (zh) 基板處理模組及基板處理裝置，以及基板的製造方法
KR20160149702A (ko) 건식처리와 습식처리를 위한 하이브리드 기판처리 시스템 및 이를 이용한 기판처리 방법
TW202405994A (zh) 基板處理裝置
KR101768519B1 (ko) 기판 처리 설비
CN118435322A (zh) 基板处理模块、基板处理装置以及基板处理单元
JP3522912B2 (ja) 洗浄処理装置およびその制御方法
JP3127073B2 (ja) 洗浄装置及び洗浄方法
JP7847157B2 (ja) 基板処理モジュール、基板処理装置、および基板処理ユニット
JP2001300445A (ja) 基板の洗浄装置、洗浄方法および洗浄システム
WO2024203887A1 (ja) 基板処理モジュールおよび基板処理装置
KR100924944B1 (ko) 기판 처리 장치 및 이를 이용한 기판 이송 방법
JPH11330193A (ja) 基板処理装置
JP2007251026A (ja) 基板処理装置及び基板処理方法並びに基板処理プログラム
KR20220059406A (ko) 기판 처리 시스템 및 기판 처리 방법
KR20200078794A (ko) 부품 세정 장치 및 방법
KR20100011852A (ko) 기판세정장치

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination